text:
|Publication number
|Publication type
|Application number
|Publication date
|Apr 23, 2002
|Filing date
|Aug 27, 1999
|Priority date
|Mar 28, 1997
|Fee status
|Also published as
|Publication number
|David B. James, William D. Budinger, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr., Lee Melbourne Cook
|Original Assignee
|Rodel Holdings Inc.
|Export Citation
|BiBTeX, EndNote, RefMan
|Patent Citations (12), Referenced by (59), Classifications (25), Legal Events (4)
|External Links: USPTO, USPTO Assignment, Espacenet
This application is a Continuation of U.S. application Ser. No. 09/049,864 filed Mar. 27, 1998, now U.S. Pat. No. 6,099,394, which is a Continuation-in-Part of U.S. application Ser. No. 09/021,437 filed Feb. 10, 1998, now U.S. Pat. No. 6,022,264, claiming the benefit of U.S. Provisional application Ser. No. 60/037,582 filed Feb. 10, 1997, and which claims the benefit of U.S. Provisional application Ser. No. 60/042,115 filed Mar. 28, 1997, U.S. Ser. No. 60/041,844 filed Apr. 9, 1997, and U.S. Ser. No. 60/064,875 filed Nov. 6, 1997. This application is a continuation-in-part of U.S. application Ser. No. 09/021,437 filed Feb. 10, 1998.
The present invention relates generally to high performance polishing systems for use in modifying a substrate by Hertzian indentation, fluid-based wear and/or any similar-type non-microgrinding mechanism; the polishing systems of the present invention are particularly well suited for use in the manufacture of semiconductor devices or the like. More particularly, the compositions and methods of the present invention are directed to polishing systems comprising an aqueous based polishing fluid and a polishing pad; the polishing pads of the present invention comprise a polishing layer having two separate phases: a high modulus phase and a low modulus phase.
1. Polishing. "Polishing" is intended to mean chemical-mechanical polishing (as opposed to micro-grinding) and is intended to include planarization and any corresponding variations thereof The polishing substrates contemplated by the present invention include semiconductor device substrates, such as, silicon, silica, gallium arsenide, silicon nitride, tungsten, tantalum, aluminum, copper, and any other semiconductor device substrate, whether conducting, semi-conducting or insulating.
2. Conditioning. In the art of chemical-mechanical polishing, conventional polishing pads generally must be conditioned or otherwise roughened to initially create, then periodically renew, the pad's polishing surface. Throughout this specification, "conditioning" is intended to mean mechanical and/or chemical surface treatment of a pad's polishing surface to generate nanoasperities.
3. Nanoasperities. Throughout this specification, "nanoasperities" are intended to mean:
i. protrusions from the pad surface; and/or
ii. particles which release from the pad surface,
having an imputed radius (of curvature) of about 0.5 to about 0.1 microns and sufficient resiliency to permanently deform (measured by the permanent change in curvature during polishing) by less than 25%, more preferably less than 10%.
4. Macro-Defects. Throughout this specification, "macro-defects" are intended to mean burrs or similar-type protrusions on the pad's polishing surface of greater than 0.5 microns in any dimension.
5. Particles. For purposes of the present invention, "particle" is intended to mean a discrete mass of material as it exists at the polishing interface. Hence, a "particle" can mean an independent, discrete primary particle, an agglomeration of primary particles which form a discrete mass, and/or primary particles which are aggregated together to form a discrete mass.
6. Self-dressing. Self-dressing is intended to mean that the polishing layer abrades, dissolves, wears or otherwise diminishes during the polishing operation, and as it diminishes, new nanoasperities are formed at the polishing interface, whether the pad is periodically conditioned during its useful life or not.
7. Low modulus phase. "Low modulus phase" is intended to mean the portion of the polishing layer which is separate and distinct from the high modulus phase and which defines a modulus of less than about 10 GigaPascals ("GPa").
8. High modulus phase. "High modulus phase" is intended to mean a portion of the polishing layer which is separate and discrete from the low modulus phase and which defines a modulus greater than about 10 GPa. The high modulus phase may further comprise a particle phase and a non-particle phase.
9. Pre-polymer. "Pre-polymer" is intended to mean any polymer precursor, including an oligomer, monomer, reactive polymer (including cross-linkable or curable polymers) and/or the like.
During chemical mechanical polishing, abrasive particles are generally intended to be uniformly dispersed in a fluid along the entire polishing interface. Ideally, as new slurry is pumped into the polishing interface (and old slurry moves out of the polishing interface), the abrasive particle distribution remains substantially uniform throughout the polishing interface. With conventional polishing systems, such particle dispersion uniformity (at the polishing interface) is very difficult to achieve, particularly during initial polishing ("start-up"). Non-uniformity of particles at the polishing interface generally lowers polishing efficiency and performance.
Conventional polishing systems generally attempt to improve particle uniformity throughout the polishing interface by flowing large amounts of polishing slurries into the polishing interface and by using slurries with high loadings of abrasive particles. However with such conventional polishing systems, the substrate and polishing equipment generally require extensive cleaning after the polish. This cleaning step slows down production, is prone to operator error and can create environmental concerns.
A need therefore exists in the art for a polishing system which provides improved polishing uniformity along the polishing interface without the need for flowing large amounts of polishing slurries (having high particle loadings) into the polishing interface.
U.S. Pat. No. 5,435,816 to Spurgeon, et al, is directed to an abrasive article having a sheet-like structure for use in abrasion-type polishing of substrates.
The polishing systems of the present invention are directed to the placing of a polishing fluid (which may or may not contain abrasive particles) between a polishing pad and a work-piece to be polished. The pad comprises high modulus and low modulus domains which are exposed at the polishing interface. The work-piece and pad are moved relative to one another, while at least a portion of the polishing fluid is located within the interface between the pad and work-piece. The movement of the pad and/or work-piece and the interaction of the polishing fluid combine to provide (chemical-mechanical) polishing.
Polishing in accordance with the present invention is directed to the removal of surface protrusions by severing the chemical bonds between the protrusion and the surface. This mechanism occurs at a molecular level and is much different from micro-grinding. Micro-grinding occurs on a much larger scale, such as by surface fracturing, cutting or abrading.
Polishing pads in accordance with the present invention comprise a polishing layer created, at least in part, by solidifying a flowable material (including the sintering of flowable solids) into a hydrophilic, polishing layer matrix. Bonded within or onto the polishing layer matrix is a high modulus phase. The low modulus phase of the present invention can be incorporated within or onto the polishing layer matrix and/or can be the polishing layer matrix itself.
The polishing fluid is preferably water based and may also comprise polishing particles (in addition to any particles exposed by or released from the pad). The polishing fluid preferably comprises a pH modifier and optionally a pH buffer, surfactant, chelating agent, and/or oxidizer.
To provide consistency of polishing performance, any polishing pad flow channel(s) should have a configuration whereby as the pad wears to one half the average depth of the largest flow channel, the amount of surface area capable of contacting the substrate changes by less than 30%, more preferably less than 10% and most preferably less than 5%.
FIG. 1 is an enlarged end sectional view showing a polishing pad in accordance with the present invention.
FIG. 2 is a schematic side view of the polishing pad and polishing slurry of the present invention as used to planarize a substrate for use in the manufacture of a semiconductor device or the like.
The present invention is directed to a single layer or multi-layer polishing pad having a polishing layer containing at least a high modulus phase and a low modulus phase (each phase being discrete and separate from the other phase). Preferably, the weight ratio of the high modulus phase to the low modulus phase is in the range of 0.00005:1 to 10:1, more preferably 0.05:1 to 1:1.
The High Modulus Phase.
The high modulus phase can be a rigid organic, such as a thermoplastic, a rubber or a derivation thereof, or more preferably is a ceramic. Critical to the high modulus phase is that the modulus is greater than about 10 GPa. A preferred high modulus phase material is a ceramic particle, particularly an oxide, most particularly a metal oxide. High modulus phase particles which may be incorporated into the polishing layer material (and may also be incorporated into a polishing fluid), in accordance with the present invention include:
1. alumina,
2. silicon carbide,
3. chromia,
4. alumina-zirconia,
5. silica,
6. diamond,
7. iron oxide,
8. ceria,
9. boron nitride,
10. boron carbide,
11. garnet,
12. zirconia,
13. magnesium oxide,
14. titanium dioxide, and
15. combinations thereof.
As used in this specification, "particle size" is intended to mean the distance of the particle's largest dimension (either height, length or width). Preferred particles have an average particle size of less than or equal to about 0.6 microns but preferably greater than or equal to 0.05 microns; more preferably, at least 80 weight percent, more preferably 95 weight percent, and yet more preferably 100 weight percent, of the particles have a size in the range of 0.1 to 0.5 microns.
In one embodiment, the high modulus phase comprises at least about 50 weight percent, more preferably 80 weight percent and most preferably greater than 95 weight percent particles having an average surface area ranging from about 25 square meters per gram to about 430 square meters per gram and an average diameter or average aggregate diameter of less than about 1 micron, more preferably less than about 0.6 microns. Preferred oxide particles of the present invention are alumina, silica, iron oxide, titania and ceria.
The surface area of the particles can be measured by the nitrogen adsorption method of S. Brunauer, P. H. Emmet and I. Teller, J. Am. Chemical Society, Volume 60, page 309 (1938) which is commonly referred to as BET measurement. Aggregate size can be determined by known techniques, such as, that described in ASTM D3849-89; measurements can be recalled individually or in the form of statistical or histogram distributions. Aggregate size distribution can be determined by transmission electron microscopy (TEM) The mean aggregate diameter can be determined by the average equivalent spherical diameter when using TEM image analysis, i.e., based upon the cross-sectional area of the aggregate.
The Low Modulus Phase.
The polishing materials of the present invention have at least one low modulus phase that is sufficiently hydrophilic to provide a critical surface tension greater than or equal to 34 milliNewtons per meter, more preferably greater than or equal to 37 and most preferably greater than or equal to 40 milliNewtons per meter. Critical surface tension defines the wettability of a solid surface by noting the lowest surface tension a liquid can have and still exhibit a contact angle greater than zero degrees on that solid. Thus, polymers with higher critical surface tensions are more readily wet and are therefore more hydrophilic. Critical Surface Tension of common polymers are provided below:
