{'fraction_non_alphanumeric': 0.020188425302826378, 'fraction_numerical': 0.006729475100942127, 'mean_word_length': 5.0, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Fabrication of Dense Carbon Nanotube Films Using Microwave Plasma-Enhanced Chemical Vapor Deposition

Carbon nanotubes (CNTs) were synthesized using microwave plasma-enhanced chemical vapor deposition. Co nanoparticles as catalyst were prepared using excimer laser ablation. Vertically aligned, dense CNT films were grown successfully on a Co-catalyzed Si substrate with a TiN buffer layer. The density of CNTs with a diameter of approximately 6 nm was controllable by changing the deposition time of Co catalytic nanoparticles prior to nanotube growth. CNTs were grown rapidly during the first 3 min of growth, then the growth rate of CNTs decreased markedly. At the early stage of growth, the CNTs grew at an extremely high rate of 300 nm/s.