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Electron Beam Observability and Controlability for the Debugging of Integrated Circuits

Observability and controlability using an electron beam are addressed in this paper. For observability, a link between a CALMA description and a Scanning Electron Microscope (SEM), based on a superimposition technique, is detailled. For controlability, a study of the Electron Beam Induced Current (EBIC) phenomenon in a diffused diode is presented.