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Performance Test for Nanometer Accuracy Capacitance Displacement Sensor

In checking to see the performance of the nanometer accuracy capacitive sensor, some parameters, such as, the linearity, repeatability and so on are presented as the characterization parameters. Firstly, the series of test method and test devices is designed to measure and evaluate these parameters of a capacitance sensor. Secondly, the measuring setup is consisted by the traceable laser interferometer with high accuracy and nanometer micro-motion system. Finally, in order to meet the displacement linearity test, the measuring method is in line with the Abbe principle. Experimental results indicate that this approach and setup can realize in the best reference line to the minimum linearity is better than 0.01%, repeatability is better than that of 3.5nm, resolution is less than 0.3nm, measurement capability is more unwavering than 3nm. It can satisfy the measurement requirements of capacitance sensor performance testing with nanometer accuracy.