{'fraction_non_alphanumeric': 0.022076860179885527, 'fraction_numerical': 0.0, 'mean_word_length': 5.762430939226519, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system

Implementing effective and efficient scheduling methods is a critical means to gain competitiveness for wafer fabrication manufacturers in today's global semiconductor market. Qualified scheduling approaches should make adaptive decisions based on real-time processing status. Most of real-time scheduling algorithms are open-loop ones, they do not continuously monitor the performance of the semiconductor manufacturing system (SMS) and select the optimal rule or strategy to improve performance. We develop a simulation based real-time scheduling (SBRS) mechanism in which dispatching rules and rework strategies vary dynamically based on real-time information. This paper also presents a real-time integrated scheduling (RIS) algorithm, which combines different dispatching rules and rework strategies. A case study is described to examine the performance impact of the scheduling method measured by cycle time, work in process, on-time delivery, and throughput. The results of the computational experiments show that the proposed scheduling method is superior to the use of static scheduling methods.