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Dynamic Characteristics of a High Speed Precision Positioning Platform Driven by Linear Motors

Positioning systems with higher speed and accuracy are required in semiconductor package manufacturing, and the product quality and production efficiency can be further improved. So this paper presents a new 2-DOF precision positioning platform with high speed. The platform is directly driven by linear motors, and a novel elastic decoupling mechanism is put forward. High positioning accuracy and good stability in a short stroke, high precision and high speed movement can be achieved using linear motors. The X axis and Y axis kinematic decoupling is realized through the novel elastic decoupling mechanism based on a preloaded spring and flexure hinges, and the dynamic characteristics of the system are improved. The dynamic characteristics of the positioning platform in free state are investigated based on finite element analysis, and the natural frequencies and vibration modes of the positioning platform are obtained, which provides theoretical basis for the further dynamic control of the positioning platform.