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The Possibility of Deposition of Diamond and DLC Coatings by PACVD Method

The Diamond like carbon (DLC) and diamond coatings were deposited on a steel substrate using plasma assisted chemical vapor deposition (PA CVD) method. The parameters of deposition were analyzed in relation to the effectiveness of the process and the quality of coatings. It was found that the DLC coatings formed only at specific conditions of temperature and pressure of precursor gases. The characterization of coatings were performed by Raman spectromicroscopy, X-ray diffraction and infrared spectromicroscopy which allowed us to recognize the dominant phases and the distribution of bonds inside the coatings. The chemical bonds such as sp2 C-C, sp3 CH3/CH2 and sp3 CH were found in microstructure coatings. The maps of distribution of bonds in the coatings were also prepared. Additionally, their microstructure was investigated by scanning electron microscopes which have revealed a spherical grains morphology of the coatings.