Critical Surface Tension (mN/m)
Silicone Rubber
Polyvinyl alcohol
Polymethyl methacrylate
Polyvinyl chloride
Nylon 6
In one embodiment, the low modulus phase is derived from at least:
1. an acrylated urethane;
2. an acrylated epoxy;
3. an ethylenically unsaturated organic compound having a carboxyl, benzyl, or amide functionality;
4. an aminoplast derivative having a pendant unsaturated carbonyl group;
5. an isocyanurate derivative having at least one pendant acrylate group;
6. a vinyl ether,
7. a urethane
8. a polyacrylamide
9. an ethylene/ester copolymer or an acid derivative thereof;
10. a polyvinyl alcohol;
11. a polymethyl methacrylate;
12. a polysulfone;
13. an polyamide;
14. apolycarbonate;
15. a polyvinyl chloride;
16. an epoxy;
17. a copolymer of the above; or
18. a combination thereof.
Preferred low modulus phase materials comprise urethane, carbonate, amide, sulfone, vinyl chloride, acrylate, methacrylate, vinyl alcohol, ester or acrylaride moieties (most preferably, urethane). The low modulus phase material also defines a modulus of 1 Pa to about 10 GPa. Preferably at least one low modulus phase component of the present invention defines an elongation to break in the range of 25% to 1000%, more preferably 50%-500% and most preferably 100%-350%. The low modulus phase material can be porous or non-porous. In one embodiment, a low modulus phase component is non-porous; in another embodiment, a low modulus phase material is non-porous and free of fiber reinforcement.
Multi-Phase Material
A multiphase material of the preferred embodiment of the present invention is manufactured by mixing an aqueous dispersion of high modulus phase material (or a precursor which can be converted into a high modulus phase material) with another phase (or a precursor to another phase) material (the other phase material may or may not be a low modulus phase material). The other phase material is preferably a polymer based material, such as a thermoplastic or a thermoset.
In a preferred embodiment, the dispersion of high modulus material is substantially free of particle agglomerations capable of scratching a semiconductor substrate. Particle agglomeration can be minimized by agitation or mixing of the dispersion shortly prior to intermixing the multi-phased material and solidifying (e.g., de-watering).
The low modulus material (or precursor thereto) can be 100% solids when mixed with the dispersion of high modulus material (or precursor thereto), but in a more preferred embodiment, the low modulus material is also a water based composition when mixed with the dispersion of high modulus material (or precursor thereto). Once these two components are adequately mixed (substantially complete blending of the one component within the other), the mixture is de-watered, such as by spray drying, oven drying or the like. As water is removed from the mixture, the resulting composition solidifies, with or without chemical reaction. Possible chemical reactions include curing, grafting, crosslinking, chain extension or the like.
In a highly preferred embodiment, an aqueous dispersion of submicron silica particles is vigorously mixed into a urethane latex and de-watered by oven drying. The urethane component of the urethane latex can be a polymer or in the alternative, can be a prepolymer which forms a final urethane polymer by a chemical reaction, such as by, chain extension, crosslinking or the like.
The multi-phased material comprises a high modulus phase in accordance with the present invention. In some embodiments, the multiphase composition may also include low modulus phase material. Generally, the high modulus phase will be the continuous phase, and the other phase is the discontinuous phase, but in alternative embodiments of the present invention, the continuous phase can be the high modulus phase.
The multiphase material can be formed into a polishing layer by casting, molding, skiving or other mechanical manipulation. In accordance with the present invention, if the multi-phased material is formed into a polishing layer, the multi-phased material must also comprise a low modulus phase.
Alternatively, the multiphase material can be broken down into small pieces, hereafter referred to as "clusters", by milling or any other particle producing process. The multiphase clusters can then be incorporated into a conventional or non-conventional pad matrix material to thereby provide a multiphase pad, whereby the multiphase component is in a particle format within a pad matrix. The pad matrix will generally be yet another phase of material, and hence, such embodiments of the present invention will define more than two phases. Critical to the present invention is that the polishing pad have at least two phases—a high modulus phase (greater than about 10 GPa) and a separate low modulus phase (less than about 10 GPa). The pad (polishing layer) matrix can be the same or different from either phase in the multi-phase material. In a preferred embodiment, the pad matrix and a phase of the multi-phase particulated material are generally different, but both are low modulus phase materials.
A possible polishing layer matrix precursor is one capable of being cured or polymerized via any appropriate polymerization mechanism, such as substitution, addition or condensation polymerization reactions. Possible precursors include acrylated urethanes, acrylated epoxies, ethylenically unsaturated compounds, aminoplast derivatives having pendant alpha, beta-unsaturated carbonyl groups, isocyanurate derivatives having at least one pendant acrylate group, isocyanate derivatives having at least one pendant acrylate group, and combinations thereof.
Optionally, a diluent can be added to any phase of the present invention to soften or otherwise lower the modulus of the material, thereby making the phase more prone to wear, to dissolving or to otherwise diminishing during polishing. In one embodiment, the diluent is a polyol, such as, polyethylene glycol, methoxypolyethylene glycol, polypropylene glycol, polybutylene glycol, glycerol, polyvinyl alcohol, and combinations thereof. In one embodiment, the diluent is polyethylene glycol having an average molecular weight of from 200 to 10,000 and comprising 20 to 60 weight percent of the matrix material.
Optionally, an oxidizing component can be incorporated into the low modulus phase material to promote oxidation of a metal layer to its corresponding oxide. For example, an oxidizing component can be used to oxidize tungsten to tungsten oxide; thereafter, the tungsten oxide can be chemically and/or mechanically polished and removed. Preferred oxidizing components for incorporation into the low modulus phase include oxidizing salts, oxidizing metal complexes, iron salts, such as nitrates, sulfates, potassium ferri-cyanide and the like, aluminum salts, quaternary ammonium salts, phosphonium salts, peroxides, chlorates, perchlorates, pennanganates, persulfates and mixtures thereof. The amount should be sufficient to ensure rapid oxidation of the metal layer while balancing the mechanical and chemical polishing performance of the system.
Other possible additives include fillers, fibers, lubricants, wetting agents, pigments, dyes, coupling agents, plasticizers, surfactants, dispersing agents and suspending agents. The polishing pad matrix material can comprise up to 80 weight percent filler and other optional ingredients. Examples of optional additives include EDTA, citrates, polycarboxylic acids and the like. Although certain clays have been described as being capable of acting as polishing particles, for purposes of the present invention, the presence of clay materials within the low modulus phase are to be deemed as filler, not (high modulus phase) polishing particles.
Particle Clusters
High modulus phase materials, particularly sub-micron ceramic particles tend to agglomerate into much larger sized particles, and this can be a problem, when creating the high modulus phase of the present invention. Such particle agglomeration can lead to scratching and can adversely affect polishing performance.
One way to avoid such unwanted agglomeration is to first: 1. mix the particles with a suitable binder, whereby the binder is initially in a flowable form; 2. agitating or stirring the mixture to thereby break up particle agglomerations and cause dispersion of the particles within the flowable binder; 3. Curing, de-watering or otherwise solidifying the binder, thereby dispersing the particles within a (now) solid binder, and thereby also preventing the particles from re-agglomerating; and 4. grinding or otherwise breaking the resulting material into fragments. The resulting fragments will hereafter be referred to as "particle clusters." The particle clusters are then incorporated into or bonded onto the polishing layer matrix material, and the particles are thereby incorporated into the polishing pad, substantially free of unwanted particle agglomeration. The binder and/or the pad matrix can provide the low modulus phase of the present invention.
The use of particle clusters is also advantageous, because it has been found that ceramic particles (without a binder) tend to weaken the pad's mechanical structure, due to poor adhesion between the particles and the pad matrix. Such decreased mechanical integrity is far less prevalent with the use of particle clusters, particularly where a binder is chosen which is more compatible with or otherwise more effectively binds to the pad matrix.
The particle cluster binder material can be optimized for specific polishing applications. The particle type, concentration and distribution can be adjusted within the binder to further optimize polishing performance for specific applications.
A Preferred Method of Fabricating Particle Clusters
According to one embodiment of the present invention, particle clusters are fabricated by mixing an aqueous dispersion of polishing particles, preferably colloidal, submicron metal oxide ceramic particles, with an aqueous dispersion of urethane prepolymer. The urethane (in either its liquid pre-polymer state or its solid cured state) will hereafter be referred to as the "intra-cluster binder." The intra-cluster binder may be, but is not limited to, urethane, epoxy, acrylic-urethane, polyacrylamide, polymethylmethacrylate, polyamide, polycarbonate, polyvinylalcohol and polysulfone.
Useful particles can include, but are not limited to, SiO2, Al2O3, TiO2 and CeO2. Particle sizes are preferably in the range of 10-1000 nm, more preferably 30-500 nm and most preferably 50-300 nm. Preferred concentrations of particles in the particle cluster are greater than 50 weight percent, more preferably greater than 75 weight percent and most preferably above 90 weight percent.
The resulting particle/particle binder mixture is preferably dried to remove water. Drying techniques may include oven drying, evaporation, spray-drying, etc. The resulting material is ground or milled into a fine powder, each granule of which constitutes a particle cluster. Grinding may be done by a mortar and pestle, roll mills, high-speed grinders, or other similar means. In one embodiment, the material may be ground into particle clusters ranging in size from 10-1000 μ(microns), preferably 25-500 μ, and more preferably 35-150 μ. The preferred size of the particle clusters will be governed by the size of the polishing particles, the grinding method and the polishing application for which they are produced.
In some instances, where conditioning is not desired, it is advantageous to achieve compositions which are somewhat friable (e.g., crumble under shear forces, preferably of less than 1000 Newtons). Friability allows a fresh supply of particles to be continuously introduced into the polishing fluid. Friability is achieved by high filler loadings and/or by use of high glass transition temperature polymers (glass transition temperatures preferably greater than 25 degrees Centigrade). When filler loadings are high, the particles are generally not fully surrounded by the polymer, creating a relatively brittle material. High glass transition temperature polymers tend to produce brittle matrices rendering the material relatively friable. Therefore, the rate of introduction of particles into the polishing fluid can be controlled by varying the particle loading and the intra-cluster binder (e.g., polymer).
