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Circular Plate Electrostatic Zipping Actuator for the Application of a Tunable Electromagnetic Cavity Resonator

This paper presents a proof-of-concept design of a MEMS tunable capacitor for an electromagnetic cavity resonator, by using a circular plate electrostatic zipping actuator. The design, fabrication and mechanical testing of a device containing the actuator and the capacitor will be presented. The testing results are compared with a finite element model using coupled-field analysis with ANSYS.