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A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).