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41.4: Research on Nano‐grating Equipment with Adjustable Period and Angle

This paper studies the nano‐grating equipment with adjustable period and rotation angle. First, it analyzes the principle of grating production. According to the demand characteristics of grating products, this paper proposes the producting process and equipment control algorithm of large‐scale grating products. In order to verify the effectiveness of the proposed process plan, the proposed control algorithm is run on the grating production equipment for verification. The grating products and production process data show that the proposed process has good practicability and can be used for large‐scale grating product production.