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A Double-gated CNF Tip Array for Electron-impact Ionization and Field Ionization

Carbon nanofibers have been investigated for a wide range of applications today. In particular, due to their remarkable conductivity, carbon nanofibers have generated a lot of interest for applications in vacuum microelectronic devices [1-2]. For example, the ionization sensor for gases is one of the most important applications since the conventional ionization sensors are bulky, require high-voltages, and consume high power. The purpose of this project is to fabricate carbon nanofiber field emission and field ionization arrays, which can be utilized in a micro-gas sensor. This device can help reduce the size of the sensor and operating voltages required for gas analysis.