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Hardness of DLC deposited by pulsed arc

Diamond-like carbon (DLC) films were deposited by means of pulsed vacuum arc ion source, and its hardness was measured using the HXD-1000 digital micro-hardness tester. Measurement results show that, substrate temperature, main loop voltage, pre-cleaning time, and pulse frequency influence hardness of DLC films. The relationships of hardness of DLC with these parameters were presented and the reasons were discussed in this paper, from these, an optimum DLC deposition technique by means of pulsed vacuum arc ion source was presented. The hardness of DLC films can be up to 25.36Gpa when the substrate temperature is 100°C, the pre-cleaning time is 30 min, the pulse frequency is 3Hz, the substrate angle is 45°;, and the main loop voltage is 200V.