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A Clean Source of Ground-State N atoms: Decomposition of N2 on Heated Tungsten

The decomposition of N2 on a heated tungsten wire was shown to produce ground-state N atoms. The density in the gas phase, determined by a vacuum–ultraviolet laser-induced fluorescence technique, was 1.2×1011 cm-3 when the wire temperature was 2800 K and the N2 pressure was 100 Pa. Although this density is less than that produced in usual plasma processes, no metastable reactive species, such as N2(A 3Σu+), are created by this method. The recently observed nitridation of GaAs and microcrystalline silicon films can be explained by this N-atom production from N2 on heated metal surfaces.