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Key technologies for diamond turning of non-rotational symmetrical micro-structured surfaces

Non-rotational symmetrical micro-structured surfaces have gained more and more applications in advanced optical systems. To obtain such surfaces with low cost and high efficiency, this paper presents the key technologies for turning of such surfaces including the diamond turning system, tool path generation and tool nose compensation algorithms. The grid based tool path generation algorithm has been proposed for on-line tool path generation. The tool nose compensation is achieved by constructing cubic Hermite interpolation curve which could improve the calculating efficiency greatly. Then several micro-structured surfaces were fabricated and we focused on the analysis of micro lens array (MLA). Height of the spherical cap, diameter of the scope, and the radius of the curvature are evaluated, their maximum deviation from designed values are -2.23%, 2.27%, and 4.29% respectively. This further verified the diamond machining is an enabling method to fabricate high precision non-rotational symmetrical micro-structured surfaces.