{'fraction_non_alphanumeric': 0.020017406440382943, 'fraction_numerical': 0.0034812880765883376, 'mean_word_length': 4.373831775700935, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
New Maskless Lithography System for Fabricating Biodevices using Light-Emitting Diodes and Squared Optical Fibers

A new low-cost lithography system convenient for fabricating biodevices was developed. Using the new 
 
system, various patterns of cell arrays, chamber arrays, flow paths of micro-fluidic devices, and others were 
 
easily printed without preparing any reticles or masks. In the system, light-emitting diodes (LEDs) were used 
 
as exposure sources and squared optical fibers arrayed in a 10×10 matrix were used as the combination of a 
 
secondary light source and a reticle. Light rays emitted from each LED were individually led to each fiber, 
 
and bright or dark of each LED was assigned by a personal computer. As a result, it became possible to print 
 
arbitrary patterns without preparing any reticles or masks. In addition to the ordinary patterning using various 
 
lightening maps of LEDs and their stitching, scan exposure was also tried. When bright images of optical 
 
fiber ends were scanned on a resist film by moving the wafer stage, long patterns appropriate for micro fluidic 
 
paths were very smoothly formed.