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Preparation of (Bi, Pb)-Sr-Ca-Cu-O Superconducting Thin Films by the Mist Microwave-Plasma Chemical Vapor Deposition Method

Superconducting thin films of (Bi, Pb)-Sr-Ca-Cu-O were prepared on single-crystal MgO(100) substrates by the mist microwave-plasma chemical vapor deposition method. The prepared films constituted of the 2212 and 2201 phases with c-axis orientation perpendicular to the substrates. The dependence of critical temperature of films on the input mole ratio of oxygen OR=FO2 /(FO2 +total FAr) was investigated. The maximum critical temperature (78 K) of as-deposited films was obtained at the input molar ratio of oxygen about of 0.60 and the microwave power of 300 W.