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TiO2 Ultraviolet Detectors with Sandwich Structure

In this letter, sandwich structure TiO2 ultraviolet detectors with Pt electrodes have been fabricated. TiO2 thin films were prepared by sol-gel method, and Pt film was deposited by radio frequency magnetron sputtering directly on the semiconductor films. At 5 V bias, the dark current and photocurrent of the detectors were 6 nA and 69.2 μA, respectively. Under irradiation of 310 nm UV light, the detector with sandwich structure achieved a higher photoresponse of 197.4 A/W. The rise time of the device was 426.6 ms and the fall time was 509.2 ms, respectively.