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Low-pressure hybrid chemical vapor deposition for efficient perovskite solar cells and module

Vapor-based deposition technique is considered as a promising approach for preparing a high-quality and uniform perovskite thin film. With evolution from coevaporation deposition to a low-pressure vapor-assisted solution process, both energy budget and reaction yield for perovskite film fabrications are improved. In this work, a low-pressure hybrid chemical vapor deposition (LPHCVD) method is applied to fabricate CH3NH3PbI3 perovskite films. The crucial dependence of working pressure on the perovskite formation is revealed. Moreover, the reaction time plays an important role in controlling the quality of the synthesized perovskite film. Efficient mesoscopic perovskite solar cells of 14.99% and perovskite modules (active area of 8.4 cm2) of 6.22% are achieved by this LPHCVD method.