Particle behavior during polishing is generally determined by how well the particles are held by the intra-cluster binder. The binder material and the particles can be optimized for best polishing performance. The concentration and properties of the particles within the particle cluster can be changed independent of the bulk properties of the polishing layer matrix. The size and concentration of the particle clusters within a polishing layer can also be varied to optimize performance.
Fabrication of Polishing Articles Containing Particle Clusters
In one embodiment of the present invention, particle clusters are incorporated into the polishing layer matrix by mixing the clusters into a flowable polishing layer matrix precursor and solidifying the matrix by curing, cooling or any other solidification operation. Alternatively, the particle clusters are bonded to the polishing layer matrix, while the matrix is in a flowable or non-flowable state.
Useful manufacturing techniques may include, but are not limited to, molding, casting, extrusion, spray-coating, web-coating, printing, sintering, photopolymerization, or the like. Additional processing may also be incorporated into the polishing pad manufacturing process, such as grooving, skiving, felting and foaming or the like. Grooving is intended to mean producing recesses of any shape on the article's polishing surface.
In one embodiment of the present invention, the polishing layer matrix (prior to solidification) with particle clusters dispersed therein is coagulated or otherwise coated and solidified upon a substrate, such as a felt or polymer film. Coagulation can form a porous, particle-containing material.
The particle clusters can be dispersed in liquid urethane precursors used in existing processes for the manufacture of polishing articles. The loading of particle clusters may be in the range of 1-95 weight percent. More preferably the particle loading is in the range of 10-90 and most preferably in the range of 25-85 weight percent. The concentration of the particle clusters can be varied over a wide range to achieve desired characteristics for different applications. For instance, high loading increases friability. Compositions preventing particle cluster agglomeration allow uniform distribution to be achieved.
The particle clusters should not interact chemically with the bulk constituents of the article in ways that would inhibit their performance. However, the inter-cluster polymeric matrix chemistry may be adjusted to obtain desired behavior of the particle clusters within the matrix. For instance, adjustments to the inter-cluster polymer chemistry may allow the particle clusters to attach to a surface of the article instead of being distributed evenly throughout.
In one embodiment the mixture of particle clusters in the inter-cluster polymeric matrix is transferred to a mold. The mixture is allowed to gel and then cured at elevated temperatures. The solidified cake is brought to room temperature and removed from the mold. The cake is skived, or similarly sectioned, to form polishing articles of desired thickness'. The articles may be used in this form or layered with other articles such as foams depending on the application. The top layers may be perforated or grooved.
In an alternative embodiment particle clusters may be dispersed in a water soluble polymer to allow release of particle clusters into an aqueous polishing fluid during use. Examples of such polymers include, but are not limited to, polyvinylalcohol or polyacrylamide.
Particle clusters may be mixed with an inter-cluster polymeric binder, preferably an aqueous dispersible polymer, then sprayed onto a substrate to form a polishing article. The preferred loading of particle clusters may be 5-95 weight percent, more preferably 20-90 weight percent, and most preferably 40-85 weight percent. The mechanical integrity of a sprayed article is dictated by the substrate. Therefore, the particle cluster loading can be higher in sprayed mixtures than in matrices that form an entire polishing article (or polishing article layer for a composite article). The substrate may be any material possessing the flexibility, elasticity and other properties necessary for successful polishing. The inter-cluster polymeric binder and substrate must have sufficient adherence to one another so that the particle clusters release the polishing particles more readily than the substrate releases the binder.
Particle clusters may be sprayed in layers. Each layer is dried and either totally or partially cured before application of subsequent layers. Preferably surfactants are added to the inter-cluster binder to enhance adhesion between layers. Layering serves to increase the thickness of the article, thereby increasing longevity. Layering also provides a means to vary the polishing capabilities within a single article. For example, layers may vary in particle size, type or loading, or in particle cluster type, size or loading. Also a single layer may contain different types, sizes or concentrations of particle clusters.
The rate of particle release into the polishing fluid can be controlled by varying the particle loading of the cluster, the particle cluster loading of the material, or by varying the types and ratios of all other materials comprising the clusters and polishing layer matrix.
In one embodiment of the present invention, particle clusters are mixed gradually into a reactive precursor to the polishing layer matrix. Once formed, the polishing layer matrix will comprise the low modulus phase and the particle clusters (which comprise a high modulus phase) are dispersed within the matrix. Examples of suitable mixing techniques include low shear and high shear mixing; high shear mixing being preferred. Ultrasonic energy may also be utilized in combination with the mixing step to lower the dispersion viscosity. The amount of air bubbles in the dispersion can be minimized by pulling a vacuum during or after the mixing step. In some instances, it may be preferred to add heat during mixing, generally in the range of 30 to 70 degrees Centigrade, to lower viscosity. The dispersion should have a rheology that coats well and in which the particles and other fillers do not settle.
A preferred matrix precursor material comprises a free radical curable component. Such polymerization can generally be initiated upon exposure to thermal or electromagnetic energy, depending upon the free radical initiator chemistry used. The amount of energy necessary to induce polymerization depends upon several factors such as the binder precursor chemistry, the dimensions of the matrix precursor material, the amount and type of particles and the amount and type of optional additives. Possible radiation energy sources include electron beam, ultraviolet light or visible light. Electron beam radiation, which is also known as ionizing radiation can be used at an energy level of about 0.1 to about 10 Mrad, preferably within the range of about 250-400 nanometers.
Also preferred is visible light radiation in the range of about 118 to 236 Watts per centimeter; visible radiation refers to non-particulate radiation having a wavelength within the range of about 400 to about 800 nanometers, preferably in the range of about 400 to 550 nanometers. It is also possible to use thermal energy to initiate the free radical polymerization, provided the polymerization chemistry is adaptable to thermally induced free radical initiation and curing.
In a preferred embodiment, the resulting mixture (of low modulus phase, polishing layer matrix precursor, particle clusters and optional ingredients, if any) is then applied to a substrate as the precursor is solidified (e.g., polymerized) to create a polishing layer comprising a high modulus phase (found within the clusters) and a low modulus phase (the polishing layer matrix and/or a second phase within the cluster). The substrate upon which the mixture is applied can be left bonded to the mixture to form a multilayer pad. In such an embodiment, the polymerization reaction should induce adhesion between the substrate and matrix material, and the substrate should be prone to surface wetting by the precursor matrix material.
In an alternative embodiment, the solidified mixture is peeled away from the substrate (such as a mold) to form a monolayer. This monolayer can be used as a pad or additional layers can be applied to the monolayer to provide a multilayered pad. Regardless of whether the final pad is a monolayer or multilayer, the multi-phased material will define at least one polishing surface of the pad.
The pad layer (pad matrix containing particle clusters) can be partially or wholly solidified upon a belt, a sheet, a web, a coating roll (such as a rotogravure roll, a sleeve mounted roll) or a die. The substrate can be composed of metal (e.g., nickel), metal alloys, ceramic or plastic. The substrate may contain a release coating (e.g., a fluoropolymer) to permit easier release of the cured material from the substrate.
The partial or complete solidification of the polishing layer can occur with the mixture in contact with a mold or other means to induce a three dimensional pattern upon a surface of the mixture. Alternatively, the surface of the mixture can be modified by any available technique, such as, photolithography and/or machining. In yet another alternative embodiment, the matrix surface is not modified, but rather, the surface texture remains as was naturally produced when hardening (e.g. polymerizing) the precursor to provide the solid matrix material.
Flow Channels
Conventional polishing pads generally perform better with a series of large and small flow channels. In a preferred embodiment of the present invention, the flow channels continuously evolve (some are created as others diminish), as the multi-phase material abrades, dissolves or otherwise diminishes.
To provide consistency of polishing performance, any flow channel(s) should have a configuration (such as rods or cylinders perpendicular to the pad's surface) whereby as the pad wears to one half the average depth of the largest flow channel, the amount of surface area capable of contacting the substrate changes by less than 25%, more preferably less than 15% and most preferably less than 10%. In one embodiment, substantially all flow channels define a groove having a width which varies by no more than 20% (more preferably no more than 10%) between the top and bottom of the groove.
In another embodiment, pads in accordance with the present invention have a pyramidal, truncated pyramidal or other three dimensional surface texture, whereby the polishing surface area will tend to change as the pad wears. To offset variations in polishing surface area during the useful life of the pad, the downward pressure upon the pad is adjusted to maintain a substantially constant frictional resistance between the pad and substrate.
Pad Longevity and "Self-Dressing"
High loadings of the high modulus phase will generally decrease pad life, since high loadings of the high modulus phase material will tend to release rigid domains and as these domains are released, the pad wears away. However such high loadings of the high modulus phase can be advantageous, because the release of high modulus domains renews the polishing surface of the polishing layer and thereby can decrease the amount of conditioning necessary during the life of the pad.
Such a decrease in pad conditioning is advantageous, because conditioning slows production, is labor intensive and presents an opportunity for operator error. The high modulus phase can be adjusted to fine tune the release of high modulus domains (e.g., particles), thereby influencing the amount of pad conditioning required during the pad's useful life.
