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Research on Contouring Control of Dual Linear Motors

In dual-axis contouring motion, contouring error is a more important performance index than tracking error. Considering direct drive XY table control accuracy, the influence of load disturbance and the velocity mismatch between X and Y axis are great. As a result, the position tracking iterative learning controller based on DOB controller is adopted at single axis, it can overcome the influence of the load disturbance, and ensure the robustness of the system; For the velocity mismatch between X and Y axis, a control strategy based on hybrid error iterative learning control (HILC) and the real-time contour error model was proposed. Simulation results show that the designed control system of XY table has strong robustness, high contour accuracy and simple structure.