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Fabrication of free-standing porous silicon microstructures

The high specific surface of porous silicon and its high reactivity makes this material a good candidate for chemical sensors based on electrical or electromechanical devices. In this paper, several processes are presented to realize free-standing porous silicon microstructures (membranes and cantilever beams). Good resonance quality factors were measured (Q = 110 and 760 respectively) demonstrating that porous silicon is a suitable material for resonant chemical sensors.