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The attenuation of poly(dimethylsiloxane) film to surface acoustic wave on a piezoelectric substrate

ABSTRACT The attenuation characteristics of poly(dimethylsiloxane) (PDMS) film to surface acoustic wave was studied. An interdigital transducer with 27.7 MHz center frequency was fabricated on a 1280 yx-LiNbO3 substrate using microelectric technology. PDMS film with different thickness was coated on the piezoelectric substrate. Paraffin oil was pipetted on the PDMS film and heated by surface acoustic wave radiation. The temperature of the paraffin oil was measured by a temperature measuring meters. Then, the energy radiated into the paraffin oil per unit time was calculated. Comparison to SAW without the attenuation of PDMS film, the attenuation of SAW is 12.6%, 31.6% and 38% respectively, when the thickness of the PDMS film is 50μm, 100μm or 150μm.