{'fraction_non_alphanumeric': 0.019583843329253364, 'fraction_numerical': 0.004895960832313341, 'mean_word_length': 5.196969696969697, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Characterization and Design Evaluation of Membrane-Based Calorimetric MEMS Sensors for Two-Dimensional Flow Measurement

This article concerns membrane-based thermoelectric flow sensors that measure both velocity and angle in a plane. The sensor chip was fabricated using a micromachining process. The chip consists of a heater and four thermopiles embedded in a low-stress silicon nitride membrane. The main application for these devices is measuring the airflow distribution in cooled storage rooms. However, their small size of 2 mm by 2 mm, combined with their high angular resolution of less than 0.5°, opens up a spectrum of various applications. Within this work, different heater and thermopile arrangements are presented and compared with each other to reveal the advantages and disadvantages of each design.