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Measurements of the CF, CF2 and CF3 Radicals in a CHF3 Electron Cyclotron Resonance Plasma

The CF, CF2 and CF3 radicals were investigated in an on-off modulated electron cyclotron resonance (ECR) plasma employing a CHF3 gas using infrared diode laser absorption spectroscopy (IRLAS). The microwave power dependences of the radical densities were measured at a CHF3 pressure of 0.4 Pa in the microwave power range from 50 W to 800 W. Moreover, the extinction processes of the radicals were discussed on the basis of the decay curve analysis of the radical densities after termination of the discharge.