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Ultrafast photoconductive switches integrated with electrical waveguides of low-k polyimide

We have fabricated ultrafast electrical waveguides with low-k polyimide integrated with ultrafast photoconductive switches formed by nano-anodization process for the first time. Electrical signals are affected by nonlinear capacitance of p-n junctions in this waveguides, and pass through the low-k polyimide, so the dielectric loss and the radiation loss are dramatically reduced. The electrical pulses as short as 290 fs were measured on this waveguide by an electro-optic sampling system based on a femtosecond laser.