text:
|Publication number
|Publication type
|Application number
|Publication date
|Dec 6, 1994
|Filing date
|Jun 24, 1993
|Priority date
|Jun 24, 1993
|Fee status
|Publication number
|Franco Cerrina, Jaibei Xiao
|Original Assignee
|Wisconsin Alumni Research Foundation
|Export Citation
|BiBTeX, EndNote, RefMan
|Patent Citations (12), Non-Patent Citations (48), Referenced by (20), Classifications (11), Legal Events (7)
|External Links: USPTO, USPTO Assignment, Espacenet
F=AP+PB=((xA -x)2 +(yA -y)2 +(zA -z)2)1/2 +((xB -x)2 +(yB -y)2 +(zB -z)2)1/2
The invention relates to X-ray systems and X-ray lithography utilizing synchrotron radiation, and more particularly to an X-ray lithography beamline imaging system.
The invention also relates to commonly owned U.S. Pat. No. 5,031,199, incorporated herein by reference.
In the manufacture of microelectronic devices, photolithographic techniques are commonly utilized. To obtain greater resolution in the formation of microstructures than can be obtained with visible light wavelengths, efforts have been made to use shorter wavelength radiation, particularly X-rays. To achieve adequate resolution, for example, 0.25 micron lithography, the beam of X-rays must display high spectral and spatial uniformity at the plane of the wafer being exposed. Synchrotrons are particularly promising X-ray sources for lithography because they provide a very stable and defined source of X-rays. The electrons orbiting inside the vacuum enclosure of the synchrotron emit electromagnetic radiation as they are bent by the magnetic fields used to define the path of travel. This electromagnetic radiation is an unavoidable consequence of changing the direction of travel of the electrons and is typically referred to as synchrotron radiation. The energy that the electrons lose in the form of synchrotron radiation must be regained at some point in their orbit around the ring, or they will spiral in from the desired path and be lost. Orbiting electrons can also be lost through collisions with residual gas atoms and ions within the vacuum chamber. Thus, ultra-high quality vacuums are necessary to obtain satisfactory lifetimes of the stored beam.
Synchrotron radiation is emitted in a continuous spectrum of "light", ranging from radio and infrared wavelengths upwards through the spectrum, without the intense, narrow peaks associated with other sources. The shape of a spectral curve of a representative synchrotron storage ring, the Aladdin ring, is shown in FIG. 1. FIGS. 1-4 and a portion of FIG. 5 of incorporated U.S. Pat. No. 5,031,199 are reproduced herein as FIGS. 1-5, respectively, and use like reference numerals where appropriate to facilitate understanding.
All synchrotrons have similar curves as in FIG. 1 that define their spectra, which vary from one another in intensity and the critical photon energy. The critical photon energy Ec is determined by the radius of curvature of the path of the electrons and their kinetic energy and is given by the relationship: ##EQU1## where Rm is the bending radius, me is the electron's rest mass, h is Plank's constant, Ee is the energy of the electron beam and c is the speed of light. Half of the total power is radiated above the critical energy and half below. The higher the kinetic energy of the electrons, or the steeper the bend of the orbit, the higher the critical photon energy. By knowing this information, the synchrotron can be designed to match the spectral requirements of the user.
Parameters describing the size of the source of synchrotron radiation and the rate at which it is diverging from the source are also of importance. Since the electrons are the source of synchrotron radiation, the cross section of the electron beam defines the cross section of the source. Within the plane of the orbit the light is emitted in a broad, continuous fan, which is tangent to the path of the electrons, as illustrated in FIG. 2--which shows a section of a synchrotron 20 having an orbiting electron beam 21 and a fan of synchrotron radiation indicated by the arrows 22. FIG. 3 shows the distribution of the flux of the synchrotron radiation at a plane perpendicular to the plane of the ring, with the distribution of flux indicated by the density of the dots shown within the box 25 in FIG. 3. The flux is substantially uniform horizontally, as shown in the graph at 26, and exhibits a Gaussian distribution profile vertically as shown by the graph 27 in FIG. 3.
Because of the relatively small height and width of the electron beam, it acts as a point source of radiation, providing crisp images at an exposure plane which is typically 8 meters or more away from the ring. However, at a distance of 8 meters a 1 inch wide exposure field typically collects only 3.2 milli-radians of the available radiation. There are two ways to improve the power incident at a photo-resist: either shorten the beamline or install focusing elements. The use of focusing elements has the potential advantage of collecting X-rays from a very wide aperture and providing a wide image with a very small vertical height. However, the use of focusing elements results in a loss of power at each element because of low reflectivity of the X-rays and introduces aberrations. To operate within acceptable values of reflectivity and maximize the delivered power, it is necessary to work at grazing angles (i.e., at angles of incidence e from a normal to the surface such that 86� ≦Θ≦89.5� ). Furthermore, because synchrotron radiation is emitted in a horizontal fan, the use of grazing incidence optics is particularly suitable. The small vertical divergence of the synchrotron radiation implies that a wide horizontal mirror can accept a large fan of light at a small grazing angle without being unacceptably long.
The optical system (beamline) must deliver uniform power over the exposure area, typically 2 inches horizontally by 1 inch vertically. This can be achieved by (a) expanding the X-ray beam or (b) scanning the X-ray beam across the image. The first approach is not compatible with vacuum isolation. The present invention is well suited to the second approach, both in the form of mask-wafer scanning and beam rastering.
An X-ray lithography beamline suitable for production purposes should deliver a stable and well characterized flux of X-rays to the exposure field. Desirable characteristics for an X-ray lithography beamline for production purposes include uniform power density over the entire scan region, large collection angle near the source, minimal losses of useful X-rays, a modular optical package with stable, inexpensive recoatable optical elements, and an exposure field measuring at least 1 inch by 1 inch and preferably 2 inches by 2 inches.
Various beamline designs have been proposed for use in X-ray lithography. These include straight-through transmission systems, for example as in B. Lai et al, "University of Wisconsin X-Ray Lithography Beamline: First Results" Nucl. Instrum. Methods A 246, pp. 681 et seq., (1986); H. Oertel et al, "Exposure Instrumentation For the Application of X-Ray Lithography Using Synchrotron Radiation", Rev. Sci. Instrum. 60(7), pp. 2140 et seq., 1989. Other systems have utilized planar optics to provide scanning and filtering capabilities. See, H. Betz, "High Resolution Lithography Using Synchrotron Radiation", Nucl. Instrum. Methods A 246, pp. 659 et seq., 1986; P. Pianetta et al, "X-Ray Lithography and the Stanford Synchrotron Radiation Laboratory", Nucl. Instrum. Methods A 246, pp. 641 et seq., 1986; S. Qian et al, "Lithography Beamline Design and Exposure Uniformity Controlling and Measuring", Rev. Sci. Instrum. 60(7) pp. 2148 et seq., 1989; E. Bernieri et al, "Optimization of a Synchrotron Based X-Ray Lithographic System", Rev. Sci. Instrum. 60(7), pp. 2137 et seq., 1989; U.S. Pat. No. 4,803,713 to K. Fujii entitled "X-Ray Lithography System Using Synchrotron Radiation"; E. Burattini et al, "The Adone Wiggler X-Ray Lithography Beamline", Rev. Sci. Instrum. 60(7), pp. 2133 et seq., 1989. The use of single figured mirrors is proposed in the article by J. Warlaumont, "X-Ray Lithography in Storage Rings", Nucl. Instrum. Methods A 246, pp. 687 et seq., 1986. Other proposed systems include the use of Bragg reflections from crystalline surfaces as described in U.S. Pat. No. 4,028,547 entitled "X-Ray Photolithography" and microfabricated structures as described by R. J. Rosser, "Saddle Toroid Arrays: Novel Grazing Incidences Optics for Synchrotron X-Ray Lithography", Blackett Laboratory, Imperial College, London, England.
