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Preparation of Ru-C Nano-Composite Film by MOCVD and Electrode Properties for Oxygen Gas Sensor

Ru-C nano-composite films were prepared by metal-organic chemical vapor deposition (MOCVD), and their microstructures and their electrode properties for oxygen gas sensors were investigated. Deposited films contained Ru particles of 5-20 nm in diameter dispersed in amorphous C matrix. The AC conductivities associating to the interface charge transfer between Ru-C composite electrode and YSZ electrolyte were 1000-10000 times higher than that of conventional paste-Pt electrodes. The electro-motive-force (emf) values of the oxygen gas concentration cell constructed from the nano-composite electrodes and YSZ electrolyte showed the Nernstian theoretical values at low temperatures around 500 K. The response time of the concentration cell at 500 K was 900 s.