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Solution Growth of 4-Inch Diameter SiC Single Crystal Using Si-Cr Based Solvent

We grew large diameter and long size 4H-SiC crystals by the solution growth method using Si-Cr based solvent. To optimize the crystal growth conditions, we applied two-dimensional axisymmetric steady-state analysis to conduct a comprehensive heat transfer analysis that calculates the magnetic field, heat transfer, and liquid flow. In particular, by optimizing the solution surface temperature environment and the seed shaft structure, we suppressed parasitic undesirable crystal formations and promoted single crystal growth at the same time. Consequently, we obtained a 2-inch bulk crystal with a thickness of 20 mm and a 4-inch bulk crystal with a thickness of 15 mm.