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Methodology for development of LVS and LPE rule sets adapted for MEMS processes

The paper describes a methodology for development of LVS and LPE rule sets adapted for microelectromechanical technologies. The method is applied on an existing multipurpose MEMS process. To evaluate the accuracy and performance of the proposed method, parasitic extraction is performed on several different devices designed with the chosen MEMS technology. The LPE results are compared to reference results obtained through finite element analyses (FEA).