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Education in semiconductor manufacturing processes through physically-based dynamic simulation

We have developed physically-based dynamic simulators relevant to semiconductor manufacturing processes, which realistically reflect the time-dependent behaviour of equipment, process, sensor, and control systems using commercial simulation software (VisSim/sup TM/) under Windows. Following on their successful research use for engineering design, we are applying them to manufacturing education and training. Because they reflect quantitatively and visually the detailed response of the system to user-initiated actions in real time, these simulators promise a new paradigm of active learning through "hands-on" operation of sophisticated expensive processing equipment. The student experience is open-ended, offering not only guided exercises but also the chance to experiment freely with the virtual equipment. Simulator modules are in development for use by both experienced engineers and manufacturing operators, with enhanced graphical interfaces tailored to the student and application.