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A planar monolithic large size resonant scanning mirror actuated by electromagnetic induction

A new design of resonant scanning mirror actuated by electromagnetic induction is presented. It is a planar device that was manufactured from 0.5 mm thick phosphor bronze by batch photofabrication. The monolithic mechanical structure have a frame, tree torsion bars and two rotors. Folded torsion bars connect the frame to the rotors, and a straight torsion bar interconnects both rotors. One rotor is devoted to the armature (moving coil), and the other rotor carries the mirror. There is a hole in the armature where a branch of the actuating magnetic core (stator) passes through, carrying the magnetic flux generated by an excitation coil of the stator. The efficiency on converting electric power to mechanical motion was increased two orders of magnitude from a previously published inductive planar device (0.005 W/deg against 2.2 W/deg). A prototype measuring 69 x 49 mm2 oscillating at 64.4 Hz presented deflection angle of 12°pp, and a quality factor Q of 200. A mathematical model was derived and a design procedure was developed. The results shown that this device has potential to replace conventional resonant scanners on high-aperture optical systems or high-power laser applications.