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Optical Scatter Characteristics And Surface Smoothing Effects In Coated Metal Surfaces

Deposition of 0.1 to 1.0 μM thick metal films on a CaF2 coated Si wafer causes a reduction in optical scatter and related microroughness. This effect is not observed when the coated surfaces are examined using a surface profilometer (Talystep). Scanning electron micrographs indicate that coated surfaces are smoother than uncoated surfaces.