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Fabrication of BeCu module probe array using heating and fusing currents

We have developed a novel probe array using BeCu sheets, to solve the high-production-cost problem associated with conventional MEMS probe cards. The BeCu probe has a simple structure and offers several advantages such as ease of fabrication and rapid prototyping; further, the fabrication process is cost-effective. The proposed array was fabricated by applying a suitable heating current (for plastic deformation via Joule heating) and fusing current (for cutting the array) to a BeCu beam. The stress relaxation time was 7 min during the application of a heating current of 4 A, and the fusing current was 20 A. The fabricated probe array is suitable for use in various complicated semiconductor chip tests.