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Fabrication of a high-throughput near-field optical probe using a double metal layer

Metal-coated oxide nano-aperture arrays have been fabricated using a micro-fabrication technique including a stress-dependent oxidation, an isotropic wet etching of silicon oxide, and the metal deposition. Au, Al, and Al/Ti double metal layers have been deposited on nano-size oxide aperture arrays in order to provide a better uniformity of the coated metal film and an ideal aperture shape. The introduction of the Ti buffer layer reduced surface roughness during the reflow process of Al deposition and resulted in an ideal circular type aperture shape.