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Fabrication of microgrooves in PMN-PT using femtosecond laser irradiation and acid etching.

A simple method of fabricating Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) deep grooves with high aspect ratios using an 800-nm femtosecond laser with chemical-selective etching is demonstrated. The 567-µm-deep grooves with aspect ratios of approximately 35 were obtained with no cracks or thermal affected zone. The morphologies and chemical compositions of grooves were analyzed by a scanning electron microscope with an energy dispersive x-ray spectrometer. The formation mechanism of PMN-PT grooves is attributed to the chemical reactions of hydrochloric acid (HCl) and laser-induced structural changes (LISCs). PMN-PT in LISC became amorphous or mixtures of metal oxide from crystal and all the compounds could react with concentrated HCl and form soluble matter, leaving no precipitation. Furthermore, influences of laser irradiation parameters on depths and aspect ratios of grooves are studied.