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High-peak-power vertical-cavity surface-emitting laser quasi-array realized using optimized large-aperture single emitters

We report on a high-peak-power vertical-cavity surface-emitting laser (VCSEL) quasi-array emitting at approximately 980 nm. The quasi-array is composed of four tightly packaged single emitters connected in series. The external quantum efficiency of large-aperture VCSEL was improved by optimizing the current distribution, and single emitters with a 62 W peak power were developed as the basic building block of this quasi-array. More than 210 W peak power is demonstrated from a ∼2.2 × 2.2 mm2 quasi-array at a current of 110 A under 30 ns and 5 kHz pulsed operation. This is the first report on a hundreds-of-watts VCSEL module consisting of single emitters.