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Nanocrystalline diamond films deposited using a new growth regime

Abstract Time modulated chemical vapour deposition (TMCVD), a new method for depositing nanocrystalline diamond (NCD) coatings, is reported. The key feature of the process is that it utilises modulated methane flow to promote secondary nucleation of nanoscale diamond crystallites. The growth modes of films deposited using both TMCVD and conventional hot filament CVD methods are described. Moreover, a pictorial model showing the key stages of film growth during NCD deposition using TMCVD is presented. The ability of this new process to promote secondary diamond crystallites has been demonstrated.