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Effective Permeability of CoNbZr Amorphous Films

The effect of substrate temperature, magnetic fields, heat treatment, and film thickness on permeability is discussed. The authors obtained good soft magnetic characteristics with uniaxial heat treatment up to 200°C, and learned that in-plane anisotropy can be controlled by applying a magnetic field of several Oe while heat treating. A magnetic field applied during sputtering can cause the easy axis to change at different temperatures and in different temperature ranges. Films thicker than 0.4 ¿m had a nearly constant permeability, but the permeability of those thinner than that was diminished.