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Miniature X-Ray Sources

This paper presents an overview of the design and technology of miniature X-ray sources of various types, which can be useful in the portable instruments for diagnosis and precision medical therapy, as well as in industrial applications. Several examples of X-ray sources using the pyroelectric and piezoelectric effects and tubes with thermal and field-emission electron sources have been described. A concept of an X-ray source integrated on one chip, made by the use of microengineering techniques, concludes this paper. In this micro-electro-mechanical system-type construction, a miniature field-emission electron source with carbon nanotube cathode and a recently developed high-vacuum micropump are applied. [2016-0214]