{'fraction_non_alphanumeric': 0.03753351206434316, 'fraction_numerical': 0.030831099195710455, 'mean_word_length': 4.976, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
A New Proximity Parameter Evaluation Method Utilizing Auxiliary Patterns for Dose Compensation

A new proximity parameter evaluation method is proposed to separately evaluate the five proximity parameters of the triple Gaussian exposure intensity distribution function. This method is characterized by a separate evaluation of each term. This is based on equalizing the dose contribution of each term in different patterns. Using this method, the proximity parameters for an X-ray mask constructed with a high-atomic-number substrate are determined as Qc=23.76 µC/cm2, α=0.261 µm, β=3.12 µm, γ=1.17 µm, η=0.101 and η′=0.447. The evaluated result shows that the third term is absolutely necessary for proximity effect correction on the X-ray mask.