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Dissolution of indium arsenide in HNO3-HBr-H2O and Br2-HBr solutions

The InAs dissolution in HNO3-HBr-H2O and Br2-HBr solutions is investigated. The surface of equal etching rates is constructed and the process limiting stages of dissolution depending on a size of a ratio in such solutions are determined. The kinetics of InAs dissolution in Br2- HBr solutions is investigated. The solution region which can be used for chemicodynamic polishing of InAs is determined.