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Heat-Resistant Polyarylates for Waveguide-Type Device Application

Polyarylates (PARs) with high glass transition temperature (Tg) of over 200°C are newly synthesized and used for waveguide-type device application. Thermal and optical properties of PARs are investigated, and results indicate that PARs show high thermal stability as well as high optical transparency in the visible region. High-resolution relief gratings on PAR thin films are fabricated by a direct electron-beam (EB) writing technique together with thermal development. Using a reactive-ion-etching (RIE) technique, the waveguide channel ridge was fabricated.