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High performance accelerometer based on CMOS technologies with low cost add-ons

Austria Mikro Systeme International has developed a high performance, one axis accelerometer with capacitive readout for the automotive sensor market. The full-scale range is customizable from 1 g to 200 g. The novel sensor concept combines the advantages of monolithic and hybrid concepts and focuses on mature, high yield/low cost batch fabrication process modules. Industrialization and performance capabilities of the sensor concept have been demonstrated.