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XPS study of silicon spheres as a density standard

As density is one of the basic physical properties of materials, an accurate density standard is absolutely essential. To determine density with high accuracy and precision, two 1‐kg single‐crystal silicon spheres (NMIJ‐S4 and NMIJ‐S5) are used as the primary standard at the National Metrology Institute of Japan. For the accurate measurement of the mass and volume of the silicon spheres, the effects of the surface layer must be carefully considered. In this work, a surface layer model of NMIJ‐S4 and NMIJ‐S5 was proposed and the thicknesses of each surface layer were determined using X‐ray photoelectron spectroscopy. A detailed uncertainty budget is presented to aid use of the density standard.