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Integration of the innovative 3D micro prism design and fabrication technology for a pico-projection system

In this study, micro-opto-electro-mechanical systems (MOEMS) technology was used to design an innovative and compact 10 × 6 × 1.5 mm) 3D micro prism, featuring three distinct 45° inclined optical surfaces that simplify the optical design and dimensions of the micro-projection system. The 3D micro-prism manufacturing process is based on a process involving three time inclined exposures and thickfilm (1.5 mm). The roughness of the inclined surface reached 29.8 nm, improving the 407-nm surface roughness yielded by computer numerical control (CNC) processing.