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Physics and microstructure of electrode microwave discharge

The general features and peculiarities of the stationary electrode microwave discharge (EMD) are presented. EMD is ignited near the tip of the powered electrode (antenna) and its luminous plasma region is less than the dimensions of the discharge chamber. The possible areas of EMD application are demonstrated. Results of spatially resolved optical emission spectroscopy of nitrogen EMD are presented. The joint experimental–simulation method is used to process the 2+ nitrogen band emission for measurements of electron density and electric field strength near the electrode plasma sheath of the nitrogen discharge. The concept of a ‘self-maintained–non-self-maintained’ mechanism of EMD is substantiated.