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On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study

A global (volume-averaged) model is applied to investigate the effect of the electron energy distribution function on the plasma parameters of a high-density, low-pressure, argon discharge. The effective electron temperature increases and the electron density decreases as the electron energy distribution is varied from being Maxwellian to become Druyvesteyn like. The sheath voltage decreases as the electron energy distribution function is varied from being Maxwellian to become Druyvesteyn like for low pressures ({<}2 mTorr) and increases for higher pressures as the electron energy distribution function is varied. Simple global model calculations demonstrated that increasing the operating pressure does not necessary lead to a higher electron density if the electron energy distribution evolves from Maxwellian to become more Druyvesteyn like as the operating gas pressure is increased.