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A Scale Factor Enhancement Method Based On Parametric Modulation For A Resonant MEMS Accelerometer

For the first time, a parametric modulation (PM) is exploited to enhance the scale factor (SF) of a resonant MEMS accelerometer. By applying a parametric modulation signal, the effective stiffness of the resonator is periodically modulated, leading to sensitivity transfer between two modes of operation. As a result, an enhancement of the scale factor from 506Hz/g to 834Hz/g is attained. With improved SF, the measured noise floor of the accelerometer is 2.8μg/Hz1/2. However, the measurement results suggest that the noise of the sensor is likely to be dominated by ambient vibrations. The fundamental limit of the sensor noise floor with PM is estimated to be approximately 60ng/Hz1/2.