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Superconductivity of Bi System Thin Films Formed by Consecutively Sputtering Three Pb-Doped Targets of Slightly Different Compositions

Superconducting Bi system thin films have been formed on MgO(100) substrates by RF magnetron sputtering from three lightly Pb-doped targets: Bi2.4Pb0.6Sr2Ca2Cu3Ox, Bi1.6Pb0.4Sr3Ca3Cu3Ox and Bi1.6Pb0.4Sr2Ca2Cu4.5Ox. To improve the superconductivity of the as-grown films, the films were kept in a sputtering chamber after deposition. The film, formed at 660°C and kept at the same substrate temperature and gas pressure as the sputtering conditions for 5 h after deposition, showed zero resistivity at 83 K and a resistivity drop at 115 K. The critical current density of the film was 4×105 A/cm2 at 77 K and 1×107 A/cm2 at 52 K.