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Opto-Mechatronics Issues in Solid Immersion Lens-Based Near Field Recording

Current developments in the solid immersion lens (SIL) based near-field recording technology are briefly introduced and research results including design, analysis, and experiments in CISD are reported. Also, the concept and performance of the novel optics using SIL is described throughout this paper. To increase the center thickness tolerance of SIL and decrease chromatic aberration, we add the replicated lens on SIL and the diffractive optical element (DOE). As a result of this design, it is confirmed that the SIL thickness tolerance of the replicated SIL optics is from -15 up to 7 mum at 0.035lambda rms, and wavefront aberration is less than 0.035lambda rms through variation of wavelength from 401 up to 412 nm