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On the Contrast of Precipitates Observed with a FE-SEM

It has been shown recently that precipitates as small as 10 nm can be imaged with a FE-SEM using a Through-The-Lens (TTL) SE detector or the so-called Upper Detector (UD). This is a very significant finding because normally, such small precipitates are observed in the TEM where specimen preparation techniques are generally a timely process. However, from Monte Carlo simulations using CASINO, it has been shown that NbC precipitates embedded in Fe as small than 6 nm can be imaged with BE. The experimental demonstration was difficult because no good BSE detectors were available at that time for low energy work. Recently, a new BSE detector has been developed for low energy work from the GW corporation, the Centaurus BSE detector. This detector is coupled with an HITACHI S-4700 FESEM In this work, images of Mg2Zn precipitates in Al obtained with the UD and the Centaurus BSE detector are compared.