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Deformation analysis on micro objects using multiple wavelength microscopic TV holography

Microscopic TV holography is a reliable and versatile non-contact optical technique for whole-field deformation measurements with interferometric sensitivity for many micro-metrology applications. The technique is based on digital speckle interferometric subtraction correlation. Characterization of deformation and surface shape is an important parameter in quality testing of micro objects related to functionality, reliability and integrity of the components. Single wavelength TV holography is used widely for deformation analysis. However the single wavelength TV holographic configuration suffers from overcrowding of fringes for large deformation that sets in limitation due to speckle de-correlation for quantitative fringe analysis. In this paper, we describe a multiple wavelength microscopic TV holographic configuration that uses sequentially recorded phase shifted frames at three different wavelengths before and after deformation of the specimen for evaluation of relatively large deformation fields at effective wavelengths. Use of multiple wavelengths for deformation and shape evaluation is also discussed. The design of the system along with few experimental results on small scale rough specimens