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Effect of Temperature and Applied Bias on Deflection of PZT Actuators with Different Metal Slides

Lead zirconate titanate (PZT) ceramics are widely applied in manufacturing transducers, sensors etc [1-3]. In all of these applications, the PZT ceramic plates are bonded with a metal substrate making out to an actuator for generating a deflection. Large amount of research work has been done on investigating electrical properties [4-6] of the PZT ceramic plates, the influence of the environmental factors on their performance and mechanisms of electrical degradation phenomenon [7-9]. In this paper, two kinds of metal substrates (Kovar alloy and Titanium) are applied for bonding with the PZT ceramic plates. Experimental results show that, the materials of metal substrates are also severely influence the output deflections of the PZT actuators. In general, for both the two types of samples, they are with a better deflection at a higher working temperature, but the PZT actuator samples with Kovar alloy substrate is with better net deflection.