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MEMS variable optical attenuator (VOA) for DWDM applications

Variable optical attenuators (VOAs) have wide applications in DWDM optical communication systems, for example, equalizing the power levers of different wavelength channels, flattening the gain of optical amplifiers, etc. A MEMS variable optical attenuator with fibers connectorized has been developed using proprietary drawbridge structure, which has achieved 1.5 dB insertion loss, 45 dB dynamic range and 37 ms response time, and requires only 8 V driving voltage. Finite element model and analytical model have also been studied and compared with the experimental data, showing that the two models predict the mechanical characteristics of MEMS VOA with reasonable accuracy.