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Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer

Sinusoidal-phase modulation interferometer is a new type of optical precision measuring instrument with nanometer accuracy real-time surface profile measurement. This paper based on real-time surface profile measurement of sinusoidal-phase modulation interferometry, researched filter theory and phase-interference in real-time measurement systems, its phase error is analyzed, and it discusses the theory of error types and causes of error, error estimation and derived measurement formula. Experiment proves the correctness of theory and application of research findings in the works in a certain significance.