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Mechanical Design and Finite Element Analysis of Tunable Fabry-Perot MEMS Structures for Adaptive Infrared Detectors

Tunable Fabry-Perot (FP) filters have been recently used in MEMS devices, such as adaptive infrared detectors. The mechanical characteristics of these filters are significantly influenced by the mechanical design of the structure, which eventually affects the filter performance and device integrity. This paper reports the mechanical design and optimization of FP filter structures by means of finite element modeling