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Acoustic Particle Velocity Sensor With Improved Time-Domain Resolution

This letter presents a comparison of acoustic particle velocity sensor versus conventional microphone in terms of a time-domain resolution. To the best of the authors’ knowledge, this is the first conceptual reasoning of a superior time-domain resolution of an acoustic particle velocity sensor. This letter also discloses an engineering solution with an outline of an in-house technological process, allowing a mechanically strong monolithic sensing element chip to be built.