{'fraction_non_alphanumeric': 0.042899408284023666, 'fraction_numerical': 0.011834319526627219, 'mean_word_length': 4.737288135593221, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long x-ray mirror

A surface profiler system with a high accuracy of the order of nanometers has been developed for a half-meter-long X-ray mirror. This system is based on microstitching interferometer (MSI) and relative angle determinable stitching interferometer (RADSI). Using elastic hinges and linear actuators, we designed the 5-axis- and 6-axis stages for the MSI and RADSI, respectively, for the half-meter-long X-ray mirror. A test mirror of length 0.5 m was used to measure the height accuracy (1.4 nm in rms) and lateral resolution (36 μm) of the proposed system.