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Application and Prospect of MEMS Technology to Geophysics

Earthquake early warning is one of the most effective means to reduce earthquake disasters. At present, many countries and regions in the world have established their own earthquake early warning systems. Compared with traditional geophone, the MEMS seismic sensor system has some advantages, including high sensitivity and compact structure, so it has been widely used in earthquake early warning systems. This paper mainly describes some projects of MEMS technology in earthquake early warning, and uses artificial excitation compares the MEMS seismic sensor system with traditional geophone. It is found that the sensitivity of the MEMS seismic sensor system is about 1.7 times that of the traditional geophone. Finally, some prospects are put forward for the application of MEMS technology in the field of earthquake early warning.