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Comparison of rigorous methods for x-ray and XUV grating diffraction analysis

A comparison of various rigorous methods of analysis for soft x ray and XUV surface-relief gratings is presented. Example results for a wide range of groove width-to-groove-spacing ratios and angles of incidence are presented for lamellar gratings. Diffraction efficiencies for gold lamellar gratings obtained from the integral and the characteristic wave methods of analysis are compared with previously published numerical results. The accuracy, the convergence, and the stability of the numerical methods are discussed.