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High-Density Plasma Produced by a Holey-Plate Surface-Wave Structure Cavity

An argon microwave discharge, created and sustained by a surface wave, using a partial-coaxial cavity resonator has been studied. A 2.45 GHz microwave is propagated through a 77D-coaxial waveguide and enters at the circumference of a dielectric disk, which is set at the terminal of the cavity. One flat surface of the disk is in contact with an inner conductor. The other surface is covered with a holey plate. An evanescent electric field is produced from the holey plate to a 40-mm-diameter plasma production chamber. Thus, high-density plasma is generated by the interaction of the evanescent field with particles. The plasma density is 7.5×1011 cm-3 with an electron temperature of 3 eV, at an argon gas pressure of 13 Pa and microwave power of 160 W.