{'fraction_non_alphanumeric': 0.012102874432677761, 'fraction_numerical': 0.0, 'mean_word_length': 5.895833333333333, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Characterization of MEMS by feedback interferometry

In this paper, we report on feedback interferometric measurements on a micromachined gyroscope and on a micromachined linear accelerometer. Characterization has been performed for different values of pressure and of other parameters using a laser diode. Resonance frequencies and quality factors have been measured. Moreover, hysteresis and other nonlinear phenomena on specific samples have also been detected. The proposed method is based on optical injection and represents an efficient alternative to the standard electrical measurements, which actually shows some limitations for bare prototype testing.