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Slot waveguide ring resonators for visible wavelengths in ALD titanium dioxide

Titanium dioxide (TiO2) ring resonators based on slot-waveguides were designed, fabricated and characterized for operating wavelengths in the visible and near infrared regions. The fabrication methods include atomic layer deposition (ALD), electron beam lithography (EBL) and reactive ion etching (RIE). The required narrow slot width (30 nm) was achieved by using a conformal ALD re-coating method, i.e., a feature size reduction technique, after the final etching step. The quality factors of the device were estimated to be 626 at 664 nm wavelength and 3446 at 1516 nm wavelength. The results show that the ALD-TiO2 is a promising platform for sensing applications for visible wavelengths.