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Auto gain tuning method for high performance of atomic force microscope

The performance of Atomic Force Microscope depends on the control gains. However, the optimal gains have uncertainties which are impacted by cantilever properties, sample properties and measurement environment. In commercial AFM, it is not easy to get good AFM imaging results since the controller is manually tuned by user. In this paper, auto gain tuning algorithm is suggested for the high performance and automation of AFM. Auto gain tuning algorithm is evaluated by step responses, frequency responses and AFM imaging results.