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Fano-Resonance Photonic Crystal Membrane Reflectors at Mid- and Far-Infrared

We report here single-layer ultracompact Fano-resonance photonic crystal membrane reflectors (MRs) at mid-infrared (IR) and far-IR (FIR) bands, based on single layer crystalline Si membranes. High-performance reflectors were designed for surface-normal incidence illumination with center operation wavelengths up to the 75-μm FIR spectral band. Large-area patterned MRs were also fabricated and transferred onto glass substrates based on membrane transfer processes. Close to 100% reflection was obtained at the ~ 76-μm spectral band, with a single-layer Si membrane thickness of 18 μm. Such Fano-resonance-based membranes reflectors offer great opportunities for high-performance ultracompact dielectric reflectors at IR and THz regions.