{'fraction_non_alphanumeric': 0.017902813299232736, 'fraction_numerical': 0.0, 'mean_word_length': 5.929203539823009, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Silicon oxynitride technology for integrated optical solutions in biomedical applications

Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide range of integrated optical devices operating at visible or NIR wavelengths. High-quality channel waveguides are reliably fabricated by plasma enhanced chemical vapor deposition and reactive ion etching following standard lithography. Based on a general, polarization-independent channel waveguide layout various arrayed waveguide gratings were designed, realized and tested for on-chip spectrometers in Raman detection and optical coherence tomography (OCT). With this approach Raman spectra of silicon and cyclohexane test samples are measured. An OCT image of a phantom sample is produced.