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Dynamics of the atmospheric pressure diffuse dielectric barrier discharge between cylindrical electrodes in roll-to-roll PECVD reactor

The high current diffuse dielectric barrier discharge (DBD) was operated in a bi-axial cylindrical electrode configuration using nitrogen, oxygen and argon gas flow with the addition of tetraethyl orthosilicate as precursor for silica-like film deposition. The behaviour of the transient plasma was visualized by means of fast imaging from two orthogonal directions. The formation and propagation (~3 × 10 4 m s −1 ) of lateral ionization waves with the transverse light emission structure similar to the low pressure glow discharge was observed at time scales below 1 µ s. Despite plasma non-uniformity at nanosecond time scale the deposition process on the web-rolled polymer results in smooth well adherent films with good film uniformity and excellent gas diffusion barrier properties.