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A 1.05V 1.6mW 0.45°C 3σ-resolution ΔΣ-based temperature sensor with parasitic-resistance compensation in 32nm CMOS

In the multicore era, thermal/power management is essential in order to meet platform-performance and energy-efficiency requirements. Accurate temperature measurements are required to reliably maximize microprocessor performance under a thermal envelope. Furthermore, in a large multicore microprocessor, multiple-location hot-spot temperature measurements are critical to limit leakage through load balancing. The requirements for absolute inaccuracy are modest (≪8°C), but good relative inaccuracy (≪3°C) is needed [1,2]. Increases in transistor variations and switching noise make static measurements difficult, and having multiple local temperature sensors for each hot-spot location is impractical. Besides, trimming a sensor for each hot-spot is costly. This paper presents a temperature sensor for remote temperature sensing that achieves the required resolution and variation tolerances by: 1) chopping the input current to the remote BJT pair; 2) deriving a voltage reference from the same BJTs; 3) making multiple current ratio measurements to eliminate parasitic resistance; and 4) using digital demodulation to eliminate analog offsets.