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Comparative Study of Si Based Micromachined Patch Antenna Operating at 5 GHz for RF Energy Harvester

This paper presents a comparative study of Si based micromachined and Si based regular rectangular microstrip patch antenna operating at 5 GHz (unlicensed Industrial, Scientific and Medical (ISM) band) frequency for radio frequency (RF) energy harvester. The work is aimed to find alternative substrate modes for integrating the antenna with the harvester circuitry design. The micromachined antenna is based on a modification of silicon (Si) wafer using micromachining technology. In this design, the Si material is etched horizontally underneath the printed patch to produce a cavity consisting of an air-filled and the Si structure in a defined thickness ratio. The air cavity synthesizes a low effective dielectric constant around the radiating patch and improving the radiation gain. The design has been simulated and analysis in CST Microwave Studio software (CST MWS). The results validate superior parameter of the micromachined over regular antenna where the gain has increased by 166.2% while the −10 dB bandwidth performed. Thus the idea of micromachining is relatively useful for designing an efficient radiator and broad bandwidth antenna for integrated RF energy harvester applications.