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Outer Shell Excitation Mechanisms and Static Mode Laser Fluorescence Spectroscopy of Sputtered Atoms

Secondary photon emission of sputtered atoms is reviewed in the light of current theories. Laser fluorescence (LFS) coupled with Auger spectroscopy for the first time measures the fractions of atoms sputtered in low-lying (0–2 eV) electronic states as a function of monolayer oxygen coverages. A "causal" collision model based on TRIM code calculations successfully accounts for the observed excitation functions.