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Non-Fourier two-temperature heat conduction model used to analyze ultrashort-pulse laser processing of nanoscale metal film.

This paper utilizes non-Fourier two-temperature heat conduction model to investigate the temperature field in nanometer-sized thin films irradiated by an ultrashort-pulse laser. Ultrashort-pulse laser processing for nanometer-sized devices is usually applied in MEMS and nanotechnology. For ultrashort-pulse laser interaction with metals, the two-temperature model was proposed to describe the heat transport in metals due to a substantial nonequilibrium between the electron and lattice temperature. For heat conduction in nanoscale devices, Fourier law is inadequate for describing the heat conduction in nanoscale due to the boundary scattering and the finite relaxation time of heat carriers. Therefore, in this work, the Non-Fourier two-temperature heat conduction model used to analyze ultrashort-pulse laser processing of nanoscale metal film. The result obtained from non-Fourier heat conduction equations is compared with the available experimental data. The parametric effects are also discussed.