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RF MEMS components using CMOS technology

Recently microelectromechanical systems (MEMS) devices have become an important technology that is used in many applications. We describe post-processing steps of CMOS technology to implement a MEMS structure suitable for RF systems. We describe CMOS-based monolithic MEMS structures suitable for realizing passive RF components operating at frequencies of up to 60 GHz. Examples of RF MEMS components - inductors, switches and tunable capacitors, and coplanar transmission lines - realized in this technology are given.