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GeO Desorption in Reactive Scattering of an Oxygen Molecular Beam with a Ge(100) Surface

Reactive scattering of O2 with a Ge(100) surface has been studied using resonance enhanced multiphoton ionization (REMPI) at substrate temperatures between 870 and 1020 K. The first observation of the (2+1) REMPI of GeO is performed at around 297 nm. The desorption rate constant of GeO is determined by analyzing the GeO waveforms, and is estimated to be k=1017.6±0.4 exp (-2.4±0.1 eV/k BT) [ s-1], and the large pre-exponential factor is well reproduced using a transition state theory calculation. The angular distribution of the GeO is found to be isotropic on the virgin surface and deformed on the highly etched surface.