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Kirkpatrick-Baez microscope with spherical multilayer mirrors around 2.5keV photon energy

A Kirkpatrick-Baez (KB) x-ray microscope has been developed for the diagnostics of inertial confinement fusion (ICF). The KB microscope system works around 2.5keV with the magnification of 20. It consists of two spherical multilayer mirrors. The grazing angle is 3.575° at 2.5keV. The influence of the slope error of optical components and the alignment errors is simulated by SHADOW software. The mechanical structure which can perform fine tuning is designed. Experiment result with Manson x-ray source shows that the spatial resolution of the system is about 3-4μm over a field of view of 200μm.