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Dynamic Characteristic Analysis of Planar Piezoelectric Six-Axis Force/Torque Sensor

To research the dynamic characteristics of a planar piezoelectric six-axis force/torque(F/T) sensor in an actual measurement, a mathematical model method, a simulation method, and a calibration method are presented. The structure model of the sensor, its working principle, and research method are explained. A mass-spring equivalent model with multi-degrees of vibration based on the sensor is established, and differential equations based on the vibration system are derived from this model. According to the experimental prototype parameters of the sensor, its numerical model is established, the numerical simulation method and dynamic characteristic are investigated, and the amplitude–frequency and phase–frequency characteristics are analysed using the harmonic response method. The natural frequency of this sensor is calibrated using the impact response method. The experimental results indicate that the natural frequency in the six directions of the planar piezoelectric six-axis F/T sensor is higher than 3.95 kHz, and that the results of the analytical mathematical method and numerical simulation method are consistent with the calibration results. The proposed analytical mathematical method, simulation method, and calibration method can be used in the design, prediction, and calibration of the dynamic characteristics of these six-axis F/T sensors.