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Broadband scatterometry at extreme ultraviolet wavelengths for nanograting characterization

The authors present a novel approach for the structural characterization of periodic nanostructures using spectrally resolved broadband scatterometry in the extreme ultraviolet (EUV) wavelength range. The implemented metrology method combines 0th and ±1st diffraction order spectrum measurements of a nanograting under broadband illumination from 8 nm to 17 nm for model-based reconstruction of geometrical parameters. For the experimental investigations, a compact stand-alone scatterometer setup is designed and realized. The setup enables measurements of spectrally resolved 0th and ±1st diffraction orders of a grating that is illuminated at various grazing incidence angles. The acquired data serves as a basis for the reconstruction of the grating’s geometry using rigorous optical finite element method (FEM). The method is applied to arrays of lines and spaces with sub-100 nm feature size.