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Degradation mechanisms of vertical cavity surface emitting lasers

We present the results of our failure analysis of proton-implanted vertical cavity surface emitting lasers (VCSELs). We show that VCSELs have a unique failure mode with the degradation occurring not only in the active regions, but also strikingly in the p-DBR mirror layers. The defect structures associated with degradation are analyzed by cathodoluminescence, electroluminescence and are identified by transmission electron microscopy. The processes involved in the p-DBR degradation are discussed.