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Modeling of integrated inductors and transformers for RF applications

This work presents a modelling approach to predict the behaviour of integrated inductor and transformers, taking into account a full geometrical description of the component. The model is based on physical assumptions and combines the accuracy and versatility of electromagnetic simulations with the easy of implementation of empirical or fitting models. The proposed modelling approach has been validated by comparing experimental measurements and expected behaviour of integrated inductors performed using a MCM-D silicon based technology complemented with silicon micromachining techniques.