text:
Tuesday Oct 15 03:45 PM
Doris Duke Theatre
About the Film:
Directed by F.W. Murnau and Robert J. Flaherty. USA. 1931. 82 mins.
Filmed on location in Tahiti, Tabu was F. W. Murnau's last film—he died in a car crash a week before the premiere. Perhaps best known for his still-terrifying Nosferatu, the granddaddy of horror films, Murnau teamed up with mining engineer-turned ethnographic documentary filmmaker Robert J. Flaherty (Nanook of the North, Moana) to interpret a traditional legend in this classic silent movie. Using non-professional actors (the opening credits include this note: "Only native-born South Sea islanders appear in this picture with a few half-castes and Chinese"), Murnau and and Flaherty tell the story of Reri and Matahi, two island youths who fall in love. They live a South Pacific idyll until she is chosen to be the Sacred Maiden who acts as an intermediary between the gods and the people. The couple flee to Takapota, which is bustling with commerce, and Matahi becomes a star pearl diver. But they can't escape Reri's fate.
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Just wondering, are there any trails near West Lafayette, IN? Because I don't have a car, it would be better if the trail is within "riding distance" or has a bus to there, from Purdue University. Don't need to be a technical or fast trail (would be a plus if it is), just somewhere I can have fun when I can't find a ride to more aggressive trails. Anyone know such a trail? Big thanks
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German Literature: A Very Short Introduction - Very Short Introductions (Paperback)Nicholas Boyle
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German writers, from Luther and Goethe to Heine, Brecht, and Gunter Grass, have had a profound influence on the modern world. This Very Short Introduction presents an engrossing tour of the course of German literature from the late Middle Ages to the present, focussing especially on the last 250 years. Emphasizing the economic and religious context of many masterpieces of German literature, it highlights how they can be interpreted as responses to social and political changes within an often violent and tragic history. The result is a new and clear perspective which illuminates the power of German literature and the German intellectual tradition, and its impact on the wider cultural world. ABOUT THE SERIES: The Very Short Introductions series from Oxford University Press contains hundreds of titles in almost every subject area. These pocket-sized books are the perfect way to get ahead in a new subject quickly. Our expert authors combine facts, analysis, perspective, new ideas, and enthusiasm to make interesting and challenging topics highly readable.
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This is a replacement stock engine mount for the Mugen MBX5 buggies. If you have a backup engine for your buggy, it is usually a good idea to have it already mounted up and ready to go, in case you have to switch to your backup engine in a hurry during a race.
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March 2015
February 2015
January 2015
You can find September 2013 and forward Staff Advisory Council meeting minutes on DU Portfolio.
You can find August 2013 and prior Staff Advisory Council meeting minutes on Scribd.
March 2015
February 2015
January 2015
December 2014
November 2014
October 2014
September 2014
August 2014
July 2014
June 2014
May 2014
April 2014
March 2014
February 2014
January 2014
Guest: Vice Chancellor Craig Woody took questions from the council while attending the council's Holiday luncheon. Shared services, Balanced Scorecard and the Strategic Issues Panel were a few items covered.
Guests: Todd Rinehart, Admissions and Linda Kosten, Planning Budget and Analysis presented on Undergraduate admissions and tuition and fees.
Guests: Advancement and Athletics and Recreation. DU VIP Cards - $99.00 up to 4 tickets for any ticketed event excluding hockey and lacrosse.
Guest speaker Kelsey Cochrane, Associate Director, Annual Giving, University Advancement, announced the kickoff of the 3rd Annual Faculty/Staff Giving Campaign; the goals, participation and challenge. Amy King, Director of Human Resources, discussed Health Reform, Merit and Flex schedules. Department reports are included. Read more on DU Portfolio.
Guest speaker Chad King, Sustainability Center, discussed several initiatives including goal to reduce carbon footprint. SAC board and committee chair vacancies were discussed. September will begin a new year with Stefanie Cowan as SAC President. Mascot status update given by Marketing and Communications. Read more
Guest speakers Jennifer Superka, Strategic Issues Program; Katie Watt & Janice Kitta, Marketing and Communications, discussed the Strategic Issues Panel on the Future of Higher Education. The 2013 Staff Appreciation Picnic event and years-of-service recognition was discussed. Council members provided departmental updates. Read more
Becky Tankersley, Fisher Early Learning Center, presented a detailed review of the admission lottery. View Fisher Early Learning Center Presentation. Staff Appreciation Picnic event was discussed. Council members provided departmental updates. Read more
Sue Hinkin of Career Services spoke about the Pioneer Career Network. The Career Service Center services students as well as staff. View Career Services Presentation. SAC committee discussed participation in the Egg Hunt and Take Your Child to Work events. Read more
Julie Reeves and Kevin Carroll of Marketing and Communications presented the new branding of the University of Denver. SAC members discussed Fisher Learning Center, its mission and admission lottery. SAC Committee discussed preparations for upcoming events. Read more
United Way and Colorado Shares representatives spoke about donating to causes that are important to us. SAC purchased a book binding in the new Academic Commons. Department and SAC Event committee representatives gave status reports. Read more
SAC committees gave status reports and council members shared departmental reports. Dan DeLaTorre discussed the bookstore advisory council. Read more
SAC committees gave status reports and we talked about follow-up actions to our meeting with administration about the merit situation. Read more.
Craig Woody, Gregg Kvistad, Julia McGahey, Linda Kosten and Amy King discussed the merit communication and reason for the one-time merit increase.
Andrea Howland and Erin Meyer from Penrose Library talked about the Academic Commons project, and the council discussed its response to the merit announcement. Read more
Amy King and Margaret Henry discussed employee fringe benefits and Katie Dunker discussed the new wellness initiative. Read more
University Advancement spoke to Council Members about the 2nd annual Ascend Giving Campaign. Read more
Members of the Presidential Debate Steering Committee gave updates on the Debate planning process. Read more
SAC committees gave status reports, we talked about the bylaws and the benevolent fund. Read more
SAC committees gave status reports, we talked about the bylaws and the benevolent fund. Read more
Provost Gregg Kvistad joined us to talk about the Renew DU initiative and share his thoughts on the University's priorities. Read more
University Chaplain Gary Brower spoke about the various programs offered by his office and attendees shared departmental updates. Read more
The Sustainability Council briefed us on their work, and Amy King from Human Resources shared an update on the retirement plan transition. Read more
Marty Neary from the DU bookstore shared an update on the transition to Follett operations and committees and departments shared updates. Read more
Ty Mills from Campus Safety gave us personal safety tips and share information about the R.A.D program; Kelly Raeburn asked for support of the Daffodil Days fundraiser, and members shared departmental updates. Read more
Guest speakers Amy King from Human Resources and Craig Woody, Vice Chancellor of Business and Financial Affairs, answered questions about a variety of topics, including health care, retirement, and professional development. Read more
We confirmed the committee chairpeople, and discussed SAC's priorities for the upcoming year. Read more
Dan Wesolowski from Athletics updated us on the new VIP card, Amy King from Human Resources presented the results of the Employee Engagement Survey and committee roles and responsibilities were discussed. Read more
University Advancement gave us an update on the Faculty and Staff Campaign, the director of Human Resources updated us on the Engagement Survey, and more. Read more
We discussed changes to the SAC bylaws and heard updates from department representatives. Read more
Find out about changes within DU's Human Resources department, University-observed holidays and much more. Read more
We discussed DU parking issues at this meeting, including the renaming of campus lots, what to do when you forget to bring your parking pass with you and where to park during events. Read more
Read Chancellor Coombe's response to numerous staff-issued questions, including employee recognition, snow days and department restructuring. Read more
Topics of discussion included childcare, the staff morale survey and the annual coat drive. Read more
Learn about DU's Sustainability Council, the Ascend campaign and more. Read more


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Irwin's Mountain Inn
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TravelPod Member ReviewsIrwin's Mountain Inn Banff
Rooms are cozy enough and clean but are certainly small. But we had fun staying. Bathrooms are really tight for those concerned and parking spaces are a bit less so you may struggle to find one. I guess you take on foot as the shops are really close. Walking distance from Safeway for some grocery shopping. Inn offers fridge but no microwave.
