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Photoelectron Spectroscopy of EuBa2Cu3O7-y Thin Film Surfaces Treated by an Electron Cyclotron Resonance Oxygen Ion Beam

Surface modification of EuBa2Cu3O7-y (EBCO) thin films induced by an electron cyclotron resonance (ECR) oxygen ion beam treatment has been studied using X-ray and synchrotron-radiation photoelectron spectroscopy (XPS and SRPES). The in situ characterization has been performed during the course of 50 eV ECR oxygen treatment for 30 min. Time-dependent analysis shows that the contaminant carbon layer on the surface region can be removed at the initial stage of the treatment (<2 min), and that the copper valence of the surfaces can be recovered to Cu2+ after 30 min treatment. It is found that room-temperature treatment using ECR oxygen can alter the contaminated, oxygen-depleted surface to a clean, well-oxygenated surface. The present results suggest that ECR treatment which can modify the surfaces in a well-defined manner would be a feasible technique for surface cleaning of high-temperature superconductors.