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High-force linear iron-core fine-tooth motor

This paper presents the design and testing of a high force linear fine-tooth iron-core permanent magnet motor. We present the design and experimental results in comparison with a commercially-available iron-core linear motor. Our new fine-tooth motor shows predicted shear stress improvements of 28 % at the prototype practical power level of 10 W/mm and 85 % at an anticipated ultimate root mean square (RMS) current density limit in the coil wires of 50 A/mm2, relative to the conventional iron-core motor. This force performance of our new motor is also experimentally validated. The new motor shows strong potential for industry applications requiring precision motion along with high speed of production, such as in photo-lithography machines.