{'fraction_non_alphanumeric': 0.017436791630340016, 'fraction_numerical': 0.0026155187445510027, 'mean_word_length': 5.41340782122905, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Effects of cyclic temperature change on the out-of-plane deformation and diffraction angle of a surface micromachined curved grating

This study examines the effects of cyclic temperature changes on the stress-induced bending of a surface micromachined gold-coated curved diffraction grating. The out-of-plane deformation of the grating is analyzed under different temperature conditions using a finite element model. A numerical and experimental investigation is performed into the effects of cyclic temperature changes on the out-of-plane stress-induced deformation of a surface micromachined curved diffraction grating. The results show that the residual stress induced within the gold coating on the cantilever beam supporting the diffraction grating increases with an increasing post-processing temperature and prompts a larger out-of-plane deformation as a result. The correlation between the post-processing temperature and the diffraction angle of the curved grating is also investigated. It is shown that the diffraction angle converges toward a lower limiting value as the temperature is increased toward a value of approximately 250 °C.