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Bending mode cantilever actuators for micro-electromechanical systems

This paper presents a bending-mode cantilever actuator (CA) concept for optical devices. Two designs are analyzed in stationary working conditions through numerical simulations, and their deformations under the action of electrodynamic body forces are evaluated. The modal structural analysis and the lumped, electric circuit parameters are also provided. These results may be of interest in the design stage of these CAs.