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Laser microscale technologies: modeling assisted processes

Set of different physical processes has crucial influence on the required precision in case of shaping of elements with dimensions less than tenths millimeter by means of a laser beam, both in terms of the 3D geometry and the structure of the material in micro-volume. Many issues in the field of micrometer scale materials can be solved and used in practice by modeling processes. This article presents some selected examples of accomplished laser microtechnologies, using beam of nanosecond pulses of fiber laser, successfully supported by computer modeling. Using a pulsed fiber laser beam in the process of a thermal ablation spatial structures of micro elements in ceramic and semiconductor materials were produced. Optimum range of process parameters to ensure efficient removal of material, and acceptable quality of a surface of made elements was set by modeling. In micro-technologies, where structures with submillimeter dimensions are formed, modeling of the process with the phase transition phenomena requires taking into account the energy coupling of a beam – material, nonlinear thermal phenomena and the difficult to modeling problems associated with moving phase boundary as well as latent heat of phase transition.