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Sub 10nm Nanopore Sculpturing with Focused Electron Beam on Single Layer Graphene Oxide Film

DNA sequencing by nanopore is a technique to detect DNA sequence by making the DNA strain passing through the nanopore material and measureing some characteristic parameters to determine the order of the four kinds of base-pairs. Graphene nanopore research becomes a hotspot for the DNA sequencing technology. In this paper, a kind of novel nanopore on graphene oxide is sculptured with FEB(Focused Electron Beam) to overcome the problem about the high noise for graphene nanopore. By tuning FEB parameters, e.g. the accelerating voltage, the spot number, the exposure time and the amplification factor, sub 10nm nanopores on single layer GO(Graphene Oxide) film will be achieved. At the same time, some challenges are discussed: difficult to get stable size, hard to take TEM pictures and hard to get relatively smaller size.