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Inverse eigenvalue analysis techniques for coupled M/NEMS resonators

M/NEMS resonators are widely used as mass sensors. Coupled resonators have emerged as a promising candidate for multifunction sensing while reducing the number of interconnections and pads. Coupling between these sensors enables control and characterization of the entire array by driving/reading from only one element. Inverse eigenvalue analysis utilizes the eigenvalues recorded from the response of one single resonator to inversely reconstruct the system matrix of all resonators. We compare two inverse eigenvalue analysis techniques to characterize coupled M/NEMS resonators. The first technique perturbs the spring constant of one element, while the second couples an additional resonator to the array. Both techniques showed high accuracy in extracting the actual characteristics of a simulated array of resonators. However, when studied for performance in noisy situation, the second technique shows better accuracy. Furthermore, the second technique is easier to implement by using a simple electrical resonator. Inverse eigenvalue analysis can be used to actuate single input single output multifunction sensors and monitor micro/nano fabrication variabilities.