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3D mode converters for SOI integrated optics

This paper reports on the development of a new mode converter technology for the growing SOI integrated optics field. Mode converters were designed and fabricated to permit efficient coupling of typical 10-/spl mu/m diameter optical fiber modes to single mode SOI waveguide structures as small as 0.25 /spl mu/m. A three-dimensional adiabatic taper approach was employed based on graytone lithography. This device is an important enabler for practical subwavelength SOI-waveguide integrated optics technology.