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Optimizing Van der Waals Forces For FIB ex situ Lift Out

Van der Waals forces are 10-12 orders of magnitude larger than the force of gravity acting on focused ion beam (FIB) prepared specimens and other small particles and fibers, and are the primary adhesion forces responsible for successful, reliable, and rapid ex situ lift out (EXLO) and micromanipulation to suitable specimen carriers [1]. Electrostatic forces which were previously believed to be the operating mechanism for EXLO micromanipulation should be avoided whenever possible [1]. A glass probe is preferred for EXLO since it may be easily drawn to a pointed tip (i.e., ~ 1 μm or less) and remains strong with some flexibility during the manipulation process. Conversely, metal probe tips may easily curl and deform during the manipulation process and therefore are not ideal.