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Development and modeling of an electrothermally MEMS microactuator with an integrated microgripper

Electrothermal microactuators have a promising future in microelectromechanical systems applications due to their capabilities of generating considerable mechanical deflection and forces at relatively low voltages. Moreover, their compatibility with existing CMOS technology as well as the small device area makes them very attractive for various applications. The current study introduces electrical and thermal analysis, modeling, fabrication and characterization of a thermal microactuator with an integrated microgripper. The analysis and modeling results were validated against experimental findings, and very good agreement was obtained. Furthermore, the device attains good tunability and no back bending was observed.