{'fraction_non_alphanumeric': 0.017994858611825194, 'fraction_numerical': 0.004284490145672665, 'mean_word_length': 4.509433962264151, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Precise Positioning Stage Driven by Multilayer Piezo Actuator using Strain Gauge

A newly developed strain gauge with a Cr–N thin film was formed directly on a zirconia plate by sputtering without using any adhesive. Unevenness of sensitivity and drift caused by an adhesive layer could thus be suppressed. The gauge factor of the strain gauge was 6, three-fold that of a conventional strain gauge such as a Ni–Cu foil type. Four strain gauges were formed on one side of a zirconia plate. This zirconia plate was attached to sensor heads. When the sensor heads were moved, positive and negative strains were induced by a diaphram construction due to the use of a full-bridge circuit. A resistance of the strain gauge of 5 kΩ could be realized by thin and fine patterning in order to suppress joule heat. Therefore 10 V could be applied on a full-bridge circuit as bridge input voltage. The value was five-fold that of conventional bridge input voltage. By these improvements, higher sensitivity could be obtained and the S/N ratio could be improved. The precise positioning stage had a 5 nm resolution using this newly developed strain gauge as a displacement sensor.