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Research of Film Thickness Online Measurement System

Aiming at the problem of traditional thickness measurement methods, the paper proposes a design and realization scheme of non-contact high-precision online thickness gauge. Double sensors are used to realize the differential measurement which can effectively reduce errors caused by the vibration of the tested object. TMS320F2812 is chosen as the main control chip to realize data collection, equipment control and signal processing. Finally algorithms of signal filtering and curve fitting are designed to improve the precision. Practical application shows that the system has easy operation, high resolution, stability and reliability.