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Influence of Magnetron Sputtering Method on Cyclic Performance of Tin Film Anodes

Tin thin films on Cu foil substrates as the anodes of lithium ion battery were prepared by direct current (DC) and radio frequency (RF) magnetron sputtering (MS), respectively. The surface morphology and cyclic performance of the films were characterized by atomic force microscope (AFM), scanning electron microscopy (SEM), inductively coupled plasma atomic emission spectrometry (ICP) and galvanostatic charge/discharge (GC) measurements. It is found that the cyclic performance of Sn film prepared by RFMS as anode of lithium ion battery is far better than that prepared DCMS. The discharge capacity of the film prepared by DCMS changes from 748 mAh/g of 1st cycle to 99 mAh/g of 30th cycle. Nevertheless, the discharge capacity of the film prepared by RFMS changes from 653 mAh/g of 1st cycle to 454 mAh/g of 30th cycle. The better performance of the film prepared by RFMS is ascribed to the retardation of the bulk tin cracking from volume change during lithium intercalation and de-intercalation, which avoids the pulverization of tin.