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A Novel XY Nano Positioning Stage with a Three Stage Motion Amplification Mechanism

This paper describes the design, modeling, and simulation of a novel flexure-based XY nano positioning stage driven by piezoelectric actuators (PEAs). As the output of PEAs is limited to their sizes, a new kind of three stage motion amplification mechanism (MAM) is proposed to achieve a large workspace. Three kinds of MAMs, namely Scott-Russell mechanism, leverage mechanism, and half bridge-type mechanism are arranged in series or parallel to form a compact structure. The kinematic modeling of the XY stage is carried out using the pseudo rigid body model approach. Further, finite element analysis is conducted to evaluate its workspace and dynamic performance. The maximum displacements in x- and y-axes can reach 126.54 μm and 126.92 μm, respectively. The results show that the amplification ratio can reach around 12.7, which demonstrates the effectiveness of the three stage MAM. Moreover, the first natural frequency reaches 157.9 Hz. Hence, the simulation results demonstrate that the proposed nano positioning stage has a large workspace and a good dynamic performance.