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Angle‐dependent neutralization of low‐energy alkali ions scattered from alkali‐covered Si surfaces

An angle‐resolved ion scattering apparatus has been developed to observe the charge exchange process between low‐energy ions and surfaces. The incident angle‐dependent neutralization was observed for Li+ ions scattered from a Cs‐adsorbed Si(111) surface. The shadowing effects have an important role in the neutralization efficiency. The azimuthal angle dependence of the neutralization efficiency of D2+ ions scattered from a clean Si(100) surface also showed minima along the crystallographic orientations. This anisotropy is explained by the blocking effects of the outgoing particles scattered in the bulk. It is suggested that the crystallographic information has to be considered to explain the angle‐dependent neutralization efficiency, and it is shown that the depth information is also important to understand the neutralization efficiency. Copyright © 2005 John Wiley & Sons, Ltd.