{'fraction_non_alphanumeric': 0.013452914798206279, 'fraction_numerical': 0.0, 'mean_word_length': 5.158620689655172, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Extraction of Damping Coefficients of Comb Drive by Partitioning

The interaction between MEMS devices and their environmental fluid is a major design consideration. An efficient macro-model technique is developed in this work to study the impact of fluid damping coefficients for moving parts of MEMS. A comb-based accelerometer has been analyzed to demonstrate the methodology. A systemlevel model is created to analyze the device. Damping templates are exported and incorporated into the systemlevel model. Small signal and transient simulations are run to examine the impact of damping coefficients on device performance. The technique has been applied successfully to extract the damping coefficients of a comb-drive based tunneling accelerometer. The method is simple and fast for damping analysis. It can be applied to accelerometer of other shapes and under large deflections as well.