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A High-Resolution Measurement System Designed for Semiconductor Microcalorimetry Sensors

The quality of measurements of non-electrical quantities not only depends on the sensor but also on the electronic system that is used for the conversion of the electrical signals to a digital form. Many research papers on the subject analyse the properties and characteristics of the sensors in detail but omit the properties of the instruments that are used to measure the characteristics. This paper concentrates on the problems concerning the design of an instrument for generating control signals and measuring the output signals of a semiconductor sensor. The measurement instrument is designed for a commercial heat flow microcalorimeter that is able to measure heat flows at the level of several µW. The novelty of this paper is the analysis of some of the undocumented properties of the sensor and the interactions between its components. The design of the instrument makes it possible to correctly measure the output signals of a microcalorimeter without the influence of the described effects. The added value of this paper is a detailed analysis of the resolution of the system and the factors that may affect it. The remarks contained in the paper can be useful for designers of other instruments that are designed for measuring non-electrical quantities.