{'fraction_non_alphanumeric': 0.020105820105820106, 'fraction_numerical': 0.006349206349206349, 'mean_word_length': 5.709219858156028, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Motion measurement system of compliant mechanisms using computer micro-vision.

Position sensing is essential to testify the validity of the mechanical design and verify the performance in micromanipulation. A practical system for non-contact micro-motion measurement of compliant nanopositioning stages and micromanipulators is proposed using computer micro-vision. The micro-motion measurement method integrates optical microscopy and an optical flow-based technique, in which the motions of complaint mechanisms are precisely detected and measured. Simulations are carried out to validate the robustness of the proposed method, while the micro-vision system and a laser interferometer measurement system are also built up for a series of experiments. The experimental results demonstrate that the proposed measurement system possesses high stability, extensibility, and precision with 0.06 µm absolute accuracy and 0.05 µm standard deviation.