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Development of Objective Aperture Holder for Mounting Compact Cs Corrector on Conventional SEM

Aberration corrected (scanning) transmission electron microscopes ((S)TEM) are well known all over the world. However, there is little example of scanning electron microscope (SEM) equipped with an aberration corrector although an improvement of spatial resolution of SEM is also being required. Therefore, we are developing a new compact spherical aberration (Cs) corrector and an objective aperture holder for mounting it on conventional SEMs.