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Quantitative voltage contrast method for electron irradiated insulators in SEM

A surface potential mapping method for electron irradiated insulators in the scanning electron microscope (SEM) is proposed. This method, based on the use of a highly compact electrostatic toroidal spectrometer specially adapted to SEM applications, is able to monitor the spatial variation of surface potentials of strongly negatively charged materials. The capabilities of this method are tested on a made-up heterogeneous sample. First results prove that the method is particularly appropriate for the reconstitution of the surface potential distribution.