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Study of photothermal vibrations of semiconductor cantilevers near the resonant frequency

The elastic vibrations of semiconductor cantilevers, which were excited with a frequency-modulated laser, were studied theoretically and experimentally in this paper. The carrier density, temperature and elastic displacement distributions were obtained by using the theoretical model including plasma and thermoelastic effects. The results showed that the plasma wave had a significant influence on the vibrations. Using an interferometric setup the photothermal signals were investigated near the resonant frequency. The results showed that the experimental results were in good agreement with the theoretical ones.