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High resolution optical characterization of cantilever arrays and multiple air-gap cavities for scanning probe microscopy, communication, analytics and sensing

We present an ultra-precise optical methodology to investigate complex nano- and microscale structures fabricated by micromachining. This method is applied for micromachined tunable multiple air-gap GaInAsP microresonators as well as for Si cantilever arrays which are fabricated commercially. These different devices are applied in scanning probe microscopy, analytics, sensing and high bit-rate communication. A detailed comparison of experimental studies with results of theoretical model calculations is performed on the basis of line-shape-fits to provide precise geometric and compositional parameters. We obtain an excellent agreement between experimental and theoretical data