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Annealing Environment Effect on the Nanocrystalline Silicon Related Photoluminescence in Silicon Rich Alumina Films

In this work, we introduced alumina as a new imbedding matrix for silicon nanocrystals and studied the correlation between the annealing environment and the luminescence properties of the silicon rich alumina (SRA) films. Raman spectra show clear evidence of silicon clustering after the annealing process. Different PL properties in the films annealed under various environments have been observed. Infrared spectroscopy and XPS have been employed to investigate the atomic bonding configuration in the films. It has been found that aluminosilicate species form after annealing and the microstructures of the films change greatly according to the annealing conditions. We suppose that the bonding status of silicon and oxygen atoms under different annealing conditions dominates the PL properties of the films.