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New Approaches for high lateral resolution Array Tomography analysis

Recent applications of Scanning Electron Microscopy (SEM) are versatile. Nowadays, the SEM is not only a surface observation and analysis technique, but can also provide three-dimensional (3D) analysis that collects information about internal structure especially in soft materials such as biological materials. Array Tomography (AT) is one of the methods which are able to analyze large 3D area of biological materials. Ultrathin serial sections prepared with ultra-microtome are placed on substrates and then observed with SEM [1,2]. 3D images are reconstructed by stacking two-dimensional (2D) images of each section. In AT, it is possible to obtain 2D images with high lateral resolution by utilizing an incolumn electron detector. Furthermore, the charging artifacts are substantially reduced, since the substrate on which the sections are placed provides a conductive pathway. This also allows us to perform Energy Dispersive X-ray Spectrometry (EDS) analysis at high incident voltages without charging up. In this report, we present acquisition of 3D images composed of 2D images with high lateral resolution that based on AT and subsequent acquisition of 3D elemental maps by AT-EDS method.