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DESIGN APPROACH FOR HIGH-DYNAMIC PLANAR MOTION SYSTEMS BASED ON THE PRINCIPLE OF KINEMATICALLY COUPLED 
FORCE COMPENSATION

Machine tools’ feed dynamics are usually limited in order to reduce excitation of machine structure oscillations. Consequently, the potential increase in productivity provided by direct drives, e.g. linear motors, cannot be exploited. The novel approach of the Kinematically Coupled Force Compensation (KCFC) applies a redundant axis configuration combined with the principle of force compensation and thus achieves an increase in feed dynamics while drive reaction forces cancel out each other in the machine base. In this paper, the principle 
of KCFC is introduced briefly. Subsequently, the basics for the realisation of a highly dynamic KCFC motion system with planar motion are derived and discussed. In order to achieve highest acceleration (> 100 m/s²) and jerk (> 100000 m/s³), a mechatronic system with specially designed components for the mechanical, electrical and control system is required. Thus, the design approach presented in this paper applies lightweight slides, 
a decoupled guide frame and voice coil motors operated at high frequencies for the pulse width modulation and control loops.

