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High-flux ion implantation of 60 keV Cu− into LiNbO3 and in-situ optical spectroscopy

Lithium niobate LiNbO3 is a ferroelectric insulator promising for nonlinear optical applications, but the material phase under high-flux ion bombardment is instable. Ion-induced optical emission (IIP E) of LiNbO3 was measured during implantation of 60 keV Cu- at ion fluxes from 1 to 100 μA/cm2. The IIPE well diagnosed significant atomic release and compositional change of the near-surface layer. In-situ spectroscopy provides important information to optimize fabrication conditions.