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Diagnosis of hydrogen ions (H+, , , H−) from the near-electrode region of dielectric barrier discharge plasmas

Hydrogen ions (H+, , ) from the near-ground-electrode region in dielectric barrier discharge plasmas were characterized using a molecular beam mass spectrometer under a hydrogen pressure of 1–80 Torr. The measured H+ current is more than one to a few orders of magnitude greater than the currents of and at a pressure of 1–15 Torr, with a peak-to-peak voltage of 50 kV and 35 kHz ac power source. At a gas pressure range of 15–80 Torr, only the H+ ionic signal is observed. The hydrogen ion currents rise with increasing discharge voltage and ac frequency but exhibit a maximum over the H2 pressure range studied. The H− ionic signal is also detected under certain discharge conditions within a hydrogen pressure of 1.5–35 Torr. The main physicochemical processes of interaction between hydrogen ions, neutrals and electrons in the alternative and temporary cathode sheath near the discharge electrode have been discussed. The dependence of the mean energy of H− ions on H2 pressure has also been obtained.