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A High-Speed Temperature Sensor with Low Supply Sensitivity for SoC Thermal Monitoring

A high-speed low-supply-sensitivity temperature sensor is presented for thermal monitoring of system on a chip (SoC). The proposed sensor transforms the temperature to complementary to absolute temperature (CTAT) frequency and then into digital code. A CTAT voltage reference supplies a temperature-sensitive ring oscillator, which enhances temperature sensitivity and conversion rate. To reduce the supply sensitivity, an operational amplifier with a unity gain for power supply is proposed. A frequency-to-digital converter with piecewise linear fitting is used to convert the frequency into the digital code corresponding to temperature and correct nonlinearity. These additional characteristics are distinct from the conventional oscillator-based temperature sensors. The sensor is fabricated in a 180nm CMOS process and occupies a small area of 0.048mm2 excluding bondpads. After a one-point calibration, the sensor achieves an inaccuracy of ±1.5∘C from −45∘C to 85∘C under a supply voltage of 1.4–2.4V showing a wo...