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Spectroscopic ellipsometer for ultra thin film

As semiconductor technology has advanced, the films have become thinner and changed to multi-layer films, such as gate dielectric construction. To deal with these trends, we are continuing development of our spectroscopic ellipsometer with elliptical polarization. We chose a Rotating-Analyzer Ellipsometer (RAE) configuration. The incident light in this type of device is usually polarized linearly, because polarizers do not disperse the light. But the incident light in the ellipsometer described in this paper is elliptical, which has a nearly circular polarization. In this paper, we introduce a technique for solving the dispersion problem.