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Improvement of Cover-Layer Surface Properties for Near-Field Optical Recording

Scratches in a soft polymer cover-layer on near-field recording (NFR) media are observed after a servo test with a rotating disc owing to collision between a solid immersion lens (SIL) and a NFR disk. A dielectric protective film is coated on the cover-layer to enhance surface properties, which reduces the scratch problem of the cover-layer. The refractive index of the dielectric film can be tailored by controlling process parameters during the sputtering and matches that of the polymer cover-layer to reduce light loss at an interface between the dielectric film and the polymer cover-layer.