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Pulsed digital oscillators as a tool for the selective activation of MEMS resonant modes

The purpose of this work is to show that it is possible to excite selectively different resonant modes of a MEMS resonator, by simply changing some parameters in the feedback filter of Pulsed Digital Oscillators (PDOs). Extensive simulation and experimental results are presented showing the goodness of the proposed approach. An iterative map, contemplating more than one resonance, is also obtained from the equation governing the motion of a cantilever.