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Sputtering of Two-Component Alloys and Compounds

The works on selective sputtering of two-component alloys and compounds are reviewed. Consideration is mainly given to one-phase alloys being paid attention in some cases. Information is presented bearing one the dependence of the sputtering yields of the components and surface composition on the parameters of polycrystal target (temperature, mass of components, their concentration) and ion beam (ion mass an energy, irradiation doze, ion-to-target atom mass ratio). The angular and energy dependences of the sputtered particles are considered. The relevant available data for the sputtering of single crystal of the binary intermetallic compounds are presented. The dependences of the sputtering of twocomponent targets are explained on the basis of the transport theory and using the surface sputtering mechanisms.