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Silicon micromachined double-rotor scanning mirror

This paper presents a new scanning mirror structure. Large area (mm-order) scanning mirrors have been studied and developed due to the many applications where mm-order light beam size is present like optical microscopes and instrumentation systems. In the proposed structure the actuation and reflection mechanisms were separated in order to provide a more flexible and accurate design that considers the specific needs of each one. The new structure consists of two square rotors linked to a fixed frame by two torsion bars, a third torsion bar connect both rotors. The electromagnetic induction actuated scanners were made using bulk silicon micromachining technology, thin film techniques and mechancial assembly. The maximum optical deflection angle was 8.0°pp at the first resonant frequency of 1316Hz with a quality factor of Q=200. The second resonant frequency was 2542Hz with optical angle of 6°pp and a quality factor of Q=422.