Alternatively, by decreasing the high modulus domain loading, the polishing layer can become less friable, and this generally improves the pad's mechanical integrity and generally increases the pad's service life. Generally speaking, high modulus phase loadings above 50wt % tend to decrease the need for pad re-conditioning.
Recess-Filled Polishing Articles
In one embodiment of the present invention, an indentation (such as a groove) is incorporated into the polishing layer surface. The indentation is then filed with a filler comprising high modulus phase material. For example, a conventional polyurethane pad can be machined to form grooves on the polishing surface. The polyurethane pad matrix can comprise low modulus phase material and can be devoid of high modulus phase material. The grooves can then be filled with a composition comprising high modulus phase material. Once the indentations are filled (such as by spraying), the overall surface of the pad can be substantially planar. By controlling the geometry of the grooves, especially the width and by adjusting the density of the high modulus material within the recess, it is possible to equalize the wear rates of the pad and the filler within the indentation(s). In this way, the underlying pad can provide mechanical integrity and the filled grooves can act as a continuous source of nanoasperities.
Sintered Polishing Pads Containing Particle Clusters
In accordance with the present invention, polishing articles (comprising both a high modulus phase and a low modulus phase and containing particle clusters) may be fabricated by a sintering process. In a preferred embodiment, the process begins by mixing the particle clusters with low modulus phase material capable of being sintered. Concentrations of the low modulus phase can range from 5 to 95 weight percent, preferably from 20 to 90 weight percent, and more preferably from 40 to 85 weight percent, depending upon the concentration of particles in the clusters and the desired loading in the polishing article. As the concentration of particle clusters increases, the friability of the polishing material tends to also increase.
Low modulus phase materials preferably sinter at temperatures and pressures below the decomposition temperature/pressure of the selected particle clusters. Nylon is a low modulus phase material which is often suitable for sintering polishing pads of the present invention. Other possible low modulus phase materials which may also be suitable for sintering include: thermoplastic polyurethanes, polyvinyl chloride, polycarbonate, polymethylmethacrylate, polysulfone and combinations thereof.
In the preferred embodiment, once a dispersion of particle clusters within the low modulus phase material is achieved, the mixture is poured into a mold and heated for sufficient time and temperature to fuse the structure together. By varying the temperature, time and pressure, different degrees of sintering can be achieved. At one extreme, a fully dense material can be sintered with no residual porosity and with high mechanical strength. Alternatively with partial sintering, the resulting material generally has open channels and is often porous and friable, at least to some degree. Thus, the degree of sintering can be used as yet another way of controlling the friability, including the propensity for releasing (high modulus) particles. This unique characteristic of the present invention generally reduces or eliminates the need for article conditioning by continually generating a fresh article surface during polishing.
The mold used can contain grooves or any other shaped designs, the pattern of which under the process of molding produces recesses in the article. Recesses may also be incorporated into the article after its formation by methods such as embossing or the like.
Other methods of producing sintered articles include, but are not limited to, wet forming, powder compaction and electrophoretic deposition.
The present invention includes a method for polishing comprising the steps of: 1) formulating a polishing article having particle clusters incorporated therein; 2) introducing a polishing fluid, preferably containing little or no particulate material, between the article and a workpiece to be polished; and 3) producing relative motion between the article and workpiece. Following are examples further describing the articles and methods of the present invention. They are not intended to be restrictive in any way.
This example describes one embodiment of particle cluster fabrication according to the present invention. A formulation was prepared having 5 weight percent A-100* and 95 weight percent CeO2**. A 1935 g CeO2 aqueous dispersion (the concentration of CeO2 in the dispersion was 21.5%) was prepared and poured into a mixer. Using high shear mixing, 63 g of an aqueous dispersion of A-100 (concentration of 55%) was slowly added to the CeO2 dispersion. Mixing continued for 30 min. The resulting mixture was poured into an aluminum pan and heated for fourteen hours at 60� C. until dried The dried mixture was ground by mortar and pestle to a fine powder. Each grain of powder represented a particle cluster.
*A-100—a water based colloidal dispersion of urethane and polyacrylate copolymer manufactured by Witco, Inc.
**CeO2—water dispersion with a primary particle size of 200 nm, manufactured by Mitsui Chemical Company.
This example describes a dispersion of particle clusters in an inter-cluster polymer.
Weight Percent of Cluster/Interpolymeric Binder Formulation
W-242{circle around (x)}
Particle Clusters
(as prepared in example 1)
XW{circle around (x)}{circle around (x)}
Velvetex BK-35{circle around (x)}{circle around (x)}{circle around (x)}
Deionized water
{circle around (x)}W-242 urethane aqueous dispersion manufactured by Witco, Inc.
{circle around (x)}{circle around (x)}XW epoxy aqueous dispersion manufactured by Witco, Inc.
{circle around (x)}{circle around (x)}{circle around (x)}Velvetex BK-35 surfactant manufactured by Henkel Corporation
Three-hundred grams of a W-242 aqueous dispersion, 157.5 g of particle clusters produced as in Example 1, 6.0 g of XW, 9.0 g of surfactant and 100 g deionized water were mixed in a laboratory jar-mill (with zirconia as a ball-mill medium) for fourteen hours. A spray-gun was used to spray the mixture on the surface of a grooved IC-1400 pad (polishing pad manufactured by Rodel, Inc., Newark, Del.). After spraying, the pad was heated in an oven at 60� C. for fourteen hours.
This example describes one embodiment for a method of polishing. Thermal oxide wafers were polished using a polishing pad prepared in Example 2. The pad was mounted on a Strasbaugh 6CA polishing machine platen. The pad was rinsed with de-ionized water and conditioned with 200 grit diamond grid for 3 min. A particle-free polishing slurry (NH4OH (1.7%) in water) was introduced on the surface of the pad at a rate of 100 ml/min. A platen speed of 60rpm and a quill speed of 50 rpm were used. The pressure between the pad and the wafer was 8 psi. The wafer was polishing for 2 min. then rinsed with de-ionized water for 30 seconds. Seventy-five thermal oxide wafers were polished with one pad. There was no reconditioning between wafers. An average removal rate of 3000-3500 Å/min was achieved.
Pad Plus Slurry.
The polishing systems of the present invention comprise the (above described) polishing pad design in combination with a polishing slurry. Any particle containing polishing fluid can be used. Preferred polishing slurries comprise less than 95 weight percent particles, more preferably less than 40 weight percent particles, more preferably less than 25 weight percent particles and most preferably 0-10 weight percent particles. In one embodiment, the polishing fluid comprises an amine, polyol, carboxylic acid, halogen ion and/or oxidizing agent.
During polishing, preferred polishing fluids provide increased reactivity or corrosivity at the point of particle contact or interaction with a surface protrusion. For example, if the polishing fluid is more corrosive at higher temperatures, then corrosion will preferentially occur at this point of contact, since the temperature at the point of contact is generally higher than at non-contact portions of the surface. A particularly preferred polishing fluid provides a corrosion rate which increases as the protrusion is stressed (i.e., bond strain is induced) due to particle contact or interaction.
Dilute solutions of hydrofluoric acid are corrosive to SiO2 and silicate materials. The rate of corrosion is sensitive to bond strain, particularly tensile strain. The corrosion rate increases by more than an order of magnitude. Such a reactive solution when used in accordance with the polishing pads of the present invention will generally result in a highly selective local removal in the proximal vicinity of the particle contact, due to the increased local bond strain in the substrate.
A preferred polishing slurry of the present invention for use in the polishing of silicon is a water based slurry, comprising about 0.05 to about 5 weight percent amine, preferably primary amine capable of receiving a free proton. In addition or in the alternative to the amine the following can be used: a halogen ion, particularly a fluoride ion; a hydroxyl ion; and/or a superoxide, such as peroxide, persulfate, permagnate or the like. A preferred pH for the polishing fluid of this embodiment is in the range of about 2-12.
Recycle of Polishing Fluid
In another embodiment, the polishing fluid is recycled back into the polishing operation. Prior to re-use, the polishing fluid can be filtered or otherwise processed or rejuvenated. If the slurry comprises a dilute hydrofluoric acid solution, the pH and HF concentration may be measured in situ before and after use. Provisions for additional HF into the slurry as needed to maintain a constant acid concentration and pH can be introduced into the recirculation system.
Similarly, for a slurry comprising 50 parts per million ozone in water at pH 4, the oxidation potential of the solution (which is directly proportional to the ozone concentration), and the pH may be measured with conventional electrodes; acid and ozone can then be added during the recirculation process to maintain consistency in polishing fluid performance.
Referring now to the drawings, FIG. 1 is an enlarged sectional view showing a polishing pad in accordance with the present invention. The pad 10 comprises a polishing surface 12 comprising a low modulus phase material 14 having high modulus phase particles 16. Optional flow channels are shown at 18 and 20. FIG. 2 provides a schematic representation of a polishing process in accordance with the present invention. The polishing apparatus is shown generally at 100, comprising a table 102, workpiece 106 and polishing pad 104. Polishing fluid is pumped into the polishing interface (between the pad and workpiece) by influent line 105. Used polishing fluid exits the polishing apparatus via effluent line 108. The used polishing fluid is filtered by filter 110, and deionized by ion exchange column 112. Excess polishing fluid can be removed by waste line 114. Sensor 116 then monitors the pH or other chemical properties of the recycled fluid, and inlet line 120 provides appropriate additives to the recycled fluid, thereby rejuvenating it for another polishing cycle. Sensor 122 monitors the polishing fluid entering the polishing operation to ensure proper pH or other properties which are desired to be monitored for quality control.
Nothing from the above discussion is intended to be a limitation of any kind with respect to the present invention. All limitations to the present invention are intended to be found only in the claims, as provided below.
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|U.S. Classification
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|Jun 15, 2004
Owner name: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, I
Free format text: CHANGE OF NAME;ASSIGNOR:RODEL HOLDINGS, INC.;REEL/FRAME:014725/0685
Effective date: 20040127
|Nov 9, 2005
|Maintenance fee reminder mailed
|Apr 24, 2006
|Lapse for failure to pay maintenance fees
|Jun 20, 2006
|Expired due to failure to pay maintenance fee
Effective date: 20060423


