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Improvement of uniformity of NbCN/MgO/NbCN Josephson junctions for large-scale circuit applications

On-wafer variation of critical current density for NbCN/MgO/NbCN Josephson junctions has been improved by introducing substrate-holder rotation into the deposition of tunnel barriers and base electrodes. From results of AFM observation of surface morphology for NbCN films, it seems that larger grain size in the base electrodes causes lower critical current density for junctions.