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An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification

A simple MEMS optical fiber pressure sensor with the Fabry-Perot interferometer configuration is constructed that is based on a square silicon diaphragm and the intensity demodulation technology. A large area ratio of the moving mirror to the stationary one is employed to minimize the non-planarity of the deflection, and a reference light generated by a 2><2 optical fiber coupler is used to reduce the errors that are produced by the intensity variations of the light source. The theoretical analysis, simulation and experimental results all show that the pressure sensor has reasonable sensitivity, stability and measurement range. With a low cost and simple fabrication process, this sensor has great potentials for mass production and commercialization.