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Modified Optical Scheme for a Silicon Electro-Optical Modulator with a Grating Coupling Element

A modified optical scheme of an electro-optical modulator in silicon-on-insulator (SOI) structures is discussed in the article. It includes a double etching profile for the adiabatic transformation of a compact optical mode from a small-sized rib to a wide optical beam for coupling with an optical fiber by a periodic grating element. In the design of the Mach-Zehnder interferometer, a combination of the MMI beam splitters l×2 and 2×2, which provides operating of the modulator with the zero phase shift in the interferometer arms, is used. The numerical modeling results of the modulator are presented. It confirms the practical use of the modified optical scheme of the modulator design.