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Onium salt structure/property relationships in poly(4-tert-butyloxycarbonyloxystyrene) deep-UV resists

A series of sulfonium and iodonium salts was synthesized and the effect of onium slat structure on UV absorbance, thermal stability, and solubility in propylene glycol methyl ether acetate (PGMEA) was assessed. Several of these onium salts gave usable deep UV photoresists when combined with poly(4-tert-butyloxy-carbonloxystyrene). The lithographic sensitivity and latent image stability of these photoresists were strongly influenced by the structure of the incorporated onium salt.