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Ultra-Transparent Atomic Layer Deposition Membranes for Liquid Cell TEM

Liquid cell electron microscopy (LCEM) has enabled the direct in-situ visualization of a range of physical and chemical processes at high spatial resolution. Various designs of liquid encapsulating cells have enabled LCEM, including “sandwiches” of two membrane chips glued to one another, monolithic microfluidic channels, and flow cells which use an O-ring to seal the liquid [1]. However, these approaches typically make use of silicon nitride (SiN) membranes, which are robust under electron radiation, chemically inert, and compatible with conventional silicon micro-fabrication techniques, making the production of these cells scalable. However, these cells suffer from significant drawbacks, including the low conductivity of SiN, and the high scattering cross section of typical membranes, which limits achievable resolution in the microscope. On the other end of the spectrum, researchers have made use of graphene liquid cells [2], which leverage the high conductivity and ultra-low scattering crosssection of graphene. However, these cells involve manual transfers of graphene on TEM grids and cannot be produced in a scalable fashion.