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Piezoelectric resonating structures for microelectronic cooling

The design of piezoelectric resonating structures was investigated for generating acoustic streaming which may be used for cooling microelectronic components. The vibration characteristics of different piezoelectric structures were simulated by the finite element method and validated with analytical approaches. Considering the product of resonance frequency and dynamic tip deflection as a performance merit, the effects of length and location of the actuators as well as the boundary conditions were analyzed for four different piezoelectric resonator designs. Results show that there exist optimal length and location of actuators on the passive structures.