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Wavefront control of optical components by laser-ablative figuring

A new method for figuring the surface profile of optical plastics and optical glass have been proposed and demonstrated. An ArF excimer laser is used to ablate very thin layer of the surface of the substrates. The shape of the ablated surface is monitored by an interferometer in site condition. The ablation rate of PMMA is 0.08 micrometers per pulse at the energy density of 50 mJ/cm2. The optical glass (BK-7) can be ablated 0.15 micrometers per pulse at the fluence of 1.5 J/cm2.