{'fraction_non_alphanumeric': 0.03389830508474576, 'fraction_numerical': 0.017796610169491526, 'mean_word_length': 5.349462365591398, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Multi-axis single-layer PDMS-on-silicon micro optical reflector

This paper reports on a new micro optical reflector made of an organic elastomer, Polydimethylsiloxane (PDMS), which achieves multi-axis motion with a single actuator layer. The whole device structure incorporates Au-coated three-dimensional PDMS micro reflector integrated with electrostatic MEMS actuators on a silicon chip by a new fabrication method named "Soft-Lithographic Lift-Off and Grafting (SLLOG)" process. The SLLOG process is a low-temperature (less than 150°C) microfabrication technique that allows soft lithographically molded PDMS micro-structures to be integrated together with silicon micromachined device patterns. The developed PDMS/silicon hybrid device reflects visible light with fast response and large rotational motion through taking advantage of the mechanical compliance of PDMS structures. The demonstrated PDMS-based reflector can achieve 4.6 micron vertical displacement using AC actuation voltage of 40 V at frequency of 1.0 kHz, and ±1.43° scanning angles using AC actuation voltage of 40 V at resonant frequency of 5.0 kHz, and ±0.85° scanning angles for static operation at 60V.