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MULTIVIEW PROFILOMETRY FROM TOMOGRAPHIC DIFFRACTIVE MICROSCOPY

Starting from the work of Wombell and DeSanto [5], we have extended their approach to full 3D, thus enhancing its applicability to a TDM setup. First results based on simulations are presented. From a numerical surface model, a collection of diffraction patterns in Fourier space are first generated from multiple illumination angles. For each angle of illumination, the simulated image is then retropropagated onto the reflection OTF according to the Fourier diffraction tomography theory. The frequency support is then simply sliced, and for each data set obtained at constant k z, a surface reconstruction is performed by inverse FFT. All intermediary surface reconstructions are then processed, to obtain a final, improved version of the original test surface, as a combination of all the intermediary retrieved images.