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Theoretical investigation of the instrumental peak line shape in ion-scattering spectroscopy.

The instrumental peak line shape describing the elastic scattering of a single isotopic primary ion off a single isotopic target surface has been investigated theoretically using a Bohr-screened Coulomb potential, the Thomas-Fermi-Firsov-screened Coulomb potential; and the Ziegler-Biersack-Littmark universal potential. Experimental factors such as the energy spread in the primary ion beam and the spectral resolution (channel fvidth) have also been taken into account in this study. The calculated line shapes have been determined for 100 eV 4 He scattering off 27 Al and 193 Nb with a scattering angle θ=143 o and a Δθ of ±12 o . The results show that the ion-scattering spectroscopy peaks are asymmetrical due to the variation in differential scattering cross section with energy