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Integrated cryogenic current comparator based on superconductor LSI technology

A new implementation of Sullivan-Dziuba type cryogenic current comparators (CCCs) is proposed. We designed an integrated CCC device consisting of a thin-film CCC, a pick-up coil and a SQUID sensor on a single chip. Prototype devices were fabricated by using a superconductor multilayer integrated circuit technology with chemical-mechanical polishing processes.