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Empirical analysis of form drag damping for scanning micromirrors

Damping is a critical factor affecting the dynamics of resonant scanning micromirrors and the design of their actuator systems. For any new micromirror design, modeling the damping to sufficient accuracy to predict the performance can save much effort in testing and redesign. To address this challenge, a simple formula for the air drag on scanning micromirrors is postulated that contains a drag coefficient, which is treated as a function of the Reynolds number that is fit to experimental measurements of the damping of two different MEMS scanning mirrors. A formula is found that describes the drag coefficients for both scanning mirrors for a range of their Reynolds numbers.