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Terahertz band on-chip one-sided directional wide band slot array antenna

In this paper, the design of terahertz band on-chip slot array antenna for imaging devices is designed and tested. Terahertz waves have a high spatial resolution and material permeability, and are suitable for imaging devices that perform nondestructive and non-contact inspections, since there are a lot of substances with absorption spectra in the terahertz frequency band. However, imaging devices using rectifier detectors currently being developed have a problem of low detection sensitivity in the terahertz band. Therefore, in this study, we designed a broadband one-sided directional slot array antenna for terahertz imaging, and fabricated the prototype antenna using a 45 nm SOI (silicon on insulator) technology. The size of the proposed two array antenna is 210 x 290 μm. The maximum gain is 6.13 dBi at 0.84 THz. The 3 dB band is 0.79 THz to 1.07 THz in the simulation.