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Pulsed-power plasma reactors: two-dimensional electropositive discharge simulation in a GEC reference cell

A two-dimensional self-consistent continuum model was developed to study the spatio-temporal dynamics of a pulsed power (square-wave-modulated) inductively coupled electropositive (argon) discharge. The coupled equations for plasma power deposition, electron temperature and charged and neutral species densities were solved to obtain the space–time evolution of the discharge in a gaseous electronics conference (GEC)-ICP reference cell. The Ar* metastable density was governed by gas phase reactions since the diffusion time was longer than the pulse period. This resulted in complex Ar* density profiles as a function of time during a pulse. The time-average ion flux to the substrate in the pulsed plasma reactor was larger than that in a continuous wave reactor, for the same energy input. The effect of control parameters such as power, duty ratio, pressure and pulse frequency on the evolution of electron density was investigated. Simulation results on electron density and temperature were in reasonable agreement with available experimental data.