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Enhanced mass sensing using subspace identification and detection in microcantilevers

Micro-electro-mechanical systems (MEMS), has brought both opportunities and challenges to the field of structural dynamics in a different scale, owing primarily to its interdisciplinary nature of research and extremely small feature size. An application of the MEMS is to detect, a target mass particle attached eccentrically to a microcantilever by measuring three-dimensional modes in the microcantilever vibration spectrum. The mass sensitivities of the torsional and lateral mode frequencies are an order of magnitude greater, than that of the conventionally used fundamental bending mode. In oder to have a better identification of these parameters we can use method of Structural Health Monitoring. Subspace methods can provide a good estimation of the frequencies, and the damping of the modes. Vibration-based Structural Health Monitoring algorithms detect damages as changes in the eigenstructure of a linear dynamic system. The target particle can be considered as a damage in the microcantilever structure, so that it is allowed to use SHM methods.