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Large-Displacement Micro-XY-Stage with Paired Moving Plates

An XY-stage driven by electrostatic comb drive actuators is fabricated realizing displacements of over 100 µm for both axes. The plates are prepared in one layer of the silicon-on-insulator (SOI) wafer and the actuators are prepared in another layer. The raster scanning of the plate is realized by maintaining orthogonal x- and y-movements. The fast scanning is along the y-axis. Paired 820 ×950-µm2-size media plates are driven at the mutually opposite y-directions canceling the inertial force. The static maximum displacements are 110 µm (geometrical limit) for the x-axis and 90 µm for the y-axis. At the resonance state, 115 µm (geometrical limit) is obtained for the y-axis.