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ALN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency

A novel AlN PMUT compatible with CMOS-MEMS process is presented. The design is a squared membrane with 4 different sections. The operational frequency of the device in liquid is in the 10 MHz range. Our FEM model shows that the cross-slit increases the displacement as well as the acoustic pressure outputs by a factor of 10. The resulted 4 PMUT sections are sealed by a passive Si3N4 layer allowing reliable liquid operation as demonstrated by the experimental acoustic characterization.