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Travel Blogs from Banff
Mountains, Glacial Lakes, and Glaciers
... and got to see more awesome views of the mountains and emerald green water.
Then it was time to head back to the campground where we had a delicious grilled dinner after a very full and rewarding day in the outdoors of the Canadian Rockies.
Tuesday, all of us and the dogs jumped in the Jeep and headed up the Icefields Parkway. For just over 60 miles each way, we saw the most awesome scenery that we have EVER seen. It was ...
Reflection Perfection: Yoho it's Lake Louise
... I don't think we could ever get enough of Lake Louise! And to all following along....truly wished you could all be here. Monday Temperature: 21 Pedometer: 15 334 Bear Sightings = 1 Total Bear Sightings = 9 PS Mindy sent through message that on her downhill bike riding tonight they had come across 6 bears...two mothers with two cubs each! One was in a tree right behind her. Not sure if this is just a trick to get us to do downhill biking when we return to ...
Bow Valley Parkway and Lake Moraine
... Not really good for snaps as too many people and it started to snow!!
On thy back we stopped to photo this rock formation that they call a tower here. So very different to the other rocks we have seen.
Tonight an evening at home. Roast turkey and a few glasses of wine when Sherwood gets back from his quad bike adventure!!
Park Lodge Jasper
Jasper Park Lodge is set around a beautiful lake. Our cabins are unique and very comfortable. Squirrels running around everywhere, even run over our feet as we have a cup of tea on our verandah, so cute. Our dinner I served overlooking the lake. A storm is brewing in the ...
The "Bones" of the Canadian Rockies
... as we were taking on water and said that they are here in the park also with the exact model of Born Free that we have! We saw their unit as we continued into the campground so that made it officially number 4!
By the way, we drove the magnificent total of 85 miles today.
After taking on the water (only electric hookups here in the National Park) we got settled on our site pretty quickly. There is a very well organized tram system set up ...


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Reviews - Dolphin House Serviced Apartments4
Dolphin Square Chichester Street, London, SW1V 3LX
Price FromView Rooms
Customer Reviews
Our reviews are from genuine LateRooms.com customers. We verify that the customer has stayed before leaving a review.
Very Good
89% would recommend it to a friend
Customer service
Food quality
Room quality
Helpful staff and quick resolution to problem
When we found out our room wasn't as expected (ie a twin room, with a decent kitchen), we mentioned it to the staff on our way out to the cricket.
Upon our return, all our luggage had been moved into the new room, including food in the fridge, and the new room was much more like we were expecting. Staff very friendly and helpful, and a visit to the on site spa is a must!
Read More Less
The staff were extremely nice, polite and helpful.
My only criticism would be the cooked breakfast in the morning- it was very poor quality and I definitely wouldn't pay £15 for that again. Everything else was great.
Read More Less
Excellent Stay!
Dolphin House is lovely, the staff were very helpful and kept our luggage safe both days while we were out sight seeing.
The location of the Hotel is ideal, it is right in the centre of London on the Victoria Line which made it very easy to get about on the tube. It is only a 5min max walk from Pimlico station. The Hotel it's self is lovely, we had lots of room in our apartment-bedroom, bathroom and a full kitchen, much more than you would get in a standard hotel. The decoration is modern and sophisticated. We had lunch in the 'Grill' near the pool which was very reasonably priced for London and yummy. There are pretty gardens in the middle of the Square which are nice to sit in and even an arcade of shops. Our only qualm was that we had a double bed instead of twins, so perhaps once you have booked a room it is worth ringing to specify this. We would definitely come back here again.
Read More Less
Customer service pants!! Book treatments in advance for spa or you will be disappointed
Customer service at this hotel leaves a lot to be desired.
Staff are unhelpful, unwelcoming and many struggled to understand English to was frustrating trying to get our views across. Room was nice and clean and well equipped but we specifically asked for a room with a view and our view was ladders and the roof of the spa which is far from pretty!. Asked at desk if they could call us a can and was huffed and puffed at so we told them to forget it and flagged one down ourselves. Spa was fully booked so no treatments were available
Read More Less
Excellent accommodation and good value on a Sunday night
Great location.
Good size rooms and very comfortable beds
Read More Less
Great hotel, excellent location.
Would definitely return
Read More Less
Excellent and interesting oasis
Dolphin square has beautiful gardens and it's own charming private shopping arcade, spa and lovely pool all included.
Food is charged separately but they have their own excellent restaurant, if a bit pricey. It seems one section of the art deco building are for guests, the rest residential. It is peaceful and the service is excellent.
Read More Less
Best Value Accommodation
This accommodation was so good that I must leave a review.
My sister and I met in London and staying in a convenient, comfortable, clean room made our stay perfect.
There was an excellent separate living room, a bedroom with everying you need and really comfortable beds. The bathroom was huge. We were surprised that the swimming pool was also included in the price. Bring you swimmers.
Definitely recommend these Serviced Apartments. Well done .
Read More Less
Great location, easy access into London.


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Bad Ideas
Bad Ideas, Law Schools, William and Mary School of Law
How Much Would You Pay To Go To 'Law Camp'?
Law camp: the ultimate in short-term thinking by law schools and silliness by mid-career professionals…
Pulling 'The Hangover' In Real Life Will Get You Arrested, Sued
In real life, the tiger in the Vegas hotel room eats you and you die.
Inventors Will Lead the Legal Future not Licensees
David McCullough's The Wright Brothers serves as an ideal case study on the requirements to innovate; a desire to learn, perseverance, and work ethic. I read it in route to a wonderful opportunity to serve as visiting lecturer for Professor and Parsons Behle & Latimer attorney Randy Dryer's innovative Technology and Modern Litigation course at […]
Bad Ideas, In-House Counsel, United Kingdom / Great Britain
Inside Straight: No Such Thing As A Free Lunch
People are idiots, as in-house columnist Mark Herrmann explains.
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Social Media Darlings at Amy's Baking Company Fear Lawsuit
From the social media meltdown of the century to the best threatened lawsuit yet.
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Lawyer Claims His 'Slut-Shaming' Is Protected By the First Amendment — Just Like the Founders Intended
Hell hath no fury like a patent practitioner romantically scorned.
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If You Don't Want to Be a Lawyer, Don't Go to Law School
Half of pre-law students don't even want to be real lawyers. Why are they going to law school?!
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3D Printers Don't Kill People, Guns Made With 3D Printers Kill People.
A law student tries to ruin 3D printing for everyone by turning it into a loophole to evade gun laws. Because… freedom!
Bad Ideas, Drinking, Law Schools, Parties
Later, When Students Have Sex On Or With A Duck Boat, The Law School Will Regret Rationing Water
Shouldn't water always be free if we care about student intoxication?