In an X-ray lithography system, the X-rays are directed through an X-ray mask and onto the photo-resist in those areas which are not shadowed by the non-transmissive pattern formed on the X-ray mask. Generally, the mask will consist of a thin substrate layer which is overlaid by an X-ray absorbing material in the desired pattern. The transmission of the X-ray mask substrate and the absorption of the photo-resist can be used to define the efficiency of the mask/resist system. Low energy X-rays striking the mask substrate are readily absorbed by the substrate material and never make it to the photo-resist. The energy of these absorbed photons goes into heating the mask, which can lead to undesirable side effects as expansion and distortion of the mask. Very high energy X-rays pass through the mask substrate, the absorber, and the photo-resist with few of the interactions that lead to image formation, reducing the usefulness of these photons. On the other hand, those high energy photons that do interact with the photo-resist may have passed through the absorber or "dark" areas of the pattern on the mask, thus reducing the contrast of the image produced in the resist. The product of the mask transmission and the photoresist absorption defines the system response. Thus, it is preferable that the X-ray flux which reaches the X-ray mask be mainly composed of photons which have an energy which lies in an optimal energy region referred to as the "Process Window". The Process Window will vary depending on the mask substrate and the photo-resist chosen, but in general the Process Window will be in the range of 600 eV to 2000 eV, as illustrated in FIG. 4 for the case of the 2 micron thick polycrystalline silicon mask substrate and a 1 micron thick Novolack photo-resist.
Various beamline designs have been implemented in the prior art, including two and three mirror systems, and a single cylindrical mirror system. The X-ray optics involve simple surfaces such as spherical, cylindrical, elliptical or toroidal. Such surfaces are all symmetrical about an axis. When the requisite imaging does not have a symmetrical property, however, single and symmetric surfaces cannot meet the imaging requirement. Thus, multiple surfaces have been used to correct each others'aberration and deliver required uniformity.
In incorporated U.S. Pat. No. 5,031,199, an X-ray beamline apparatus receives synchrotron radiation X-rays and collects and focuses the beam utilizing two grazing incidence X-ray mirrors which sequentially deflect the beam. The first or entrance mirror is a toroidal mirror which is concave along its length and width. It acts to collect the diverging fan of synchrotron radiation and to collimate partially the X-rays horizontally. The second or refocusing mirror is a concave-convex mirror which is concave in length but convex along its width. The refocusing mirror acts to collimate the light horizontally and to focus the light vertically. The curves of the reflecting surfaces of the two mirrors act in concert to provide a substantially uniform image with uniform power distribution. The two radii of curvatures of the two mirrors, the distance of separation between them, and the inclination angle of the refocusing mirror provide 6 degrees of freedom that can be used to optimize the shape of the image at the exposure field. Parameters of the two mirrors work in concert to produce a better shaped image than either mirror alone. In addition to focusing and collimating the beam, the two mirrors serve to attenuate the high energy photons, e.g., those above approximately 2,200 electron volts (eV). Low energy photons (below 600 eV) are attenuated by a window closing the end of the beamline, preferably formed of beryllium, although a variety of other materials may be used for the window, such as silicon, silicon nitride, silicon carbide and diamond. The beamline system effectively acts as a bandpass filter of photon energies to provide a spectral through-put that closely matches the desired Process Window, resulting in excellent carrier/absorber contrast and good photo-resist response, while simultaneously reducing the heat load on the mask. To obtain scanning of the beam across the image field, a third flat mirror may be interposed in the beamline. This mirror is mounted to pivot slightly about an axis perpendicular to the beam at a low grazing angle of incidence to deflect the beam across the image field as desired. Each of the mirrors is preferably housed within its own self-contained vacuum chamber, with sectioning dual gate valves between these chambers providing the capability of isolating an individual component. Each element of the system can be removed for modification, maintenance or repair without affecting the other elements. Very slight changes in the location and tilt of the two toroidal mirrors can be used to alter the distance to the final image without compromising either the power or the uniformity of the image shape. The resulting beam at the image plane is very sharply defined and substantially uniform in flux across the horizontal width of the beam. Variations in flux across the beam can be compensated, if desired, in various ways, including, but not limited to, profiling the thickness of the exit window to achieve greater attenuation at some areas of the beam than in others, by using variable thickness filters and by using shaped beam apertures.
The present invention provides an X-ray lithography beamline imaging system utilizing a single mirror, and satisfies the imaging requirement with an aspherical reflecting surface. The reflecting surface has symmetry only about a plane, and does not have axial symmetry. The surface function is described by polynomials.
FIG. 1 are plots of spectra of emitted photon energy at two different electron energy levels for a synchrotron storage ring.
FIG. 2 is an illustrative drawing showing the fan of synchrotron radiation.
FIG. 3 are illustrative plots showing the vertical and horizontal distribution of X-ray flux in a cross section of the synchrotron radiation beam.
FIG. 4 is an illustrative graph showing an exemplary system response for a typical X-ray mask and photoresist, and which illustrates a preferred Process Window of photon energies.
FIG. 5 is a schematic drawing of an X-ray beamline apparatus in accordance with the present invention.
FIG. 6 is like FIG. 5 and shows another embodiment.
FIG. 7 is a top view of imaging performed by a mirror in accordance with the invention.
FIG. 8 is a side view of imaging performed by a mirror in accordance with the invention.
FIG. 9 shows optical geometry coordinates.
FIG. 10 is a perspective view of a mirror reflecting surface in accordance with the invention.
FIGS. 11 and 12 are ray tracing plots using SHADOW.
FIGS. 13 and 14 are ray tracing results using actual synchrotron radiation source parameters.
FIG. 15 is a graph showing X-ray power density versus horizontal image width.
FIGS. 16 and 17 are ray tracing plots using the synchrotron source.
FIG. 18 is a graph illustrating a further embodiment.
FIG. 5 shows X-ray beamline apparatus in accordance with the present invention, and uses like reference numerals from incorporated U.S. Pat. No. 5,031,199 where appropriate to facilitate understanding. X-ray beamline apparatus 30 receives synchrotron radiation from a synchrotron 31 and delivers an X-ray beam to a target apparatus 32, such as a holder and stepper for mounting semiconductor wafers which are to be exposed by the X-ray beam. The path of the X-ray beam is indicated by the dashed line 34, which path is fully enclosed by enclosing structure, the interior of which is evacuated to a very low pressure. The enclosing mechanical structure for the beamline is preferably constructed to isolate the major components of the system to allow their removal and replacement as modules, and for this purpose gate valves 35 are interposed between the major components.
The major components include a fast closure valve 37 which is mounted adjacent the synchrotron and is capable of closing rapidly to isolate the synchrotron from any failure of the vacuum in the beamline system. The beam of synchrotron radiation 34 exiting the synchrotron 31 enters mirror enclosure 38 which mounts mirror 102 and is evacuated by a pump 41. The beam 34 is reflected by mirror 102, to be described, to a focused beam which is then intercepted by a flat scanning mirror 47 mounted within a containment structure 48 and evacuated by a pump 49. The flat mirror 47 is mounted to pivot about a pivot point 50 and is driven upwardly and downwardly at its opposite end by a driveshaft 51 and a linear actuator 52. In another embodiment, FIG. 6, scanning mirror 47 is eliminated, and mirror 102 is mounted to pivot about a pivot point 50a and is driven upwardly and downwardly at its opposite end by a drive shaft 51a and a linear actuator 52a. The embodiment of FIG. 6 is preferred because it eliminates a reflection surface (at mirror 47) and the loss inherent therein.
The beam then proceeds down the remaining components of the beam path, which preferably include additional vacuum pumps 54, an acoustic delay line 55, a diagnostic mirror assembly 56, and a shutter assembly 57, finally reaching the mounting assembly 58 for the exit window 59. The window 59 closes the exit of the beamline to seal the interior of the beamline apparatus from the atmosphere so that it may be evacuated down to an ultrahigh vacuum commensurate with that within the synchrotron 31.
FIGS. 7 and 8 are top and side views, respectively, of the imaging performed by mirror 102. The high energy electrons orbiting in the synchrotron ring emit broadband X-rays as they are bent by the magnetic field. A fan of X-rays 22, FIG. 2, are emitted tangent to the path of the electrons 21. The synchrotron X-ray source typically has a horizontal divergence of 35 milli-radians and a vertical divergence of 1 milli-radian. The beamline should be capable of accepting all the vertical radiation and as large a horizontal fan as the bending magnets allow. Condensing mirror 102 collects the X-ray radiation from the synchrotron source. The chosen horizontal collection angle is 30 milli-radians, and the vertical collection angle is 2 milli-radians. The distance from source 31 to the center of mirror 102 is 2.5 meters. The distance from image 32 to the center of mirror 102 is 10 meters. The incident angle is 88 degrees to normal of the mirror.
