{'fraction_non_alphanumeric': 0.026874115983026876, 'fraction_numerical': 0.008486562942008486, 'mean_word_length': 5.742857142857143, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
MEMS shock sensor fabricated on flexible substrate

Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors[1, 2] on flexible substrates[1], none of the sensors have been integrally fabricated on the substrate[3]. Fabricating MEMS sensors on flexible substrates [4] along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry [5], a research topic currently of great interest.