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Resonanzverschiebungen in HF-Entladungen bei axialem Magnetfeld/Resonance Shifts in High Frequency Discharges in Axial Magnetic Field Configurations

Abstract The pressure dependence of the lower hybrid resonance is investigated in a hydrogen plasma generated by a high frequency discharge. Appreciable shifts of the absorption peak with the neutral gas pressure are observed only in a mirror like magnetic field configuration. The measurements show that this shift cannot be explained by a change of the ion composition of the plasma, but must be attributed to two other mechanisms: The composition of the spectrum of the kn-components is influenced by the axial electron density profile so that at low pressure the higher modes of the spectrum are dominant.With higher pressure the formation of radial modes is favoured which leads to an additional apparent shift of the resonance.