{'fraction_non_alphanumeric': 0.017628205128205128, 'fraction_numerical': 0.00641025641025641, 'mean_word_length': 5.188118811881188, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Evaluation of a novel antimony source delivered as vapor from an implanter gas box

A novel antimony compound has been developed for the ion implantation process. The dominant and current compound used in many applications is antimony trioxide, a solid material that must be vaporized at high temperatures within the ion source. This paper discusses the technique to be used to evaluate the volatile solid compound SbCH3Br2 (dibromomethyl-stibine) in comparison to the solid Sb2O3 (antimony trioxide). The delivery changes and requirements, and the methods used to compare the performance of the compounds will be discussed.