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Intra-field gate CD variability and its impact on circuit performance

Statistical analysis of an advanced CMOS process reveals a significant systematic within-field variability of gate CD strongly dependent on the local layout patterns. We present a novel modeling methodology for accurate prediction of the effect of such CD variability on circuit performance that enables statistical design for increased performance and yield. We also propose a mask-level gate CD correction algorithm allowing significant reduction of overall variability and provide a model to evaluate the effectiveness of correction.