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Terahertz MEMS bolometers with enhanced thermal sensitivity by phononic crystal structures

We have fabricated nm-scale phononic crystals (PnCs) to improve the thermal sensitivities of terahertz(THz) MEMS bolometers. Homogenous hole arrays of square lattices were formed on the MEMS beams, which significantly reduced the thermal conductance of the MEMS beams by ~90%, giving an enhancement in the thermal sensitivity by ~10 times. Furthermore, since the heat capacitance of the MEMS beam is also reduced by introducing the PnCs, the thermal bandwidth is only slightly decreased, demonstrating the effectiveness of the PnC structures for enhancing the thermal sensitivities of THz bolometers without significantly deteriorating their operation bandwidths.