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Multi-grain and Multi-direct Impact Simulation on ABAQUS and Experimental Analysis of Single Crystal Germanium Surface Polishing

Single crystal germanium has good physical and chemical property, but it is difficult to be processed. It had been found that plastic deformation of brittle materials could be produced in a small range by using two-phase flow processing technology, which could make the surface of single crystal germanium effective processed. Temporarily, the simulation studies of multi-gain impaction during processing had been focused on one direct impaction, which lack of multi-direct impaction analysis. The paper based on Hrosovsky's theory of grain impact abrasion, used ABAQUS FEM software to establish a multi-grain and multi-direct impaction model to simulate the polishing process, and designed experiment to validate the availability of simulation. After analyzed the results of experiment and the simulation found that, the grains' multi-direct impaction has negative effects that should be avoided during the processing. The experiment validated the availability of simulation model, also, found the deficiency of the model. The paper provides a new research idea in two phrase flow polishing process.