{'fraction_non_alphanumeric': 0.04691075514874142, 'fraction_numerical': 0.004576659038901602, 'mean_word_length': 4.912162162162162, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
What is process window?

Process window is a collection of values of process parameters that allow circuit to be manufactured and to operate under desired specifications. For instance, lithographic process window is typically defined as the set of {focus, exposure} points to control critical dimension (CD) variation to within 10%. One simple way visualizing it is using a Focus-Exposure Matrix (FEM) curve which plots exposure vs. defocus for a given linewidth tolerance. Maximal inscribed rectangle in this plot then represents the process window [1]. Of course, metrics can go beyond linewidth (e.g., sidewall angle) as can process variables (e.g., overlay, temperature). Furthermore, the overall process window for a design will be intersection or overlap of process windows for all different layout patterns existing in the design (e.g., isolated vs. dense lines) [2].