General Counsel, In-House Counsel, Legal Ethics, Screw-Ups
In-house columnist Mark Herrmann shares a few examples of how NOT to protect client confidences.
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A growing number of attorneys are turning to a set of project management and process improvement techniques commonly known as "Agile."
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Space Coast School of Law is as silly as it sounds…
Bad Ideas, Football, Law Schools, Quote of the Day, Sports
Quote of the Day: Dreaming of a Third-String Law School?
Perhaps this football player's spot in the line-up is indicative of his future law school's ranking.
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* U.S. Attorneys are rising up, taking office, and conducting their business like hard-ass prosecutors. [Wall Street Journal]
* If only they had more guns at the police station, this might never have happened. [Fox News]
* Of course, out in Arizona, the state attorney general is pushing for an "armed posse" to patrol schools. Arizona: where bad ideas go to be fruitful and multiply. [NBC News]
* Would you give your kidney to your favorite law professor? I wouldn't, but I would consider taking the kidney of my least favorite law professor and giving it to, well, pretty much anybody else. [Wake Forest School of Law]
* "Aereokiller" has been ordered to stop killing TV networks. [Film On]
* Wait, we still have "longshoremen"? For real, not just as the backdrop for a season of the Wire? [Miami Herald]
* Should law deans be "disbarred"? I like how people have to spend all this time just trying to figure out how to get law deans to tell the truth. [Tax Prof Blog]
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Lawyer of the Day: Sorry Judge, But I'm Unavailable Due to the Mayan Apocalypse
It's the end of the world as we know it, so I'm not coming to court, judge!
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Quote of the Day: Well, This Gives a Whole New Meaning to the Phrase 'Oral Argument'
You wanted to call your lollipop what? That sounds so dirty!
Advice for the Lawlame, Bad Ideas, Law Professors, Law Schools, Libraries / Librarians, Parties
Law Profs Have Holiday Party In The Reading Room During Exam Period
Hmm… what's the worst place at a law school to hold a holiday party?
Abortion, Attorney Misconduct, Bad Ideas, Divorce Train Wrecks, Judge of the Day, Pregnancy / Paternity, Rank Stupidity, Sex, Sex Scandals, State Judges, State Judges Are Clowns
Judge of the Day: A State Judge's Alleged Affair and Baby Mama Drama Exposed — Via Incriminating Texts
The Michigan judge who sent half-naked pictures of himself to a bailiff via text is now back in the news with some more scandalous (and sexy) allegations.
Attorney Misconduct, Bad Ideas, Judge of the Day, Legal Ethics, Pornography, State Judges, State Judges Are Clowns
A Former Judge of the Day Admits He's Been 'Addicted to Porn' Since Childhood
A state judge in Illinois admits that he's addicted to porn, but will that save his career?
Attorney Misconduct, Bad Ideas, Biglaw, Contracts, Law Schools, Legal Ethics, Money, Morning Docket, Music, Patents, Pornography, Real Estate, Shakira, State Judges, State Judges Are Clowns, Technology
* When it comes to the art of law firm valuation, you may be surprised when you find out which Biglaw firm is worth the most. Here are a few hints: it's not Baker & McKenzie, and it's not DLA Piper or Skadden, either. [American Lawyer]
* Remember back in July when this Judge of the Day was busying clicking on hardcore porn sites while in chambers? As it turns out, now he's busy crying in court while battling to keep his judicial career intact. [Chicago Sun-Times]
* Evening students are capable of doing more than ruining your class rank. Jacob Lew, once a night student at Georgetown Law, is now the White House chief of staff assisting with fiscal cliff negotiations. [New York Times]
* For now, the only thing that's keeping Florida from gaining another law school is a lack of square footage in the real estate rodeo. But that's probably a good thing, because adding a twelfth law school would be more than a little ridiculous. [Daytona Beach News-Journal]
* Samsung's trying to get out of paying $1.05B to Apple, and their lawyers are trying to pin knowledge of the jury foreman's misrepresentations on their technological nemesis to get the verdict thrown out. [Bloomberg]
* Shakira's hips don't lie, but her contracts allegedly do. The sexy singer's ex-business partner (who's also her ex-boyfriend) is suing her for $100M to "recover his share of past and future partnership profits." [Billboard]


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Before studying abroad, Jennifer would live vicariously through National Geographic photos and online travel blogs. This book aims to do just that - bringing the destination to the audience, while documenting Jennifer's adventures around Europe. Her advice to those with limited international experience: The world is your oyster, so take advantage of every opportunity you get to explore and discover!
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A YEAR ABROAD IN LANDSCAPES AND CITYSCAPES Published April 28, 2015
OBRIZOK FAMILY MOMENTS Published April 28, 2015


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Classically cut and fabulously fluid, Gucci's metallic bronze stretch silk-satin shirt epitomizes the timeless allure of the Italian fashion house. Team it with taupe pants and an olive jacket to add a luxe molten touch to an understated look.
Gucci shirt: metallic bronze stretch silk-satin, long sleeves, button-fastening cuffs, seam detail. Button fastenings through front. 96% silk, 4% elastane. Dry clean. Designer color: Khaki.
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Frankfort—While Puma still expects an increase in full-year net income compared to 2012, the athletic footwear maker today posted a drop in sales and product in its second quarter earnings report.
Puma, which is 83% controlled by Kering, remains a distant No. 3 behind Nike and Adidas especially in athetlicwear sales. Its second quarter profit before interest and taxes fell to 31 million euros (about $40.9 million) from 47 million euros a year ago. The results also missed analysts' average estimate for 36.1 million euros.
"Southern Europe and the Far East remain challenging," Puma said. Revenue fell 4% to 692 million euros on a currency adjusted basis, missing the 709 million-euro average analysts estimated.
Those misses sent shares of the company down in trading earlier today and brought renewed hope that the new CEO Bjorn Gulden, a former Adidas executive and professional athlete, could bring back credibility to Puma as a sports brand rather than just a fashion brand.
Gross Margin Pressure
"I think we have the worst behind us, but if we look at the economic environment and what we're getting from the markets, then we see that the second half will be quite challenging," Michael Laemmermann, chief financial officer, said.
Besides cutting jobs and product ranges in footwear, Puma has closed stores and hopes to improve its performance-wear offerings.
Poor sales in France, Italy and China, and Japan—its second largest market with about 10% of total sales—and increased discounts narrowed Puma's gross margin to 46% from 49.1%.
Sales in Asia-Pacific declined by 7.2%. Laemmermann said China remained tough, with an excess of stock on the market.
Footwear sales, which account for nearly 50% of total revenue, fell 7.3% in the quarter as the group had to discount its products more than last year to get them off the shelves. Puma's footwear sales fell by 7.8% in the first quarter (Adidas increased its by 3 %.)
Puma had cut its fiscal full year forecast in May and reiterated it today: a low-to-mid single-digit decline in currency-adjusted sales as well as gross profit margin pressure during the second half. Total sales are expected to be up between 1% to 5%.
For commercial purposes, extract supplements can be obtained from the fruit of the pericarp. Garcinia cambogia reviews is performed by a physician Chen and Oz to prove that it is an herb for weight loss, a lot of research has been done. Studies, Garcinia cambogia extract supplementation decreases the weight of the body fat accumulation, was shown to have a positive effect on prevention. We are important substances such as cholesterol (LDL), reduces the serum leptin and triglycerides. In addition, it will increase the level of serotonin and cholesterol (HDL). The study also, Garcinia cambogia extract supplements, has proven that there are no significant adverse effects on many of the eight weeks, such as its use.


