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An Automatically Mode-Matched MEMS Gyroscope Based on Phase Characteristics

An automatic mode-matching method is proposed based on phase difference between a ratio scaled drive signal that is applied on sense electrode and a sense output to improve the scale factor and the bias instability of gyroscope. The method is simulated by Simulink tool and verified by a FPGA-based digital control circuit on a cobweb-like disk resonator gyroscope (DRG). The test result shows that the scale factor and zero-bias instability performance under mode-matching are improved by 68.8 times and 23.1 times, respectively, compared with the mode mismatch.