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A Review of: “Scanning Auger Electron Microscopy”

This book will enlighten the reader on many aspects of scanning auger electron microscopy. The editors, along with several other authors from University of York, U.K., and characterization laboratories in Texas, USA, and Bristol, U.K., have written chapters on auger electrons and the information that can be obtained from this process. The chapters include topics such as auger process, instrumentation, spatial resolution, image forming, image processing, quantification of auger images, and applications to both material science and semiconductor manufacturing. The editors and authors did a good job compiling information, examples, theory, and references on this topic (even though there were slight changes in font from chapter to chapter). Each chapter provides a depth of understanding for the reader to gain an understanding and the numerous figures provide real examples of the application of these concepts. Throughout the book, the various authors kept theory and derivations to a minimum but still provided a deep understanding of the principles and concepts of this type analysis. The large number of figures also enhances the comprehension of this rarely discussed topic. This reviewer felt that the introductory chapter did not flow as well as it could have and may discourage some readers from continuing. But obviously, if the reader is intent on learning about scanning auger electron microscopy, they will forge ahead. Perhaps the next edition could address that aspect. This reviewer also felt that each chapter should have some summation remarks at the conclusion, similar to the last chapter of the book. This book is ideal for a graduate course in Physics or Material Science that deals with surface analysis. Researchers, scientists, and engineers working in this field and using the results from auger analysis will find this book quite valuable.