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Acoustically Levitated Spinning Optical Scanner

A novel concept for obtaining a wide-angle two-dimensional scanner using the acoustic levitating method is proposed. A lightweight and high-surface quality silicon mirror is fabricated by micromachining and it is attached vertically on the 3 mm diameter polymer disc with a ferromagnetic rod for fabricating a mirror rotor. The size of the mirror is about 1 mm and the weight of the mirror rotor is 800 ug. The levitating and 360 degrees rotation of the fabricated mirror rotor is demonstrated by placing the mirror rotor in the standing acoustic field and rotating magnetic field, successfully. In addition, the tilting of the rotational axis of the fabricated mirror rotor during the rotation for creating the two-dimensional laser scanning is also demonstrated by this proposed concept, successfully.