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Estimation of Strength for the Sensitive Element of Si-Flex-Type Compensating Pendulum Accelerometer by the Method of Finite Element Analysis

This paper shows the process of determining the permissible overloads acting on the sensitive element of the pendulum compensating accelerometer. The sensing element is a pendulum made of monocrystalline silicon in the form of a plate. The estimation of permissible overloads was carried out by the method of finite element analysis using modern computer aided design software. To check the adequacy of the results obtained, physical experiments were carried out, during which the pendulums were loaded along one of the axes.