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4 kHz KrF-laser with plate-like electrodes

The electric-discharge KrF-laser with inductive-capacitive discharge stabilization and a pulse repetition rate up to 4 kHz is developed. The multisectional discharge gap with length of 25 cm was formed by 25 pairs of anode-cathode plates. The narrow discharge width of ≤1 mm was realized. The buffer gases He and Ne with F2 as the donor of fluorine were used. The maximum laser energy was ≈6mJ by using Ne/Kr/F2 mixture at a total pressure of 1.6...3.2 atm. The maximum laser efficiency was ≈1.4%. For measuring of the gas flow velocity in discharge gap the original optical method is used. The maximum gas velocity in the working gap is 19 m s-1. The average output power of KrF laser is ≈12 W at the pulse repetition rate of 3...4 kHz. The relative root-mean-square deviation of the laser pulse energy is σ=2...3.8%. It was shown, that laser beam profile formation in a laser cavity essentially depends on a gradient of refractive index of the active medium Δn, was made by free plasma electrons. The value of a refractive index gradient at the KrF laser wavelength is grad n ≥ 10-5 cm-1.