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Surface shape measurement of tilted surfaces by wavelength scanning interferometry

Wavelength scanning interferometry is applied for the shape measurement of tilted surfaces both diffusively reflecting and milled. We succeeded to measure those with tilt angles up to 45 degrees. We also investigated the influence of the tilt angle on accuracy and noise of the results of measurement. We found that the standard deviations of the measurement increase remarkably as the tilt angle increases owing to the more appearance of erroneous pixels. In the milled surface, the influence of the erroneous pixels is stronger than that in the diffuse surface. We also found that the accuracy of the measurement depends on the tilt angle. We compared the dependences of the standard deviations of the diffuse surface and the milled surface on the given tilt angle. We found that the tendency also depends on the surface structure.