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Three-dimensional integration of vertically coupled microring resonator filters: fabrication and wavelength trimming technologies

We have proposed and demonstrated a vertically coupled microring resonator filter as an Add/Drop wavelength filter. The ultra-compact ring resonantor can be realized by the ultra-high index contrast waveguide (=34%) consisting of glass core (n=1.80) and air cladding and the vertically coupled configuration, where a microring resonator with a few tens micron radius is stacked on the crossing point of cross-grid bus waveguides. The cross-grid topology of busline waveguides and very small ring radius enables a dense integration of filter circuit. To achieve the 3D integration, we developed a novel fabrication process of flat-top waveguide using a so-called lift-off process and the SOG (Spin-On-Glass), and successfully obtained a very smooth and flat surface of lower waveguide with a step height less than 0.01μm. In addition, to manipulate the center wavelength after fabrication, we developed two trimming methods; one is the use of UV-sensitive polymer for the over-cladding, and the other is the direct UV irradiation to the ring ocre made of Ta2O5-SiO2 compound glass. Utilizing the former method, the channel spacing of filter array was precisely controlled within 0.5nm, which can not be achieved by the control of ring radius.