{'fraction_non_alphanumeric': 0.039721946375372394, 'fraction_numerical': 0.016881827209533268, 'mean_word_length': 5.0359281437125745, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
A micromechanical mirror based on PZN-PT single crystal films

This paper presents an investigation of a stand-alone PZN-PT film-based movable micro-mirror and characterizes its precision level. Micro-mirrors have received considerable attention for applications in various micro-opto-electro-mechanical systems (MOEMS). For example, there is considerable interest in creating micro-mirror arrays for image display and telecommunication applications. Such optical applications require high precision position control of micro-mirrors. We present the development of stand-alone self-moving micro-mirrors on the basis of a single-film actuation mechanism. The mirror design provides for tilt motion using a single-crystal Pb(Zn1/3Nb2/3)O3-PbTiO3 (PZN-PT) film unimorph actuator. A prototype micro-mirror plate is designed to a size of 600 × 400 × 10 μm3 including actuation device. In this paper, it is shown that a prototype micro-mirror fabricated in our laboratories can be operated at frequency of 50 kHz.