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Characterization of Thin Dielectric Films up to Mm-Wave Frequencies Using Patterned Shielded Coplanar Waveguides

This letter presents an original method based on Patterned Shielded CoPlanar Waveguides transmission lines (patterned S-CPW TLines) for the wideband characterization of thin dielectric materials, up to millimeter-wave frequencies. The proposed method is easy to use and a very promising candidate to reach a better precision than classical methods. The dynamic for the relative permittivity (respectively the dielectric loss tangent) determination is 3.8 times (respectively, 1.9 times) higher compared to classical methods. The method is experimentally validated by the characterization of a thin SiO2 layer (1 μm).