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Mass Spectrometry Ion Sampling on the Positive Column DC Discharge Plasmas

The quadrupole mass filter (QMF) calibration constant of ion sampling from the positive column of a dc discharge plasma was studied as a function of various experimental parameters such as the gas pressure, the diameter of the sampling orifice, and the nature of the gas discharge. The most important factor included in the calibration constant, the sampled ion beam attenuation from the orifice to the mass filter, is explained very satisfactorily by the Coburn-Kay model. Some experimental data are reported on the ion sampling calibration constant of neon discharges at pressures up to 8 Torr and a discharge current of between 20 mA and 80 mA. Measurements in argon and neon discharges illustrate that the transition from the Knudsen region to the near-Knudsen region is nearly independent of the type of gas.