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A time-of-flight range image sensor using high-speed 4-tap lock-in pixels

This paper presents a CMOS Time-of-Flight (TOF) range imager using pinned-photodiode based high-speed 4-tap lock-in pixels with lateral-electric-field charge modulators (LEFM) in a 0.11 um CIS process. The proposed lock-in pixel structure using lateral electric field control is suitable for implementing a multiple-tap charge modulator while achieving high-speed charge transfer for high time resolution. The TOF imager with the multiple-tap charge modulators is expected to have background light cancelling capability in one frame and to improve range resolution with the 4 time windows for a range-shifted light pulse. Measurement results of the implemented TOF imager with 160×240 pixels are reported.