{'fraction_non_alphanumeric': 0.02516411378555799, 'fraction_numerical': 0.0010940919037199124, 'mean_word_length': 5.678832116788321, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
One-mask procedure for the fabrication of movable high-aspect-ratio 3D microstructures

This paper describes a unique surface microfabrication procedure for cost-effective manufacture of free-standing, high-aspect-ratio micromechanical structures for sensor and actuator applications. This enables microstructures to be manufactured from a two-layer system with only one standard optical mask. The entire microstructures are grown electrochemically within a patterned thick (up to m) resist template on an electroplating base layer. The movable parts are subsequently obtained by removing the underneath base layer using a current-controlled electrochemical etching approach. The novel one-mask procedure involves only a few processing steps, promising low-cost, high-yield production. The realization of a lateral sensitive acceleration sensor is taken here as an example to illustrate this fabrication procedure.