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Simulation for a Plasma Discharge Model in Microwave Transmitter-Receiver Waveguide by COMSOL Multi Physics Software

Rapid plasma formation and evolution during microwave gas discharge device produce a macroscopic plasma shield to the microwave transmission, which can severely limit the performance of the device. In this paper, the electromagnetic (TE)- plasma interaction and the chlorine Discharge Global modeled in a standard rectangular waveguide WR 284 (72.14 mm× 32.04 mm) by COMSOL multiphysics provide to be a very good compromise between flexibility and work efficiency.