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Scanning Angle Control of MEMS Micro-mirror Used in LIDAR *

In this paper, a robust-control scheme of scanning angle of MEMS micro-mirror-based LIDAR is proposed. The structure of LIDAR using an electromagnetically driven scanning micro-mirror for laser beam scanning is presented. Then, based on the analysis of the characteristic of the micromirror, a nonlinear hysteresis compensation scheme is used for compensating the effect of hysteresis, then a PID strategy based on robust design is proposed for controling the angular movement. The corresponding experimental results are illustrated.