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53.3: Automated, Eye‐like Analysis of MURA Defects

In this paper we report new developments in automation of MURA defect testing. Two main steps are tackled: segmentation and quantification. The relevance of two families of segmenting algorithm is first analyzed. Then quantification functions ‐based on the SEMI standard proposal‐ are discussed. The final aim is to objectively quote MURA defect with respect to the user's eyes sensation of discomfort.