text:
Police have identified the driver who died Saturday night in a crash on Riverview Drive in Murfreesboro.
Knoxville resident Xavier C. Bingham, 25, was killed just before 9 p.m. when the 2010 Ford Mustang he was driving crashed into a tree in the 1600 block of Riverview Drive, according to officials with the Murfreesboro Police Department.
"The driver was pronounced dead at the scene," said Sgt. Kyle Evans, public information officer for the Police Department.
A passenger, Emmanuel Wallace, was also seriously injured in the crash.
The 19-year-old Clarksville resident was transported via LifeFlight to Vanderbilt University Medical Center in Nashville, Evans said.
"Wallace remains in critical but stable condition at Vanderbilt," he said.
The Fatal Accident Crash Team is still investigating the cause of the wreck, which did not involve any other vehicles.
This is the second traffic fatality that has occurred within the Murfreesboro city limits since the first of the year.
On Feb. 5, 20-year-old Timothy Martin, who was a Middle Tennessee State University student, died after being struck by a car as he walked across North Rutherford Boulevard.

subset: commoncrawl


text:
UPDATE 1-First Niagara repays TARP proceeds, shares up
* Repays $184 mln TARP proceeds
* Sees Q2 charge of $0.07/shr * Stock up 6 pct before the bell
May 28 (Reuters) - First Niagara Financial Group Inc FNFG.O said it redeemed all of its $184 million non-voting senior preferred stock that was sold to the U.S. Treasury under the Capital Purchase Program.
The company said it will record an accelerated discount accretion of $7.7 million related to the difference between the amount at which the preferred stock sale was initially recorded and its redemption price.
The accretion, together with the final preferred stock dividend, will hurt its second-quarter earnings by 7 cents a share, it added.
First Niagara also said it intends to negotiate with the Treasury to buy back a warrant for 953,000 common shares issued under the program, which is not expected to have an impact on its earnings.
The company said in April it will sell $300 million of common stock to repay the government funding, and to close its acquisition of 57 branches, $4.2 billion of deposits and $839 million in loans from City National Bank, a unit of PNC Financial Services Group Inc (PNC.N: Cotización).
The government created TARP last fall to unlock the flow of credit after credit markets were brought to a near halt by shocks such as Lehman Brothers Holdings Inc's LEHMQ.PK bankruptcy.
At first, banks viewed TARP money as a positive, signaling government confidence. But TARP also allows the government to unilaterally impose restrictions, including on pay, and many investors now believe holding bailout money signals weakness.
First Niagara shares were trading up 6 percent at $12.34 before the bell. They closed at $11.68 Wednesday on Nasdaq. (Reporting by Anurag Kotoky in Bangalore; Editing by Anil D'Silva)
© Thomson Reuters 2017 All rights reserved.


text:
We have no old photos of Treflach available currently. However you can browse old photos of these nearby places:
Historic maps of Treflach and the local area, hand-drawn by Ordnance Survey cartographers and Samuel Lewis.
Browse 5 photo books on Treflach and the surrounding area.
I am looking for any family who go under the name of Davies or Whyley. My mum was Pamela Whyley and her sister is Margaret, they are the daughters of the late Mary Elizabeth Whyley (nee Davies) and the late George Whyley, I understand they have a half brother called Robert and we would like to contact him. Mum has sadly passed away ...Read full memory


text:
By Geneen Roth
Publisher: Simon & Schuster Audio
Language: English | Number of Pages: | Format: Audio CD
Isbn-10: 1442336609 | Isbn-13: 9781442336605 | Publish date: 11/05/2010
Also available as: Hardcover , eBook , Paperback , Softcover and Stapled
Category: Philosophy , Religion & Spirituality , Self Help
Do you like Women Food and God ?
Join aNobii to see if your friends read it, and discover similar books!
If you suffer about your relationship with food—you eat too much or too little, think about what you will eat constantly or try not to think about it at all—you can be free. Just look down at your plate. The answers are there. Don't run. Look. Because when we welcome what we most want to avoid, we contact the part of ourselves that is fresh and alive. We touch the life we truly want and evoke divinity itself.
Now, after three decades of studying, teaching and writing about what drives our compulsions with food, Geneen Roth adds a profound new dimension to her work in Women Food and God. She begins with her most basic concept: The way you eat is inseparable from your core beliefs about being alive. Your relationship with food is an exact mirror of your feelings about love, fear, anger, meaning, transformation and, yes, even God. She shows how going beyond both the food and feelings takes you deeper into realms of spirit and soul to the bright center of your own life, and reveals how your relationship with food is the doorway to freedom and what you want most: the demystification of weight loss, and the luminous presence that so many of us call "God."
A knock-your-socks-off ride to a deeply fulfilling relationship with food, your body?and almost everything else, Women Food and God is, quite simply, a guide for life.


text:
I'm wondering why I can not seem to be able to rate 2 of my purchased photodune items:
This seems to be happening only on Photodune. I have tried with different occasions to rate those specific 2 items, but I haven't succeeded, it just shows a "loading" icon in the bottom left part and then nothing. It isn't a big deal, but being an author myself, I know how important a small little rating is.
Thank you for your support!
Very strange. Have you contacted Support about it yet?
Hi Gabriela,
This must have been a bug as it was happening to me too. But it now appears to have been fixed as I am now able to rate files that was previously not saving the ratings I was giving photos. Try again and let us know if it works for you too, thanks!


