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Optimization and Analysis of Capacitive Ring Vibrating Gyroscope with High-overload

The capacitive ring vibrating gyroscope is a new type of solid-state inertial sensor, which is manufactured by micromachining and microelectronic process technology. According to the environmental adaptability of MEMS gyroscope, a capacitive micromachined ring vibrating gyroscope with high-overload is designed based on the vibration characteristics and working principle of degenerate gyroscope. In this paper, the dynamic theory and angle sensitivity mechanism is studied, and the anti-overload characteristics are analyzed base on material theory. The design parameters of the sensitive structure are optimized and determined by analyzing the maximum stress and displacement in a certain rage of load. The simulation results have proven that the resonant frequency of the vibrating gyroscope studied in this paper is 8.7620 kHz, and it can work safely on the transient impact of 10 000g, which provides an analytical basis for the further development of high-overload micromachined gyroscope.