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Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer

This paper presents a comparison study of three readout methods for a capacitive MEMS accelerometer, which is fabricated using standard SOI technology. Three readout methods, namely, capacitive-voltage convertor (CVC), capacitive-phase convertor (CPC) and sigma-delta modulator, are used in this study. The sensitivity and nonlinearity obtained from using each method are respectively, 10.1mV/g, 0.875deg/g, 3.1fF/g and 0.38%, 0.33%, 0.18%. The experimental results show that the circuit of CVC is relatively simple than the other two methods, and it has a better stability and lower noise among the three methods.