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Fabrication of fiber-optic EFPI with double-layer SU-8 diaphragm

In this paper, we fabricated fiber-optic extrinsic Fabry-Perot interferometric (EFPI) sensors with photolithography . The sensor has double-layer SU-8 diaphragm: one is the pressure transduction layer; the other is cavity control layer. Since SU-8 material has a low Young's modulus, high pressure sensitivity can be achieved with SU-8 diaphragm. The EFPI were formed by a single mode fiber and a double-layer SU-8 diaphragm. To improve the fringe contrast, gold mirrors with a reflectivity of 50% were evaporated onto the end face of the single mode fiber and the inner face of the SU-8 diaphragm respectively. Experiments were done to estimate the performance of the sensor for static pressure measurement. The results show that an expected cavity length of the sensor was obtained and the EFPI sensor has a good linearity from 100 to 2500 Pa with 100 Pa resolution and a sensitivity of 154.8 nm/kPa.