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Design and Modeling of an Electromagnetic Levitated and Actuated Micromotor

The design of an electromagnetic levitated and actuated micromotor is presented. The micromotor is consists of a counter-circular tracks that provide stable levitation force and radial parallel tracks that produce motoring rotational torque. Using simple filamentary representation of different features of the micromotor design, analytical expressions of the electromagnetic force produced by the features are derived and are used as foundation for the micromotor design. Finite element modeling is then used to analyze the actual micromotor design layout. From both the analytical and modeling results, the effects of different design features are presented. Finally, a macro-scale demonstrator is constructed to corroborate the micromotor design.