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Characteristics of SiC/Mg multilayer mirrors

A multilayer coating mirror of Mo/Si is usually integrated into an EUV optics for space science, especially for He-II (30.4 nm) radiation, because it is highly stable under vacuum and atmosphere and achieves the fairly high reflectance of 15-20%. But space science community needs the coating of higher reflectance at 30.4 nm radiation for the future satellite missions. In this work, to develop a new multilayer mirror of He-II radiation, we report the design of a multilayer consisting of a pair of Mg and SiC, and its production, and aging change of the reflectance under the atmosphere and vacuum circumstance.