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Design, Modeling and Optimization of a Novel Two DOF Polymeric Electro-Thermal Micro-Actuator

In this paper, design, simulation and optimization of a novel electrothermally-activated polymeric microactuator capable of generating combination of bidirectional lateral and rotational motions are presented. The composite structure of this actuator is consisted of a symmetric meandered shape silicon skeleton, a SU8 thermal expandable polymer and a thin film chrome layer heater. This actuator is controlled by applying appropriate voltages on its four terminals. With the purpose of dimension optimization, a numerical parametric study is executed. The modeled actuator which is 1560 μm long, 156 μm wide and 30 μm thick, demonstrates a remarkable lateral displacement of 23 μm at power consumption of 38 mW and a considerable rotation of about 7.5° at the same power consumption but with excitation of different terminals.