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Surface Measurements With A Non-Contact Nomarski-Profiling Instrument

This paper presents measurements of surface features from a variety of surfaces using a non-contact, long scan surface profiler. Data is presented emphasizing the waviness and roughness of the surface. Several different types of samples are presented, including the surface of a diamond turned mirror, computer hard disk, machine tool surface, and film. The instrument used for these measurements has a resolution of 1 Angstrom and has a scan length up to 100 millimeters.