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Performance parameter of 2D position sensitive detector

The performance parameter of 2D Position Sensitive Detector (PSD) are analyzed and calculated theoretically. The non-linearity and distortion grid map of the theoretical calculation using this structure position formula are in good agreement with the experimental result. The experimental results show that with the signal processor, the position non-linearity (rms) is less than 0.15% in the 60% range of a 13 mm x 13 mm active area, the position error is less than ±20 μm. It has demonstrated that 2D PSD was obtained the best position non-linearity results of 13 mm x 13 mm.