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Design And Performance Of 64 X 128 Element PtSi Schottky-Barrier Infrared Charge-Coupled Device (IRCCD) Focal Plane Array

A 64 x 128-element IR-CCD focal plane array was developed with high-performance PtSi Schottky-barrier detectors. The buried-channel CCD imager has an interline transfer organi-zation with 22% detector area efficiency and 120 x 60 μm pixel size. The high-performance "thin" platinum silicide detectors have cut-off wavelength of about 6.0 μm and quantum efficiency of 4.0 to 1.0% in the 3.0 to 4.5 μm spectral range. Depending on the processing parameters and operating voltage, the measured dark current density of these IR detectors at 77K is in the range of 5 to 60 nA/cm2. High quality thermal imaging has been obtained with the 64 x 128-element PtSi Schottky-barrier IR-CCD focal plane array in a TV compatible IR camera. The IR-CCD camera operates at 60 frames per second without vertical interlacing.