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Thin NIL films viscosity and rheological nano-probe

In this paper, a new approach for determination of viscosity with newly developed nano-probe with particular application to characterization of NIL resists is described. Considering Navier-Stokes equation a problem of penetration of a tip of given shape was solved in manner allowing acquisition of viscosity etamiddot from experimental data. The approach based on the nano-probe developed for viscosity characterization allows temperature measurement of thermoplastic, thermo-and photo-curable polymers (materials used in NIL) with sub-micron resolution. It could be used in design, tailoring and optimisation of soft matter for different application.