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Reduction of Space Charge Distortion in Retarding Field Energy Analyzers

The modelling, measurement, and control of ion flux energy distributions are of growing in terest for the fabrication of complex structures in microelectronics manufacturing processes. Retarding field energy analyzers (RFEA 's) enable the direct measure of these energy distributions, and can be used to measure the ion flux spectrum incident on these structures in order to elucidate the flux contribution to critical process parameters for material deposition and pattern etching.