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Censor Board
137 Censor Board Articles
Censor Board clears John Abraham – Anil Kapoor's Welcome Back with U/A certificate; demands 15 cuts1 month ago 0
The family comedy is slated to hit screens on September 4 Anees Bazmee's upcoming romcom, Welcome Back, which stars John Abraham, Shruti Haasan… Read Article ▶
Abhishek Bachchan's All Is Well cleared by the Censor Board without any cuts2 months ago 0
That sure is some good news for the makers All is well for Abhishek Bachchan - Asin - Rashi Kapoor starrer, All Is Well, as far as the Censor Board… Read Article ▶
Censor Board goes lenient on Paoli Dam's Yaara Silli Silli!2 months ago 0
Guess the script demanded it... Is the Central Board for Film Certification (CBFC) going liberal already? After ensuring there would be no rollback… Read Article ▶
Sunny Leone excited about Mastizaade's clearance; rubs her victory in the face of haters!2 months ago 0
The actor is super excited about her film getting cleared by the CBFC Sunny Leone's upcoming adult comedy, Mastizaade was stuck amidst a lot of… Read Article ▶
Sunny Leone's Mastizaade cleared with an 'A' certificate2 months ago 0
After a long battle with the Board, the news might have come as a big relief to the makers and the actors Milap Zaveri's upcoming sex comedy… Read Article ▶
Shocking: Akshay Kumar, Sidharth Malhotra allowed by Censor Board to say BASTARDS in Brothers2 months ago 0
CBFC Chief Pahlaj Nihalani had set out a list of cuss words a few months back, which couldn't be used onscreen. Then how come did Karan Malhotra's… Read Article ▶
Muslim representatives hired by Censor Board to clear Salman Khan's Bajrangi Bhaijaan!3 months ago 0
The CBFC cleared the film after demanding five cuts Salman Khan and Kareena Kapoor Khan are all set to take the nation by a storm with their… Read Article ▶
Madhur Bhandarkar's Calendar Girls' song not suitable for TV?3 months ago 0
Known for making controversial films, Bhandarkar again faces the wrath of the Censor board Renowned filmmaker Madhur Bhandarkar, who has made… Read Article ▶
Excess sexual content in Sunny Leone's Mastizaade might affect the film's release!4 months ago 0
The Milap Zaveri directorial is facing a tough time getting clearance from the Censor Board Sunny Leone's upcoming adult comedy, Mastizaade, is… Read Article ▶
CBFC's new rule: Films will not be cleared on the basis of rush-prints!5 months ago 0
Producers hoping to speed the process of censoring by submitting rush-prints of their films to the CBFC board will now have to change their tactics… Read Article ▶
Anurag Kashyap and Vidhu Vinod Chopra win the battle against Censors over the anti-smoking warning5 months ago 0
Filmmakers are not supposed to put the anti-smoking warning in films anymore but the onus is on theatre-owners and exhibitors now, says Censor… Read Article ▶
Yogen Shah
Sunny Leone v/s Censor Board – Makers fight against 'A' certification!5 months ago 0
They are convinced the film doesn't deserve an A and will fight for it.... Sunny Leone's films are nothing if not sensuous. The fact that she is… Read Article ▶
Sunny Leone's family entertainer Kuch Kuch Locha Hai gets an 'A' certificate from Censor Board!5 months ago 0
The pornstar-turned-Bollywood heroine must be truly disappointed with this news, after all everybody knows how much the Ek Paheli Leela actress has… Read Article ▶
Here's what Kamal Haasan had to say to protesters demanding ban on Uttama Villain!6 months ago 0
The actor's films have always been targeted by fringe religious groups and this time around it was Vishwa Hindu Parishad which created a ruckus… Read Article ▶
Censor Board chief Pahlaj Nihalani calls for change in animal welfare rules!6 months ago 1
According to Mr Nihalani, the stringent rules of animal welfare are keeping producers away from using animals in films Draconian rules and laws… Read Article ▶


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|Publication number
|Publication type
|Application number
|Publication date
|Oct 12, 2004
|Filing date
|Jul 1, 2003
|Priority date
|May 25, 1999
|Fee status
|Also published as
|Publication number
|Lee Veneklasen, David L. Adler
|Original Assignee
|Kla-Tencor Technologies Corporation
|Export Citation
|BiBTeX, EndNote, RefMan
|Patent Citations (23), Non-Patent Citations (2), Referenced by (10), Classifications (17), Legal Events (4)
|External Links: USPTO, USPTO Assignment, Espacenet
This application claims priority and is a continuation of U.S. patent application, having application Ser. No. 09/579,867 filed May 25, 2000, now U.S. Pat. No. 6,586,733, by Veneklasen et al., which claims priority of (1) U.S. patent provisional application, having Application No. 60/135,742 filed May 25, 1999 by Veneklasen et al., (2) U.S. provisional application, having Application No. 60/204,248 filed May 15, 2000 by Veneklasen et al., and (3) U.S. patent application, having application Ser. No. 09/354,948 filed Jul. 16, 1999 entitled "Apparatus and Method for Secondary Electron Emission Microscope" by Adler, et al. These four applications are incorporated herein by reference in their entirety for all purposes.
The present invention relates generally to an apparatus and a method for using electron beams to microscopically inspect the surface of an object, and more particularly to inspect layers in a semiconductor device.
A variety of methods have been used to examine microscopic surface structures of semiconductors. These have important applications in the field of semiconductor chip fabrication, where microscopic defects at a surface layer make the difference between a functioning and a nonfunctioning chip. For example, holes or vias in an intermediate insulating layer often provide a physical conduit for an electrical connection between two outer conducting layers. If one of these holes or vias is inadequately etched or becomes clogged with foreign material, it will be impossible to establish this electrical connection and the whole chip may fail. Examination of the microscopic defects in the surface of the semiconductor layers is necessary to ensure proper functioning of the chips.
Electron beams have several advantages over other mechanisms to examine samples. Light beams have an inherent resolution limitation of about 100 nm-200nm, but electron beams can investigate feature sizes as small as a few nanometers. Electron beams are manipulated fairly easily with electrostatic and electromagnetic elements, and are certainly easier to produce and manipulate than x-rays.
Electron beams in semiconductor defect inspection do not produce as many false positives (elements inaccurately identified as defective) as optical beams. Optical beams are sensitive to problems of color noise and grain structures whereas electron beams are not. Oxide trenches and polysilicon lines are especially prone to false positives with optical beams due to grain structure.
A variety of approaches involving electron beams have been utilized for examining surface structure. In low-voltage scanning electron microscopy (SEM), a narrow beam of primary electrons is raster-scanned across the surface to emit secondary electrons. If the primary electrons in the beam of scanning electron microscopy are near a particular known electron energy (called E2), there is a minimal corresponding charge build-up problem associated with SEM, and the surface of the sample remains relatively neutral. However, raster scanning a surface with scanning electron microscopy is slow because each pixel on the surface is collected sequentially. Moreover, a complex and expensive electron beam steering system is needed to control the beam pattern.
Another approach is called Photo-Electron Emission Microscopy (PEM or PEEM), in the which photons are directed at the surface of the sample to be studied, and by the photoelectric effect, electrons are emitted from the surface. On an insulating surface, the emission of these electrons, however, produces a net positive charge on the sample surface since there is a net flux of electrons from the surface. The sample continues to charge positively until there are no more emitted electrons, or electrical breakdown occurs. This charge build-up is especially problematic when imaging insulator materials.
