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Atomic hydrogen beam source: a convenient, extended cavity, microwave discharge design.

An extended cavity design of a microwave discharge source for production of intense beams of atomic, radical, and metastable species in vacuo is described. The extended cavity enables the discharge to be run at the beam source nozzle while the power connection and tuning elements remain conveniently outside the apparatus. This design minimizes wall recombination losses to produce intense atomic hydrogen beams with considerably less engineering than previous discharge sources.