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Web-based procedure to speed up reaction to in-line inspection alarms

An important point in the in-line yield improvement strategy is to be able to react as soon as possible to the alarms detected, and stop the excursions quickly in order to reduce the impact in yield loss and reliability. Therefore, to improve these requirements, we have developed a procedure, using web-based tools, which we detail in this paper. This exchange of information system permits the operators to easily access the engineer's documents. The engineering expertise about the usual problems is concentrated in these documents, which clearly explains the procedures to follow. Using a web interface, operators can complete all necessary data to continue with the investigation through different shifts. This database is easily accessible by engineers and other operators and the information is structured and organized in a uniform and correct way. In this paper we will show the benefits that we have found during the last six months working in production with this procedure.