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UV-laser-induced polymer ablation: the role of volatile species

Single-shot laser ablation of polyimide has been investigated with UV Ar+-laser radiation (lambda approximately equals 302 nm) for pulse lengths between 140 ns and 5000 ns. The dependences of the ablation rate on laser pulse length and intensity were measured by means of an atomic force microscope (AFM). These data are compared with mass-loss measurements using a microbalance. The experimental data are analyzed by taking into account both mass losses related to volatile product species and real material ablation.