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Product development of a MEMS optical scanner for a laser scanning microscope

A MEMS electromagnetic optical scanner for horizontal scanning in a laser scanning microscope has been developed. Although few MEMS actuators have been commercialized to date, it has successfully satisfied all the specifications including not only the fundamentals such as resonant frequency and maximum scan angle but also those for a commercial product such as scanning stability and reliability. It will be commercialized as a part of our product, OLS1100 in the second half of FY 2001.