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Research on the ring-diode based readout circuit for MEMS vibratory gyroscopes

This work presents the analysis with experimental verification of ring-diode based readout circuit for MEMS vibratory gyroscopes. Detailed deductions on the C-V conversion and signal demodulation process were given with performance prediction using MATLAB simulation. Experimental verification of the analysis results was also carried out using a MEMS vibratory gyroscope. This work provided theoretical insights on the ring-diode based readout scheme, which could benefit further optimization of the readout circuits. Experiment results shows that the output of the optimized readout circuits (9.0V) is 15 times as much as what we used before optimization (0.6V).