Another method of examining surfaces with electron beams is know as Low Energy Electron Microscopy (LEEM), in which a relatively wide beam of low-energy electrons is directed to be incident upon the surface of the sample, and electrons reflected from the sample are detected. However, LEEM suffers from a similar charge build-up problem since electrons are directed at the sample surface, but not all of the electrons are energetic enough to leave the surface, which repels further electrons from striking the sample, resulting in distortions and shadowing of the surface.
Several prior art publications have discussed a variety of approaches using electron beams in microscopy, but none have determined how to do so with parallel imaging, while at the same time reducing or eliminating the charge build-up problem. One of these approaches is described by Lee H. Veneklasen in "The Continuing Development of Low-Energy Electron Microscopy for Characterizing Surfaces," Review of Scientific Instruments, 63(12), December 1992, Pages 5513 to 5532. Vaneklasen notes generally that the LEEM electron potential difference between the source and sample can be adjusted between zero and a few keV, but he does not recognize the charging problem or propose a solution to it.
Thus, there remains a need for methods and apparatus that utilize electron beams to investigate sample surfaces, while minimizing charge build-up problems and increasing the speed of examining sample surfaces.
Accordingly, the present invention addresses the above problems by providing apparatus and methods for parallel imaging. In general terms, a first beam is used to generate an image of a relatively wide area of a sample. Parallel imaging is accomplished by using a relatively wide beam. A second beam having a lower landing energy than the first beam may be used in order to reduce positive charge build up on the sample that may result from the first beam.
In one embodiment, an apparatus for inspecting a sample is disclosed. The apparatus includes at least a first electron beam generator arranged to direct a first electron beam having a first range of energy levels toward a first area of the sample and a second electron beam generator arranged to direct a second electron beam having a second range of energy levels toward a second area of the sample. The second area of the sample at least partly overlaps with the first area, and the second range of energy levels are different from the first range such that charge build up caused by the first electron beam is controlled. The apparatus further includes a detector arranged to detect secondary electrons originating from the sample as a result of the first and second electron beam interacting with the sample. In a preferred embodiment, the first electron beam has a width appropriate for parallel multi-pixel imaging, and the first and second electron beam generator are arranged to concurrently produce the first and second beams.
In another embodiment, a method for controlling charging of a surface while exposing the surface to a beam of charged particles is disclosed. The surface is exposed to a first set of electrons in a first beam with the first set of electrons having energies within a first range. The surface is exposed to a second set of electrons in a beam with the second set of electrons having energies within a second range, different from the first range, wherein the second range of energies is predetermined to provide electrons from the second set which land on the surface to reduce positive charge present on the surface. In a preferred embodiment, the surface is concurrently exposed to said first set of electrons and said second set of electrons.
The present invention has several advantages. For example, the apparatus and methods allow imaging of a large number of pixels in parallel on a detector array, and thereby has the properties of being faster and lower in noise than conventional Scanning Electron Microscopes and methods. Additionally, electron beam scanning systems are not required, and the electron beam current densities are not as high so that the probability of damaging sensitive samples is lessened.
These and other features and advantages of the present invention will be presented in more detail in the following specification of the invention and the accompanying Figures which illustrate by way of example the principles of the invention.
The present invention will be readily understood by the following detailed description in conjunction with the accompanying drawings, wherein like reference numerals designate like structural elements, and in which:
FIG. 1 shows the basic configuration for the Secondary Electron Emission Microscopy (SEEM) apparatus having dual beams in accordance with one embodiment of the present invention.
FIG. 2 is a graph of the relationship between the charge balance yield ratio and the primary electron energy in a system having a single beam.
FIG. 3 is a chart comparing the SEEM technique of the invention to prior art electron beam inspection techniques.
FIG. 4 illustrates an imaging method of SEM.
FIG. 5 illustrates an imaging method of SEEM for comparison with FIG. 4.
FIG. 6(a) shows how the electron beam of SEEM detects a defect (an obstruction) in a via of an insulating layer.
FIG. 6(b) shows how the electron beam of SEEM inspects metal lines connecting vias.
Reference will now be made in detail to the specific embodiments of the invention. Examples of the these specific embodiments are illustrated in the accompanying drawings. While the invention will be described in conjunction with these specific embodiments, it will be understood that it is not intended to limit the invention to the described embodiments. On the contrary, it is intended to cover alternatives, modifications, and equivalents as may be included within the spirit and scope of the invention as defined by the appended claims. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be practiced without some or all of these specific details. In other instances, well known process operations have not been described in detail in order not to unnecessarily obscure the present invention.
FIG. 1 shows the basic configuration for the Secondary Electron Emission Microscopy (SEEM) apparatus 100 having dual beams in accordance with one embodiment of the present invention. The SEEM 100 includes two electron gun sources 10 and 8 that each emits a beam of primary electrons e1 along paths 12 and 7, respectively.
The electron beams are each collimated by electron lens 13 and continue along paths 12 and 7. Magnetic beam separator 14 then bends the collimated electron beams so that they are incident along electron optical axis OA normal to the surface of a sample 9 to be inspected. In other words, the two beams may be directed to strike a same general area of the sample at about the same time.
The landing energy of one of the beams is selected to balance charge on the surface of the sample. In one embodiment, one of the beams has a landing energy on the order of 1 keV. Although the landing energy of the first beam may be selected to result in a neutrally charged sample, in certain types of materials (e.g., insulators) the first beam results in a net positive charge build up on the surface of the sample. That is, electrons are lost from the sample due to a strong electric field that is produced at the surface by the higher energy beam. Thus, a second beam having a lower landing energy is used in conjunction with the first higher energy beam to reduce any positive charge build up on the sample resulting from the higher energy beam. The lower energy beam preferably has an energy of approximately zero eV.
In theory, the landing energy of the second beam is selected to lock the surface voltage of the sample into a predetermined voltage value. When a lower voltage beam is used, the surface of the sample seems to be electrically connected by a wire to an electrode (i.e., the source of the electrons of the second lower beam). This voltage locking mechanism provides a way to automatically lock in the surface such that the surface does not charge even for a relatively broad range of substrate materials.
In one embodiment, the lower energy beam has a landing energy of about 0 eV, which value facilitates reduction of positive charge build up resulting from the higher energy beam. In theory, the electrons within the lower energy are insufficiently energetic to cause the emission of secondary or backscattered electrons. These lower energy electrons compensate for any surface charging that might otherwise have been produced by the higher energy beam. The lower energy electrons will land on the surface if the surface becomes positively charged, and will eliminate this positive charge. If the surface is not sufficiently positively charged, these electrons will not land.
Objective electron lens 15 focuses the primary electrons, e1 into two overlapping beams. Preferably, the lower energy beam has a same or larger spot size than the higher energy beam. That is, the lower energy beam falls on a spot that is equal to or encompasses the spot of the higher energy beam. Thus, the lower energy beam may facilitate reducing the positive charge build up that is present within the entire spot area of the higher energy beam. A larger spot size for the lower energy beam may be required to compensate for misaligments within the beam focusing system.
The size of the electron beam spots on the sample 9 from the two beams are preferably in the range of 0.1 to 100 millimeters, and more preferably are about one to two millimeters. The size of this beam at the sample and imaging planes is optionally variable with a zoom imaging system to control the resolution and rate of acquiring the image. In any event, if it is desired to eliminate edge effects, the beam widths should be larger than, and preferably at least twice the characteristic dimension of, the detector at the image plane.
