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A quota-constrained, speed control model for production scheduling in semiconductor manufacturing

This paper presents a quota-constrained, speed control model for integrated production scheduling in a Semiconductor Manufacturing Chain (SMC). For each lot in the SMC, a production speed is tagged on it as its daily production target. The higher the speed is, the shorter cycle time production takes. As there are only limited resources at a time, a quota for each speed level is specified. Our objective for scheduling in an SMC is to satisfy customers' requirements in a just-in-time way, while satisfying all the speed quota limitation. The quota-constrained, speed control problem is formulated into an integer programming problem which is solved by the Lagrangian relaxation and the minimum-cost, linear network flow techniques. Numerical results indicate that the developed methodology can generate near-optimal schedules and can be applied efficiently to realistic problems.