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The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography

One key issue for all nanoimprint techniques is an appropriate method for the fabrication of desirable molds. We report on a novel flexible mold fabrication process—pressure-assisted molding (PAM)—for high resolution soft ultraviolet nanoimprint lithography (soft UV-NIL). In PAM, enhanced master filling is achieved by applying an external pressure during the mold fabrication process. Flexible molds, fabricated with PAM using different pressures in the range of 10–90 kPa, are compared to determine the role of pressures applied in the imprint performance.