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The Synthesis and Characterization of Ba0.5Sr0.5TiO3 Film Fabricated by Micro Arc Oxidation

Ba0.5Sr0.5TiO3 film was successfully fabricated by micro arc oxidation of titanium plate in aqueous solution containing Sr(OH)2 and Ba(OH)2 for 25 minutes. X-ray diffraction , energy dispersive spectrometer and scanning electron microscopy were used to characterize the crystalline structure, elements composition and surface morphology and HP4284 capacitance prober was used to analyze the dielectric properties of the film. The micro arc oxidation film is mainly composed of tetragonal Ba0.5Sr0.5TiO3 phases and possesses both high dielectric constant of 454.2 and low dielectric loss of 0.052 at the frequency of 100Hz.The surface morphology appeares smooth and homogeneous except that some holes are uniformly distributed outwardly.