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Impact of the gas dynamics on the cluster flux in a magnetron cluster-source: Influence of the chamber shape and gas-inlet position.

Although producing clusters by physical methods offers many benefits, low deposition rates have prevented cluster-beam deposition techniques from being adopted more widely. The influence of the gas aerodynamics inside the condensation chamber of a magnetron cluster-source on the cluster throughput is reported, leading to an improved understanding of the influence of gas aerodynamics on cluster transport. In the first part of this paper, the influence of the carrier gas's inlet position on the cluster flux is studied. In particular, two inlet configurations were investigated, i.e., from the rear of the chamber and from within the magnetron sputtering source. It was found experimentally that the latter configuration can lead to an increased cluster flux, under the same conditions of gas pressure and power applied to the magnetron. This behavior is explained with the help of simulations. In the second part of this paper, the gas dynamics behavior inside four chamber shapes, namely, two cylindrical shapes with different cross-sectional diameters and two conical shapes with different apex angles, was simulated. The modeling showed that the fraction of clusters successfully leaving the aggregation zone can be increased by up to eight times from the worst to the best performing chamber geometries studied. Finally, the cluster throughput was determined experimentally using a quartz microbalance in two of the four chamber designs. It was found that the cluster flux increased up to one order of magnitude, reaching ∼20 mg/h for a condensation chamber with a smaller cross section and a conical exit.