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A MEMS‐based heating holder for the direct imaging of simultaneous in‐situ heating and biasing experiments in scanning/transmission electron microscopes

The introduction of scanning/transmission electron microscopes (S/TEM) with sub‐Angstrom resolution as well as fast and sensitive detection solutions support direct observation of dynamic phenomena in‐situ at the atomic scale. Thereby, in‐situ specimen holders play a crucial role: accurate control of the applied in‐situ stimulus on the nanostructure combined with the overall system stability to assure atomic resolution are paramount for a successful in‐situ S/TEM experiment. For those reasons, MEMS‐based TEM sample holders are becoming one of the preferred choices, also enabling a high precision in measurements of the in‐situ parameter for more reproducible data.