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An expandable Petri Net Framework for method Behavior evaluation of reconfigured equipment

This paper proposed a design approach for evaluating the feasibility of Reconfigurable Equipment Behavior (REB) based on the Extendable Petri Nets Framework (EPNF). The approach can analyze equipment scenarios through developing and usage phases. Most importantly, EPNF is fully automatic to build a Petri nets (PNs) model according to equipment scenarios of Unified Modeling Language (UML). Moreover, it also can enhance efficiency of production system. Adopting a cluster tool (CT) of semiconductors was presented as a case study to illustrate the proposed approach.