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Switchable bulk acoustic wave resonator based on ferroelectric films

The calculation of eigen acoustic modes of multilayer microwave capacitance structure with thin ferroelectric films in paraelectric state is carried out. For estimation of excitation efficiency of bulk acoustic waves (BAW) by ferroelectric films the system of electromechanical equations is solved and spatial distribution of mechanical displacements in the structure is presented. Finally, the switch ability of eigen acoustic modes for novel switchable BAW resonator is discussed.