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Dynamic analysis of a no-coupling and large stroke two-dimension micro-stage

Compliant micro-stage is the key component of the micromanipulator equipments and its dynamic performance can seriously affect the micromanipulator's kinematic and positioning accuracy. This paper proposed a two-dimension micro-stage based on bridge type amplification mechanism and U-type parallel guiding mechanism using the nesting structure and right angle flexure hinge. According to the structure characteristic of micro-stage, the dynamic model of one dimension stage is built, the stiffness performance of amplification mechanism is analyzed using the 1/4 model of bridge type amplification mechanism and the stiffness performance of U-type parallel guiding mechanism using the guiding cantilever beam theory. And on those bases, frequency response of the micro-stage can be obtained. Then, an impact experiment is carried out to test the micro-stage's frequency response. The effect of supporting mechanism and the sensor mass to the frequency response of the micro-stage, and the error between theory and experiment is analyzed. The experiment results proved the correctness and effectiveness of theory model.