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Electron Scattering from Si Surface and Interface by Cross-Sectional Transmission Electron Microscopy

Streak-shaped scattering, referred to as crystal truncation rod (CTR) scattering in X-ray diffraction, is observed in electron diffraction patterns obtained from the Si surface and the interface boundary by the cross-sectional observation technique. CTR scattering can be seen due to the truncation of a crystal at the side wall of a trench as well as at the surface. It becomes possible to evaluate the morphological quality of the surface and the interface on an atomic scale from CTR scattering in electron diffraction, of which the intensity is sensitive to the roughness.