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Determination of deflection and Young's modulus of a micro-beam by means of interferometry

In this paper we have developed a technique for testing deflections of a micro-beam in an accelerometer under point-force loads and presented a formula to determine Young's modulus of the micro-beam. The technique is based on optical interferometry. A collimated monochromatic light is directed onto an air-wedge consisting of an optical flat and a micro-beam. A long distance microscope with a CCD camera is utilized to capture the interference fringe pattern that results from recombination of two beams reflected from the optical flat and the micro-beam. The resulting fringe patterns are analysed by the use of fast Fourier transform (FFT) and deflections of the micro-beam are obtained, which are used to calculate Young's modulus. The experimental results show that the proposed technique is relatively simple and accurate, and is a potential method for the evaluation of mechanical properties of micro-components.