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Numerical simulation on 1 on 1 surface damage threshold test of fused SiO2 with Monte Carlo method

For researching the influence factors of the damage threshold test results, the 1 on 1 test program and data processing on fused SiO2 optical elements was numerically simulated with Monte Carlo method. The influence of the surface defect density and the target test spots area for the test results of damage threshold was studied. The numerical simulation results indicate that the damage threshold of optical elements can't be accurately evaluated with 1 on 1 test program if the surface defects have the characteristics of both low density and low damage threshold. The zero-probability damage threshold isn't equal to the minimum energy density when the laser induced damage of optical element appears. This work is helpful for understanding the 1 on 1 test result and has important reference value in the actual damage threshold test of optical elements using 1 on 1 test method.