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Analysis of Stress Distribution in Piezoelectric MEMS Energy Harvester Using Shaped Cantilever Structure

Much interest in energy harvesters has been focused on maintaining their conversion efficiency during scaling down via the micromachining process. The piezoelectric PZT-based MEMS energy harvester was designed and fabricated to increase the fraction of the material strained during deflection since the geometric change of the cantilever shape can change the strain distribution on the beam and improve the output power. The generated power during beam deflection was separately collected from individual electrodes located at different positions of the cantilever, and they had good agreement with the strain estimation from finite element analysis. The trapezoidal shape showed 39% higher power than that of rectangular one.