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Formation mechanism and application of a three-dimensional pattern in dielectric barrier discharge system

We report a continuous three-dimensional pattern with the symmetry of D2h in dielectric barrier discharge by introducing surface discharges (SDs) with a specially designed device for the first time. From the front view, it consists of dark spots and bright bars, which correspond to the conventional volume discharge (VD) and novel VD. Different from the conventional VD, the novel VD bends through three gas gaps and discharges multiple times per half-voltage-cycle, which results from the complex interaction between the VD and SD. By using this device, three surfaces of the sample inserted between electrodes are processed simultaneously, which greatly improves the plasma processing efficiency.