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In-situ Correlative Analysis of Electrical and Mechanical Properties of 3D Nanostructures by Combination of AFM, SEM and FIB

The combination of different analytical methods into one instrument is of great importance for the simultaneous acquisition of complementary information. Especially the in-situ combination of scanning electron microscopy (SEM) and atomic force microscopy (AFM) enables completely new insights in the micro and nano world. In this work, we present a unique AFM – the AFSEM - that can be easily integrated into the high-vacuum environment of almost any scanning electron microscope (SEM) or other host system (e.g. dual beam microscopes). It allows direct in-situ combination of these complementary techniques due to the simultaneous operation of SEM and AFM inside the vacuum chamber. Furthermore, due to the open design it can be combined with additional add-ons, e.g., tensile stages, nano-indentors or nano-manipulators. [1,2] Especially the characterization of electrical properties of nanostructures inside the high-vacuum environment of a SEM or FIB system is of great interest. We will present first results using the combination of novel self-sensing cantilevers [2] with functionalized tips for conductive, magnetic or thermal measurements, that are fabricated by the 3D nano-printing technique using focused electron-beam induced deposition (FEBID).[4] We will show results for in-situ electrical characterization of nanostructures by combining SEM and conductive AFM measurements for dose-dependent conductivity measurements of nanogranular Pt(C) structures after focused electron beam induced processing (Figure 1b). In addition, we