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Ultra-linear, low-cost measurement system for multi-electrode pF-range capacitors

An extremely accurate capacitance-measurement system has been
developed. The system consists of a discrete capacitance-dependent
oscillator and a microcontroller. It is suited to measure
multi-electrode capacitors, with capacitances up to 2 pF. These can be
measured with 100 ppm accuracy with respect to a reference capacitor.
The resolution amounts to 50 aF with a 300 ms total measurement time