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In-situ formation of an ion-doped porous structure for high sensitive humidity sensing utilizing low-cost UV sensitive glue

This paper presents a novel method for in-situ formation of an ion-doped porous structure for high sensitive humidity sensing utilizing low-cost UV sensitive epoxy. Nano-size granular polymer structures can be directly deposited on a substrate by exposing a UV sensitive epoxy in an organic solvent of alcohol. SEM observations indicate that the deposited porous structure is constructed by stacking polymer nano-particles of around 300 nm in size. A deliquescence salt of MgCl2 is simultaneously introduced into the porous sensing layer for enhancing the vapor absorption ability during the polymerization process. Results show that the sensitivity of the humidity sensor with the ion-doped porous structure is enhanced over 365 times greater than the sensor fabricated with the same material without ion-doped porous structure. The proposed method provides a simple and fast way to fabricated high performance humidity sensors.