{'fraction_non_alphanumeric': 0.010174418604651164, 'fraction_numerical': 0.0, 'mean_word_length': 5.561904761904762, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Polarization analyses of aerial images produced by an optical lithography system.

The influence of polarization on the image formation of one-dimensional periodic patterns in a projection optical lithography system has been investigated. Assuming a linear polarizer at thelens pupil, I derived a simple expression representing the image intensity as the summation over spatial-frequency harmonics as well as three orthogonal polarizations. I calculated the coefficient for each image component as a function of the pattern frequency by independently varying the degree of partial coherence such that the image qualities of the two extreme polarization cases could be thoroughly compared.