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Room temperature ozone and humidity response evolution of atomic layer deposited SnO2 sensors

This work investigates the changes in response to ozone and humidity of Atomic Layer Deposited (ALD) tin dioxide (SnO2) sensors operated at room temperature and integrated into a portable platform over several weeks. The impact of humidity is highlighted as it relates to immediate changes in ozone response and in slower changes where the history of exposure influences the surface kinetics while the adsorbed gas species attempt to reach an equilibrium state.