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Characterization of cross-plane thermoelectric properties of Si/Ge superlattices

In this paper, a novel method is developed to measure simultaneously the Seebeck coefficient and thermal conductivity in the cross-plane direction of thin films. Using a differential measurement between a superlattice sample and a reference sample, the temperature and voltage drops cross the superlattice thin film are determined and used to deduce its cross plane thermal conductivity and Seebeck coefficient.