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Microelectronic Fabrication of Transition Edge Sensors

Achieving optimum spectral energy resolution in conventional scanning electron microscopes (SEM) can be accomplished by using microcalorimeters. Improvements in device design are being studied, although many research groups have developed fabrication techniques that produce consistent results [1]. Here, we discuss the fabrication method that we are using to produce microcalorimeters using superconducting transition edge sensors (TES) as thermometers, and some of the roadblocks we are observing.