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Methane sensing properties of CuxO thin films deposited by pulsed laser deposition

In the last years, semiconductor metal oxide films play an increasing role as sensing devices for various gases [1,2]. Copper oxides thin films (Cu2O and CuO) are p-type semiconductors that have attracted much interest due to their potential applications for solar cells and gas sensors [3,4]. Especially, the composites of copper oxides and n-type metal oxides such as ZnO/CuO and SnO2/CuO have been studied as gas sensors [5–7]. However, the research on copper oxide gas sensors is far from being satisfactory and only a few investigations have shown their gas-sensing properties to flammable gases such as CH4 [8].