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Fundamental limits of disk flexure resonators

High performance PZT-on-silicon disk flexure resonators were recently demonstrated with peak |S21| of −1 dB with direct 50 Ω termination, high bandwidth tunability, and high coupling at 22 MHz. This paper explores the performance limits and design optimization of this new resonator in the space of radius and silicon thickness of the (1,1) disk flexure mode. This effort is enabled by the Rapid Analytical/FEA Technique, a novel method for expedited acoustic resonator simulation. Simulations indicate that monolithic integration of disk resonators with −0.5 dB max|S21| may be achieved across a wide range of HF and low-VHF frequencies without the need for external impedance matching.