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Metal-Optics Scatter Measurements

Many applications using metal optics require that the optical elements have very low scattering surfaces. A scatterometer suitable for measuring the scattering properties of metal mirror has been developed at AEDC. The scatterometer operates at two wavelengths, 0. 6328 and 10. 6 μm. Tests required to evaluate the performance of the scatterometer are described, and the directional scattering data off a high quality metal mirror are presented.