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Ion Milling by Beam Scanning Techniques–Effect of Beam Diameter on Milled Surface Shape

The effect of beam diameter on a surface shape produced by a beam scanning-type ion milling has been studied. An argon ion beam accelerated to 10 keV was electrostatically scanned and the scanning speed was varied as a function of the beam bombarding point. The flatly-formed, wedge-shaped and parabolic surfaces exclusive of the milled-region edges were produced on a Si target surface independently of the beam diameter which varied locally.