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Analog Micro-Clock Driven by Scratch-Drive Actuators

Scratch drive actuators (SDAs) have been used in a wide variety of MEMS applications. Generally speaking, SDAs are convenient because the entire SDA structure is displaced during actuation, which is useful for motion over long distances. SDAs are capable of producing 100 μN of force [1] and have a typical step size on the order of 10 nm, so that a driving signal modulating at a frequency of 100 kHz corresponds to a velocity on the order of 1 mm/s. Finally, the step size and force output of an SDA can, to a degree, be tuned simply through the selected geometry. These attractive features of the SDA make it one possible mechanism for actuating an analog micro-clock. SDAs have been researched extensively but certainly not exhaustively, with several papers published in the field of dimension optimization by Akiyama, Fujita, and others [1][2][3]. Additionally, SDAs have been used extensively as actuating mechanisms for rotating movement [4] as well as linear positioning [5].