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Light Ion Beams Interacting with Thin Films

Both the helium and neon ion beams are relatively light compared to gallium, and these beams are finding new applications that involve many 2D materials and thin films. For example, the helium beam has been used to precisely sputter patterns in thin films to make nanoscale plasmonic resonators in gold [1] and nanopores in silicon nitride [2]. Graphene devices have been functionalized by helium to induced lattice defects to create novel band gap devices [3]. The helium beam can also disrupt the structure of a superconducting material to create Josephson junctions for sensors or other devices [4]. Even for basic imaging tasks, the helium beam is highly regarded for its ability to make visible thin films such as self-assembled monolayers [5].