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Analysis of the impact of release area on the quality factor of contour-mode resonators by laser Doppler vibrometry

Energy dissipation through the anchors of an aluminum nitride (AlN) MEMS contour-mode resonator (CMR) plays an important role in setting the device quality factor at frequencies under 500MHz [1]. The acoustic energy leaving the resonator is effected, not only by the anchor, but also the portion of the surrounding device layer that has been released from the substrate during fabrication. Typical device simulations used for design do not take into account the motion of this additional area. Using laser Doppler vibrometery and COMSOL simulations we show a variation in device Q by 28% as a result of the motion of this released region.