{'fraction_non_alphanumeric': 0.021450459652706845, 'fraction_numerical': 0.018386108273748723, 'mean_word_length': 5.049382716049383, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Evaluation method of longitudinal and transverse piezoelectric d-coefficients for thin films

Abstract The main idea of this research is to provide a distinctive solution for the measurement of both the longitudinal and the transverse piezoelectric d-coefficients. d33 and d31, of ferroelectric thin films and also thick films. In general, to get these two coefficients of thin films, two different measuring systems are required. Here, we propose the improved method for the evaluation of these two coefficients with single equipment and with the relatively convenient procedure. The two-step loading process of applying the both positive and the negative pressure has been designed to acquire the piezoelectric coefficients. These results have been calibrated for both the longitudinal and the transverse piezoelectric d-coefficients, d33 and (d31, of thin films. In the first stage of the experiments, we have obtained d33 of 108pC/N and d31 of 56.8pC/N for the PZT thin films