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The Characteristics of Magnesium Titanate Thin Film as Buffer Layer by Electron Beam Evaporation

We have studied the application of magnesium titanate thin films as buffer layer for the improvement of adhesion of Pt films to Si substrate. Magnesium titanate films were successfully prepared on Si(100) substrate by electron beam evaporation. The crystal phase of MgTi2O5 and MgTiO3 films on Si substrate were observed. These films had a very smooth and densely packed surface morphology and showed a good characteristic as the adhesion layer for Pt. Also, AES analysis showed the excellent properties as the reaction barrier layer between Pt and Si.