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Servo-Assisted Position-Feedback MEMS Inclinometer with Tunable Sensitivity

In this paper a Micro Electro-Mechanical System (MEMS) inclinometer based on a double-actuator electrical servo-assisted position-feedback mechanism is presented. The mechanical position of the moveable part of the system is kept fixed thanks to a position-feedback loop that exploits a capacitive position sensor and two electrostatic force actuators. By adjusting specific loop parameters, the angle sensitivity can be finely tuned electrically. Experimental results show that the proposed system allows to tune the sensitivity up to 33.1 mV/deg, and to obtain a maximum angle resolution of 40 mdeg.