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Photoinduced Changes in Ge-Doped Flame Hydrolysis Silica Glass Films

The influence on the structural and optical properties of Ge-doped flame hydrolysis silica glass films of KrF excimer laser irradiation was investigated. A maximum refractive index change of about 3.41× 10-3 is obtained at approximately 1550 nm after 10 min irradiation. The irradiation process and roughness of the films were analyzed by atomic force microscopy (AFM). As irradiation time increased, the density of the films increased, resulting in decreases in the surface roughness and increases in the refractive index of the films.