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Development and evaluation of fluorine-resistant coatings for windows of high-energy KrF laser

Fluorine-resistant coatings for fused silica windows of high-energy KrF lasers with damage thresholds as high as 20 J/cm2 have been developed using two comparative deposition techniques: ion-assisted e-beam evaporation and magnetron ion sputtering. They were evaluated by means of atomic-force microscopy, Fourier spectroscopy, and laser-damage testing in large irradiated spots ~ 1 cm at powerful GARPUN KrF laser.