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Analysis of a nanopositioning actuator using numerical and analytic methods

In this paper, we report on our study of a nanopositioning actuator (NPA), which uses an impact/inchworm mechanism. Various kinds of similar precise positioning actuators, which use the same working mechanism, have been proposed by many researchers for several decades. However, characteristic analysis and design methods for the NPA have not been proposed yet. Moreover, the characteristic analysis and design methods for similar actuators were approximate and inefficient. Hence, this paper presents an analysis method for the NPA, which is based on a combination of numerical and analytic methods, shedding light on the complex working mechanism and taking significant factors in the analysis into consideration for an exact and efficient characteristic analysis of the NPA and similar machines. In the present study, the mechanical and electrical systems of the NPA were prototyped. Finally, the effectiveness of the NPA, the feasibility of the clarified complex working mechanism, and the adequacy of the proposed analysis method were verified by experiments.