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Sigma - Delta inspired control technique for the improvement of MEMS reliability

Dielectric charging of insulating films in micro-electromechanical systems (MEMS) has a crucial effect on the operation of those devices. In our previous work we have shown the feasibility of a new sigma-delta based control method which is able to maintain the dielectric charge at a desired level. The method is based on a smart actuation technique where the applied voltage is selected based on the state of the device. The purpose of this paper is to show the link between the method and sigma-delta modulation and to investigate the operation of the method in the space of device parameters.