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Energetic ion radiation effects on a silicon carbide (SiC) multimode resonating diaphragm

We report on measuring radiation effects of energetic oxygen ions on silicon carbide (SiC) diaphragm resonators. Micromachined SiC diaphragms (1 mm × 1 mm × 2μm) vibrating at ∼200–800 kHz on multimode resonances are exposed to 14.3 MeV oxygen ions to sensitively probe the radiation effects of high-energy ions. We have observed frequency redshifts as large as ∼2.6%, as well as quality (Q) factor degradation in the multimode resonances of the SiC diaphragm. Non-ionizing energy loss (NIEL) damages appear to play a dominant role for such changes, with an equivalent NIEL dose of ∼7.3×10<sup>10</sup>/cm<sup>2</sup>, a value simulated from the stopping and range of ions in matter (SRIM).