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Polar etching, a simple technique for finger length weighting surface acoustic wave transducer structures

The finger overlap function of a surface acoustic wave interdigital transducer determines its frequency response. During development work it is convenient to experimentally modify the overlap functions but the cost of doing this at the primary artwork stage may be prohibitive, especially for structures with large time bandwidth product. A method of selectively breaking alternate fingers of a standard aluminium interdigital transducer at the final device stage is proposed. The technique employs a simple electrochemical process together with a low definition artwork of the weighting function. A similar technique is proposed for use with chromium patterns.