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Development of Sampling Moire Camera for Real-Time Phase Analysis

Sampling Moire method is one of the convenient phase analysis methods. The accuracy of phase difference analysis is from 1/100 to 1/1000 of the grating pitches. This method is useful for a real-time measurement because the phase analysis can be performed from a single-shot image. In this paper, we developed a sampling moire camera which can analyze grating phase in real time. This camera is composed of a CMOS sensor and a FPGA. A two-dimensional grating image taken by the CMOS sensor was analyzed by the FPGA in real time. An application on a real-time deformation measurement of a cantilever is demonstrated.