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Research on Elastic Characteristic of the Diaphragm Capsule Vacuum Packaged in Pressure Sensor

. The diaphragm capsule, one of the most important components of the vacuum pressure sensor, should have linear elastic characteristic. Make research on simulation of the diaphragm capsule packaged in vacuum pressure sensor by finite elements Analysis to obtain its elastic characteristic, and get its elastic characteristic by experiment. Compare the displacements between simulation and experiment at each load, the maximum error is smaller than 5%. The analysis results can be used for the structure design of the diaphragm capsule.