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Design and implementation of magnetically coupled current probe for monitoring simultaneous switching current in package

In this paper, we present a new embedded current probe that can support measurement-based approach for extracting switching current waveform that was injected into power distribution network (PDN). The proposed embedded current probing structure utilizes magnetic coupling behavior between primary conducting via and secondary toroidal coil structure surrounding and it can be used as a sensor which relates the induced voltage across toroidal coil to the switching current of conducting via. This paper will present characterization of magnetic coupling behavior of proposed embedded current probing structure, demonstration of proposed current extraction method by implementing the current probing structure in a board level PDN and validation of SSN analysis by applying the extracted current waveform through the simulation and measurement result.