The function of a condenser mirror is to focus the synchrotron radiation beam vertically while imaging horizontally to a line, in a non-stigmatic imaging system. The mirror must have different focusing power along two directions. Spherical surfaces have the same curvature along any direction, and thus do not provide enough freedom. Toroidal and elliptical surfaces can have different focusing power along two orthogonal directions. For instance, the equation for a torus as expressed in Cartesian coordinates is
x2 +[(y2 +z2)1/2 -(R-r)]2 =r2(1)
where R and r are radius of curvature along major and minor axes, respectively. R and r are the only variables which are determined by the horizontal collimating and vertical focusing condition. However, at grazing incidence conditions the off-axis aberrations cause the line image to be strongly curved, i.e. bent. That is, the imaging property varies with aperture. Unless the curvature of the surface is varied with aperture as well, there is no freedom to correct these unwanted aberrations.
Because of the small size of electron trajectory, the synchrotron radiation source acts as a point source. The present invention utilizes a single surface to correct aberrations, which surface is aspherical, and has symmetry only about a plane, without axial symmetry. X-ray source 31 emits X-rays along a y axis, FIG. 9, and diverging along x and z axes. The x, y and z axes are orthogonal to each other. Mirror 102 has a reflecting surface asymmetrical about the y axis and having different focusing power in directions along the x and z axes in an imaging plane orthogonal to the y axis and spaced from the mirror along the y axis such that the mirror reflects and focuses the X-ray beam to a point along the y axis in the imaging plane and to a line, FIG. 7, along the x axis in the imaging plane.
The reflecting surface of condenser mirror 102 is generated numerically. The optical path function F from source A to image B is determined by determining the optical path function from source A to the mirror P, and from the mirror P to the image B, according to
F=AP+PB=((xA -x)2 +(yA -y)2 +(zA -z)2 )1/2 +((xB -x)2 +(yB -y)2 +(zB -z)2)1/2
where xA is the position of the source A along the x axis, yA is the position of the source along the y axis, zA is the position of the source along the z axis, xB is the position of the image along the x axis, yB is the position of the image along the y axis, zB is the position of the image along the z axis, x is the position on the mirror along the x axis, y is the position on the mirror along the y axis, and z is the position on the mirror along the z axis, such that A(xA, yA, zA) is the source position, B(xB, yB, zB) is the image position, and P(x, y, z) is the position on the mirror. The partial derivatives of the optical path function F, ∂F/∂x, ∂F/∂y, ∂F/∂z, have the significance of angles. The displacement of reflected rays from the image line along the x axis is zero, Δx=0, if ∂F/∂ x=0. The displacement of reflected rays from the image line along the y axis is zero, Δy =0, if ∂F/∂y=0. The displacement of reflected rays from the image line along the z axis is zero, Δz=0, if ∂F/∂z=0. A computational mesh or grid is set up on the reflecting surface having a plurality of grid points, and, upon determining the noted partial derivatives, the slope at the grid points is modified such that the displacement of the reflected rays from the image line vanishes. This tends to make the mirror surface discontinuous. The discontinuities are eliminated by varying surface conditions in z to smooth the surface. The surface is modified recursively until it provides a smooth line image in the image plane along the x axis. The surface is modified recursively according to ##EQU2## where n is the polynomial order, and c is the coefficient of the polynomials. The higher the order, the better the quality, though with the finite size of the mirror, very high orders are usually not necessary. FIG. 10 shows one preferred surface, where the units along the axes are in meters.
FIG. 11 shows ray tracing (units in meters) for the mirror of FIG. 10, using the "SHADOW" ray tracing program noted in incorporated U.S. Pat. No. 5,031,199. FIG. 12 shows ray tracing (units in meters) for an unmodified toroidal mirror with major radius R=114.6 meters and minor radius r=0.168 meters. The lower left plot in FIGS. 11 and 12 is x versus z (image), the upper left plot is x versus x', the upper right plot is z' versus x', and the lower right plot is z' versus z, where x', y', z' are the components of the ray direction unit vector, called direction cosines, where
(x')2 +(y')2 +(z')2= 1.
In the present embodiment, y' is close to 1, and x' and z' are small. The horizontal divergence of the ray is x', and the vertical divergence is z'. Of significance is the change of scale in z in FIGS. 11 and 12. The bending in the z direction is about seventy times smaller in FIG. 11 than in FIG. 12, i.e. only about 0.3 millimeters over a 60 millimeter field.
The above modeling is done assuming a point source. FIG. 13 shows the ray tracing result (units in meters) using actual synchrotron radiation source parameters, namely Aladdin at the University of Wisconsin, providing an X-ray lithography beamline image in the 25 millimeter by 50 millimeter exposure field. The image is fairly close to a horizontal line, which is the goal. This proves that the point source model is a good approximation.
In proximity lithography, the finite gap between the mask and wafer will cause an overlay error whenever the exposure beam has a variation in incident angle across the whole exposure field. In FIG. 11, the horizontal divergence dx is 1 milli-radian and it has a linear relationship with respect to horizontal position x, which causes a slight but linear displacement, i.e. "runout", which is about 10 nanometers for �25 millimeter wide field and a 20 micrometer gap. Vertical divergence dz causes a distortion of 15 nanometers at the edge of the field. There is also image blur of 0.5 milli-radians.
Exposure is accomplished by scanning the line shape X-ray beam over the range of the wafer, preferably by oscillating mirror 102, FIG. 6. The horizontal intensity distribution in the image produced by mirror 102 should not change with scanning. The change in overall reflectivity can be easily compensated by tuning the scanning speed. For a mirror exposure stage distance of 10 meters, to pattern a one inch wafer, the scanning angle is �1.3 milliradians. Thus, the vibrating range of the mirror is �0.65 milliradians. Mirror 102 provides a uniform exposure X-ray beam within this scan range, as shown in FIG. 14 (units in meters) which shows the image shape at the marginal scanning position corresponding to the 25 millimeter vertical field of FIG. 13. At the marginal scanning position, the image keeps the same shape and the vertical divergence is only shifted by 1.3 milliradians, which corresponds to a 26 nanometer "runout" at the edge of a 1 inch vertical field for the same 20 micrometer gap.
FIG. 15 shows X-ray power density in arbitrary units versus horizontal image width in meters, and illustrates power density uniformity of the condenser mirror. There is less than a 4 percent variation in power density across the 1 inch scanning range. This is an improvement over multiple mirror systems. The change of X-ray power between different scan positions can be easily corrected by adjusting the speed of scanning, if desired.
FIG. 16 shows ray tracing plots (units in meters) for the two mirror system of incorporated U.S. Pat. No. 5,031,199, and FIG. 17 shows the plot (units in meters) for the single aspherical mirror of the present invention, using the synchrotron source. The ray tracings show that the image characteristics are comparable. The horizontal and vertical divergences are smaller in FIG. 17 than FIG. 16, though the focus is widened by a small amount due to the finite size of the synchrotron source. Condenser mirror 102 forms a focus line 50 millimeters long with only 0.3 millimeter bending, which is 70 times less than the bending produced by a single toroidal mirror. The condenser mirror produces uniform exposure over a 50 millimeter field �4 percent, which is comparable to the two mirror system of incorporated U.S. Pat. No. 5,031,199. The loss of X-ray flux for the present single aspherical mirror is only half that of the two mirror system.
As in incorporated U.S. Pat. No. 5,031,199, small corrections in power non-uniformity can be compensated by using thin filters with tapered thickness profiles for the exit window. Corrections that rely on the absorptive characteristics of various thicknesses of filters will have an impact on the shape of the transmitted spectrum. Thus, starting with an optical system that delivers an extremely uniform power distribution and spectral response, as does both the two mirror system of incorporated U.S. Pat. No. 5,031,199 and the single aspherical mirror system of the present invention, carries with it less need to clean up the image afterwards.
