{'fraction_non_alphanumeric': 0.03151862464183381, 'fraction_numerical': 0.0, 'mean_word_length': 5.3545454545454545, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Performance assessment of a multi-level repulsive-force out-of-plane microelectrostatic actuator

A multi-level repulsive-force out-of-plane microelectrostatic actuator is proposed in this paper. The actuator uses a repulsive force instead of an attractive force and thus avoids the "pull-in" effect associated with conventional parallel-plate microelectrostatic actuators. The multi-level repulsive-force actuator is modelled, and the performance of an example design of the actuator is presented through numerical simulations. Simulation results show that the multi-level actuator can output a stroke much larger than that of a two-layer repulsive-force actuator when subject to the same voltage.