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Structural Study of In2O3 Structures Grown by the Metalorganic Chemical Vapor Deposition

We have synthesized the film-like and rod-like structures of indium oxide (In2O3) by metalorganic chemical vapor deposition (MOCVD) method. The structural morphology of the deposits changed from the film to the arrays of 1-dimensional (1-D) materials with increasing the deposition temperature. The 1-D materials with the serrated surfaces prepared at 350°C possessed a crystalline cubic structure and had preferentially grown along the [111] direction.