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Decomposition of Halide Compounds by Nonequilibrium Discharge

A narrow-gap silent discharge has been successfully applied to the resolution of halide compounds (CCl2F2 and CF4) diluted in mixed gases of H2O, O2, N2 and Ar with a varied composition at an atmospheric pressure. The optimum composition of the discharge gas is discussed in terms of an effective decomposition energy Ed defined as the energy necessary for e-1-fold reduction of the halide concentration. Efficient decomposition of CF4 gas is realized with the use of Ar gas as the dilution gas; the minimum value of Ed approaches 760 eV/CF4-molecule, which must be compared with the value of 18 keV/CF4 obtained when N2 is used as the dilution gas.