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Microsphere-assisted interference microscopy for resolution enhancement

Abstract In order to push the limitations of optical measurement technology further and to measure finer structures, various systems have been published in current research. It has been shown that microspheres applied in the near-field can improve the resolution of an interferometric measuring system and make structures below Abbe’s resolution limit visible. In this study, measurement results obtained with a high-resolution Linnik interferometer show structures with lateral dimensions below the resolution limit. Furthermore, the analysis of the transfer behavior in the spatial frequency domain provides information about the mechanisms in nearfield-assisted interference microscopy by microspheres.