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Design and Manufacture of a Temperature Adaptive MEMS Wind Speed Sensor

In this paper, an AlN-based hot-film wind speed and direction sensor was designed through the thermal analysis of two-dimensional flow field, realized the measurement of wind speed and direction. The 2D micro structure sensor was prepared by lithography process and laser micro machining process on 0.2mm thick AlN substrate. It is composed of a heater in the middle, four temperature detectors around and a temperature sensor. The sensor has a small volume, a low power consumption, it is easily to be integrated, can be applied to a variety of portable flow meters and gas flow detectors of the complex environment.