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40 GHz AlGaInAs Multiple-Quantum-Well Integrated Electroabsorption Modulator/Distributed Feedback Laser Based on Identical Epitaxial Layer Scheme

An AlGaInAs multiple-quantum-well (MQW) distributed feedback (DFB) laser is monolithically integrated with a lumped-electrode electroabsorption (EA) modulator based on an identical epitaxial layer integration scheme. The device exhibits a threshold current of 12 mA and an extinction ratio of higher than 13 dB under a 3 V reverse bias. By adopting a dry-etched high-mesa ridge waveguide and planar electrode structures, the capacitance of the modulator is reduced to about 0.11 pF and a 3 dBe modulation bandwidth of over 40 GHz has been demonstrated. To our knowledge, this is the first report on a 40 GHz operation of AlGaInAs integrated light sources.