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Uncertainty Evaluation of SEM-Based Nanoroughness Measurement

In metrology, a measurement process without uncertainty evaluation is incomplete. The same applies to nanoroughness metrology. In this paper, Scanning Electron Microscopy (SEM） measurement uncertainty of nanoroughness is studied based on ISO Geometric Product Specification and Verification (GPS). The uncertainty propagation model of SEM-based nanoroughness measurement is presented. The evaluation model of SEM-based standard measurement uncertainty is conducted. As a case study, the line edge roughness uncertainty produced by the JSM-6700F SEM is evaluated.