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Change in the surface morphology and chemical composition of some oxide crystals under UV laser irradiation

The effect of the 248-nm KrF and 355-nm YAG:Nd3+ laser radiation on the surface morphology and chemical composition of SrTiO3, Sr2RuO4, PbMoO4, LiNbO3, Y3Al5O12, and Al2O3 crystals has been studied. A relationship between the laser energy density on the sample surface and the surface roughness caused by the irradiation is determined. A technique for determining exactly the geometric surface characteristics is proposed. The effect of the surface roughness on the results of energy-dispersive X-ray (EDX) microanalysis has been investigated. A method for correcting the EDX data for samples with a rough surface has been developed. It is shown that the small variation in the composition of PbMoO4, LiNbO3, Y3Al5O12, and Al2O3 samples after laser irradiation can be explained by the measurement error, related to the change in the surface roughness. At the same time, the irradiation of SrTiO3 and Sr2RuO4 crystals by a YAG:Nd laser changes the chemical composition of their surface layers.