Primary electrons e1 incident on the sample 9 produce electrons e2 (which could be secondary, backscattered or mirrored) which travel back along the axis OA perpendicular to the inspection surface to objective electron lens 15, where they are recollimated. Magnetic beam separator 14 bends the electrons e2 to travel along image path 16. The electron beam along image path 16 is focused by projection electron lens 19 onto an imaging plane of detector 20.
The detector 20 may be in any suitable form for detecting the secondary electrons. For example, the detector 20 may include an electron imager (e.g., as shown, a YAG screen 20 a) for converting the electron beam into a light beam. The light beam may then be detected by a camera or preferably a time delay integrating (TDI) optical or electron detector 20 b. The operation of a TDI optical detector is disclosed in U.S. Pat. No. 4,877,326 to Chadwick et al, which is incorporated herein by reference. Alternatively, the image information may be processed directly from a 'back thinned' TDI electron detector without using an electron imager or YAG screen. Signals collected from the TDI detector can be processed and compared with other data to inspect the substrate and to identify and/or classify possible defects and other features thereon. Such processing and comparison could be performed in a die to die mode, in which nominally identical portions of selected semiconductor die are compared to one another, and differences therein may represent defects. Such processing and comparison could instead or additionally be performed in an array mode, in which nominally identical portions of a repeating array present on a single semiconductor die are compared to one another, and differences may again represent defects. Or such processing and comparison could be performed in a die to database mode, in which data (e.g, images) from the inspected portion of the substrate is compared to corresponding data derived from a reference database. The reference database may be derived from or identical to the database used to create the images present on the inspected portion of the substrate. Alternatively, the reference database could be derived from other rules corresponding to the expected images of the structures, such as arrays or other repeating structures or test structures which may have a partially repeating or predictably changing design.
FIG. 2 is a graph showing the charge ratio versus primary electron energy characteristic of single incident electron beam inspection techniques such as LEEM, SEM and SEEM. Yield ratio η is defined as the number of electrons emitted by the surface, e2, divided by the number of electrons incident on the surface, e1. Yield ratio η thus defines the amount of charge build-up on the surface being inspected since there will be a net charge build-up wherever η does not equal unity. A yield ratio of greater than one implies that more electrons are being emitted than are incident, resulting in a net positive charge at the surface, and conversely a yield ratio of less than one indicates that more electrons are incident on the surface than are being emitted, resulting in a negative charge build-up.
Yield curve C indicates the experimentally-derived mathematical function that defines the yield ratio at various incident election energies, E, for a typical sample substance. As shown FIG. 2, line L is the line of charge balance, η=1, and there are only three points on yield curve C where charge balance is achieved, i.e. e2/e1=1. These three points are E0=0, E1, and E2. (Energy E0=0 is uninteresting for present purposes since it represents a situation where no electrons are incident on the sample.) In the region I between line L and yield curve C, there is an excess of negative charge since e2 is greater than e1. In region II, between line L and yield curve C, there is an excess of positive charge since e1 is greater than e2, i.e. more secondary electrons are emitted than primary electrons are incident. In region III, between line L and curve C, the charge build-up again becomes negative.
One can see from FIG. 2 that on yield curve C there are only two significant points, E1 and E2, where there is likely to exist a charge balance. The problem is that only point E2 is actually stable. That is, if the energy, E, of the primary electrons incident on the sample surface varies in either direction from E1 by small amount, say ΔE1, the charge balance is quickly lost. Charge balance η becomes increasingly negative or increasingly positive depending upon whether E1 was approached from the +ΔE2 or −ΔE2 tends to return the beam energy to point E2. The value to of E1 or E2 have been experimentally determined from a variety of substances, such s silicon dioxide, aluminum, and polysilicon. While each substance has its own characteristic yield curve C, the general shape of these yield curves is as shown.
FIG. 2 illustrates graphically the problem with past techniques of electron beam inspection, and shows why the SEEM technique described in the parent application provides unexpected advantages. Low Energy Electron Microscopy (LEEM) generally operated below E1, with electron energies of 100 eV or less. Since point E1 is unstable, LEEM suffered from the problem of charge build-up. Scanning Electron Microscopy (SEM) operated just below E2 is stable, there was no problem with charge build-up in SEM, but SEM is slow precisely because it requires scanning. Prior to the present invention, it is believed that none had thought to drive the relatively wide beam of the LEEM parallel imaging system at a relatively high energy (e.g., E2), as is recognized by the SEEM technique of the invention. The SEEM technique of the present invention is therefore the first recognition of the advantages of combining the parallel imaging of LEEM with the charge balance of SEM.
Although in theory, one may operate a relatively wide beam at E2, it may be difficult to maintain the wide beam at a stable landing energy (e.g., E2) without charge build-up occurring on the sample. Since the E2 value depends on material composition, the E2 value will necessarily vary as the beam moves across the sample and over various structures having different material compositions. Thus, even though the SEEM apparatus may be initially configured to operate at E2 for an initial beam position on a first material of the sample, the landing energy will move away from E2 as the beam moves across a different material on the sample. Accordingly, the present invention provides a second beam at a lower landing energy to compensate for any charge build up that may occur.
Advantageously, the first beam does not even have to operate at E2 in order to minimize charge build up since the second beam compensates for positive charge build up. Preferably, the high-energy beam operates between E1 and E2, and more preferably operates at the yield peak between E1 and E2. A local charge equilibrium may be automatically established by the appropriate selection of energy and flux of the beams such that the potential of the surface is locked within a selected range. The high-energy beam energy may be selected to have a positive-charging effect on the sample surface (e.g., yield is greater than 1). Thus, the high-energy beam causes more secondary and backscattered electrons to be ejected from the surface than are absorbed from the incident high-energy beam. For example, a landing energy in the range of about 100 eV to about 2000 eV may be used for most materials. The low-energy beam energy is selected so that the beam is attracted to a positively charged sample surface and neutralizes such positive charge. A low-energy beam with a current density that is at least twice that of the high-energy beam seems to work well to maintain voltage equilibrium on the sample surface, and is therefore preferred. Several embodiments for configuring and utilizing a high-energy beam in conjunction with a low-energy beam are described further in the above referenced U.S. provisional application filed on May 15, 2000, which application is incorporated herein in its entirety.
It is important to note that for purposes of the above description the primary electron energy is to be measured at the surface of the sample. The energy of the electrons focused by objective electron lens 15 is generally different than the energy of the electrons at the sample, called the landing energy, and this landing energy is often not easy to predict. The landing energy may depend on factors such as the current density of the beam, the material of the sample and the electric field at the surface.
FIG. 3 is a chart summarizing the differences between, and advantages of, the four PEEM, LEEM, SEM and SEEM techniques. PEEM uses photons instead of primary electrons to produce emitted secondary electrons. PEEM suffers from the problem of positive charge build-up on insulating sample target materials because secondary electrons are being knocked off the sample surface by the photons, but no negatively charged particles replace these secondary electrons. The inspecting photon beam of PEEM can be wide, and parallel imaging can be achieved.
In Low Energy Electron Microscopy (LEEM), a wide beam of primary electrons is projected at the inspection surface, and parallel imaging can be achieved. These primary electrons are relatively low in energy, and the imaging method involves reflecting these low-energy electrons from the surface. Because only low energy electrons are incident, primary electrons are reflected but few secondary electrons are emitted. Also, the low energy implies a negative charge build-up because these electrons are not sufficiently energetic to escape the sample surface.
