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High-Q Factor Multiferroic Resonant MEMS Low Frequency Magnetic Field Sensors

SummaryMultiferroic resonant MEMS magnetometers show great promise to provide a highly sensitive, low noise option for detecting low frequency magnetic fields at room temperature and in a small form factor. Strain modulation techniques enable sensitivity enhancement by the high device Q factors. However, as the strain modulation increases, a resonator Duffing nonlinearity is observed before the magnetostrictive material can be sufficiently strained to provide high modulation efficiency. Here, we report a multiferroic resonant MEMS magnetometer with a sensitivity of 32mArms/T and noise value of ~2.2nT/√Hz.