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Design and Implementation of Multi-mode Scanning Atomic Force Microscope

Atomic force microscope (AFM) is used to scan the topography of samples using a sharp probe; however, conventional AFM devices are limited by XY scanners based on piezoelectric actuation. This paper proposes a novel AFM system featuring multi-mode scanning via two high-precision positions called piezoelectric actuation positioner (PAP) and precision electromagnetic positioner (PEP). The 3 degrees of freedom (DOF) provided by the PAP and the 2 DOF provided by the PEP greatly enhances the flexibility of the scanning positioners, allowing operation in the following three modes: 1) Short-range scanning; 2) Long-range scanning; 3) Image-series scanning. Extensive experimentation demonstrated the feasibility of the proposed system.