In Scanning Electron Microscopy (SEM), relatively slow raster scanning imaging must be utilized because the electron beam is focused to a narrow spot size. SEM, however, produces energetic primary source electrons incident at energy E2, which is a stable point on the yield curve, so that charge-neutral operation is attained. Energetic primary electrons produce secondary electrons in SEM.
In the Secondary Electron Emission Microscopy (SEEM) technique of the present invention, a beam of energetic primary electrons is directed at the sample surface with an energy Because a relatively wide beam of primary electrons is introduced, parallel imaging becomes possible, which is significantly faster than SEM imaging. Moreover, these primary electrons can be incident with an energy E2 and/or can be accompanied by electrons of significantly lower energy such that the sample remains charge neutral. SEEM thus combines the most favorable attributes of LEEM and SEM.
FIGS. 4 and 5 comparatively illustrate the respective imaging methods of Scanning Electron Microscopy and Secondary Electron Emission Microscopy. In FIG. 4, a Scanning Electron Microscope produces a beam 41 of electrons and directs them at the surface of sample 42 having a characteristic dimension D. Beam 41 has a width "w", which is in the range of 5 to 100 nanometers (50-1000 Angstroms). This beam 41 is raster-scanned in a pattern represented by path 43 across the surface of sample 42. (The number of scan lines is greatly reduced from purposes of illustration.) In order to control the beam 41 so that it travels along raster path 43, it is preferred from the inspection system to include an electron beam steering apparatus for electromagnetically deflecting the electron beam 41. Electrostatic deflection could alternatively or additionally be used.
FIG. 5 shows parallel imaging in the Secondary Electron Emission Microscopy inspection technique of the present invention. Beam 54 is produced from an electron gun source, and beam 54 has a width "W", typically about one to two millimeters, at the surface of sample 55. Sample 55 has the characteristic dimension D, which is much greater than the width W of the electron beam. In SEEM, the width of the electron beam 54 is much larger than in SEM, but it may still be possible and necessary to move the sample 55 with respect to the beam to scan the sample 55. However, in the preferred embodiment, SEEM requires only mechanical movement of the stage of the sample 55 with respect to beam 54, and not an electron beam deflection system for electromagnetically steering beam 41. Electromagnetic and/or electrostatic deflection could still be used, of course, and may be useful for such tasks as compensating for stage vibration or steering the wide beam along a serpentine path. The SEEM inspection system of the present invention can operate much faster than the SEM inspection system because SEEM images thousands or millions of pixels in parallel.
FIG. 5 further shows a magnified view of the imaging portion of the beam 54 on the sample 55 to illustrate the parallel, multi-pixel imaging region 56 within beam 54. A rectangular detector array region 56 occupies a central portion of the beam 54 and defines the imaging aperture. (The detector array is either of the time delay integrating (TDI) or non-integrating type.) The detector array 56 images between about 500 thousand and one million pixels in parallel.
SEEM is therefore 500 thousand to one million times faster than SEM due to the number of pixels in the detector array. If SEEM spends one millisecond looking at a pixel, SEM can only take one or two nanoseconds for that pixel to capture the same data frame at 100 MHz. Accordingly, the current density at the sample surface in SEEM is 106 (i.e. one million) times smaller than in SEM, which results in less damage to the sample. If, say, that 10,000 electrons per pixel are required for a good image, SEM must direct a larger number of electrons per unit time onto the pixel spot. In SEEM, the same number of electrons are spread out over a longer time because one million pixels are imaged simultaneously.
It further follows that SEEM has better noise reduction characteristics than SEM. At 100 MHz, SEM looks at each pixel for one nanosecond, while SEEM looks at each pixel for one millisecond. SEEM, therefore, averages out noise above one kHz, while SEM can only average out noise above 100 MHz. In defect detection applications, this implies fewer false positives and a better signal-to-noise ratio.
Besides the preferred method of using a second lower energy beam in conjunction with a first higher energy beam to control charge build-up, SEEM can obtain additional advantages in charge control by flooding the sample 55 with beam 54, but imaging only the central portion of the beam 54 to eliminate edge effects. Ordinarily, non-uniformities in charge on the imaging surface lead to imaging distortions by deflecting the beam. The sample surfaces at the edge of the beam 54 have less uniform charge distributions than the surfaces at the interior portion of the beam because there is no electron flux outside the circumferences of the beam diameter. There are further edge effects because of the residual charging in areas the beam had already scanned. By flooding an area 54 larger than the imaging area of the detector array region 56, these imaging distortions are avoided. In SEM, edge effects cannot be eliminated by this method because the beam diameter is too small for further aperturing. Additional techniques for reducing the effect of surface charge accumulation are taught in U.S. Pat. No. 5,302,828 to Monahan, which is hereby incorporated by reference.
The present invention optionally may include still other additional means for maintaining the charge balance at the sample. One possibility is to apply a supplemental electric field by attaching electrodes to the sample. A variable voltage control feeds current to the electrodes thereby supplying an additional degree of freedom towards charge balance stability. Another possibility is to introduce a low pressure gas, such as argon, into the vacuum chamber which contains the sample to control the charge balance. The low-pressure gas may act to prevent the accumulation of excess charge on the sample. While the above techniques are exemplary of additional control means for maintaining the charge stability of the sample, they are no means all-inclusive, and other such techniques may exist or be subsequently discovered to regulate charge control.
Any of these additional charge control means optionally may be utilized with the flooding method of Monahan, supra. The use of an electron beam of a particular energy with respect with the E2 value of the material is one method for maintaining a stable charge balance. The use of additional or alternative charge control means such as using a second low energy beam, flooding, electrodes, and/or low pressure gas provide other methods for maintaining this charge balance. The combination of these first and second order charge control mechanisms may optionally be used for a charge control apparatus.
It is useful to compare the limitations imposed by the maximum scan rate in SEEM and SEM. To summarize the advantages of SEEM over SEM:
Lower Noise. A longer image integration time is obtained for a given sample area. Averaging over longer sampling times results in less noise.
Less Image Distortion. By flooding a larger area on the sample than is imaged, a more uniform charge distribution is maintained from the imaged area, and edge effect distortion is eliminated.
Lower Current Densities. Lower current densities, made possible by parallel imaging and greater dwell times, imply that there is a reduced probability of damage to the sample.
Faster. Parallel imaging means that many pixels (e.g. one million) are imaged at the same time in SEEM. Only one pixel is imaged at one time in SEM.
No High Speed Scanning Electronics. These scanning systems are complex and expensive, but are not required in SEEM because of faster parallel imaging.
FIG. 6(a) illustrates how defects in a via between the layers of a semiconductor device are detected in accordance with one embodiment of the present invention. An intermediate stage of fabrication of semiconductor device 60 is shown. In this example, semiconductor device 60 consists of a substrate 61, a metal layer 62 deposited on substrate 61, and an insulating layer 63 formed over metal layer 62. Vias or holes 64, 65 are shown extending through insulating layer 63 to metal layer 62. At a subsequent stage of fabrication, a second metal layer 66 is formed over insulating layer 63, and vias 64, 65 are filled with an electrically conductive material to form electrical connections between metal layers 62 and 66. At the present stage of fabrication, however, metal layer 66 has not yet been deposited, so it is only shown in dotted lines. Generally speaking, vias 64 and 65 are formed by etching insulating layer 63. Via 64, however, is herein shown to be clogged while via 65 is clear. Via 64 may, for example, become clogged with foreign material, or it may be clogged because of imperfections in the etching process. In either event, via 64 represents a defective via, while via 65 represents a perfect via.
