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Variable cross-section nanopores fabricated in silicon nitride membranes using a transmission electron microscope

Nanopores were fabricated using a transmission electron microscope (TEM). By manipulating TEM parameters, such as relative stage settings, electron beam shape and dwell time, it was possible to fabricate both single and ordered arrangements of nanopores with controlled geometries in silicon nitride membranes supported on a silicon window. Three distinct nanopore geometries with circular, elliptical and triangular cross-sections were fabricated. The smallest critical dimension reported here is on the order of 3 nm for the elliptical pore.