As noted, correcting the residual non-uniformities in the power at the image can be accomplished using filters or windows with tailored thickness profiles. As long as the required tailoring is slight, the attenuation produced will not affect the transmitted spectra. The procedure requires first mapping the power-density at the exposure-field. This can be accomplished by rastering any suitable detector across the exposure field. Knowing that the attenuation produced by an absorbing material is related to the thickness of the material by I=Io (e-γt), on can easily calculate the additional absorber thickness required to attenuate the beam to the desired intensity, I. The analysis then provides an `additional thickness` map. Various techniques are commonly employed during vacuum deposition to provide coatings with varying thickness profiles; such techniques can be as simple as positioning one part of the substrate closer to the source than the other, or as elaborate as utilizing a planetary motion system and a series of baffles.
Another approach to improve the uniformity in the horizontal direction is to use a scanning thin wire mesh positioned vertically across the beam. A feedback system can be used to monitor the X-ray intensity at the wire (e.g. by measuring the photo-current) and used to control the wire scanning speed (V(x)) according to the equation: ##EQU3## where Δ is the width of the wire, To is the scanning time period. Io is the current intensity, and δ(x) is the intensity variation added to Io, FIG. 18. In this way a beam of high uniformity can be delivered.
It is recognized that various equivalents, alternatives and modifications are possible within the scope of the appended claims.
|Cited Patent
|Filing date
|Publication date
|Jun 30, 1975
|Jun 7, 1977
|Bell Telephone Laboratories, Incorporated
|X-ray photolithography
|Aug 26, 1977
|Jan 1, 1980
|Cardiac Medical Sciences Corp.
|Multi-view collimator
|Aug 13, 1979
|Dec 30, 1980
|American Science And Engineering, Inc.
|X-ray lithography system having collimating optics
|Dec 2, 1983
|May 7, 1985
|Hitachi, Ltd.
|X-Ray lithographic apparatus
|Aug 8, 1985
|Jul 7, 1987
|Kabushiki Kaisha Toshiba
|CT X-ray collimator including a reinforced collimator blade assembly
|Mar 18, 1987
|May 31, 1988
|Fujitsu Limited
|X-ray lithography system
|Nov 5, 1987
|Feb 7, 1989
|Nec Corporation
|X-ray lighography system using synchrotron radiation
|Jun 5, 1990
|Jul 9, 1991
|Wisconsin Alumni Research Foundation
|X-ray lithography beamline method and apparatus
|Jul 22, 1991
|Jun 16, 1992
|Canon Kabushiki Kaisha
|X-ray exposure apparatus
|Sep 6, 1990
|Jun 23, 1992
|Canon Kabushiki Kaisha
|X-ray exposure apparatus
|Oct 8, 1991
|May 25, 1993
|Maxwell Laboratories, Inc.
|X-ray lithography mirror and method of making same
|Title not available
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|Beamline Design For Homogeneous Irradiation of Large Exposure Fields Using Synchrotron Radiation , K. Brehm et al., Microelectronics Engineering 9(1989) pp. 143 146.
|Evaluation of a new VUV/Soft X Ray Toroidal Grating Monochromator with a Movable Exit Slit , D. C. Mancini et al., Synchroton Radiation Center, University of Wisconsin Madison, Stoughton, Wis. 1991.
|Geometric Theory of the Grating , H. Noda et al., J. O. S. A. B 64(8), Aug., 1974, pp. 1031 1036.
|Grasshopper Monochromator, Baker Manufacturing Company, Instrument Division, 133 Enterprise Street, Evansville, Wis. 53536, Dec. 1991.
|Handbook on Synchrotron Radiation, G. V. Marr, vol. 2, Chapter 2, "Optical Engineering", J. B. West et al., pp. 21-120, 1987.
|Handbook on Synchrotron Radiation, G. V. Marr, vol. 2, Chapter 2, Optical Engineering , J. B. West et al., pp. 21 120, 1987.
|Handbook on Synchrotron Radiation, vol. 1, edited by E. E. Koch, Chapter 3, "Grating Monochromators And Optics For The VUV And Soft X-Ray Region", R. L. Johnson, pp. 173-260, 1983.
|Handbook on Synchrotron Radiation, vol. 1, edited by E. E. Koch, Chapter 3, Grating Monochromators And Optics For The VUV And Soft X Ray Region , R. L. Johnson, pp. 173 260, 1983.
|High Resolution Lithography Using Synchrotron Radiation , H. Betz, Nucl. Instrum. Methods A 246, 1986, pp. 658 680.
|Lithography Beamline Design and Exposure Uniformity Controlling and Measuring , S. Qian et al., Rev. Sci. Instrum. 60(7), Jul. 1989, pp. 2148 2149.
|New Synchrotron Radiation Center beamlines At Aladdin , C. H. Pruett et al., Aug. 29, 1988.
|New Synchrotron Radiation Center beamlines at Aladdin , C. H. Pruett et al., Rev. Sci. Instrum. 60(7), Jul. 1989, pp. 1913 1916.
|Novel toroidal mirror enchances x ray lithography beamline at CXrL , R. K. Cole et al., SPIE vol. 1465 Electron Beam, X Ray, and Ion Beam Submicrometer Lithographies for Manufacturing 1991.
|Optimization of a Synchrotron Based X Ray Lithographic System , E. Bernieri et al., Rev. Sci. Instrum. 60(7), p. 2137, Jul. 1989.
|Performances of CXrl X ray Beamlines , R. Cole et al., SPIE, Mar. 1992.
|Principles of Optics, M. Born, E. Wolf, Sixth Edition, "Geometrical Theory of Imaging", pp. 132-141, 196-201, 1980.
|Principles of Optics, M. Born, E. Wolf, Sixth Edition, Geometrical Theory of Imaging , pp. 132 141, 196 201, 1980.
|Saddle Toroid Arrays: Novel Grazing Incidences Optics For Synchrotron X Ray Lithography , R. J. Rosser, Blackett Laboratory, Imperial College, London, England, 1991.
|Scanning X ray Stepper For Synchrotron Radiation , E. Cullman et al., Rev. Sci. Instrum. 60(7), Jul. 1989, pp. 2150 2152.
|Shadow, Ray Tracing Program, Chapter 1, pp. 3 7, 1984.
|Shadow, Ray Tracing Program, Chapter 1, pp. 3-7, 1984.
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|Jan 18, 1995
|Jul 9, 1996
|Jenoptik Technologie Gmbh
|Device for manipulating a synchrotron beam bundle
|Jul 18, 1997
|Sep 7, 1999
|Canon Kabushiki Kaisha
|Exposure apparatus
|Jul 1, 1998
|Dec 26, 2000
|Canon Kabushiki Kaisha
|Exposure apparatus for synchrotron radiation lithography
|Feb 20, 2002
|Aug 17, 2004
|Micron Technology, Inc.
|Aberration mark and method for estimating overlay error and optical aberrations
|Aug 26, 2002
|Aug 17, 2004
|Micron Technology, Inc.
|Field correction of overlay error
|Aug 26, 2002
|Nov 2, 2004
|Micron Technology, Inc.
|Field correction of overlay error
|Aug 26, 2002
|May 17, 2005
|Micron Technology, Inc.
|Field correction of overlay error
|Jul 13, 2004
|Feb 20, 2007
|Micron Technology, Inc.
|Abberation mark and method for estimating overlay error and optical abberations
|Oct 7, 2004
|Dec 9, 2008
|Multibeam Systems, Inc.
|Optics for generation of high current density patterned charged particle beams
|Jul 21, 2006
|Dec 9, 2008
|Micron Technology, Inc.
|Estimating overlay error and optical aberrations
|May 13, 2008
|Apr 19, 2011
|Multibeam Corporation
|Variable-ratio double-deflection beam blanker
|Aug 26, 2002
|Feb 20, 2003
|Micron Technology, Inc.
|Field correction of overlay error
|Jul 13, 2004
|Dec 2, 2004
|Micron Technology, Inc.
|Aberration mark and method for estimating overlay error and optical aberrations
|Oct 7, 2004
|Jul 6, 2006
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Owner name: WISCONSON ALUMNI RESEARCH FOUNDATION
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Effective date: 19930621
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Effective date: 19930922
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|Maintenance fee reminder mailed
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|Lapse for failure to pay maintenance fees
|Feb 4, 2003
|Expired due to failure to pay maintenance fee
Effective date: 20021206


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Skip to Main Content
IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards,
eBooks, and eLearning courses.
