Automatic Layout Generation with Applications in Machine Learning Engine
  Evaluation
  Machine learning-based lithography hotspot detection has been deeply studied
recently, from varies feature extraction techniques to efficient learning
models. It has been observed that such machine learning-based frameworks are
providing satisfactory metal layer hotspot prediction results on known public
metal layer benchmarks. In this work, we seek to evaluate how these machine
learning-based hotspot detectors generalize to complicated patterns. We first
introduce a automatic layout generation tool that can synthesize varies layout
patterns given a set of design rules. The tool currently supports both metal
layer and via layer generation. As a case study, we conduct hotspot detection
on the generated via layer layouts with representative machine learning-based
hotspot detectors, which shows that continuous study on model robustness and
generality is necessary to prototype and integrate the learning engines in DFM
flows. The source code of the layout generation tool will be available at
https://github. com/phdyang007/layout-generation.
