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A System-Level Simulation Approach for Analyzing MEMS Gyroscope Manufacture Error

In this paper, an effective system-level simulation approach for MEMS gyroscope is reported to analyze the effect of imperfections. This approach establishes the dynamic model of gyroscope with manufacture error by model-order reduction (MOR), and deeply the paper provides an electrical system model in Verilog-A to simulate with interface circuit. The system model can capture typical effects such as quadrature and synthetic signal, which represent the degree of structural asymmetry due to manufacture errors. With this flexible approach, the dimensional errors in supporting beams are evaluated by quadrature error signal of the outputs. The match of the practical experiments and the simulation within less than 9.22% deviation has proved the feasibility of this approach.