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Development of a Silicon Based Air-Breathing Micro Direct Methanol Fuel Cell

As one part of the efforts to break the bottleneck of power sources in development of integrated micro systems, a silicon based air-breathing micro direct methanol fuel cell (μDMFC) was developed in this work. By using micro-machining technologies compatible with that in processing of the other MEMS devices, the anode and cathode micro flow-field plates had been successfully fabricated on a pair of 2-inch silicon wafers. The silicon μDMFC was evaluated under ambient conditions using aqueous methanol solution with different concentrations. Results show that open circuit potential (OCP) of the μDMFC was above to 0.6 V, and by using 3mol/L methanol, the peak current density and power density of the silicon μDMFC could reach 28mA/cm2 and 8mW/cm2, respectively.