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Combined Radioisotope XRF Analysis of Complex X-Ray Spectra in the Case of Magnetostrictive TbDyFe Thin Films

The XRF analysis of TbDyFe thin film results in a multiple overlap between the Kα and Kβ characteristic X-rays of Fe and the L X-rays of Tb and Dy, hence it is not a trivial procedure to extract quantitative information about the atomic ratios of the various elements in the film. To overcome this problem, two annular radioactive sources, 109 Cd and 241 Am, were employed in the XRF analysis of the films. By combining their results together with the experimentally determined sensitivity constants and relative intensities of the various characteristic x-rays, the overlapping x-rays are resolved and the composition of the films can be determined.