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High-speed and high-resolution heterodyne interferometer using a three-mode laser

In the measurement using conventional heterodyne interferometer, `high-speed' and `high-resolution' were methodologically contradictory problems. Previously, authors have solved this contradiction by using two conjugate beat signals. In this work, we realized highly sensitive measurement without speed limit of the target using a three- mode laser. The synthetic wavelength of (lambda) /2 generated by three-mode laser enabled to increase the measurement sensitivity twice. The three-mode laser also has an advantage of higher output power.