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Effects of External Magnetic Field on the Characteristics of Electron Cyclotron Resonance Discharge

The effects of external magnetic field on the characteristics of electron cyclotron resonance (ECR) discharge are investigated by means of simulation. The quasi-3-D particle-in-cell plus Monte Carlo collision (PIC/MCC) method is presented. Secondary electron emission model is applied to describe the interaction between electron and boundary, which is simulated by the Monte Carlo collision (MCC) approach. The spatiotemporal evolution of electron space distributions is shown. Electron density and temperature at the initial stage and steady state of ECR discharge with the different external magnetic field configurations are discussed.