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The Film Thickness Effect on Electrical Conduction Mechanisms and Characteristics of the Ni–Cr Thin Film Resistor

The electrical conduction mechanisms of Ni-Cr thin film resistor are demonstrated by different film thickness through scattering models fitting. The resistivity and temperature coefficient of the resistance of Ni-Cr thin film are measured to investigate the influence of thickness with different annealing temperature. Finally, an oxidation and atom inter-diffusion model was proposed to explain the effects of film thickness on the electrical properties of Ni-Cr thin film resistor under different annealing temperature.