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Soft Magnetic Properties and High-Frequency Characteristics in FeCoSi/Native-Oxide Multilayer Films

Magnetic properties of FeCoSi/native-oxide multilayer films, prepared by DC magnetron sputtering and exposure to oxygen in a sequence, have been investigated. It is found that the appropriate thicknesses of the native-oxide layers and FeCoSi layers are very important in decreasing coercivity Hc of the multilayered films, which may be caused by the exchange coupling between the FeCoSi particles through the oxide. A minimum Hc value of 8.4 Oe was obtained for the [FeCoSi (20 Aring)native-oxide]50 multilayer film with the largest in-plane uniaxial anisotropy field Hk of 130 Oe. The real part mu' of complex permeability of this sample is more than 100 and flattens almost to 2.5 GHz, while the imaginary part mu" is less than 50 for f < 2.5 GHz. The ferromagnetic resonance frequency is as high as 3.9 GHz, implying that the film is promising for high-frequency applications.