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Three-Dimensional Analysis of Liquid Propagation at Microchannel Junction using ESEM

The three-dimensional wetting phenomena in a T-shaped microchannel made of a SU-8 photoresist accompanying with a pillar sub-pattern are analyzed by using an environmental scanning electron microscopy (ESEM). By lowering the sample temperature in the ESEM chamber at constant the H2O pressure, the water condensation occurs under H2O dew point and the liquid propagation in the microchannel can be observed. The experimental results show that the pinning angle of water flow at T-junction is 58 degrees in the T-shaped microchannel. In the case of the T-shaped microchannel with the sub-pattern, it is found that the pinning angle becomes low by adhering the water around the sub-pattern. These results can realize to the smooth flow at the channel junction without any water trapping for the three-dimensional microfluidic devices.