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Statistical experimental design for optimizing integrated capacitor fabrication

Integrated decoupling capacitors for MCM-L/D technology are an important component for next-generation electronic packaging applications. Thin film integrated capacitors using polymer-ceramic composite materials have been developed to achieve this need This paper presents a statistically designed experiment for systematic characterization of the dielectric constant and loss tangent of integrated capacitors formed by mixing lead magnesium niobate (PMN) particles into polyimide and benzocyclobutene (BCB) polymer dielectric layers. We determine these quantities as a function of the type of polymer material, the volume fraction of ceramic in the polymer matrix, and the polymer cure time and temperature. These factors have been examined by means of a D-optimal experiment. Results indicate manipulation of each of the four factors over the ranges examined proved statistically significant and led to considerable variations in dielectric constant and loss tangent. Based on data from these experiments, we train neural networks to model the process variation as a function of above variables. Using this methodology, we determine proper combinations of polymer/ceramic materials and processing conditions to achieve desirable electrical properties.