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Piezoelectric microsensors based on thin ferroelectric films

On the basis of the thin films of BaTiO3 and LiNbO3 the piezoelectric isotropic and anisotropic sensors of dynamical deformation (SDD) have been constructed and investigated. It has been ascertained that the electrical signal of isotropic SDD is proportional to the sum of the main components of the relative deformation tensor of the surface of the sample whereas the anisotropic sensor signal depends on the angle (phi) between the sensor axis and the main axis of the deformation tensor of the sample. The stability of their parameters has been ascertained under repeated deformation of the sample surface and repeated heating/cooling.