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Development of 850-nm VCSELs for high-speed interconnection systems

Development of vertical cavity surface emitting lasers (VCSELs) at 850nm-wavelength for high speed interconnection systems is disclosed. The device structure is designed for a given set of static and dynamic characteristics. Electrical resistance, thermal characteristic and lateral mode characteristic are carefully designed and realized by a well-controlled fabrication process. 10Gbps transmission through a 500m-long, high-bandwidth multimode fiber is successfully demonstrated. An overview of 850nm-VCSEL technologies including future prospect is also described.