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Retrospective sputter depth profiling using 3D mass spectral imaging

A molecular multilayer stack composed of alternating Langmuir‐Blodgett films was analyzed by ToF‐SIMS imaging in combination with intermediate sputter erosion using a focused C60+ cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field‐of‐view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth resolution to be assessed. In a similar way, the observed degradation of depth resolution with increasing depth of the analyzed interface can be analyzed in order to determine the ‘intrinsic’ depth resolution of the method. Copyright © 2010 John Wiley & Sons, Ltd.