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Thermal stability of normal incidence multilayer mirrors for x-ray wavelength near carbon K-edge

Annealing effects in short-period multilayers Cr3C2/C, TiC/C, Cr3C2/(B+C) and CrB2/C were studied in wide temperature range approximately equals 200-1200 degree(s)C by X-ray scattering and cross-sectional microscopy. It was shown that thermodynamic equilibrium of layers materials at their interfaces and stabilization of layer structure by impurities and heat treatment are effective approaches to short-period multilayers with enhanced thermal stability of their structure and optical properties.