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Scatterometer and scatteroscope for testing optical surfaces

An instrument for measuring the roughness of optical surfaces was recently built in the Institute of Applied Optics. It is especially useful for testing highly polished surfaces of glass, silica, metals and for visualization of digs, scratches, surface microirregularities and dust particles. Results are compared with the rms surfaces roughness obtained by phase-stepping Differential Interference Contrast (DIC) technique and Total Integrated Scattering (TIS).