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Cross-Sectional Analysis on Hardness and Sp3 Bond Fraction of Diamond-Like Carbon Film Prepared by Mass-Separated Ion Beam Deposition

Carbon films were prepared on Si(100) wafers by mass-separated ion beam deposition (MSIBD). Cross-sectional analysis of the film hardness and structure was performed. The hardness has the maximum value of 80 GPa at the surface region, and decreases to 60 GPa gradually on approaching the bottom region of the film from the surface. There is a good correlation between the film hardness and the sp3 bond fraction. The maximum value of the sp3 bond fraction of 89% is obtained at the film surface region, and the fraction decreases to 67% at the bottom region of the film.