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Design and analysis of a novel oil-air vibration isolator for microelectromechanical systems manufacturing platform

Abstract Microelectromechanical systems (MEMS) are a precision system. Therefore, vibration isolation is significant in the manufacture of MEMS devices. There are some microvibrations in working processing in environments, so MEMS manufacturing platform must be designed for safety. For example, vibrations come from the ground, motion interfere by other instruments, human ambulating, building swing, etc. The frequency of vibrations from these vibration fountains is found to be 0-100 Hz. The objective of this paper is to design a novel vibration isolator to improve the dynamics of MEMS manufacturing platform. The vibration isolator is designed through coupling oil and air by ingenious tactics. The physical mechanism of the vibration isolator is systematically investigated. The experimental results of a prototype in dynamic test show complex non-linear dynamic characteristics. Based on the test, a mathematical model is presented by analysing internal fluid dynamic phenomenon with respect to the vibration isolator. Comparisons with test data confirm the validity of the model. In the meantime, an optimal model for parameter matching design is built for parameters design of the vibration isolator. An example is illustrated to confirm the validity of design approach.