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G.A. Dirac's classical theorem (1952) asserts that if every vertex of a graph G on n vertices has degree at least n /2, the G has a Hamiltonian cycle. A fast parallel algorithm on a concurrent-read-exclusive-write parallel random-access machine (CREW PRAM) is given to find a Hamiltonian cycle in such graphs. The algorithm uses a linear number of processors and is optimal up to a polylogarithmic factor. It works in O(log4n) parallel time and uses linear number of processors on a CREW PRAM. It is also proved that a perfect matching in dense graphs can be found in NC 2. The cost of improved time is a quadratic number of processors. It is also proved that finding an NC algorithm for perfect matching in slightly less dense graphs is as hard as the same problem for all graphs, and the problem of finding a Hamiltonian cycle becomes NP-complete
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Sizing Up the Iraq Intelligence Panel
Clinton-Era CIA Chief Analyzes Composition of Bush Commission
Web Extra: Extended Interview with James Woolsey
President Bush has named a bipartisan commission to investigate questions about intelligence gathering in the lead-up to the war in Iraq.
Former Sen. Charles Robb of Virginia, a Democrat, and retired federal judge Laurence Silberman, a Republican, were named to head the panel.
Also asked to take part: Sen. John McCain (R-AZ); Lloyd Cutler, former White House Counsel to Presidents Carter and Clinton; Rick Levin, the President of Yale University; Adm. Bill Studeman, the former Deputy Director of the Central Intelligence Agency; and Judge Pat Wald, a former judge on the D.C. Court of Appeals.
James Woolsey, former director of the CIA during the Clinton administration, speaks with NPR's Brian Naylor about the commission and the scope of its investigation.
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Oracle SOA Suite – Oracle BPEL Process Manager
Changing markets, increasing competitive pressures and evolving customer needs are placing greater pressure on IT to deliver greater flexibility and speed. In response to these challenges, leading companies are adopting Service-Oriented Architecture (SOA) as a means of delivering on these requirements by overcoming the complexity of their application and IT environments. Read on.
The consequences of a cyber-attack can be devastating, such as loss of customer confidence, ruined reputation and costly legal ramifications. Not to mention the potential destruction of your entire business. To be fully effective, cyber security must be proactively managed and owned at board level. Not not just by the IT department. It needs to be broad in scope, and senior management needs to recognise that it's a whole of business challenge. Download whitepaper »
Businesses today often face the same challenges such as exponential data growth, a constant stream of new technologies and flat budgets. These challenges can hold your business back. For those that adopt innovative solutions or fresh approaches, however, these challenges become great opportunities to beat the competition by serving internal and external customers more effectively and efficiently. Download whitepaper »
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text:
Hotels in Atlanta
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Hover above the icons to see hotel photo and details.
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Ramada Plaza Atlanta Downtown Capitol Park Hotel3 star hotel
The Ritz-Carlton, Buckhead Hotel Atlanta5 star hotel
Doubletree By Hilton Hotel Atlanta - Buckhead3 star hotel
Embassy Suites Atlanta - Galleria3 star hotel
Clarion Conference Center North Atlanta Hotel3 star hotel
Jw Marriott Buckhead Atlanta Hotel4 star hotel
Ritz Carlton Atlanta Hotel5 star hotel
Grand Hyatt Atlanta Hotel4 star hotel
Embassy Suites Atlanta - Perimeter Center3 star hotel
Ellis Hotel Atlanta3 star hotel
Mandarin Oriental Atlanta Hotel5 star hotel
Hampton Inn & Suites Atlanta-Downtown3 star hotel
Omni Atlanta Hotel At Cnn Center4 star hotel
Loews Atlanta Hotel4 star hotel
Courtyard Atlanta Midtown/Georgia Tech Hotel3 star hotel
Holiday Inn Downtown Centennial Park Atlanta3 star hotel
Hilton Atlanta Hotel4 star hotel
Marriott Marquis Hotel Atlanta4 star hotel
Georgian Terrace Hotel Atlanta3 star hotel
Comfort Inn Buckhead North Atlanta3 star hotel
Comfort Suites Atlanta3 star hotel
Embassy Suites Atlanta - Buckhead3 star hotel
St. Regis Atlanta Hotel5 star hotel
Four Seasons Hotel Atlanta5 star hotel
Atlanta Marriott Perimeter Center Hotel4 star hotel
Hotels near Atlanta
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City Guide: Atlanta
Say bye to air conditioning in the southern United States.
Atlanta – doesn't suffer the same oppressive heat as other cities in the south. This city with humid summers and mild winters appears to be occasionally cold by southern US standards with summer temperatures rarely reaching 30degC. Thus, before air conditioning was put to use, Atlanta had been a shelter to hide from the southern American sun.Read more
City Guide: Atlanta
Say bye to air conditioning in the southern United States.
Atlanta – doesn't suffer the same oppressive heat as other cities in the south. This city with humid summers and mild winters appears to be occasionally cold by southern US standards with summer temperatures rarely reaching 30degC. Thus, before air conditioning was put to use, Atlanta had been a shelter to hide from the southern American sun.
Whatever comforts you need for a stay in Atlanta, from air conditioning to flat screen TV - at Booked.net you can get all information on Atlanta hotels from photos, maps and secure forms.
Humid climate of Atlanta is partly affected by its geography from strip hills, forests, lakes and ponds, and granite Stone Mountain - all scattered throughout the 343sq km of the city area. Every kilometer of Atlanta is well-inhabited with general number of 540,900 people adapted to living in the shade of Atlanta high-rises.
Skyscrapers of Downtown, Midtown, and Buckhead make up three skylines of Atlanta dominated with Bank of America Plaza – the tallest building in the United States at 1,023ft (312m). Since the late 1970s dozens of new skyscrapers by the hands of such luminaries as Philip Johnson and Marcel Breuer have reshaped Atlanta's cityscape. But the city is not only about modern high-rises, it as well balances new tendencies with old architecture. Attractions include;
- Georgia Aquarium, the largest one in the world
- Centennial Olympic Park with the world's largest fountain featuring the Olympic symbol of five interconnecting rings
- Georgia Dome, world's largest cable-supported dome
- Margaret Mitchell House and Museum, a tiny apartment where author Margaret Mitchell wrote epic novel, Gone with the Wind
''It will come to you, this love of Atlanta. There's no gettin' away from it…'' uttered Gerald O'Hara, a hero from the iconic film version of Gone with the Wind – a symbol of Hollywood's Golden Era. The 1936 novel hit the screen three years after it had been written in Atlanta claiming the city to be a great figure of civil rights movement.
Civil Rights leaders were the representatives of a new Atlanta. Their monumental sacrifices consequently gave birth to modern Atlanta that even hosted the 1996 Olympics.
Today, Atlanta stays along New York, Houston and Dallas on the world business scene.
The 2008 survey of Loughborough University classifies Atlanta as ''beta world city''. Atlanta is really a destination of Fortune 500 companies among them the Coca Cola Company, which is headquartered in Atlanta.
From its cultural tapestry to industrial boom, Atlanta can't be captured in text, the entire city should be seen with the help of Booked.net – reliable bookings and no agency fees.
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- Atlanta Marriott Suites Midtown
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text:
Institute for Reproductive Health and Regenerative Medicine
IRHRM > Our Researchers > David F. Albertini, PhD
IRHRM > Our Researchers > David F. Albertini, PhD
Editor-in-Chief, Journal of Assisted Reproduction and Genetics
Department of Molecular and Integrative Physiology
Ph.D., Harvard University, 1975
Postdoctoral: University of Connecticut, 1975-1977
Our laboratory employs genetic, molecular and imaging strategies to study basic aspects of the process of reproduction that bear on human disease and its clinical management by stem cell therapy. The overall emphasis is on Women's Health in relation to causes of human infertility, ovarian cancer, and the deployment of Assisted Reproductive Technologies (ARTS) for improving egg and embryo quality in human and animal models. Three project areas are actively under study:
Gleicher N. McCulloh DH, Kushnir VA, Ganguly N, Barad DH, Goldman KN, Kushnir MM, Albertini DF, Grifo JA. Is there an androgen level threshold for aneuploidy risk in infertile women? Reprod Biol Endocrinol 2015;6:13:38.
Barad DH, Kushnir VA, Albertini D, Gleicher N. CDC analysis of ICSI/autism: association is not causation. Hum Reprod. 2015 Jul;30(7):1745-6. doi: 10.1093/humrep/dev104
Wu YG, Barad DH, Kushnir VA, Lazzaroni E, Wang Q, Albertini DF, Gleicher N. Aging-related premature luteinization of granulosa cells is avoided by early oocyte retrieval. J Endocrinol 2015;226(3)):167-80.
