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Infrared phased-array sensor

Metal-oxide-metal (MOM) tunnel diode detectors when integrated with phased-array antennas provide determination of the angle of arrival and degree of coherence of received infrared radiation. Angle-of-arrival measurements are made with a pair of dipole antennas coupled to a MOM diode through a coplanar strip transmission line. The direction of maximum angular response is altered by varying the position of the MOM diode along the transmission line connecting the antenna elements. Phased-array antennas can also be used to measure the degree of coherence of a partially coherent infrared field. With a two-element array, the degree of coherence is a measure of the correlation of electric fields received by the antennas as a function of the element separation. Antenna-coupled MOM diode devices are fabricated using electron beam lithography and thin-film deposition through a resist shadow mask. Measurements at 10.6 μm are substantiated by electromagnetic simulations and compared to analytic results.