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A novel and ultrasensitive NH2-MIL-125/silicon nanoporous pillar array-based capacitive humidity sensor

Using silicon nanoporous pillar array (Si-NPA) as a template, a prototype humidity sensor was fabricated by growing NH2-MIL-125(Ti) on it through a simple hydrothermal method. With the relative humidity (RH) changed from 11 to 75% measured at 20 Hz, a capacitance response over 5397% was gained. The response time was 70 s and the recovery time was only 6 s. The highest hysteresis was evaluated to be ~ 1.9% at 54% RH. These phenomena are attributed to the channel network induced by Si-NPA, while the high humidity sensitivity may be ascribed to the increase in the given surface area due to its unique nanostructure.