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3D Nano-Thermistors for Thermal Probing.

Accessing thermal properties of materials or even full devices is a highly relevant topic in research and development. Along with the ongoing trend towards smaller feature sizes, the demands on appropriate instrumentation to access surface temperatures with high thermal and lateral resolution also increase. Scanning thermal microscopy is one of the most powerful technologies to fulfil this task down to the sub-100 nm regime, which, however, strongly depends on the nano-probe design. In this study, we introduce a 3D nano-probe concept, which acts as a nano-thermistor to access surface temperatures. Fabrication of nano-bridges is done via 3D nano-printing using focused electron beams, which allows direct-write fabrication on pre-structured, self-sensing cantilever. As individual branch dimensions are in the sub-100 nm regime, mechanical stability is first studied by a combined approach of finite element simulation and scanning electron microscopy assisted in situ atomic force microscopy (AFM) measurements. After deriving the design rules for mechanically stable 3D nano-bridges with vertical stiffness up to 50 N.m-1, a material tuning approach is introduced to increase mechanical wear resistance at the tip apex for high-quality AFM imaging at fast scan speeds. Finally, we demonstrate the electrical response in dependence of temperature and find a negative temperature coefficient of -(0.75 ± 0.2) 10-3 K-1 and sensing rates of (30 ± 1) ms.K-1 at noise levels of ±0.5 K, which underlines the potential of our concept.