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The thermal stability of the carbon-palladium films for hydrogen sensor applications

The thermal stability of two types of C-Pd films prepared in PVD process were studied. These films are composed of Pd nanograins embedded in a multiphase carbonaceous matrix. These films were distinguished by Pd content. These films were annealed in a range of temperatures 50÷1000°C. The structural, topographical and molecular changes were studied by scanning electron microscopy (SEM), infrared spectroscopy (FTIR) and X-ray diffraction (XRD) methods. The results show that investigated films are thermally stable up to 200°C.