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Design of a novel uniaxial tunneling magnetoresistance accelerometer

In this paper, the design, the simulation and the experiment of a uniaxial accelerometer based on tunneling magnetoresistance and 3D printing technology are presented. The uniaxial tunneling magnetoresistance accelerometer mainly consists of a linear tunneling magnetoresistance (TMR) sensor, a proof mass with a permanent magnet, a spring beam and a frame structure based on 3D printing technology. The structure simulation results demonstrate that the output displacement of proof mass has a good linear relationship with the input acceleration. The magnetic field simulation illustrates that the magnetic field intensity has an approximately linear relationship with the horizontal displacement when the horizontal displacement from the center of proof mass range from 4mm to 10mm. Then the measurement circuit and prototype is implemented. Experimental results indicate that the uniaxial tunneling magnetoresistance accelerometer has a scale factor of 676mV/g and the bias stability of 134.6ug in Allan variance, and the nonlinearity degree of the tunneling magnetoresistance is 2.87%.