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SIMULATION AND OPTIMIZATION OF MEMS PIEZOELECTRIC ENERGY HARVESTER WITH A NON-TRADITIONAL GEOMETRY

Piezoelectric energy harvester converts mechanical vibration into electrical energy via piezoelectric effect. In this paper a MEMS based energy harvester with a nontraditional geometry is designed. The design of the energy harvester consists of a T-shaped cantilever structure with triangular shape at the tip. Simulation results demonstrated that the new cantilever structure can improve the strain distribution and generate more voltage than the triangular and rectangular structures at the resonance frequency. The proposed structure is simulated using the software COMSOL Multiphysics and the results are compared with other geometries such as rectangular and triangular.