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Fabrication and characterization of thermal infrared sources

This work presents fabrication and characterization of thermal infrared sources based on chromium meander resistors obtained by microfabrication techniques. The infrared source fabrication is based on a simple technological approach which employs standard photolithography and wet etching processes. The electrical and optical characterization of the sources offered good results for 1 square mm area resistors based on 100 micrometers wide meanders.