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Fabrication of pyroelectric thin film ceramics by tape casting method

The purpose of this research is to obtain the sensitive element of infrared (IR) detector directly by tape casting method. The green tapes of pyroelectric ceramic with the thickness of 100-160 /spl mu/m were cast from the slurry composed of pyroelectric ceramic powder and an appropriate binder-solvent system. The influence of a special "Sandwich" sintering process on the properties of the monolayer thin film pyroelectric ceramic were investigated. As a result smooth thin pyroelectric ceramic sheets with relative high density have been obtained. The dielectric and pyroelectric properties of samples made by tape casting were almost the same as those shaped by dry pressing process. The experiment proves that the tape casting method is a feasible process to make pyroelectric thin film ceramics.