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Force Transducer and control Model for AFM Nano-manipulator

ABSTRACT : In most recent works, manipulation process based on nano robotic system has been widely investigated. In this article a 3D model in order to describe relation between AFM (Atomic Force Microscope) cantilever’s deformation and force (as a force transducer) is developed furthermore a state space model is used to find suitable feedback control. Considering recent developments in AFM Nano robot applications in biotechnology and manufacturing Nano structures, proper understanding of cantilever’s response, has gained a great importance in control process. Using the proposed model improves capability of precise manipulation processes.