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Analysis of X-ray Photoelectron Spectroscopy of ZrO_2 Thin Films

The composition of the self-made ZrO 2 thin film has been analyzed by XPS(X-ray photoelectron spectroscopy). The results show that when there is negative bias on substrate, the oxygen imperfection would be produced, but it can be compensated by annealing. There is a Y richment layer in the surface layer of the ZrO 2 film. The reasons of these phenomena have also been discussed.