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Dynamic Response Modeling of MEMS Micromirror Corner Cube Reflectors With Angular Vertical Combdrives

A model for the dynamic response of microelectromechanical-systems micromirrors with angular vertical combdrive electrostatic actuators has been proposed based on a numerical solution of the nonlinear dynamic equations for torsional oscillation. The torque generated by the electrostatic drive is assumed to depend at least on the second order of the turn angle, and the model shows a shift in the resonant frequency with drive voltage, in agreement with the experimental results obtained from components fabricated by self-assembly of bonded silicon parts. The dynamic response of a corner cube reflector (CCR) based on a pair of scanning mirrors and a fixed mirror is predicted using the model, and the theoretical response agrees well with the experimental results. From the model, a small initial misalignment of the CCR mirrors can be determined