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Spatial distribution of the optogalvanic signal in a microplasma detector for lab-on-a-chip gas analysis

Gas sensors are characterized by their sensitivity and selectivity. This is preferably combined with versatility, where the selectivity can be altered, without complex modifications and whiteout losing sensitivity. If aimed at lab-on-a-chip applications, the sensor also must be able to analyze small samples. Today, sensors combining selectivity and versatility for chip-level gas analysis are scarce; however, this paper investigates how miniaturized optogalvanic spectroscopy can fill this gap. By studying the spatial distribution of the optogalvanic signal inside a microplasma, it is shown that the signal is generated in the minuscule gas volume of the sheath surrounding the plasma probe that collects it. Nevertheless, a strong and stable spectroscopic signal can be extracted from the sheath, and the sample concentrations can be calculated using straightforward plasma theory. The minimum detectable absorption and the noise equivalent absorption sensitivity of the system are estimated to be less than 1.4  ×  10−9 Hz−0.5 and 2.8  ×  10−9 cm−1 Hz−0.5, respectively, without cavity enhancement. Combined with inherited versatility from absorption spectroscopy and the capability of handling sub-nanogram samples, this makes optogalvanic spectrometry an excellent candidate for future lab-on-a-chip gas analyzers.