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Phase noise suppression effect at the turnover temperature in oven controlled mems oscillator

An obvious phase noise suppression effect is reported for the first time at the turnover temperature of a degenerately phosphorus-doped silicon oscillator. It was reported that the resonant frequency of an N++ [100] bulk mode single crystal silicon resonator reached the maximum at a particular temperature, which is called the turnover temperature, and a near zero temperature drift may be obtained by heating the oscillator to the turnover temperature. Our experiments show that both the temperature drift and phase noise reach the minimum at the turnover temperature. More than 20 dB drops of the phase noise has been observed at the turn-over temperature.