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Laser-induced defects in optical multilayer coatings by the spatial resolved method

The spatial resolved method, which measures the laser-induced damage fluence by identifying the location of the damage point in the Gaussian beam three-dimensional direction, is demonstrated. The advantages and practicality of this method have been explained. Taking a triple frequency beam splitter as an example, the defect damage fluence can be accurately calculated by the spatial resolved method. The different defect damage performance of the triple frequency splitter is distinguished under irradiations of only the 355 and 532 nm lasers. The spatial resolved method provides a way to obtain precise information of optical film defect information.