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Study on cross-sensitivity of temperature and strain of surface acoustic wave strain sensor

In this paper, a method is proposed to solve the cross-sensitivity of strain and temperature of SAW strain sensor. In theory, the formulas of the frequency variant of resonators relate to temperature and strain are deduced by perturbation theory and the finite element method. Then the decoupling formulas to calculate the strain and temperature from two resonators' frequencies are derived. In experiment, two resonators are fabricated on Y+34°quartz substrate. the frequencies of two resonators are measured at 0°C∼80°C and 0∼400με. The coefficients of the above decoupling formulas are calibrated. The temperature and strain values are obtained by the frequencies of the resonators and the decoupling formulas. Compared with the referred temperature and strain in the experiment, the error of temperature is less than 2C, and the error of strain is less than 10%, which verify the feasibility of the decoupling method.