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Experimental demonstration of a stacked SOI multiband charged-coupled device

The multiband charge-coupled device (CCD) is a polychromatic image sensor fabricated on semiconductor-on-insulator substrates with multiple device layers. It can achieve a multifold improvement in efficiency compared to a conventional CCD, because photons are collected and resolved in the substrate without external optics. We present the first experimental demonstration of multiband light absorption and charge extraction for a single-pixel device. The ratio of the active layers' responsivities changes with wavelength, indicating that incident color information is captured in the multiple device layers.