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Investigation of the maximum optical power rating for a micro-electro-mechanical device

Reports results of an investigation of optical power induced damage to a MEMS device, and the development of a mathematical model for predicting the maximum incident optical power a MEMS device can withstand before the reflective surface is permanently damaged. The mathematical model is based on a heat flow analysis of a MEMS device in thermal equilibrium under direct illumination, and has been validated using a variety of surface-micromachined micromirrors with both thermal simulation and direct laser illumination.