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Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence.

The optical parameters of a SiO2 thin-film coating determined from the spectral reflectance and transmittance measurements at various incidence angles, including the normal incidence and the Brewster's angle, are compared in this paper. The high-accuracy measurements were carried out through visible-near-infrared spectral regions by using our purpose-built instruments. The optical parameters obtained from the reflectance and the transmittance data are consistent over the angles of incidence and agree within 0.2%. The effect of important systematic factors in the oblique-incidence spectrophotometric measurements is also discussed.