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Design and Simulation of a Novel Vertical Hall Sensor With High Negative Differential Sensitivity

We report on the design and simulation of a novel vertical Hall sensor, which exhibits highly nonlinear characteristics between Hall voltage and bias voltage, featuring a region of large negative differential sensitivity. Based on these features, novel techniques for exciting the Hall plate and for signal extraction are suggested, allowing for further enhancement of the residual offset-limited dc resolution of in-plane magnetic field-sensitive Hall sensors, in particular, and integrated three-dimensional Hall sensors, in general.