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Detection Limit of ultra-scaled Nanowire Biosensors

The fundamental detection limit of ultra-scaled Si nanowire FET (NWT) biosensors is studied with a NEGF quantum microscopic approach. For negatively charged analytes, a N-doped NWT is found to be more sensitive and to get less sensitivity degradation when increasing channel length. Our results predict threshold voltage shifts due to a single charge analyte on the order of tens to hundreds of mV in dry (air) or low ionic solution environments, which hint at single charge/analyte detection. However, the sensitivity to a single charge analyte rapidly drops down to the mV range in typical ionic solution and SAM conditions.