Advantage of Machine Learning over Maximum Likelihood in Limited-Angle
  Low-Photon X-Ray Tomography
  Limited-angle X-ray tomography reconstruction is an ill-conditioned inverse
problem in general. Especially when the projection angles are limited and the
measurements are taken in a photon-limited condition, reconstructions from
classical algorithms such as filtered backprojection may lose fidelity and
acquire artifacts due to the missing-cone problem. To obtain satisfactory
reconstruction results, prior assumptions, such as total variation minimization
and nonlocal image similarity, are usually incorporated within the
reconstruction algorithm. In this work, we introduce deep neural networks to
determine and apply a prior distribution in the reconstruction process. Our
neural networks learn the prior directly from synthetic training samples. The
neural nets thus obtain a prior distribution that is specific to the class of
objects we are interested in reconstructing. In particular, we used deep
generative models with 3D convolutional layers and 3D attention layers which
are trained on 3D synthetic integrated circuit (IC) data from a model dubbed
CircuitFaker. We demonstrate that, when the projection angles and photon
budgets are limited, the priors from our deep generative models can
dramatically improve the IC reconstruction quality on synthetic data compared
with maximum likelihood estimation. Training the deep generative models with
synthetic IC data from CircuitFaker illustrates the capabilities of the learned
prior from machine learning. We expect that if the process were reproduced with
experimental data, the advantage of the machine learning would persist. The
advantages of machine learning in limited angle X-ray tomography may further
enable applications in low-photon nanoscale imaging.