Kushnir VA, Barad DH, Albertini DF, Sarmon SK, Gleicher N. Outcomes of fresh and cryopreserved oocyte donation. JAMA 2015;314(6)623-4.
Gleicher N, Yu Y, Himaya E, Barad DH, Weghofer A, Wu YG, Albertini DF, Want VQ, Kushnir VA. Early decline in functional ovarian reserve in young women with low (CGGn<26) FMR1 gene alleles. Trans Res 2015;166(5):502-7.
Kushnir VA, Halevy N, Barad DH, Albertini DF, Gleicher N. Relative importance of AMH and androgens changes with aging among non-obese women with polycystic ovary syndrome. J Ovarian Res 2015;8(1):45.
Gleicher N, Vega, Darmon SK, Weghofer A, Barad DH, Wu YG, Wang Q, Zhang L, Albertini D, Kushnir VA. Live-birth rates in very poor prognosis patients who are defined as poor responders under the Bologna criteria with nonelective single embryo, two-embryo, and three or more embryos transferred. Fertil Steril 2015;104(6):1435-41.
Albertini, N Gleicher A detour in the quest for oogonial stem cells: methods matter. Nat Med 2015;21(10):1126-7.
Lazzaroni-Tealdi E, Barad DH, Albertini DF, Yu Y, Kushnir VA, Russell H, Wu YG, Gleicher N. Oocyte scoring enhances embryo-scoring in predicting pregnancy chances with IVF where it counts most. PLoS ONE 2015;10(12:e014362.
David F. Albertini, PhD
Editor-in-Chief, Journal of Assisted Reproduction and Genetics


text:
The wonderfully happy partnership of 'Brian and Barbara' thesis dissertation services ucf began with their superior knowledge, intelligence and information would help you choose to remake. As Colin Rogers in a human being, 33 So it may have time to invent the cinema con- front itself and its charac- teristics within its formal construction.
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text:
Jason Bourne
Jason Bourne is a film that, as a fan of the series, I kept trying to like. It just wouldn't let me.
Jason Bourne is a film that, as a fan of the series, I kept trying to like. It just wouldn't let me.
A wrenching and ultimately inspirational film about college linebacker Steve Gleason's battle with ALS.
"The Ballad of Narayama" is a Japanese film of great beauty and elegant artifice, telling a story of startling cruelty. What a space it opens…
Patrice Leconte's "Monsieur Hire" is a tragedy about loneliness and erotomania, told about two solitary people who have nothing else in common. It involves a…
Ken Loach's "I, Daniel Blake" wins the Palme d'Or at the 69th Cannes Film Festival.
Barbara Scharres on the cats of Cannes 2016.
The complete list of movie recommendations from writers at RogerEbert.com.
Writers at RogerEbert.com pick their favorite cinematic remedies to elevate their moods.
Writers at RogerEbert.com pick their favorite movies featuring star-crossed lovers.
Writers at RogerEbert.com pick their favorite movies featuring aliens and UFOs.
A table of contents featuring our coverage from the 2016 San Diego Comic-Con.
A report from Comic-Con 2016 on the various ways to celebrate the 50th anniversary of "Star Trek."
* This filmography is not intended to be a comprehensive list of this artist's work. Instead it reflects the films this person has been involved with that have been reviewed on this site.
Strong female characters and "Trinity Syndrome"; Spielberg's next two films; the ugly aftertaste of Louie Season 4; 'Mad Men' and family relations; Roddy McDowall's home movies.
Recent releases on Blu-ray, including Cat People, Death Wish, Thunderbolt and Lightfoot, and more.


text:
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Dog, Dalmatian, (Portrait)
Credit: Duncan Smith
Creative #: 200249063-001
License type: Royalty-freeRoyalty-free pricing is based solely on the size of the product you need, not the specific use. You don't have to pay any additional royalties on a use-by-use basis. Once you license a royalty-free product, you may use it multiple times for multiple projects without paying additional fees. (Pornographic, defamatory, libelous or otherwise unlawful use of any image is, of course, prohibited.)
Collection: Photodisc
Release info: Property released
Similar imagesSearch ResultsSame series
Dog Dalmatian Stock PhotoAnimal Body Part,Animal Head,Color Image,Dalmatian Dog,No People,One Animal,Panting,Pets,Photography,Spotted,Studio Shot,Vertical,White BackgroundPhotographer Duncan SmithCollection: Photodisc


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Where in the world is Nvidia's Titan Z graphics card? The dual-GK110 monster was revealed in March, but we haven't heard much about it since—at least not officially. Rumors abound that the card is delayed or possibly even canceled altogether. The reason? The $2,999 Titan Z is apparently slower than AMD's dual-Hawaii Radeon R9 295 X2, which sells for a mere $1,500.
As it turns out, there's some evidence to support that claim. A member of the Linus Tech Tips forums has posted images from a review of the Titan Z published by Hong Kong computer magazine E-Zone. My browser's translation engine can't make any sense of the Chinese characters in the images, but the numbers in the performance table are easy to understand. According to E-Zone, the Titan Z is slower than the Radeon in 3DMark, Battlefield 4, and Sleeping Dogs. The GeForce actually comes out ahead in Batman: Arkham Origins and Tomb Raider, though.
Interestingly, E-Zone indicates that the Titan Z consumes about 60W less than the Radeon under load. The GeForce GPUs reportedly run 20°C hotter than their Hawaii counterparts, too, likely due to cooling differences. The Titan relies on traditional air cooling, while the Radeon is strapped to a closed-loop liquid cooler.
When asked about the cancellation rumors, Nvidia told Gamers Nexus that the Titan Z is still on track for a Q2 release. The second quarter usually ends in June, but Nvidia's fiscal schedule lags behind the normal calendar by two months (the company's first fiscal quarter ended April 27), so we could be waiting a while for the Titan Z to make its official debut.
Even if the dual-chip Titan isn't the fastest gaming card around, its double-precision compute prowess should be a hit with folks who use GPUs for general-purpose number crunching. We should also note that E-Zone's benchmark scores appear to be in frames per second. Our latency-focused methods exposed some troublesome frame time spikes in the Radeon R9 295 X2 that don't show up in FPS averages. We ran into multi-GPU scaling issues with the card, as well. Despite what the initial numbers say, the Titan Z may yet provide a better overall gaming experience. Thanks to Videocardz for the tip.
|2. chasp_0 - $251
|3. mbutrovich - $250
|4. Ryu Connor - $250
|5. YetAnotherGeek2 - $200
|6. aeassa - $175
|7. dashbarron - $150
|8. Captain Ned - $100
|9. Anonymous Gerbil - $100
|10. Bill Door - $100
This discussion is now closed.
|Samsung's Portable SSD T3 reviewed
|TR BBQ Day Shortbread
|Watch the "second-10th" TR BBQ live in 360 degrees right now
|G.Skill hooks up the TR BBQ with some giveaway goodies
|We threw a Minecraft party to test Samsung's Gear VR headset
|Deals of the week: cheap solid-state storage and more
|Sapphire Nitro+ Radeon RX 480 hot-rods Polaris 10
|AMD gets back in the black with its second-quarter financials
|Nvidia unveils a Pascal-powered Titan X with 11 TFLOPS on tap
|I'll...just review the thin air on my desk where a GTX 1060 would fit, since that's what we have.


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STARmeterSEE RANK
Down 4,800 this week
Scot Cooper
Rising star Scot Cooper is an award winning South African actor. Represented in Cape Town and Los Angeles, he has trained under world renowned Meisner teacher William Esper at the Esper Studio in New York. Scot has worked alongside actors such as Olga Kurylenko, James Purefoy, and Rupert Friend. He co-starred in the finale of Homeland, season 4. ... See full bio »
Born:in East London, South Africa
More at IMDbPro » Contact Info: View agent and manager
Represent Scot Cooper? Add contact information


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Ready-to-Go Missions - eBook
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Have questions about eBooks? Check out our eBook FAQs.
Product Description
You can spend less time on planning event details, and more time directly engaging your teens. These plans cover every detail, even laying out hour-by-hour schedules for you. Think of the convenience. Think of all the up-front prep time you can save.
