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High Driving Frequency (>54 kHz) and Wide Scanning Angle (>100 Degrees) MEMS Mirror Applying Secondary Resonance For 2K Resolution AR/MR Glasses

We have successfully realized the MEMS mirror which can scan the wide optical angle of over 100 degrees at the driving frequency of 58 kHz by applying the secondary resonance mode driving design and the new stress dispersion structure to our “Double-Tuning-Fork type MEMS mirror” which was reported in “MEMS 2020” [1]. This MEMS mirror paves the way for realizing a high resolution “2K (2560 × 1440@60 fps)” in the laser beam scanning system employing the two-scanning-mirror architecture where each mirror in responsible for one axis [2], which was impossible with conventional MEMS mirrors.