text:
|Patriots Look Poised For Another Super Bowl Run
|Bruins Trade For Drew Stafford
|Black and Gold Bruins Turn Yellow On Parade Day
|Inconsistency Will Continue For Bruins Unless A Change Is Made
Three years ago the little-known career backup, Matt Cassel, stepped in after the injury to a future Hall of Fame quarterback.
Three years ago, it was Cassel who led the Patriots to an 11-5 record — including an undefeated December.
Three years ago, it was Cassel who became a fan favorite in New England after his 3,693 yard and 21 touchdown performance.
So, naturally the mood would be light on Monday night when Cassel and his Chiefs travel to Foxborough. Cassel's first appearance at Gillette Stadium, since a Dec. 21, 2008 47-7 win over Arizona.
Not so fast.
Chiefs head coach Todd Haley told reporters that Cassel's hand injury, which occurred in the fourth quarter against the Denver Broncos Sunday, is significant and he will need surgery. Haley said that Tyler Palko will start for Kansas City.
A big blow for the 2005 seventh-round draft choice by the Patriots.
Since arriving in Kansas City, Cassel has passed for 7,753 yards and 32 touchdowns. Last season, Cassel led the Chiefs to the playoffs with a 10-6 record.
In July 2009, Cassel signed a six-year $63 million contract with the Chiefs. The Patriots traded Cassel, along with veteran linebacker Mike Vrabel, to Chiefs in return for a 2009 second round pick (Patrick Chung) in February 2009.
Palko, Cassel's replacement, has completed nine passes since being signed as an undrafted free agent with the New Orleans Saints in 2007. The Chiefs also have 2011 fifth round pick Ricky Stanzi from Iowa. Stanzi has yet to play a down this season, but does offer a stronger arm and possess bigger size over Palko.
Tags: Kansas City Chiefs, Matt Cassel, New England Patriots, Ricky Stanzi, Tyler Palko


text:
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CARMUSTINE, BCNU (kar MUS teen) is a chemotherapy drug. It is used to treat glioma and glioblastoma. The wafers are placed at a site where a brain tumor used to be, at the end of a surgery to remove the tumor.
This drug is placed into the space made when a tumor is removed. It is administered during surgery in a hospital.
Talk to your pediatrician regarding the use of this medicine in children. Special care may be needed.
Side effects that you should report to your doctor or health care professional as soon as possible:
allergic reactions like skin rash, itching or hives, swelling of the face, lips, or tongue
signs of infection - fever or chills, cough, sore throat, pain or difficulty passing urine
breathing problems
changes in emotions or moods
changes in vision
problems with balance, talking, walking
stiff neck and sensitivity to light
swelling of the ankles, feet, hands
unusually weak or tired
Side effects that usually do not require medical attention (report to your doctor or health care professional if they continue or are bothersome):
hair loss
nausea, vomiting
trouble sleeping
Interactions are not expected.
This does not apply.
This drug is given in a hospital and will not be stored at home.
They need to know if you have any of these conditions:
bleeding problems
an unusual or allergic reaction to carmustine, BCNU, other medicines, foods, dyes, or preservatives
pregnant or trying to get pregnant
Visit your doctor for checks on your progress. You will need to have regular blood work. Report any side effects.
In some cases, you may be given additional medicines to help with side effects. Follow all directions for their use.
Call your doctor or health care professional for advice if you get a fever, chills or sore throat, or other symptoms of a cold or flu. Do not treat yourself. This drug decreases your body's ability to fight infections. Try to avoid being around people who are sick.
Avoid taking products that contain aspirin, acetaminophen, ibuprofen, naproxen, or ketoprofen unless instructed by your doctor. These medicines may hide a fever.
Do not become pregnant while taking this medicine. Women should inform their doctor if they wish to become pregnant or think they might be pregnant. There is a potential for serious side effects to an unborn child. Talk to your health care professional or pharmacist for more information. Do not breast-feed an infant while taking this medicine.
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text:
Our roundup of legal news links, legal PR client news and story ideas
By Geri L. Dreiling, Esq.
This week, 48 Up & Coming lawyers gathered at the St. Louis Rams club for a reception held in their honor by Missouri Lawyers Weekly.
The Up & Coming awards recognize attorneys who have distinguished themselves in their legal practices, given back to the community through charitable contributions or obtained impressive results on behalf of their clients.
Congratulations to all of the honorees, and a special huzzah to Anne Brockland, Alicia Campbell, Timothy Grochinski, Andrea McNairy, Jeff Roseman and J. Brad Wilmoth.
Notable Links
Large Firms: Take Next Social Media Step
For many law firms, the idea of individual lawyers interacting on social media sites triggers worry and dread. However, Nicole Black at Sui Generis sets forth a step-by-step outline explaining how risk-averse law firms can test the social media waters with a handful of lawyers. She also provides a social media interaction formula that can help lawyers navigate the various social media streams.
SEO Copywriting: The Five Essential Elements to Focus On
Copyblogger's Brian Clark sets out five strategic elements to focus on when writing search engine optimized content. The blog post explains in plain language the importance of the title; meta description; unique, frequently updated and tightly focused content; keyword frequency; and page links.
Time Management, Creative Productivity and Multitasking
Every lawyer I know is stretched thin and being tugged in several different directions at once. Multiple court appearances in various courthouses scheduled at the same time, competing case files requiring simultaneous attention and clients with questions are just a few of the challenges attorneys encounter daily. Writer and illustrator Debbie Ridpath Ohi shares some great nuggets about multitasking and time management on the MiG Writers site. Though not geared specifically to lawyers, legal professionals will find her tips useful.
Ideas for Journalists
Law Firms That Dare to Be Different
Bound by precedent and steeped in tradition, the legal profession takes its time when trying anything new. For many firms, the conservative pace even extends to changing the physical space and layout. In most traditional firms, each lawyer has his or her own office with a window view, the more senior partners receive the corner offices, support staff members are located in windowless cubicles in the office interior and conference rooms often boast impressive views.
But what about the firms that dare to be different?
For example, Marta J. Papa's practice is located in a converted home. Mediation clients literally sit down at the dining room table over coffee and work out their differences. At The BrickHouse Law Group, partners Geoff Gerber and Pete Salsich share one large office with a conference room table between their desks, reinforcing their collaborative approach to problem-solving.
To ensure that you don't miss out on this valuable information, subscribe to our regular e-mails or RSS feeds. You can also find Legal Media Matters on Facebook or follow us on Twitter.
At Legal Media Matters, we provide legal public relations, law firm marketing and attorney website content writing services.


text:
The following photos are visual examples of improperly healing surgical sites after having a female dog spayed. If your pet was spayed at Pets In Stitches, please contact us if your pet's incision looks like any of these pictures.
Don't just take our word for it…
I liked that my puppy didn't have to stay overnight. I also liked that the staff called a couple of days later to make sure everything was going well. When I told them I was concerned about a small lump and a red mark they had me bring her right in to be checked out for free. Of course everything was fine (just a very active puppy) but it was nice to know for sure.
Thank you very much for providing a wonderful service at an affordable price. Gizmo is doing wonderful and never had any problems at all. He healed up terrific and is his wonderful crazy pug self.
I would rate Pets In Stitches a perfect 10 and have already recommended them to several friends.
There is absolutely nothing more I could have asked for in the care of my sweet Pug. Doctor Rastetter and her staff were fabulous and caring from the time of drop off to pick up. They were very efficient, timely, and caring and it really made me feel at ease. The facility was extremely clean and sanitary.
When I came to pick Gizmo up the staff was again friendly and went over all post op instructions and gave me a list of emergency number if I needed anything. I was extremely impressed when they told me that after hour calls were answered by their own staff members. I received all instructions but after I got home I thought of another question and called back and was surprised that Dr. Rastetter herself answered the phone. It was very refreshing to meet such a wonderful and caring doctor. She truly loves animals and worries about the pet population. I greatly appreciate her special services at an affordable price.
I honestly cannot think of anything to improve the service because I was 100% satisfied.


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Stephens keeps his edge
As Clint Eastwood's character in the Oscar-winning film "Million Dollar Baby" noted, sometimes "tough ain't enough." In lightweight up and comer Jeremy Stephens' case, being the guy stepping in on short notice may gain you fans and prove your willingness to scrap anytime, anyplace, against anyone, but it can also lead you to defeat when facing the type of top-notch competition that fills the UFC's 155-pound weight class . . . Click here for more by Thomas Gerbasi, UFC
The Ultimate Fighting Championship® is proud to announce its first-ever event in Nashville, Tennessee, April 1, live on Spike TV at 7 p.m. CT/8 p.m. ET/PT! In the main event, Carlos Condit, in his UFC debut, takes on Martin Kampmann. Click here for more info


