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Study on Effect of Van Der Waals Force and Casimir Force to Microsystem

Based on the electrostatic comb drive structure, the comb will do relative motion when it is driven up, and the space between them will be less than 1μm. Considering the micro-scale effect, the Van der Waals force and the Casimir force is used to analyze the influence on the micro-structure, compared with the electrostatic force. The van der Waals force and the Casimir force is almost equivalent to the electrostatic force when the initial gap of the micro-structure and the relative displacement between the micro-structure is relatively small. Therefore the van der Waals force and the Casimir force play an important role in the micro-structure and cannot be ignored.