{'fraction_non_alphanumeric': 0.019742489270386267, 'fraction_numerical': 0.010300429184549357, 'mean_word_length': 5.072916666666667, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Fabrication of Bidirectional Electrothermal Microactuator by Two-Photon Polymerization



Alternative micro/nanofabrication methods are being investigated actively due to the cost, time
consumption and complexities involving in conventional MEMS fabrication practices.



 The majority of fabrication techniques are based on several strictly followed steps, thus demanding more
extended periods and attention.



 One of the fabrication techniques that emerged to address those issues mentioned above is called Two-Photon
Polymerization (2PP). In this work, 2PP based 3D printing technique has been utilized to perform the fabrication of an
electrothermal microactuator using support structure, and its operability has been illustrated via experiments.



The characterization results show a movement of 2.82 µm when a voltage of 5 to 7V is applied to the
microactuator. Any voltage above 7V causes the breakage in the actuator arms. Since it is a bidirectional actuator,
therefore, the total movement span is 5.64 µm.



 Finite Element Analysis (FEA) and Analytical analysis of the designed electrothermal structure were
performed before the fabrication process.
