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Fabrication of three-dimensional photonics devices using femtosecond laser pulses

Localized structural and refractive index modifications can be generated inside transparent solids by using focused ultrashort laser pulses, which allows for example the fabrication of optical waveguides. In this paper we present the fabrication of true three-dimensional integrated optical devices. The optical properties of the produced 3D structures as well as processing details and requirements on the positioning accuracy will be discussed. The experimental results will be compared with beam propagation simulations and limitations of this technique will be evaluated.