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A high-speed polar-symmetric imager for real-time calibration of rotational inertial sensors

We present a high-speed (> 1kfps), circular, CMOS imaging array for contact-less, optical measurement of rotating inertial sensors. The imager is designed for real-time optical readout and calibration of a MEMS accelerometer revolving at greater than 1000rpm. The imager uses a uniform circular arrangement of pixels to enable rapid imaging of rotational objects. Furthermore, each photodiode itself is circular to maintain uniform response throughout the entire revolution. Combining a high frame rate and a uniform response to motion, the imager can achieve sub-pixel resolution (25nm) of the displacement of microscale features. In order to avoid fixed pattern noise arising from non-uniform routing within the array we implemented a new global shutter technique that is insensitive to parasitic capacitance. To ease integration with various MEMS platforms, the system has SPI control, on-chip bias generation, sub-array imaging, and digital data read-out.