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SnO2-MOF-Fabry-Perot humidity optical sensor system based on fast Fourier transform technique

In this paper, a new sensor system for relative humidity measurements based on a SnO2 sputtering deposition on a microstructured optical fiber (MOF) low-finesse Fabry-Perot (FP) sensing head is presented and characterized. The interrogation of the sensing head is carried out by monitoring the Fast Fourier Transform phase variations of the FP interference frequency. This method is low-sensitive to signal amplitude variations and also avoids the necessity of tracking the evolution of peaks and valleys in the spectrum. The sensor is operated within a wide humidity range (20%-90% relative humidity) with a maximum sensitivity achieved of 0.14rad/%. The measurement method uses a commercial optical interrogator as the only active element, this compact solution allows real time analysis of the data.