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Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor

We fabricated MEMS-based optical fiber pressure sensor with anodic bonding. The vacuum-sealed microcavity with a thin silicon diaphragm is used as sensing element and its deformation characteristics determine the pressure measurement performance. Considering residual gas inside Fabry-Perot cavity and the thermal properties of material, we established a sensor’s temperature response mathematical model based on ideal gas equation and elastic theory. Temperature experiment of this sensor was carried out under vacuum. This work will provide a guide of temperature compensation process for achieving high precision pressure measurement.