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Three-Axis MEMS Threshold Accelerometer Switch for Enhanced Power Conservation of MEMS Sensors

A no-power 3-axis bidirectional MEMS threshold accelerometer is presented in this paper. Threshold accelerometers of 25g, 50g, and 100g were designed and fabricated on a single 3mm chip. The design is based on a conductive spring-mass system made of Au metal layers that close a switch between two metal contacts when the designed threshold is exceeded. We present the MEMS threshold accelerometer switch fabrication process and provide an analytical and experimental framework for the device performance