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Combination of Double Scale Measurements for Large Scale Surface Profile Measurement

In the field of surface profile measurement, many software datums were proposed. When a measured surface profile is large, the number of sampling point becomes large. As the result, the influence of the random error becomes large. To decrease the error propagation, the concept of the division of the length datum is applied to the integration method for surface profile measurement. Analytical results and simulation show when integration method is used as the software datum for surface profile measurement, combination of the large scale integration method and short scale integration method is useful to decrease the error propagation.