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Varifocal mirror integrated with scanner using wafer bonding technology

The integration of a varifocal mirror with a scanner using wafer bonding technology is presented. The wafer bonding technology enables us to enlarge the design possibility. A 2 mm diameter varifocal mirror is bonded on the scanner. The optical scanning angle is 7° at 3.59 kHz. The focal length changes from infinity to 139 mm.