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Atomic Scale Kinetic Monte Carlo (KMC) Simulation on a New {111}-Oriented Chemical Vapor Deposition (CVD) Diamond Film Growth Process: Two-Step Growth

The growth of {111}-oriented CVD diamond film under a two-step model was simulated at atomic scale by using revised KMC method. The simulation was conducted at various substrate temperature (1100K-1400K), CH3 radical concentration (0.01%-0.03%) and atomic hydrogen concentration (0.005%-0.3%). The results showed that: Substrate temperature (Ts), the concentration of CH3 ([CH3]) and the concentration of atomic H ([H]) can produce important effects on the film deposition rate and surface roughness.