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Production-ready silicon microvalve

Micromachining is envisioned as an enabling technology for the miniaturization of chemical analysis systems. It has been pursued for gas phase analysis (GPA) in HP's Chemical Analysis Group and at HP Labs. A thermally actuated, silicon micromachined gas control valve has been jointly developed at HPL and Little Falls Analytical Division (LFAD) for use in a gas chromatograph. This microvalve has 1/10 the weight and 1/5 the package volume of competing solenoid valves. This low cost, high reliability, proportional gas control valve reduces the cost, weight and size of a crucial component for a gas chromatograph system. This paper discusses valve structure and performance, and the resolution of issues over the course of the development.