{'fraction_non_alphanumeric': 0.020061728395061727, 'fraction_numerical': 0.0015432098765432098, 'mean_word_length': 6.131868131868132, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters

InP-based microstructuring optimization is presented in order to develop the fabrication of highly selective and widely tunable optical filter for WDM applications. Technological constraints such as etching selectivity, etching anisotropy, sticking phenomena and residual stress are listed and their respective practical solutions are demonstrated. Opto-electro-mechanical simulations combined with this technological 'know how' have yielded to the fabrication of 8 air gaps InP-based microstructures suitable for production of optical filter demonstrators.