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Patterning Properties of PZT Thick Films Made by Aerosol Deposition

Factors responsible for a sidewall formation of thick PZT films prepared by impact based deposition technique were experimentally investigated. An inclination of patterns sidewall is mainly determined by velocity of the impacted particles. For 100- w m-thick PZT film made by aerosol deposition method a pattern with the sidewall angle 60° was achieved.