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31P Nuclear Magnetic Resonance Study of Local Bonding Configuration of Phosphorus in Amorphous Silicon-Hydrogen-Phosphorus Alloys

31P nuclear magnetic resonance (NMR) spectra have been measured for amorphous hydrogenated silicon heavily doped with phosphorus. Phosphorus is enriched in the film during glow-discharge decomposition of the SiH4-PH3 mixture at a substrate temperature of 250°C by a factor of 3. 31P NMR results demonstrate that almost all the phosphorus atoms are bonded to three silicon atoms, and not to hydrogen or to other phosphorus.