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Electrical behaviour of laser-damaged silicon photodiodes

A measurement of the electrical parameters degradation of Si photodiodes irradiated by laser visible light has been performed. The laser is a q-switched Nd:YAG, frequency doubled, operated in single pulse mode of 4 ns duration. The applied fluence levels range up to 90 J/cm2. Two kinds of irradiation process have been applied: either a part of the detector active area has been irradiated in single pulse mode, or a scanning of the whole detector active area has been performed with successive identical pulses. It has been shown that the fluence necessary to induce significant changes (local decrease of 35%) in responsivity is several times the surface melting threshold fluence (0.5 J/cm2). Conversely, the dark current is the most sensitive parameter, it increases by about four magnitudes for high irradiation. The in-depth dopant distribution is altered by high fluence irradiation in a way that cannot be explained by simple thermal modelization.