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Deterministic coupling of site-selected InAs/InP quantum dots to 2D photonic crystal microcavities

Site-selective epitaxy and standard electron beam lithography techniques are employed to spatially couple small InAs/InP quantum dot ensembles to 2D photonic crystal membrane cavities. The small InAs quantum dot ensembles, consisting of just a few dots, are localized to areas 100x100nm2 at predetermined positions dictated by a nanotemplate consisting of InP pyramids. The dots are embedded in a 2D membrane using a planarization growth step and single missing-hole defect cavities are fabricated in the membrane with the defect sites centered on the dot ensembles. This spatially couples the ensembles to the χ-dipole mode of the cavities. Emission from the cavities shows the expected mode structure, with quality factors of 2000.