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Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

Nanolithography based on atomic force microscopy is a widely used techniques for the prototyping of nanostructures. This technique has attracted great attention due to its simplicity, versatility and precise control. Oxidation is performed at normal atmosphere where the meniscus connecting tip and surface plays a key role. The present study describes the electrical conductivity of this nanometer-size meniscus. By acquiring force vs distance curves, we determine the relationship between the tip-surface separation and electrical current. It is observed an increase of the electrical current at small finite separations (< 2 nm) due to a change in water meniscus properties, and a decrease of electrical current when the meniscus is elongated.