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Digital Moiré based transient interferometry and its application in optical surface measurement

Digital Moiré based transient interferometry (DMTI) is an effective non-contact testing methods for optical surfaces. In DMTI system, only one frame of real interferogram is experimentally captured for the transient measurement of the surface under test (SUT). When combined with partial compensation interferometry (PCI), DMTI is especially appropriate for the measurement of aspheres with large apertures, large asphericity or different surface parameters. Residual wavefront is allowed in PCI, so the same partial compensator can be applied to the detection of multiple SUTs. Excessive residual wavefront aberration results in spectrum aliasing, and the dynamic range of DMTI is limited. In order to solve this problem, a method based on wavelet transform is proposed to extract phase from the fringe pattern with spectrum aliasing. Results of simulation demonstrate the validity of this method. The dynamic range of Digital Moiré technology is effectively expanded, which makes DMTI prospective in surface figure error measurement for intelligent fabrication of aspheric surfaces.