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Comparison of Polypyrrole Organic Thin Film Actuators with or without Silicon Microspring

Organic actuators utilizing electrochemomechanical strain are of special interest for application in some types of microelectromechanical systems (MEMS). Amongst of those, polypyrrole (PPy) actuators have advantages of their large strain and stress. In this work, two kinds of PPy thin film actuators with or without a silicon MEMS microspring were fabricated and compared. The polypyrrole thin films with the thickness of 91 µm were deposited by galvanostatic electropolymerization. One of the actuators was inserted with a silicon MEMS microspring with the length of 15 mm, the width of 0.5 mm, and the thickness of 60 µm. The MEMS PPy actuator exhibited nearly 12% of the electrochemical strain under the load stress of 0.3 MPa in a water solution of an electrolyte, lithium bis-trifluoromethane sulphonyl imide (LiTFSI) at the bias sweeping rate of 10 mV/s in the voltage range between −1 and 1 V. Although the performances of the MEMS acstuators showed some degradation compared to the PPy actuator without the MEMS microspring, the MEMS PPy actuator may be beneficial to drive MEMS structures, which require a large strain and a large stress with a low voltage actuation.