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Influence of polymer properties on airborne chemical contamination of chemically amplified resists

We describe here an extensive study of the relation between polymer structure and rates of NMP uptake for a set of polymer films with a very broad range of properties. NMP labeled using radioactive 14C was introduced at a concentration of 12 ppb into a stream of purified air. The film of interest was then immersed in the airstream for a predetermined time under controlled conditions. The radionuclide serves as a tag which allows precise quantitation of NMP absorbed by the polymer film. NMP uptake rates measured using this method are shown to correlate with polymer physical properties in a straightforward manner. The observed trends are in accord with those expected on the basis of the solution diffusion model of polymer permeation. These data provide a basis for the rational design of polymers for chemically amplified resists which are insensitive to airborne contaminants.