FIG. 6(a) further shows a beam 67 of primary electrons incident normal to the surface of semiconductor device 60 onto insulating layer 63. This beam 63 represents the combination of a first beam having higher energy electrons and a second beam having lower energy electrons. Because layer 63 is an insulating material, electron mobility on layer 63 is limited. Insulating layer 63 therefore has a tendency to collect charge on it surface, and this has led to the charge build-up problems associated with prior art inspection techniques such as LEEM. However, in the Secondary Electron Emission Microscopy (SEEM) technique of the present invention, the energy of the higher energy electrons in beam 67 could be chosen to be sufficiently near the E2 value of the material of insulating layer 63, or could be at a different energy, so long as the lower energy beam has an energy appropriate to control charging of layer 63. Thus, upon illumination by primary electron beam 67, a secondary electron beam 68 is produced by insulating material 63 with minimal build-up of charge on surface 63 of the material. The energy of the lower energy electrons in beam 67 is selected to minimize charge build-up on the sample surface resulting from the higher energy electrons.
Returning electron beam 68 may be emitted in a direction normal to the surface of insulating layer 63, and in a sense opposite to primary electron beam 67. Returning electron beam 68 contains information about the defective and perfect vias 64, 65, and this information passes back through the optical system, is detected and subsequently processed to enable the operator to determine whether the semiconductor device 60 is defective.
FIG. 6(b) shows electron beam inspection of the semiconductor device 60 of FIG. 6(a) at a subsequent stage of construction. Metal lines 66 a and 66 b extend in a direction perpendicular to the page to connect metal layer 62 through vias 64, 65, thereby providing electrical contact between lines 66 a, 66 b and layer 62. Primary electron beam 67 is incident on semiconductor device 60, and particularly on meal lines 66 a, 66 b and insulating layer 63. Inspective imaging of the surface of metal lines 66 a, 66 b and insulating layer 63 can be achieved with voltage contrast information derived from returning electron beam 68.
Process control monitoring for the semiconductor industry is thereby improved with electron beam inspection of the present invention as compared with optical beam inspection by reducing or eliminating false positives due to grain structures and color noise. Once a defect has been identified, it may be repaired with a procedure such as focused ion beam implantation if the defect is critical. The information derived from the inspection of substrates can also be used to improve yields of subsequently fabricated semiconductor devices. The SEEM system of the present invention, if desired, could be used in situ as part of a semiconductor wafer manufacturing apparatus, in which wafers could be inspected before, during or after processing, and a common robot could be used for handling the wafers and moving them between inspection and processing stations. The SEEM could also be located in a vacuum chamber that is additionally used for other fabrication purposes, such as ion implantation or deposition. Data from the inspection can be fed forward to subsequent processing stations or fed back to prior processing stations to provide improved automated process control.
Since they contain different kinds of information, it is desirable to separate the images originating from the high and low energy illuminating beams. One novel means of separating the low energy mirror and higher energy scattering images in a dual beam SEEM exploits the principle of synchronous detection. In this mode, the low energy beam and the higher energy beam are not superimposed, but rather are alternately turned on and off (toggled). The image is recorded only while the desired mirror or scattering image is present. During the unwanted part of the toggle cycle, the image beam is also blanked off.
To maintain the desirable charge balance from the low energy beam, the switching rates between the two images can be selected to meet certain conditions. The rate of change in surface potential (charge buildup) dV/dt depends upon the difference Ja−Js (charge/sec/sq.cm) between the absorbed (Ja) and scattered (Js) current densities, and upon the surface layer capacitance C per square cm of surface area, in such a way that dV/dt=(Ja−Js)/C. If ΔV is the tolerable increase in surface potential (approx. 0.1 Volt) during one cycle, then the beams must be toggled in a time less than Δt<CΔV/(Ja−Js). If the toggle time Δt for an image element is sufficiently short, the image will behave as though the two beams were actually superimposed, even though the image from only one of the beams is observed. In comparison with the image subtraction method above, this method has the advantage of rejecting noise as well as contrast from the unwanted image.
This mode of operation requires that both the illumination beam and the image beam be turned on and off electron optically (blanked). In one embodiment, the control grid of an electron gun is switched between two voltages to blank the illumination beams. The beam is off when the grid is biased sufficiently negative to prevent electrons from leaving the cathode. The beam is on when the grid is biased more positive. In another embodiment, a beam is deflected (where the deflection is accomplished magnetically, electrostatically or both) at an image plane, so that it passes through an aperture only when the beam should be unblanked. Both of these blanking methods may be applied in a dual beam SEEM to separate its images.
In another embodiment of the invention, both mirror mode and secondary/backscatter mode are used sequentially to create images having different characteristics. In this embodiment, each type of image is sequentially produced, as in the preceding embodiment. However, the image beam is not blanked off, because there is no unwanted part of the toggle cycle. Instead, each type of image is used to determine features of the substrate under observation. As an example, in an "array mode" or a "die to die mode" of semiconductor inspection, a mirror mode image of a first portion of a die is compared to a mirror mode image of a corresponding portion of an array from the same die (for array mode), or a corresponding portion of another die (for die to die mode). A similar die to die comparison or array comparison can then be performed for the secondary/backscatter image. Information derived from both types of comparison can be used to better identify and characterize defects on semiconductor substrates. A more detailed description of die to die mode comparison can be found in commonly assigned U.S. Pat. No. 5,502,306.
More generally, the secondary electron emission microscopy of the present invention is used to inspect defects in any semiconductor device, thin film magnetic head, reticle for semiconductor fabrication or flat panel (e.g., liquid crystal or field effect) display. Insulating, semiconducting, or conducting materials, or even superconductors and plasmas, are capable of being imaged with SEEM. A typical semiconductor fabrication process involves ultraviolet reduction projection of a reticle pattern produced for a wafer design, followed by chemical etching for each of the device layers. Alternatively, semiconductor devices are patterned with ion beams or etching, or by CMP processing. Process inspection and monitoring of the intermediate and final products is then performed with the method of the present invention. The SEEM system of the present invention could also be used for defect review, in which previously inspected wafers are reviewed and the defects located thereon may be characterized
Although the foregoing invention has been described in some detail for purposes of clarity of understanding, it will be apparent that certain changes and modifications may be practiced within the scope of the appended claims. It should be noted that there are many alternative ways of implementing both the process and apparatus of the present invention. Accordingly, the present embodiments are to be considered as illustrative and not restrictive, and the invention is not to be limited to the details given herein, but may be modified within the scope and equivalents of the appended claims.
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text:
The networkable IP loudspeakers of Series AFLS bring together communication and public address in a single device.
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text:
A&E's DUCK DYNASTY Presents 'I'm Dreaming of a Redneck Christmas' Tonight
A&E's DUCK DYNASTY will present a one-hour Christmas Special, "I'M DREAMING OF A REDNECK CHRISTMAS" tonight, December 5th at 10 pm/ET/PT.
In the special, it's the holiday season and as usual, the Robertsons are doing things a little differently. The family gears up for Ms. Kay's big Christmas party where her ultimate cooking creation takes center stage; the "Pirducken" (pig that's been stuffed in a turkey, then stuffed in a duck and then stuffed in a chicken).
In preparation for the festivities, Jase and the rest of the boys inject some redneck flair into the house's Christmas light decorations, while Ms. Kay and Phil head out on their land to cut down this year's tree. Meanwhile, Willie volunteers to play Santa at a children's church event and Si tags along as an uninvited elf.
About Author
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