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In Situ Topology Measurement of Micro Structured Surfaces with a Confocal Chromatic Sensor on a Desktop Sized Machine Tool

In this research a confocal chromatic point sensor was implemented in a desktop sized machine tool. The sensor was used to detect the surface in z-direction. Data from the machine control of the x- and y-axes is extracted and combined with the z- information of the sensor to directly scan surfaces. With the presented sensor, micro structures as small as 5 μm can be characterized. Based on the possibilities of this measuring system, face milling before the actual micro machining can be avoided by determining tilts and waviness of the workpiece. Also the effective tool diameter can be determined and compensated. After machining, the structure can be measured for quality control. Based on this measurement system, a micro machining process was developed broadening the potential for the use of desktop sized machine tools.