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Industrial development of micromechanical devices: from academic prototypes to volume production

The necessity of dealing with and compensating for the specific properties of silicon microsensors, and their wide diversity of possible applications, make the development of one single application quite a wide task. Not only has the device to be developed, but also some of the manufacturing and control methods have to be brought to a volume-production standard. The steps of the process from generic device to volume production of an application are described.