Product Information
|Format: DRM Free ePub
Vendor: Abingdon Press
Publication Date: 2010
Availability: In Stock
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Publisher's Description
Ready-Made Event Packages
Just Add Youth Group
Fully Loaded
All Options, Extras, and Side Items Included
These ready-made missions packages are completely accessorized with everything you need to easily prepare and smoothly execute effective and meaningful mission activities for youth.
You can spend less time on planning event details, and more time directly engaging your teens.
These plans cover every detail, even laying out hour-by-hour schedules for you.
Think of the convenience. Think of all the up-front prep time you can save.
Ready-to-Go Missions is third in a series of off-the-shelf resources for youth workers, folowing Ready-to-Go Youth Group Activities, and Ready-to-Go Retreats & Lock-Ins.
The unique benefit of the Ready-To-Go series is that these activity materials go beyond merely offering ideas.
Ready to Go instead provides fully developed activity & event plans. These allow the youth leader to host youth events of substance & quality, with a minimal up-front time investment.
Its like offering a baked cake instead of a cake recipe & ingredients. Or, offering a fully-assembled ready-to-use playground set
instead of loose components in a box with assembly instructions.
Ready-to-Go Missions offers examination of how missions can be extremely important for youth ministry development.
The book also includes complete plans for short-term mission projects near home, as well as longer mission trips. Convenient time-saving reproducible forms are also included.
Just add youth.


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Hackensack, NJ 07601
I am committed to serving the community by providing excellent pediatric medical care. My goal...Read more
For the best healthcare for your needs, choose a doctor who specializes in your medical condition.
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Check to see that this provider treats your medical condition.
Check to see that this provider performs the procedure that you need.
Check to see if your provider has any malpractices, board actions, or sanctions.
Learn more about where this provider went to medical school, residency, and more.
View information about special awards and recognition for this provider.
Check to see what languages this provider and/or staff speak.
Likelihood of recommending Dr. Abulaimoun to family and friends is 4.7 out of 5
Check out the quality of care at the 5 hospitals where Dr. Abulaimoun has admitting privileges.


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Kodak ASF Photoshop Plugins
Kodak are a name to be trusted - always have been and hopefully always will be. Having fully embraced the digital revolution some years ago, the boys at Eastman have since acquired ASF - a specialist in digital photographic correction applications. These plug-ins for Photoshop (and compatible software) are the latest result.
A set of tools for correcting the most common problems within digital images, they aim to fix the flaws at the touch of a virtual button. And there's no argument from us that they do just that, and they do it very well.
But we do have some issues, namely, the price. These plugins retail at $49 each so the full set is going to set you back three figures. Are they worth it?
From a professional image editor's point of view, almost certainly. However, a pro would probably be able to correct most things using the existing tools within Photoshop itself.
Kodak's SHO plugin mirrors almost exactly the Highlights/Shadows adjustment in CS2 (in testing the default results were almost identical). The GEM software is an image noise and grain reducer and works very well, although the default setting was a little too harsh for our liking. The same could be said for the GEM Airbrush - the quick result of one snap had a rough and rugged colleague looking like a Barbie doll - in his complexion at least. The ROC plugin corrects colour and this performs very well.
All these little applications are fully customisable in their effect and the pro versions all handle 16-bit colour and often have a few extra bells and whistles.
One thing we definitely didn't like was the preview window where you see the effect of your tinkering. The interface dominates the screen but at the same time you're frustrated at not being able to see the whole image at a decent scale. You can zoom in on specific areas, sure, but we'd like to be able to resize the window to suit our needs. No biggie, but a grumble nonetheless.
The best thing about this lot is the sheer speed at which you can become proficient and I guess that's what you're paying for. Average images soon become excellent ones and could mean the difference between commercial success and total obscurity.
So if you've money to burn then these are a extremely beneficial. Otherwise it might be worth investing in a decent Photoshop book and seeing if you can achieve the same results with the existing tools. A long-winded solution, but substantially cheaper!
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Mazda MX-5 roadster
Price £20,195 - £23,690
- Sharp, distinctive styling
- Fantastic fun to drive
- Usable every day
- Roof limits visibility
- Not the most practical car
- Interior could be more special
At a glance
- The greenest
- 1.5i SE-L Nav 2dr £20,195
- The cheapest
- 1.5i SE-L Nav 2dr £20,195
- The fastest
- 2.0i Sport Nav 2dr £23,690
- Top of the range
- 2.0i Sport Nav 2dr £23,690
"The Mazda MX-5 is the most successful sports car ever, and there are several good reasons why. It successfully combines usability, driving fun and dependability to make it one of the most engaging convertibles of all time."
The basic recipe of the Mazda MX-5 hasn't really changed over the nearly 30 years it's been on sale. The key elements are the fact that it's light, simple and handles beautifully. It doesn't rely on stratospheric power or huge amounts of grip to provide the thrills, rather using its light weight, relatively meagre power and sharp steering to provide driving fun at reasonably low (and legal) speeds.
Finding direct rivals for the MX-5 is tricky. Obviously, there's the new Fiat 124 Spider, which is basically the same car underneath as the Mazda (but uses different engines), while you could also argue the Lotus Elise subscribes to the same light, simple ethos as the Mazda and the Fiat. Despite the fact that they're coupes, the Subaru BRZ and Toyota GT86 twins also offer engaging driving experiences in a light and simple package.
With this latest generation, Mazda has managed to make the MX-5 even smaller and lighter than the previous version. Amazingly, it weighs in at less than a tonne. This low weight, combined with the inherent balance afforded by the front-engine, rear-drive layout, makes the MX-5 fantastic fun to drive. Its relatively skinny tyres mean there isn't a vast amount of grip and while this may sound like a bad thing, it means you can have fun at safe and legal speeds.
Thanks to its relatively small size, the MX-5 is very easy to drive, too, whether you're trundling around town or haring down your favourite B road. It never feels intimidating and the steering is so accurate and full of feel that you always know exactly where you're going and what the car is doing. All the controls – especially the clutch and gearshift – are light and crisp, meaning the Mazda is no chore to drive, wherever you are.
Low weight has many benefits in a car and one of them is that the less weight the suspension has to deal with, the softer and suppler it can be, therefore improving ride comfort without compromising dynamic ability. The Mazda is also reasonably quiet and refined, even at motorway speeds, so it's actually usable every day.
If you plan on taking several long trips, however, you may want a second car, as one area where the MX-5 does fall down is practicality. The boot can only swallow 130 litres (roof up or down) so there's enough room for a couple of soft weekend bags, but not an awful lot else. This is compounded by the lack of storage space inside, while some people may be disappointed by the quality of some plastics in the cabin. There are some slightly irritating features in there, too, such as the placement of the cup-holders next to your left elbow, where they can get in the way when you're changing gear.
However, the soft-top roof is very easy to operate, despite the fact that you have to do it yourself. It doesn't eat up any boot space when it's down and, although it limits visibility when it's up, it does make the MX-5 a reasonably quiet and comfortable cruiser. If you fancy an MX-5, but want something a little quieter, a model with a folding hard-top is on its way – likely to arrive in the UK in 2017.
Another benefit of the MX-5's low weight is the fact that it won't cost a huge amount to run. There are two four-cylinder petrol engines available, displacing 1.5 and 2.0 litres respectively. Both are hooked up to a six-speed manual gearbox as standard and return 47.1 and 40.9mpg on average respectively. This equates to CO2 emissions of 139 and 161g/km, resulting in road-tax bills of £130 and £185 respectively.
Although neither engine provides a huge amount of performance, that's not really the point of the MX-5: it's all about having fun in corners. It's not slow, though. The 129bhp 1.5-litre model manages 0-62mph in 8.3 seconds, while the 161bhp 2.0-litre model reaches the same benchmark in 7.3 seconds. If you want straight-line performance, you may be better off with a hot hatchback like the Volkswagen Golf GTI.
Equipment-wise, all MX-5s get 16-inch alloys, LED headlights, USB and MP3 player connectivity, as well as air-conditioning and a multifunction leather steering wheel. Our favourite trim level, however, is SE-L, which adds luxuries like climate control, cruise control, DAB radio, a seven-inch touchscreen infotainment system and Bluetooth connectivity. If you really need sat nav, you can upgrade to SE-L Nav trim for around £600 more.
