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An Inertial Piezoelectric Hybrid Actuator With LargeAngular Velocity and High Resolution

An inertial piezoelectric actuator with large angular velocity and high resolution equipped with various combinations of asymmetrical clamping structures and a bias unit is presented. Two control types are constructed as types A and B. Simulation experiments are conducted to explore the angular displacement and velocity characteristics. The first-order natural frequency by simulation is 16.666 and 17.379 Hz for types A and B, respectively, which agrees with the experiment results of 13.828 and 14.141 Hz. Furthermore, for type A, compared with the characteristics of the actuator that has a sole asymmetrical clamping structure, angular velocity is improved to approximately 6.90 times from 18.88 mrad/s to 130.23 mrad/s at 50 V and 7 Hz. For type B, the resolution is enhanced to 2.85 times from 7.98 μrad to 2.80 μrad under a square signal of 20 V and 1 Hz and offset distance of −22 mm. Thus, type A can improve angular velocity and type B can enhance resolution.