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Hydrogen Detection in Individual Diamond Grains on Si(100) Substrate Grown by Microwave-Assisted Chemical Vapor Deposition

Secondary ion mass spectrometry is applied to the detection of hydrogen in individual diamond grains 1–4 µm in diameter. In the analysis, the primary Cs ion beam was fine-tuned at diameters of 50–200 nm on the surface, and then a combination of presputtering and spot analysis was carried out along a line defined in the scanned 12C image with a high lateral resolution. The intensity ratios of (H/12C) in the (111) and (100) planes were determined as having values of 1.36×10-2 and 3.2×10-3, respectively. The value obtained in the (100) plane is background in the analysis. The results demonstrate the potential of the analytical technique for the detection of impurities in materials science.