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Nature of Dopants and Effects on Sensitivity of SnO2 Based Gas Sensor

Abstract In this work, a thick film SnO2 sensor was fabricated on a 1″ × 1″ alumina substrate. It consists of a gas sensitive layer (SnO2) doped with Pd and Pt; a pair of electrodes in array form underneath the gas sensing layers serves as a contact pad for sensor and a common heater element on the backside of the substrate. Alumina substrate (96%) has been used as a substrate for sensor fabrication. The fabricated sensor was tested for varying concentration of LPG and methane in a locally developed test chamber. The response of sensors to varying concentration of LPG and methane was studied at 350°C. The Pd-doped sensor was found to be more sensitive towards LPG and methane.