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Transparent Flexible Zinc–Indium–Tin Oxide Thin-Film Transistors Fabricated on Polyarylate Films

Transparent flexible displays can be realized using active matrix organic light emitting device (AMOLED) with transparent electrodes on transparent plastic substrates. In this study, we developed low-temperature, high-performance [ZITO, ZnO:In2O3:SnO2=3:1:1 molar ratio] thin-film transistors (TFTs) on polyarylate films. After optimizing the sputtering condition, the ZITO TFT with an ITO electrode had a high mobility of 16.93 cm2 V-1 s-1, and an SS of 0.39, while the ZITO TFT with a ZTO:B electrode showed no hysteresis on sweeping, a mobility of 2.29 cm2 V-1 s-1 and an SS of 0.18.