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High precision tracking of a piezoelectric nano-manipulator with parameterized hysteresis compensation

High performance scanning of nano-manipulators is widely deployed in various precision engineering applications such as SPM (scanning probe microscope), where trajectory tracking of sophisticated reference signals is an challenging control problem. The situation is further complicated when rate dependent hysteresis of the piezoelectric actuators and the stress-stiffening induced nonlinear stiffness of the flexure mechanism are considered. In this paper, a novel control framework is proposed to achieve high precision tracking of a piezoelectric nano-manipulator subjected to hysteresis and stiffness nonlinearities. An adaptive parameterized rate-dependent Prandtl-Ishlinskii model is constructed and the corresponding adaptive inverse model based online compensation is derived. Meanwhile a robust adaptive control architecture is further introduced to improve the tracking accuracy and robustness of the compensated system, where the parametric uncertainties of the nonlinear dynamics can be well eliminated by on-line estimations. Comparative experimental studies of the proposed control algorithm are conducted on a PZT actuated nano-manipulating stage, where hysteresis modeling accuracy and excellent tracking performance are demonstrated in real-time implementations, with significant improvement over existing results.