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Experimental VUV absorbance study of fluorine-functionalized polystyrenes

A number of fluoro-functionalized poly(4-hydroxystyrene) derivatives, consisting of both blocked and unblocked hexafluoroisopropanol-substituted stryrenes, were prepared and their vacuum-ultraviolet absorption spectra were measured. From our efforts, we find that a wide range of synthetic flexibility exists and allows for a variety of fluorinated analogs of APEX-like and ESCAP-like copolymers and terpolymers with 157nm absorption coefficients less than 4.0micrometers . From these findings, we conclude that facile routes to high-performance 157nm resins are possible with optimum imaging thicknesses of 100 to 130nm.