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Detection of Volatile Organic Compounds in Fabricated MEMS Cantilever Sensor

Volatile Organic Compounds (VOC) such as Ethanol and Toluene need to be detected in highly discriminative method because of their hazardous effect on human health and environment. In this study three cantilever sensors are simulated in COMSOL Multiphysics 5.0 and the same has been fabricated using standard micromachining technique by coating Poly Venyl Pyridine (PVP), Mercapto Nicotinic Acid (4MNA) and Mercapto Benzoic Acid (6 MBA). The sensing characteristics of the fabricated sensors for the detection of VOC were investigated. The sensitivity of three sensors is based on the change in resistance with respect to time at a temperature of 40 °C.