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The Anti-Oxidation Properties of MoS2/Sb2O3 Films

The MoS2/Sb2O3 films were prepared by RF magnetron sputtering. The films were stored in humid environment (25°C, 60%RH) 30 days. The anti-oxidation properties of MoS2/Sb2O3 were studied by XPS. The composition was studied by XRF. The results show that the anti-oxidation properties were improved by doping Sb2O3. Introducing Sb2O3 into the films provides a substantial benefit to tribology properties of film.