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MOEMS-based instruments for in-situ scanning confocal microscopy

A new microscope is under development that combines the MOEMS scanner and focus control elements to achieve full 3-D beam positioning. A novel co-axial architecture utilizing an annular scan mirror permits a packaged instrument measuring less than 2 mm in diameter. This microscope will be suitable for fluorescence imaging, with a 0.4 N.A.. water-immersion lens.