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Improvement of Temperature Characteristics of Boundary Acoustic Wave Resonators Using Multilayered Electrodes

In this paper, we describe a new boundary acoustic wave structure employing multilayered metal electrodes with a high-density metal and a low-density metal. By using this structure, such as Pt/Al/Pt, the electromechanical coupling coefficient (k2) and temperature coefficient of frequency (TCF) of the boundary acoustic wave can be changed. We theoretically studied the dependence of the energy distribution of the boundary wave on the position of the total electrode gravity center when the electrode layer structure is changed. It was experimentally confirmed that k2 and TCF can be changed simultaneously. By using this structure, we developed a novel filter with good electrical characteristics, and a very small variation of the filter characteristic with temperature (almost zero TCF) was successfully realized.