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A FEM Model to Analyze the Structural Mechanical Problem in an Electrostatically Controlled Prestressed Micro-Mirror

In many industrial and biomedical applications (laser scanning displays, optical switch matrices and biomedical imaging systems) the sensing and actuation components are realized using micro-mirrors fabricated by MEMS technology. In this paper is evaluated, through numerical methods, the structural mechanical properties of the actuation mechanism of a ring shape micro-mirror. For the lift-off of the structure there are used four springs simulating a prestressed cantilever beam.