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Ultrasmall Line Scan Nonlinear Optical Microscope Using 1d Dichroic Mems Scanner and Siob Assembly

This paper reports an ultrasmall line scan nonlinear optical (ULSNLO) microscope with a twelve-fold reduction in overall volume compared with state-of-the-art designs, which benefits from the integration of, for the first time, a 1D dichroic MEMS (Microelectromechanical systems) scanner with a SiOB (Silicon optical bench) assembly. The ULSNLO microscope features its dimensions of ~7mm×6.5mm×3mm due to the novel dichroic scanning architecture and also highlights an ultrafast imaging speed up to thousands frames per second (fps) limited by the external CMOS camera. This design will enable the head-mounted fast functional neuronal soma imaging of freely behaving animals for neuroscience study.