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Fabrication of nano-Bragg polymer waveguide by soft-lithography process

A polymer waveguide is successfully fabricated by a new method, which is implemented by a Micro-Electro-Mechanical System (MEMS) process including a stamping transfer technique incorporated with holographic interference, a lithography procedure and soft molding tecnnology. The polymers used in these experiments are OG146 and OG154 with different refractive indices. The near-field measurement for the channel waveguide has shown that the polarization dependent loss is very low. This process is simple, easy and suitable for mass production.