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A spiral planar inductor: An experimentally verified physically based model for frequency and time domains

The results of a comprehensive investigation of spiral inductors are presented. A physically based model includes the self and mutual inductances, the capacitances between adjacent turns, the substrate capacitance, and the ohmic loss effects proposed. Heterogeneous simulation scheme, including circuit and device models during time and frequency domains, is successfully implemented in VHDL‐AMS language and is simulated numerically in Simplorer platform. The model has been validated during frequency domain with measurement data of spirals having different geometries and various sizes. Moreover, the fabricated spiral inductors are evaluated in DC‐DC power converter to benchmark the model accuracy. Simulation and experimental results show excellent agreement. Validity domain is discussed.