{'fraction_non_alphanumeric': 0.038894575230296824, 'fraction_numerical': 0.02047082906857728, 'mean_word_length': 4.891566265060241, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
A humidity sensor based on AlN Lamb wave resonator coated with graphene oxide of different concentrations

A high-performance humidity sensor based on an AlN (aluminum nitride) Lamb wave resonator coated with graphene oxide (GO) is presented in this paper. With the porous structure and oxygen-containing groups of GO as the sensing layer, the humidity sensor exhibits a high sensitivity of 26 kHz/%RH at 10%–90% relative humidity. However, more than half of the frequency variation occurs in the range of 70%RH to 90%RH. In this paper, we propose a vacuum film-coating method to improve the performance of the GO film. With this GO film, the sensitivity is increased by 160% in the humidity range between 10% to 60%RH compared to conventional ones. The sensor also demonstrates a low temperature coefficient of frequency, small hysteresis, and short response (~9 s)/recovery (~11 s) time. Therefore, the humidity sensor with GO shows great potential in practical applications.