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Frequency Response Characteristics Of An Optical Scatterometer And A Surface Profilometer

The frequency response characteristics of an angle-resolved optical scatterometer and a mechanical profilometer are examined. The transfer function for the scatterometer is found to be constant within the spatial frequency bandwidth of the system. The mechanical profilometer is found to have a nonlinear response. The effect of the nonlinearity on the frequency response of the mechanical profilometer is examined.