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Depth profiling of polycrystalline layers under a surface using x‐ray diffraction at small glancing angle of incidence

An analysis method for evaluating a polycrystal structure under a surface using x‐ray diffraction at small glancing angle incidence was studied. Intensities of the diffracted x‐rays on a polycrystalline iron surface were measured at various incidence angles, and the dependency of the incidence angles was investigated by analysing the intensity of x‐ray propagation in surface layer materials characterized by a complex refractive index that changes continuously with depth. The dependence of the diffracted x‐ray intensities on the glancing angle was analysed and the depth profile of the polycrystalline layers of oxidized iron was evaluated to an accuracy of the order of nanometres. Copyright © 2005 John Wiley & Sons, Ltd.