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Study on Electrodeposition of InGaAs Thin Film

The principle and the experimental method of the electrodeposition are discribed in detail in this paper.InGaAs thin film was prepared by using optimized electrodeposited conditions. The radiative wave length of the film was between 1.3～1.5 μm, the composition of the film was analyzed by energy spectrometer and the transmission spectrum of the film was measured by spectrophotometer and monochromator. The V I chractristic of the conductive type and the topography of the In x Ga 1 x As film were also studied.