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Laser Damage Properties of Optical Coatings with Nanoscale Layers Grown by Atomic Layer Deposition

The notable change in the structure and laser damage properties of coatings using periodically incorporated Al2O3 nanoscale layers grown by atomic layer deposition is demonstrated. Coatings with a nanoscale laminated structure had a higher transparency than pure TiO2 films grown at 400°C. The laser damage resistance of nanolaminate coatings is three times larger than that of pure TiO2 films. The morphology of laser-induced damage shows a significant reduction in the number of damage sites.