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Silicon subwavelength gratings for reflective color filters with wide viewing angle

We designed and fabricated three primary color filters using structural color by subwavelength gratings. They are expected to be applied to devices such as displays. Fabricated red, green and blue filters have pitches of 400, 340 and 300 nm, and peak reflectivities of 0.8, 0.55 and 0.5, respectively. They also have wide viewing angle of 50 deg when the incident light is s-polarized.