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P-Nats Hammer Red Sox with Assist from Werth
7-3 Nationals Win in Game Four Finale Yields Series Victory
By Potomac Nationals | May 30, 2013 7:34 PM ET
PHOTO CREDIT: Gary Dize (Potomac Nationals)
Woodbridge, VA-Washington Nationals RF Jayson Werth made his third rehabilitation start of the season and second in succession with the Potomac Nationals (28-24, 17-11) on Thursday evening at Pfitzner Stadium to aid the Nationals to a 7-3 victory in the Game Four finale. Werth went 2-for-3 with a pair of singles, including a run scoring one-base knock, and scored one run to assist the P-Nats triumph over the Salem Red Sox (21-29, 12-18).
Werth, rehabbing a still tender hamstring, was tested twice in the outfield on fly balls off the bats of RF Matty Johnson and 3B Garin Cecchini in the 3rd inning and ran the bases twice on his singles, a groundball chopped through the hole at shortstop in the 1st inning and an RBI rope to center field in the Nationals' 6th stanza.
Potomac RHP Blake Schwartz was effective and came up one out shy of a quality start after tossing 5.2 innings and allowing three earned runs on seven hits with two walks and two strikeouts. Schwartz allowed his first home run of the season, a solo shot over the first tier of signs in left center field to C Carson Blair in the 2nd frame. That blast from Blair ended a stretch of 37.2 innings without Schwartz allowing a four-bagger.
Salem RHP Mike Augliera (4-2), the losing pitcher, gave up four earned runs on six hits to take his second loss of the 2013 season.
Potomac struck first with one run in the 1st inning on an RBI fielder's choice by CF Michael Taylor, who earned a three RBI night, that scored the leadoff hit batsman, LF Billy Burns, who stole his Carolina League-best 24th and 25th bags in the contest.
Blair tied the game with his aforementioned solo shot before Potomac answered in the home half of the 2nd with a solo tater over everything in left field off the lumber of C Cole Leonida, his third dinger of the campaign and second homer against Salem.
The Red Sox tallied a pair of runs to knock out Schwartz in the 6th when DH Keury De La Cruz roped an RBI double to right field and 1B David Renfroe followed in suit with a two-bagger to right to give the Sox a 3-2 lead.
Nationals LHP Matt Grace (3-0) was immaculate out of the bullpen allowing just one base runner on a walk issued to SS Deven Marrero.
The P-Nats bats returned fire in the last of the 6th stanza as a leadoff Burns triple down the left field line led to Werth's run scoring lazer beam to center. SS Jason Martinson ripped an RBI two-base hit out to left field to bring home the Nationals' fourth run taking a 4-3 advantage.
The Nationals caked on three more runs of insurance after 7th inning stretch time via a Francisco Soriano RBI shot to right field and a two-run double cranked to left field by Taylor.
RHP Cameron Selik, in a non-save situation, sat down the Red Sox in order in the 9th inning to seal the deal on a series victory for Potomac.
With Werth scheduled to continue his rehabilitation with the Potomac Nationals through Sunday, the P-Nats usher in the Northern Division leading Lynchburg Hillcats (Atlanta Braves) as the clubs begin a three-game weekend set.
Potomac sends LHP Robbie Ray (3-2, 2.58) to the mound to gun against Lynchburg RHP A.J. Holland (3-3, 3.47) in the series opener.
The Potomac Nationals Baseball Network will begin streaming with the P-Nats Baseball Lead-Off Show at 6:50pm in preparation for the live play-by-play at 7:05pm. Broadcast coverage of Potomac Nationals Baseball is accessible by heading to www.potomacnationals.com.
The Potomac Nationals of the Carolina League play at Pfitzner Stadium in Woodbridge, Virginia, and are the Class-A Advanced affiliate of the Washington Nationals. P-Nats 2013 season tickets and mini plans are on sale now. Sponsorship opportunities for the '13 season are now available. Plan your corporate outing now in preparation for the summer months as the P-Nats offer discounted group rates and all-inclusive picnic options. Visit the P-Nats online at www.potomacnationals.com or call the ticket office at 703-590-2311 for more!
-- Potomac Nationals --
This story was not subject to the approval of the National Association of Professional Baseball Leagues or its clubs.View More


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|Effective: Summer 2013
|1 Unit(s)
|Advisory: Advisory: This course is included in the Ballet & Conditioning family of activity courses.
|Grade Type: Letter Grade, the student may select Pass/No Pass
|Not Repeatable.
|FHGE: Lifelong Learning Transferable: CSU/UC
|3 hours laboratory. (36 hours total per quarter)
|Student Learning Outcomes -
|Description -
|Introduction to the elementary fundamentals of classical ballet technique and training. Course includes the basic vocabulary and practice of beginning barre and center floor exercises.
|Course Objectives -
|The student will be able to:
|Special Facilities and/or Equipment -
|Dance studio, comfortable exercise clothing and proper ballet shoes.
|Course Content (Body of knowledge) -
|Methods of Evaluation -
|The following evaluation methods may include but are not limited to:
|Representative Text(s) -
|Ryan, Walter J. Technical Manual and Dictionary of Classical Ballet. 2011
|Disciplines -
|Method of Instruction -
|Lecture presentations and classroom discussion using the language of classical ballet technique, Discussion, Cooperative learning exercises, Laboratory, Demonstration.
|Lab Content -
|Lab content may include, but is not limited to the following:
|Types and/or Examples of Required Reading, Writing and Outside of Class Assignments -
|Written critique of a live dance performance, optional writing exercises based on recommended reading.


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Hey there, time traveller!
This article was published 14/3/2014 (1198 days ago), so information in it may no longer be current.
So where did you grow up?
I've lived in Minnedosa since I was 10. I grew up on a farm — I've always been a farmer. I got a job just outside the city working on a farm. And I did that on and off for 10 years or so.
And have you been able to resume that or are you still working?
No. I'm not able to. I can't work or anything.
So this life-altering event for you happened when?
Just this past summer, Aug. 9. We were just on my boat, and I was just on a tube and I told the people I was with I didn't feel good, and the next thing I knew I was in the hospital coming out of a coma.
Gee whiz! How long were you in a coma?
Two days.
And what's wrong with your heart?
The electrical part of my heart kind of beats at whatever beat it wants to beat at. It beats out of control and then it finally just quit.
So your heart just stopped. And you're in the middle of the lake. So you can't tell me first hand but you will have heard from other folks exactly what happened.
We were just sitting by the boat on the tube and I fell off the tube into the water. And they had to pull me up. They started CPR right away. When the ambulance got there, they shocked me and finally got a heartbeat after about 20 minutes.
Twenty minutes! I thought a person suffered brain damage long before that length of time!
You should be dead after 10 minutes. They took me to hospital in Minnedosa and then they took me to Brandon and induced a coma for a couple of days just to keep my body cold and let my heart recover.
Had you known that you always had this problem?
Yeah. They got treated as heart attacks but they weren't heart attacks. It was just the electrical conductivity in my heart was out of whack.
Was what happened last summer the first time that had happened?
No. I'd been hospitalized and treated for this before, since I was about 18 or 19. But this was the first time my heart stopped.
So after you came out of the coma, I presume it was a long road to recovery.
I had the standard angiogram in Winnipeg. I had a couple of those and then they put a defibrillator in me. It's the same as a pacemaker but it does the exact opposite. With the defibrillator, when your heart's beating out of control, it shocks it into a regular rhythm.
I have what I'm told is a fairly common condition called Barlow's Syndrome or mitral valve prolapse, where the valve between my heart's left atrium and the left ventricle doesn't close properly, so the valve can bulge with blood and then the blood can leak back. When that happens, my heart goes nuts — it races and beats irregularly. And every time — EVERY time that happens — I feel like I'm having a heart attack, like I'm about to die. And it's terrifying during those moments. I'm sure you can feel this device in you when it does its thing. Do you get symptoms? Can you feel your heart doing what it's not supposed to do? And are you like me? Scared when it happens?
Since I've gotten the defibrillator in, I haven't been shocked. It's been close a couple of times. But they say that when it does go off, it feels like you're getting kicked in the chest by a horse.
So you really hope that it's there for insurance and you don't need it.
They call it my safety net, which it is. I can't feel it if my heart beats too fast, but it has an internal memory, and I get readouts from it and send them into Winnipeg.
So THEY know it's been close a couple of times.
Has this limited your activity a lot? You can't work now. Are you still allowed to play hockey?
Just a limited dose of it. I don't play the calibre of hockey I used to because I can't have any physical activity — contact, like.
How do you keep trim, though? You must work out a bit…
No. I don't have a license to go anywhere. They took my driver's license. And I was working — hauling oil with a Class One (driver's license). They took that forever. So I'm basically straight out of high school again, at 28.
Is it depressing?
A lot. There are other factors, too. It's not fun.
But you took advantage of the Cardiac Rehab Program, right? What did you do there and what could they do for you?
Half of my problem is doing stuff to work out to get my heart going — that's what I want to do. But I don't do it because I'm scared of what would happen. So what that heart program does is there's a doctor and a cardiac nurse right there just in case. So it's benefited me a lot, because I get peace of mind knowing that if I do overwork it and something does happen, I know that at least there's somebody there. It's not like if I go to the gym in Minnedosa, sometimes there's nobody in there so you're just by yourself.
So do you go to heart rehab once a week?
I did go once a week. But then I bought a heart-rate monitor. And it's a hundred bucks, but for me, it's a hundred bucks well spent, because I can play rec league hockey just for fun and to get some sort of workout. And I wouldn't be able to if I didn't have this monitor. It's just peace of mind to know — I can just look and know what my heart rate's at and know if I should take it easy.
Would you recommend the Cardiac Rehab Program to other folks?
Yeah. For the peace of mind. It's just 95 per cent peace and five per cent for the workout.
Do you still go?
Well, I'd like to, but I live in Minnedosa and it's hard to get to Brandon because I can't drive. It just puts a restriction on things because if I've got to go somewhere, I've got to find an alternate way. It's like I've got a DUI, but I don't.
So how do you get around most of the time?
My girlfriend, Brianna Workman.
And how has she handled all this?
I wouldn't be alive if it wasn't for her. She's the one who did CPR on me on the boat.
So the future for you. What do you see?
Oh, Dennis!
I don't. I think about it all the time. I've got to get there first. My future seems not too bright. It's a mental thing. And it's physical. I've had these problems since I was 18. And twice I was hospitalized before this last one. And they've just been arrhythmia — they're not your typical heart attacks. So they didn't know what was going on. So I just went about life as normal and picked myself off the ground twice before. And now this one. And I don't want to do it all again, because if it — the defibrillator — goes off, I'm back to square one again.
Are you on some sort of long-term disability pension? What happens in circumstances like these?
It's a rough go with the government. My doctors have filled out forms saying I'm not ready to work and the government's telling me that I'm ready to work in their eyes. So I'll just keep on bugging them until they give in, I guess. I don't know. It's frustrating, because you're trying to live your life and you can't work and you go to ask your government, and they're telling you to go to work.
And your doctors are telling you you can't and your life is hanging in the balance. Wow.
I know I can't. I know they don't know what's wrong with me and I don't want to do this all again if they don't know. And it's frustrating because everybody's at a standstill because I'm alive, so they think they're doing the right thing, but I can't live off pills the rest of my life.
So it's still not a firm diagnosis, then? Even with the implant?
No. They don't know. They don't know. And that's the most aggravating, frustrating, draining thing about this whole thing is they don't know what's going on but they're not really taking the necessary steps. They've got their own thing to do and other people to see, but for me, it's just I sit there. I don't work, so I sit at home and think about everything.
And I'm sure thoughts of death cross your mind.
Yeah. It's a lot. I've been asked, 'Do you think of suicide?' But I'm so terrified of dying. I don't want to die. So suicide's out the door. I won't do that.
But the future is the worst part. Not knowing. It's mentally frustrating. It'd be nice to know. And I think not knowing is more hard on me than anything.
Do you have a shortened life expectancy because of this? Or do you just think that's likely?
I just think it's likely. Anybody with heart problems — it's a main part of the body. And when it's not a hundred per cent …
It's just hard to have three heart episodes before you're 30 years old and try to tell everybody you're not addicted to cocaine or haven't done it. If somebody hears that somebody my age is having a heart attack, which I'm not, there's one thing people think all the time.
That you're doing drugs and you brought this on yourself?
Yeah. But I think too much about what other people think. The first time it happened — that my heart acted up — I got asked about four different times by medical people if I did cocaine or any other drugs. It's like if they can't figure it out, they have to pin it on something. And when you're getting told you're doing something when you're not, it's frustrating — and insulting.
I understand your cardiac nurse, Joey Pattle, has been a great advocate for you.
She's been more than a heart nurse. She cares. She goes the extra mile for me. I've called her about everything — nothing to do with heart — and she's just right there. It's good having somebody like that in your back pocket.
Anyone interested in finding out more about the Cardiac Rehabilitation Program at the YMCA can contact cardiac nurses Sandi Atkinson at 204-578-4225 or Joey Pattle at 204-578-4204.


