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Oscillator-type micro-gyroscope on dielectric substrates

Known vibration-type micro-gyroscopes (VTMG) of planar design operating for microwave circuit designs are based on application of silicon and its modifications. The specificity of silicon plate profiling process gives the triangle or trapeziform configuration of movable element torsions, and predetermines the intrinsic mechanical stresses. The latter, together with thermo-mechanical stresses arising as a result of application of high temperatures (up to 1200/spl deg/C) and materials with substantial thermal expansion coefficient differences under processing, reduce considerably the reliability of such VTMG. An example of the VTMG design formed on the basis of dielectric substrate of anodic alumina (AA) is described.