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X-ray diffraction on Si single crystal with a W-shaped longitudinal groove.

The measurement of the sagittal deviation of an X-ray beam diffracted on the inclined surface of an Si(111) single crystal was performed on beamline BM5 at the ESRF, with lambda = 0.1 nm and an inclination angle, beta, of 70 degrees . The measured value agrees with the theory developed in previous papers. The topographic picture of the longitudinal edge shows a structure that can be explained in terms of the properties of inclined diffraction.