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EPITAXIAL THIN FILM YBCO MEMBRANE STRUCTURE FOR THERMAL DETECTORS

ABSTRACT YBa2Cu3O7(YBCO) films have been used at room temperature as conducting oxide electrodes, as well as an excellent template layer for epitaxial growth PZT thin films. This research addresses the fabrication of epitaxial thin film membrane structures based on high temperature superconductor (HTSC) microbolometers for highly sensitive thermal detectors that can be miniaturized for affordable passive millimeter-wave (MMW) imaging. A completely dry etch process is described for fabricating transition-edge microbolometer airbridges based on YBCO film. Pulse Laser Deposition (PLD) grown YBCO film on silicon substrate have anomalies on the surface that must be removed prior to the release process.