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X-ray diffraction behaviour of W/Ti superlattices

The structural properties of periodic and quasiperiodic W/Ti superlattices have been investigated by means of X-ray diffraction. Intensity attenuation of even ordered peaks occurs in the spectra of W/Ti periodic superlattices with near-equal-layer thicknesses. This phenomenon is theoretically explained. Two series of quasiperiodic (Fibonacci) samples are prepared, one with thickness ratio d A /d B = τ, and the other d A /d B = 1/τ. X-ray diffraction results of these quasiperiodic superlattices are discussed and compared. The possible application of Fibonacci films as optical elements in the soft X-ray region discussed. Furthermore some X-ray diffraction spectra are simulated by computer calculation in order to understand the detailed structures. The calculated results are in good agreement with measured ones.