{'fraction_non_alphanumeric': 0.023653088042049936, 'fraction_numerical': 0.017082785808147174, 'mean_word_length': 5.743362831858407, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Transparent PZT MIM Capacitors on Glass for Piezoelectric Transducer Applications

This paper reports on the realization and characterization of a fully transparent Pb(Zr0.52,Ti0.48)O3 (PZT) based MIM capacitor on glass substrate for piezoelectric transducer applications. A PZT film grown on a 200 mm Si substrate was layer transferred to a glass substrate using a new technological process. The transferred PZT film keeps its high (100) texturation obtained during deposition, which is required for optimal piezoelectric properties. ITO/PZT/ITO capacitors show excellent ferroelectric properties, thus proving piezoelectric behavior. This first demonstration opens the way to the integration of transparent piezoelectric actuators on glass for haptic devices.