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Mechanical and Tribological Properties of Diamond-Like Carbon Coatings with Different Ni Content

Ni-doped diamond-like carbon coatings were deposited on silicon wafer by magnetron sputtering. The Ni content was controlled by changing the Ni target current. The Ni content, mechanical properties and tribological properties of the coatings were systematically studied by Raman spectroscopy, nano-indentation and ball-on-disc tester. The highest hardness and internal stress are obtained at the Ni content of 2.3%. The friction coefficient and wear rate lower with the decreased of the Ni content, which may be responsible for the excellent tribological properties.