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Experimental verification of high speed AFM through local raster scanning

Local raster scanning is an algorithm for using the data acquired by an atomic force microscope in real time to steer the tip so that it stays on a sample of interest. The algorithm is suitable for all samples that are “string-like” in nature and has been shown through simulation and experiment to produce an order-of-magnitude improvement in imaging rate. This paper presents experiment results of applying the algorithm to gratings, demonstrating this improvement in speed. We compare the results to standard raster-scanning and discuss challenges introduced by our approach.