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Geometrically caused image distortion effects and their influence on interpretation of EBSD measurements

Abstract The imaging of high tilted flat sample surfaces in scanning electron microscopy has some special characteristics. A typical example is the trapezium distortion which is only detectable at low magnifications. In contrast to this, a rhomboidal distortion is discussed in the present paper which appears independent of the magnification used. Rhomboidal distortion is also caused by a simple geometrical misalignment, an additional slight tilt of the sample surface out of the plane of the microscope stage or the pretilted sample holder. The rhomboidal distortion may affect all image related orientation descriptions, e.g. also a texture characterisation. In order to draw attention to this unexpected influence, some typical examples are given and a simplified solution is proposed.