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Microsensors and actuators based on single-crystal silicon in miniature gas chromatographs and analysers

The excellent properties of single-crystal silicon allow the design of both microsensors and microactuators for miniature gas analysers and chromatographs, combustion and toxic detecting devices, ecology monitoring systems and more. It may not be possible to fabricate miniaturized components, using methods other than those used in the semiconductor industry. The authors observed three kinds of microsensor: thermoconducting, thermocatalytic and semiconducting. The same technology may be used for the design of both microactuators (micropumps, injection valves, etc.) and microcolumns.