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Research on the Micro Self-Vibration of Aerostatic Bearing with Pocketed Orifice Type Restrictor

In this paper, Computational Fluid Dynamics (CFD) is used to analyze the micro self-vibration of aerostatic bearing with pocketed orifice type restrictor as the bearings performance is stable and it is widely used ultra-precision equipments. By using Large Eddy Simulation (LES), time-variation flow field inside the bearing is obtained. Then the pressure fluctuation characteristics is discussed because it influences the micro self-vibration of the bearing directly. Moreover, the relationship between bearing diameter, orifice diameter, air chamber diameter, air chamber depth and the micro self-vibration is researched. The results can be considered for the designing of ultra-precision aerostatic bearing with pocketed orifice type restrictor.