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Comparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models

Measured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact models. The motion of the perforated plates is almost translational, the surface shape is rectangular, and the perforation is uniform validating the assumptions made for compact models. In the structures, the perforation ratio varies from 24% 59%. The study of the structure shows that the compressibility and inertia do not contribute to the damping at the frequencies used (130kHz 220kHz). The damping coefficients given by all four compact models underestimate the measured damping coefficient by approximately 20%. The reasons for this underestimation are discussed by studying the various flow components in the models.