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Double-image Green's function method for 3-D capacitance and conductance extraction of on-chip transmission lines

A new double-image Green's function approach is developed to compute the frequency-dependent capacitance and conductance for three-dimensional multilayered on-chip transmission lines on silicon substrate. The ε-algorithm of the Pade approximation is adopted to reduce the time for establishing the coefficient matrix. The parameters gained from this new approach are shown to be in good agreement with the data obtained by the total charge Green's function method.