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Vertical scanning white-light interference microscopy on curved microstructures.

Although white-light interferometers have become well-established tools for measuring smooth, rough, and microstructured surfaces, there are some limitations in certain applications, e.g., if tilted surface areas or small radii of curvature are to be measured. Since the correction of chromatic aberrations is not perfect over the total field of view or the total pupil plane, dispersion differences occur for different ray paths of the microscopic imaging system. The influence of these effects is discussed on the basis of the most commonly used Mirau interferometer, and the resulting systematic measuring errors are explained.