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closed core microfluxgate sensor with cascaded planar FeNi rings

In this paper, we present a new microfabricated fluxgate sensor structure using cascaded planar rings as the ferromagnetic core. The planar ring structures provide closed magnetic excitation loops enabling uniform core saturation with relatively small excitation magnetic field. The magnetic excitation is provided with a rod passing through the ring cores. Planar coils placed under the edges of the core are used as sensing elements. By using this structure, fluxgate sensors having a closed core configuration are realized with a developed microfabrication process in a very small area (<0.1 mm2) with reduced number of