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Wavelength tunable laser based on distributed reflectors with deep submicron slots

To reduce the cost of wavelength tunable lasers, the structure and fabrication methods of a wavelength tunable laser based on distributed reflectors with deep-submicron slots are proposed. By using a pillar reversing technique, the device is fabricated with standard UV lithography. The features and benefits of reflectors with deep-submicron slots are simulated and explained. As high as 47dB side mode suppression ratio and 50nm tuning range around 1550nm is achieved.