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Model of capacitive micromechanical accelerometer including effect of squeezed gas film

An electrical component model for a micromechanical accelerometer is presented. In addition to the varying capacitances, the motion of the seismic mass and the damping gas films are described by means of an electrical equivalent circuit. The resulting model can be analyzed together with the interfacing electronics utilizing all analysis modes available in a circuit simulator. The model has been implemented in the general purpose circuit simulation tool APLAC. The model simulations show an excellent match with the measured frequency responses.