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Approximate Analytical Solutions of the Pull-In Behavior of an Electrostatically Actuated Clamped-Clamped Micro-Beam

For the deformation problem of electrostatically actuated clamped-clamped micro-beams, pull-in behaviors of the micro-beams have been analyzed by using Rayleigh-Ritz method. Approximate analytical expressions for pull-in voltage and normalized pull-in displacement of the micro-beam have been obtained. When the pull-in occurs, the pull-in voltage and normalized pull-in displacement of the micro-beam at the mid-span position are 38.6V and 0.398, respectively. The results show that the approximate analytical solution possesses high accuracy.