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Influences of Reflector Gratings on the Properties of Love Wave Acoustic Sensors in ZnO/Quartz Structure

Love wave acoustic devices are very promising in biosensors applications in liquid environments because of their high sensitivity. ZnO films with c-axis orientated crystalline structure have been grown successfully on 90°-rotated ST-cut quartz by r.f. sputtering technique. In this paper, a Love mode sensor with two-port interdigital transducer and reflector grating structure is reported. Frequency response with narrower bandwidth and higher sensitivity has been achieved.