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Design of an electrostatically excited H-type resonant gyroscope suitable for fabrication using the LIGA process

Abstract This paper presents a new design of miniaturized H-type resonant gyroscope suitable for automotive applications which is to be fabricated in electroformed metal using an emergent technology known as LIGA (the German acronym for the process steps of Lithographie, Galvanoformung and Abformung). The sensor features electrostatic drive and capacitive readout techniques. The simulation-aided design process used to obtain the final sensor structure is described in the paper. The paper also details how a set of equations for the electrostatic-structural coupled field problem is derived and implemented in conjunction with a commercial finite element analysis package. The driving and detecting circuitry are also discussed.