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Response of a MEMS Microshutter Operating at 60 K to Ionizing Radiation

Total ionizing dose (TID) measurements at low temperature (60 K) of a micro-electro-mechanical system (MEMS) microshutter array (MSA) indicate that exposing the MSA to ionizing radiation causes some of the shutters to stop operating properly. The number of non-functional shutters depends on the applied bias. With increasing dose, the number of micro-shutters that become non-functional increases.