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Dense III-V/Si Phase Shifters for Optical Phased Arrays

In this work, we report a dense heterogeneous integration of III-V/Si phase shifters for optical phased arrays. The phase shifters have a V2π of 0.9 V and optical loss of 0.15 dB at 1550 nm for 2π phase shift with low power consumption of less than 3 nW. We integrate those phase shifters in optical phased arrays with a pitch of 4 µm and the number of channel up to 240. 2D beamsteering is also demonstrated in a 32-channel optical phased array.