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Electron Probe Micro-Analysis at Low Accelerating Voltages: The Impacts of Surface Coatings and Oxide Layers on Quantification

Under the low accelerating voltage conditions commonly required for high resolution electron probe micro-analysis (EPMA) even thin surface layers become significant components of the analysis volume. In a previous study the authors presented the results of modelling a mono-elemental coating on a homogenous substrate at low accelerating voltages [1]. However, for air sensitive materials it cannot be assumed that the substrate surface is pristine prior to application of a conductive coating. For example, Uranium is known to oxidize readily in air, to the extent that it cannot be considered to be oxide free unless prepared and analyzed under ultra-high vacuum conditions [2]. Here we present the results of modelling a more complex three-layer system, of an oxidized surface on a bulk homogeneous substrate, on which a conducting coating has been applied. The results are compared against experimental measurements on electro-polished depleted uranium (DU) coated with silver.