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Weighted electrode configuration for electromechanical coupling enhancement in a new class of micromachined Lithium Niobate laterally vibrating resonators

This paper reports on an electromechanical coupling (k<sub>t</sub><sup>2</sup>) enhancement technique for a new class of Lithium Niobate based laterally vibrating MEMS resonators. This technique uses a weighted electrode configuration to experimentally demonstrate a more than 2X enhancement of the device k<sub>t</sub><sup>2</sup>. The resonator orientated 30° to +Y in the X-cut plane achieved a k<sub>t</sub><sup>2</sup> of 21.7%, and a quality factor of 1300, effectively corresponding to a figure of merit of 280 - the highest demonstrated to date for laterally vibrating resonators.