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Angle-resolved polarimetric phase measurement for the characterization of gratings.

A goniometric ellipsometer is used to recover the optogeometrical parameters of metallic gratings. The phase difference between TE and TM polarizations in all the diffracted orders is measured as a function of the incidence angle. The groove depth, together with the refractive indices of all the media of the diffracting structure, is determined for a holographic sinusoidal aluminum grating. It is shown that a thin layer of alumina on top of the grating must be considered.