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On-line calibration of phase-shifter in phase-shifting interferometer

Phase-shifting interferometry (PSI) as a high accuracy measurement method is widely used in modern measurements. Accurate calibration of phase-shifter is very important if good measurement results are expected from PSI. A new method of on-line calibration for phase-shifter is presented. By constructing a mathematic model for intensity of interferogram associating with the phase-shifter's characters, the coefficients of the function can be solved by introducing Damped-Least-Square methods. Results of computer simulation show a high accuracy after several fast iterations. Experimental results are presented for on-line phase-shift calibration.