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Measurement of thickness and refractive index using femtosecond and terahertz pulses

We report a simple method to measure the thickness and refractive index of parallel-plane samples simultaneously using femtosecond and terahertz pulses. The time-of-flight measurements of the pulses with and without a sample are exploited to determine the thickness and refractive index of the sample. The accuracy in thickness measurement using femtosecond pulses is 2–3 μm where refractive index can be measured with an accuracy up to three decimal points. The accuracy and lower limit of thickness measurement using terahertz pulses is also improved.