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Development of nanostructured ZnO thin film sensor for NO2 detection

In this work, we report on the performance of a NO2 sensor based on nanocrystalline zinc oxide (ZnO) operating at 200°C. The sensor was fabricated using spin coating technique on glass substrates. ZnO film was characterised for their structural as well as surface morphologies and NO2 response was studied. The XRD analysis showed formation of nanocrystalline ZnO. Morphological analysis using SEM revealed formation of a diffusion free surface. The ZnO film showed selectivity for NO2 over methanol compared to ethanol, H2S, Cl2 and NH3 (SNO2 /SCH3OH = 18.6, SNO2 /SC2H5OH = 12.4, SNO2 /SCl2  = 9.3, SNO2 /SH2S = 3.32 and SNO2 /SNH3  = 5.32). The maximum NO2 response of 37.2% with 78% stability for the film annealed at 700°C at gas concentration of 100 ppm at 200°C operating temperature was achieved.