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Design optimization of nanoscale electrothermal transport in 10 nm SOI FinFET technology node

A flexible framework is obtained for enhancing both the thermal and electrical performance of fin field-effect transistor (FinFET) technology. Investigation of the nanoscale heat conduction within a short-channel field-effect transistor can be regarded as an emerging challenge related to future-generation transistors. In this work, we report the electrothermal transport in a 10 nm silicon-on-insulator (SOI) FinFET based on the dual-phase-lag model and modified drift-diffusion motions. We found that electron mobility decreases along the channel due to carrier confinement under higher electric field. In addition, the surface detection temperature indicates that the self-heating process is localized between the source and drain region. As promising results, high-κ metal-oxide and lower thermal boundary resistance can optimize the nanoscale heat transport in the SOI FinFET device.