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Research On The Fiber Optic Efpi Sensor With a Beam-Supported Membrane Structure For Pd Acoustic Detection

In this paper, the fiber optic extrinsic Fabry-Perot interferometer (EFPI) sensor with a beam-supported membrane structure was designed and developed to detect acoustic emission (AE) signals of partial discharge (PD). Based on the MEMS processing technology, the silicon-On-Insulator (SOI) was used to fabricate the diaphragm structure of the supporting beam and control the Fabry-Perot (FP) cavity length accurately by design of the hole shoulder. Processed diaphragm and its measurement results of size parameters are given, while measurement of FP cavity length by surface profilometer is also shown. At last, experimental results in laboratory show that the developed EFPI sensor with a beam-supported membrane structure is feasible and practical used for PD AE detection.