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Observation of Vicinal Si(111)7×7 Surface by Energy-Filtered Reflection High-Energy Electron Diffraction

Extra spots near the specular spot have clearly been observed for a vicinal Si(111)7×7 surface by zero-loss energy-filtered reflection high-energy electron diffraction (EF-RHEED) at [112] incidence with 10 kV electron beam. The extra spots are distributed in a line across the specular spot. From the geometrical consideration of these extra spots, the mean terrace length parallel to the [112] direction was reasonably estimated based on a regularly arranged step surface with single step height. Glancing angle dependences of the extra spots were also simulated, and good agreement with the experimental results was obtained.