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Molecular dynamics simulation of ablation process with ultrashort-pulsed laser

Ultra-Short pulsed lasers are highly useful tools in the field of microfabrication. In microfabrication, the laser pulse usually is very short in the pico-second or subpico- second range: therefore, it is very difficult to observe the transient material processing phenomena experimentally. Over the years, the authors have conducted molecular dynamics (MD) simulation to study the ablation process with ultra-short pulsed laser irradiation. The MD method has been modified to simulate the laser ablation of metals by updating heat conduction effect by free electrons at each calculation time step. In this paper, a review of the modified MD simulations on ablation and shock phenomena for metal with pico-second laser irradiation is presented.