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Effect of vacuum thermal-annealing temperatures on the microstructure and optical properties of single-phased Ag 2 O film

A single-phased Ag 2 O film was deposited on glass substrate by direct-current reactive magnetron sputtering, and was then vacuum thermally annealed at different annealing temperatures ( T A) for 1 hour. Effect of the T A on the films microstructure and optical properties was investigated by X-ray diffractometry, scanning electron microscopy and spectrophotometry. The results indicate that Ag nano-scaled particles begin to appear in the annealed Ag 2 O film at T A = 300 ℃. The Ag content obviously increases with increasing T A , and in particular, Ag 2 O phase is completely transformed into Ag at T A = 475 ℃. The evolution of the films surface morphology from dense to loose indicates that the diffusion and escape of O atoms from film surface accompanied the thermal decomposition reaction of Ag 2 O to Ag particles during the vacuum thermal annealing. The changes of the films transmissivity, reflectivity and absorptivity with T A are attributed to the thermal decomposition of Ag 2 O and the films structure evolution during annealing.