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Picosecond laser patterning of NiCr thin film strain gages

This paper presents results of ablation experiments of NiCr layers with thicknesses ranging from 23nm to 246nm on Al2O3 substrates. Investigated parameters are fluence, number of pulses, film thickness and substrate roughness. The influence of the parameters on the removal threshold is analyzed in order to identify stable processing parameters. Patterned NiCr thin films as an essential component for the measurement of mechanical stress are required for the development of sputtered thin film strain gages. With this new approach strain sensors will be resistant against creeping or swelling through changing ambient conditions unlike conventional strain gages.