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A Hybrid 3D Thermal / 1D Piezoelectric Finite Element Model for Rapid Simulation of FBAR Filter Response Under High Power

The increasingly stringent power requirements imposed on BAW filter technologies has made coupling between thermal and piezoelectric physics relevant to the design process. Existing lumped filter models do not account for the effect of a 3D temperature distribution over each resonator. Here we report a new finite element based method for rapid simulation of filter response under high power that captures the effect of heat flow within the filter die as well as its path through the PCB to thermal ground.