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Nano-graphite formation enhanced by fluorine in gas phase of carbon sputtering plasmas

The particles grown in gas phase of carbon sputtering plasmas were observed, and analyzed in chemical composition and atomic arrangement. The atomic arrangement obviously changed from amorphous to crystalline with addition of fluorine-contained gas (CF4). The fluorine atom enhanced the formation of nano-sized particles with graphite structure. The fluorine content was not be found in the crystalline structure of graphite, which implied that chemical reactions made fluorocarbon or carbon molecules transformed to graphite with removing of fluorine.