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Research and development of a new series of measuring instruments directly tracing to the wavelength

High uniformity of graduation is obtained in the wavelength unit length scales of measuring instrument. Developement of such series of instruments has been successful in new models of grating universal metroscope and vertical laser metroscope. The uniformity of spacing of wavelength grating developed is less than 0.03 μm. The uncertainty of these kinds of instruments is ±(O.2/O.3±2x 1OL) m. The real time comprehensive compensating method of measurement used in them can effectively compensate the linear systematic error and reduce requirements of temperature control of measuring environment.