Soft Sensing Model Visualization: Fine-tuning Neural Network from What
  Model Learned
  The growing availability of the data collected from smart manufacturing is
changing the paradigms of production monitoring and control. The increasing
complexity and content of the wafer manufacturing process in addition to the
time-varying unexpected disturbances and uncertainties, make it infeasible to
do the control process with model-based approaches. As a result, data-driven
soft-sensing modeling has become more prevalent in wafer process diagnostics.
Recently, deep learning has been utilized in soft sensing system with promising
performance on highly nonlinear and dynamic time-series data. Despite its
successes in soft-sensing systems, however, the underlying logic of the deep
learning framework is hard to understand. In this paper, we propose a deep
learning-based model for defective wafer detection using a highly imbalanced
dataset. To understand how the proposed model works, the deep visualization
approach is applied. Additionally, the model is then fine-tuned guided by the
deep visualization. Extensive experiments are performed to validate the
effectiveness of the proposed system. The results provide an interpretation of
how the model works and an instructive fine-tuning method based on the
interpretation.
