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Analysis and design of magnetic mesa-structure array for ensemble detection applications of nuclear spins

Micro/nano fabrication of magnetic materials is becoming a crucial technology for future magnetic systems/devices such as high-density magnetic recording heads, high-density patterned media, magnetic quantum devices, and micro/nano magnetic smart systems, etc. In our previous work, NiFe alloy with the highest saturation magnetic-flux density was selected as the micro-magnet for detecting the feasibility of all-silicon quantum computer. The micro-magnet was designed to create a large magnetic field gradient and to distinguish 29Si nuclear spins arranged as chains in a 28Si matrix with Larmor frequencies. This paper reports the possibility of micro fabrication of a NiFe alloy mesa structure by sputtering NiFe alloy on the top of Si substrate with SiO2 stripes for potential application of ensemble detection of nuclear spins. The mesa structure array design was carried out based on the results of ANSYS analysis, in the aim to obtain a strong magnetic gradient with homogeneous magnetic-flux density for single micro-magnet, and to reduce mutual cancellation which caused by magnetic field superimposition.