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Hybrid finite element-boundary element method for vector modeling diffractive optical elements

We apply a 2D hybrid finite element-boundary element method to the analysis of diffractive optical elements (DOEs). We use the finite element method to solve Helmoltz's equation in the interior of a DOE and use the boundary element method, a Green's function approach, to determine the field exterior to the DOE. We couple the two methods at the DOE surface by enforcing field continuity conditions. We use the hybrid method to analyze the diffraction from a binary-phase lens that has subwavelength features and an eight level diffractive lens.