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Fabrication Technology of Quartz Glass Resonator Using Sacrificial Metal Support Structure

This paper reports an electromagnetically driven quartz glass micromachined ring resonator on a quartz glass substrate. The resonator was fabricated using Au-Au thermocompression bonding technique. Two types of Au structures were used: temporary supporting structures during fabrication process and permanent structure for anchoring. Time-controlled release process successfully removed the temporary Au support structures while the permanent anchor remained. The released quartz glass resonator, which has 55 μm thickness and 4 mm in diameter, was successfully oscillated by electromagnetic transduction at the resonant frequency of 26.8 KHz.