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Electromagnetic parameters measurement for thin film materials

A new method is proposed in this paper to measure the electromagnetic parameters of thin film materials. The multiple microstrip is used as measure configuration. The formulations are deduced to calculate the electromagnetic parameters of the thin films, and the commercial software IE3D is used to obtain the S-parameters of the configuration. The results show that, by using this proposed method, the error of the real part of permeability is less than 5% and the error of the imaginary part of permeability is below 0.05.