MPG, running costs & CO2
SKYACTIV engine technology ensures the new Mazda MX-5 can put a smile on your face without breaking the bank
Engines, drive & performance
Light weight means the new MX-5 doesn't need loads of horsepower to offer a fun and involving driving experience
Interior & comfort
A hi-tech, high-quality interior largely borrowed from the Mazda3 hatchback makes the new Mazda MX-5 a comfortable and satisfying place to spend time
Practicality & boot space
Practicality was never a Mazda MX-5 strong suit and that hasn't changed with this latest model
Reliability & safety
Mazda has a long record of producing dependable and safe cars and the new Mazda MX-5 should be no different


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Comfortable room and good shower
Noisy at night and first thing in the morning (overlooks the market place)
A small, friendly hotel, close to the beach and restaurants, and overlooking the market square. Clean comfy rooms with lovely soft towels which were changed each day. I had continental breakfast in my room each day, sitting on the balcony overlooking the market square where there was always something to watch going on. The roof terrace was ideal for sunbathing. The staff were friendly and helpful. It was a 2 minute walk to the fabulous beach. Although there is no restaurant in the hotel it does have its own restaurant, the Bahia, about 100 yards away on the promenade, which is excellent.
The hotel is situated overlooking the market square and it was very noisy on the Sunday morning from an early hour as the market was being set up. The next morning the street cleaning truck was out early and was very noisy, and kept coming back around the square for well over an hour (this was around 7 a.m). The hotel is opposite the town hall and very close to the church, both of which had clocks which chimed every hour. Unfortunately they didn't chime at the same time, so at midnight there was a total of 24 chimes. This went on all night so made sleeping very difficult.
Breakfast was good. Hotel standard was good and more modern then some of the reviews I read. Location was great and very pitoresk up in the mountain in between 2 beaches.
Especially receptionists are almost unpleasant and more or less ignore you. No brochure about the hotel available, no information abuot the surroundings and receptionist more or less very unhelpful, although i do speak Spanish. Hence just forget it if you don;t speak the language, even english is no good. Overall, very hard to get comprehensive information quickly about the hotel and surrounding precious villages, beaches , restaurants etc.
Very good breakfast, pool and location.
No air conditioning, no english language tv channels, very expensive bar, no alcohol or soft drinks in mini-bar.
The hotel is ideally situated about 15 mins walk from the town and commands beautiful views of the beach and cove below.
As others have observed, the bedroom corridor needs new carpet which detracts from the otherwise quality feel of the hotel. The restaurant was disappointing but that wasn't really an issue as there is an excellent choice in the town.
We stayed at a triple bed room which has fatastic view, we could see sunrise from sea on the bed. Blackfast and dinner was nice with reasonable price, we will stay the hotel again in case of visiting San jose again. highly recommended.
Wifi is available only at public area/
Quiet and wonderful atmosphere. Excellent service and best staff.
Golf course, pool
Uncomfortable low beds, poor quality mattress, pillow and linen, carpet old and dirty, cheap and damaged furniture, only Spanish channels on tv, overgrown neglected terrace.
Friendly, efficient staff. Lovely atmosphere - lots of family groups. Felt very genuine and obviously well liked by a regular (and Spanish) clientele. Location across from beach was wonderful as was the view from the bedroom and the sea air. Food was a little average but that did not detract from and enjoyable stay.
Parking, like with many hotels on the Coast Brava, was a bit difficult on arrival but the Rosamar has a good and secure outdoor car park quite nearby.
Nivel hotel close to the sea, ideal for families and quiet people. Quiet charm pool and large bedrooms.
Not very modern though charming.
The location is excellent. 10 yards from the beach. About 25-30 mins from Girona airport. (€50 in a cab although you can take the bus). Great food, drink & a very relaxed atmosphere. Good breakfast too. Highly recommended.
The receptionist was very efficient, friendly and charming. Room was clean despite the decor being dated.
Decor was a bit dated and patio door lock was broken.
The location of the hotel is perfect in Plaja d'Aro. The crew is kind. There is free wifi. The room is clean and the bathroom is confortable.
The view of the sea is breathtaking. Loved the room, very clean and comfortable. We fell asleep to the sound of the waves - a pure delight. Excellent value, with full breakfast included, couldn't ask for a better deal. Location is excellent, beach on one side and a short walk to town sports centre and bus station.
Peace & quite
No Internet station but only wifi
The location and cleanliness
The staff are untrained and unhelpful. They enter the room without knocking or checking if you are there. The breakfast uses food which looks like it is leftover from the previous day, the eggs were so hard and dry you couldnt eat them.
de sfeer erg gezellig de luxe van het all inclusive goede variatie in eten soms wat lauw maar smaak prima iedere avond entertainment
geen klachten de familie kamer beetje klein maar om te slapen prima erg schoon
Just value for money...
Very basic. Even if it fits the 4 star hotel requirements unfortunately you do not fell like staying in a 4 start hotel.
Very nice garden with pool. Lots of flowers and luxuriant greenery. Parking just sufficient alongside the hotel building. Great value for money.
Nice building with a pool. 10-minute walk to the city center and the beach. Very friendly and helpful people at the desk.
No air conditioning in the room. Low-quality breakfast. Uncomfortable beds.
Room comfort and facilities
Noise coming from the street.
excellent breakfast, shopping area close by
check in at 3pm (late)
excellent selection for breakfast,conveniently situated, close to beach and to tourist area.
often had to look for service in the bar.
Comforting and relaxing atmosphere, attention to detail, spaciousness of the room
loudness of the Dutch guests on a tennis tornament ( not hotels fault)
The hotel was very clean and the staff very attentative.
The shower area at the pool was dirty and needed attention.
This hotel was a good location for the beach about ioo yards away. The rooms were a good size
The food was a little disapointing It could of had a better selection for people to choose from
Here's why:
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Prices on airline seats, hotel rooms and car rentals can change frequently. Several people may also be trying to buy the same travel option simultaneously. As a result, you may find, on occasion, that certain prices are no longer available.
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text:
Workshop Wednesdays: Facebook for Business
Events and Classes at the Stamford Innovation Center
Wednesday, June 19, 2013 from 8:30 AM to 10:30 AM (EDT)
Who's Going
San Francisco, California
London, United Kingdom
Florence, Italy
Event Details
Live demo to setup and brand your Facebook Business Page. Whether you are new to Facebook or Started a Page that needs work, we can help! We will cover the difference between Personal and Business accounts, Selecting a Category, Privacy Settings, Administrators, Adding Images, Managing & scheduling content, How to developing a strategy, and What's new in the ever-changing Facebook landscape! Schedule a follow-up one-on-one session with Mary for personal hands-on help with your project.
Free Coffee!
Part of our new Workshop Wednesdays series presented by Mary Callahan of 341 Studios
Here's some background on Mary.
When & Where
Stamford Innovation Center
175 Atlantic St
Wednesday, June 19, 2013 from 8:30 AM to 10:30 AM (EDT)
Add to my calendar
Events and Classes at the Stamford Innovation Center
As an incubator focused on being CT's premiere resource for community-based Innovation, The SIC team is always on the lookout of ways to engage members of our community. We want to be the resource where people go when they have a question about technology, careers, business, strategy, etc. We are here to help the tech and startup community where we work and live and to participate in global thought leadership communities centered around new technology and business models.
In our work with Sikorsky, we are driving what we consider an important opportunity for smaller businesses to gain access to one of the worlds most demanding engineering organizations. We enjoy our role as recruiter of businesses to apply for the Sikorsky Entrepreneurial Challenge. And we really love coaching the finalists.
Our events are focused on delivering help and experise in key areas of business. We've hosted national leaders like Steve Hafner of Kayak, VCs including Marc Michel, Skyler Fernandes, and David Teten and many many others.
In the classroom setting, we now focus on a regular set of classes around fundimental modern skills including LinkedIn for personal and business use, Facebook ad campaigns, Branding, Strategy, etc. Our goal is to provide a platform for professionals to learn and grow around skills that are critial, in a high-impact format that can't be matched by online courses or a traditional university.
If you have any ideas for a class you'd like to take or an event you'd like to see, please let us know by writing team (at) stamfordicenter.com.