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MICRO ACOUSTIC DEVICES USING PIEZOELECTRIC FILMS

ABSTRACT A novel PZT based micro acoustic device with the diaphragms clamped on all four edges has been studied. It can be used both as microphone and microspeaker. Compared with other piezoelectric micro acoustic devices, PZT based device has higher sensitivity for microphone and larger output acoustic pressure for microspeaker. The microfabrication process flow of this device is simple, and the transducer has excellent performance, miniature size and high reliability. The micro acoustic devices could be widely used in various practical audio frequencies and ultrasonic systems.