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On Saturday evening my friend Linda and I were coming home from Dayton with our horses. While traveling down Route 210 toward Elderton, something broke loose under our truck and our cable housing was torn in half, we lost our brakes, our fuel line was severed and we found ourselves stranded on a blind bend.
People immediately stopped to help. Some directed traffic, a woman with a horse trailer turned around and hauled our horses home for us and a friend came and got our trailer.
A state trooper from Kittanning came out and set up flares, the Elderton fire and EMS came and assisted until Hammill's Towing arrived to get our truck.
I have been surrounded by so many negative people lately that it truly warmed my heart to know that there are still so many kind and wonderful people out there. I cannot thank you enough for all did for us that day. God bless you and know that you will be rewarded some day.
I try to do a random act of kindness every day, and Saturday I was definitely rewarded for it. Thank you everyone!
Sherry Amsler


text:
Stocks Open Higher
Stocks opened higher Wednesday, after a lower-than-expected reading on a gauge of inflation at the consumer level gave hope for a rebound from Tuesday's plunge.
The Dow Jones industrial average rose 38.87 points, or 0.37%, to 10,650.07. The broader Standard & Poor's 500 index went up 4.45 points, or 0.38%, to 1,188.61. The Nasdaq composite index rose 5.66 points, or 0.28%, to 2,035.98.
Crude oil futures were 36 cents lower Wednesday after Tuesday's upshoot. Oil traded at $51.06 a barrel on the New York Mercantile Exchange.
The U.S. January consumer price index (CPI) rose only 0.1%, after a 0.1% decline in December. Median estimates expected a gain of 0.2%. While this relieves some inflation worries, the economy is still facing inflation pressure that should remain in place for at least the first half of 2005, says Action Economics.
More economic reports are due later in the week. On Thursday, figures on January's durable goods orders are expected to show a 0.1% increase, after a 1.1% rise in December. On Friday, the preliminary reading of fourth-quarter gross domestic product (GDP) is forecast to rise 3.5%, up from the original estimate of 3.1%.
In earnings news Wednesday, Novell (NOVL ) announced first-quarter earnings of 90 cents, vs. 3 cents last year. The computer networking company posted 8.6% higher total revenues, but profits were flat after discounting money made from a legal settlement with Microsoft (MSFT ).
Home-improvement chain Lowe's (LOW ) posted fourth-quarter earnings of 64 cents, vs. 49 cents last year. Lowe's saw 6.9% higher same-store sales, and beat analysts' profit estimates.
Footwear marketer Skechers U.S.A. (SKX ) saw 18% higher total sales in the fourth quarter, posting earnings of 5 cents a share, vs. a 33 cent loss last year.
Up ahead, apparel retailer Gap (GPS ) and entertainment group Viacom (VIA ) will both announce earnings after the close Thursday. Broadcaster Clear Channel Communications (CCU ) on Friday.
Treasury Market
Treasuries prices rose, and yields retreated, after the tame CPI report. The yield on the 10-year note fell to 4.24%.
World Markets
European stock markets finished lower Tuesday after recovering from session lows. In London, the Financial Times-Stock Exchange 100 fell 50.95 points, or 1.01%, to 4,981.90.
Germany's DAX index fell 24.43 points, or 0.57%, to 4,298.78.
In Paris, the CAC 40 index fell 35.78 points, or 0.89%, to 3,966.55.
Asian markets closed lower Wednesday. Japan's Nikkei-225 index fell 97.53 points, or 0.84%, to close at 11,500.18. In Hong Kong, the Hang Seng Index dropped 132.58 points, or 0.94%, to 13,957.94.


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President John Dramani Mahama will address the nation in tomorrow evening. The speech will be his first since he won the presidential elections on December 7.
The president arrived from South Africa where he had been away on a private visit the early hours o this evening.
He was met on arrival by Vice President Paa Kwasi Amissah Arthur and some Ministers of State.
Spokesperson for the president, John Jinapor says the president willuse the speech to give his New Year message to Ghanaians.
Source: Citifmonline
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2014 SRT8 wheels (black Chrome)
Do you know a good place to get a set of these ? Also do you know any company that has replicas of these in black chrome ?
Re: 2014 SRT8 wheels (black Chrome)
no replicas in black chrome.
I know a guy in Ohio who has a set...he's a member here. srt8_hemi. Look in the fs forum and I know he has them on ebay for $3300 with tires
Re: 2014 SRT8 wheels (black Chrome)
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GUERLAIN 'L'Or Pure Radiance' face primer 30ml
Item No.1233828336
Item No.1233828336
Particles of 24 carats pure gold instantly melt into the skin to make your skin radiant. Highly efficient active elements moisturise and smooth your skin. Your complexion becomes luminous to bring the beauty of your face to perfection. For daytime use with or without make up.
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text:
Since 1996, the Marching Hundred has ended Band Camp Week with a Section Competition as part of the "Saturday Night in the House" performance at The Rock (Memorial Stadium). Promoting section spirit and "friendly" section rivalry, the Section Competition quickly became an important and popular Hundred event.
Each season, more and more members of the Hundred bring new and innovative ideas to the Section Competitions. The 1997 Competition, won by the Meltos (mellophones and alto saxes), featured Irish dancing by the winning team, and an appearance of "Skippy the Bush Kangaroo" in the Low Brass feature. The 1998 Competition saw the Low Brass incorporate other Big 10 Styles into their winning routine. The 1999 Competition featured Austin Powers in the lead role for the winning Upper Woodwind section. The 2000 Competition featured Jon Landes as Superman, with the trumpet section "winning it all" at the end of the evening (the other three sections tied for 2nd place). The 2001 Competition turned dark as many of the sections decided to mock the recent success of their rivals!
In 2003, the Competition format changed - the "traditional" pairing of sections (piccolo/clarinet, horn/alto sax, etc.) was changed to pairings done by a random draw. In this way, we can hear sousaphones marching with piccolos, and trumpets and clarinets getting along like peas in a pod
The rules are fairly simple: Each section performs "The Procedure" - a short routine of marching fundamentals - in any way, shape or form. The judges rate each section on performance ability, execution, and innovation.


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Victoria`s Secret So Sexy Nourishing Shampoo for Dry/Damaged Hair10 fl. oz. | Cleanser
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A collection of advanced-formula products for ultra-shiny, ultra-touchable hair. Restores moisture, smooths and adds silkiness. Safe for color-treated hair.
water, sodium C14-16 olefin sulfonate, sodium laureth sulfate, PPG-2 hydroxyethyl coco/isostearamide, fragrance, PEG-7 glyceryl cocoate, glycol stearate, propylene glycol, guar hydroxypropyltrimonium chloride, PEG-150 distearate, diazolidinyl urea, methylparaben, propylparaben, panethnol, isostearyl ethylimidazolinium ethosulfate, disodium EDTA, citric acid, hydrolyzed silk, sunflower seed oil, ivy extract, hibiscus flower extract, rosemary flower extract, peach extract, chamomile extract, avocado extract, retinyl palmitate, tocopheryl acetate, silk amino acids, phytantriol, PEG/PPG-18/18 dimethicone
Ingredient Attributes: moisture, anti-humectant
Ingredient Attributes: moisture, anti-humectant
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