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Discontinuous transitions between alpha and gamma regimes of rf capacitive discharge

A one-dimensional self-consistent fluid model has been used to analyse a capacitive rf discharge at various applied voltages and frequencies. Within a limited range of applied conditions the model provides two distinct stable stationary solutions. These correspond to two different modes of rf discharge which are termed according to the prevailing mechanism of ionization as alpha and gamma regimes of rf discharge. Transitions between these states are discontinuous and result in jumps in the discharge V - I characteristic. The alpha-to-gamma transition occurs when the transition voltage is reached and dc-like breakdown condition of sheaths is satisfied. The reversed transition from gamma to alpha regime occurs when the sheath voltage decreases under the minimal maintaining value of secondary electron ionization feedback.