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Finite Element Analysis of A new Multi-DOF Flexible Micro-Displacement Manipulator Based on Ferrofluid

This paper presents a new multi-DOF flexible micro-displacement manipulator based on ferrofluid for high precision micro-displacement manipulation. It is aimed at achieving a flexible, smooth and precise control of multiple degrees of freedom micro-displacement by utilizing controlled ferrofluid. The mover of the proposed manipulator is suspended on the ferrofluid affected by the combined magnetic field coupled by a permanent magnetic field and a controlled electromagnetic field. Then the proposed manipulator can be manipulated by changing the strength of the combined magnetic field, which is adjusted by the input current. In addition, the proposed manipulator also can effectively eliminate the disturbance to the micro-operation caused by vibration during operation since the mover is totally supported by ferrofluid. The finite element analysis is also performed to observe the magnetic field intensity changes in ferrofluid with different excitation current, which verifies the rationality and feasibility of the proposed manipulators. Consequently, the proposed manipulator has a significant potential for applications where the high precision micro-displacement manipulation, such as microinjection system.