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Experimental study on polarization-limited operation speed of negative capacitance FET with ferroelectric HfO2

We have experimentally investigated the polarization-limited operation speed of Negative Capacitance FET (NCFET) through direct measurement of negative capacitance in transient behavior of ferroelectric HfO2 capacitor and physics-based modeling, for the first time. Systematic analysis of frequency dependence and transient characteristics of ferroelectric HfO2 capacitor enabled accurate parameter extraction. With extracted parameters, our newly developed time-dependent NCFET model provided the evidence that NCFET can operate at >MHz, which is suitable for ultralow power IoT application.