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Research on Ultra-Precision Machining of Silicon Nitride Ceramics: A Review

The contemporary aspects of ultra precision machining of Si3N4 with regards to enhanced productivity and precision demands is presented in this paper. This paper reviews the literature on machining technology of covering the history, Several machining methods of Si3N4 are discussed. By comparing their advantages and disadvantages, some beneficial conclusions, which have some guiding significance for the coming practical works, are reached.