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Evaluation of an Electrostatic Film Motor Driven by Two-Four-Phase AC Voltage and Electrostatic Induction

This paper describes a voltage-induction type electrostatic film motor that operates by feeding electric power to the slider by electrostatic induction. In electrostatic film motors, feeding power to slider is important for better output capability and positioning performance. However, the power feeding using electric cables sometimes cause mechanical disturbance to the motor motions. In the new electrostatic motor, the power to the slider is fed by electrostatic induction, thus removing electric cables that can cause mechanical disturbances. The proposed motor has a two-phase electrode in the slider and a four-phase electrode in the stator. In addition, both stator and slider have the induction electrodes so that electric power is transferred to the slider through the induction electrodes. The paper first analyzes the thrust force characteristics of the proposed driving-electrode configuration, and then analyzes the characteristics of voltage induction, both based on capacitance-network analysis. The analyzed result is verified by experiments that showed good agreements with the provided analysis