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Design and Preparation of a High Resolution Accelerometer Based on Graphene

Because of the contribution to the development of modern science and technology, scanning tunneling microscopy (STM) effect has been recognized generally for the Nobel Physics Prize in 1986. However, due to the limitation of micromachining technology, tunnel spacing of the tunneling accelerometer cannot reach the order of 1nm. The tunnel effect is generated by loading a pull-down voltage on the deflection electrode. This method not only greatly increases the complexity of the process, but also reduces the consistency of the device, making it difficult to achieve high-accuracy measurement, which limits the increasingly widespread application of tunneling accelerometer. The paper takes this as a breakthrough point to research the design and preparation method of tunneling accelerometer based on graphene. At first, the overall structure of the accelerometer is studied through simulation calculations according to the requirements of the indicators. After that, graphene and cantilever are integrated, then the atomic tunnel junction is prepared accurately by using electro-combustion technology. Finally, tunnel current is detected in real time by controlling the closed-loop feedback circuit. And acceleration is obtained through feedback voltage. For the tunneling accelerometer, the research work will provide powerful support for the improvement of the performance and the expansion of application area.