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A Pulsed Discharge Vacuum Gauge

New vacuum gauges and their controls have been developed. They employ a pulsed crossedfield discharge which shows excellent pressure measurement application characteristics. Experiments have shown that a high-voltage pulse generator and a specific measuring circuit with a PIG tube can measure pressures ranging from 2×10-8 to 1×10-3 Torr. Accuracy better than 0.6% is obtained in 10-6 and 10-5 Torr range. A pressure change caused by measurement, which has been a serious defect of conventional vacuum gauges, has been revealed as being very slight.