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On A Few Functions Of HIPOSS (High Precision Optical Surface Sensor) And Their Applications

The principle of the high precision optical surface sensor (HIPOSS) is based on the focus detection of the critical angle method. This sensor has two sensing ranges in its characteristic curve, a precision range and a wide range. The precision range is used for an ordinal ultra-high precision profilometer, of which sensitivity is better than 0.2nm rms with about 2μm measuring scope. On the other hand, relatively large linear measuring range of around 20μm with 1nm resolution can be achieved by use of the wide range. Besides the two and three dimensional profilometer, each range of the HIPOSS can be used as a compact displacement sensor or a dynamic sensor of higher than 10kHz response such as in-process measurement for single point diamond turning control. The HIPOSS was designed to eliminate several errors especially from the surface inclination. Taking advantage of the function, an inclination angle of the surface can also be detected by the HIPOSS with about 1 minute of arc sensitivity.