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Current State Of The Art In InSb Infrared Staring Imaging Devices

A monolithic 128 x 128 InSb array is described for staring infrared imaging systems operating in the 3-5μm spectral region. The array is fabricated with only 4 mask levels and has almost 5 times higher responsivity and nearly 14 times greater wafer yield as compared to a previous design. The higher responsivity has resulted in demonstration of significantly improved thermal imagery.