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An integrated micro-optical system for laser-to-fiber active alignment

We report a new micro-optical system for laser-to-fiber active alignment. An integrated microsystem platform, which has a thermally-actuated micromirror, a silicon etched v-groove and flip-chip bonding pads, is successfully fabricated and actuated for beam adjustment from a vertical-cavity surface-emitting laser (VCSEL) to a fiber. The micromirror has 4.0 degree maximum beam steering angle with the resolution of 0.08 degree/mA. With the steering angle reaching 2.5 degrees, the coupling efficiency improves to 80 % from 9% initial efficiency.