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Adaptive Interferometry Sensor for Detection of Nanoscale Displacements

In this work we present an adaptive holographic interferometry sensing system for measurement of nanoscale displacements of microand macro-objects. The system is based on using dynamic hologram continuously recorded in photorefractive CdTe crystal. Theoretical limit for displacement detection which can be provided by the system is 0.1 nm. It is experimentally demonstrated that system is able to detect a displacement from 0.7 nm up to 266 nm in linear regime. We also present theoretical model of adaptive interferometer operation which take into account a displacement speed. Due to its adaptive properties the measurement system can be used for inspection of sub-micro-scale objects with arbitrary shape and surface profile. Copyright © 2014 IFSA Publishing, S. L.