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New Developments and Applications of Electron Beam Absorbed Current in SEM

Electron Beam Absorbed Current (EBAC) is a long-discovered operation mode of Scanning Electron Microscopes (SEMs), where the current from the specimen is used as a signal for imaging [1,2]. It has been explored in the early days of electron microscopy, termed as charge collection or specimen current, but it has been largely abandoned within general microscopy in favour of Secondary Electron (SE) detectors because of requirements for higher speed. However, EBAC has retained a core value for Electrical Failure Analysis (EFA), primarily because of its derivative technique of Resistive Contrast Imaging (RCI) [3]. As RCI electronics are developing for improved speed and signal-to-noise ratio, it is now timely to revisit application of EBAC to general SEM work.