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Organic Vapor Sensitivity In A Porous Silicon Device

Organic vapor sensitive device using anodized porous silicon has been developed. The device consists of two pn junctions surrounded with the porous silicon layer as a vapor sensing element. The devices show an increase of current for exposure to thousands ppm of organic vapor at room temperature. A high sensitivity is observed for ethanol vapor. It is discussed that the adsorption of polar molecules induces a "soft" breakdown in the reverse biased pn junction.