{'fraction_non_alphanumeric': 0.016591251885369532, 'fraction_numerical': 0.01809954751131222, 'mean_word_length': 4.876106194690266, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon

A precisely rectilinear electrothermal actuator integrated with highly thermally expandable micromachined composites of SU-8 and silicon is presented. The actuator is capable of producing a maximum output rectilinear displacement of 42 μm with an estimated blocked force of up to 61 mN. The actuator operates at a low temperature rise of less than 266 °C and at input voltage of less than 15 V. Thermal time constant of the actuator is measured to be less than 3 ms. Such a powerful and power-efficient actuator could benefits future devices in optical MEMS.