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Design of Digital Micromachined Thermal Gas Gyroscope

Embedding microcontroller into sensor in order to make it smart has become one of development trends of sensor, especially for MEMS sensor. In this paper, the way of embedding microcontroller into sensor to design the digital micromachined thermal gas gyroscope (DMTGG) is discussed. The scheme of micromachined thermal gas gyroscope (MTGG) is introduced first, basing on it, the design of DMTGG is proposed. The design of digital drive module for MTGG, the design of signal detection of MTGG based on digital phase sensitive detector, and the design of embedded microcontroller system are introduced. The designed DMTGG has been tested by experiments. The measurement results of DMTGG show a system scale factor of 4.119mV/(o/s) ,a non-linearity of 0.38 %, a dissymmetry of 0.19%, a zero-bias stability of 1.05 o/s and a noise density of 0.95 o/s/Hz-1/2.