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Tunable MEMS diffraction gratings

Tunable gratings find applications in spectrometers, tunable cavity lasers and projection displays. In this paper, we discuss the design, modeling, fabrication process and optical characterization of a reflective type period tunable MEMS diffraction grating. The optical modeling of different grating periods for optimum efficiency is presented. A new fixed-fixed beam design with a uniform displacement over 33% of its length is proposed and simulated. The grating membranes are fabricated with gold metal. The optical characterization of the fabricated structure is presented.