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Module development for the ATLAS ITk pixel detector

After the upgrade of the LHC to the high-luminosity-LHC, the instantaneous luminosity will reach unprecedented values, resulting in about 200 proton-proton interactions in a typical bunch crossing. The current ATLAS inner detector will be replaced by an all-silicon system, the Inner Tracker. The innermost part of the Inner Tracker will consist of a state-of-the-art pixel detector. The individual modules of the Inner Tracker pixel detector comprise silicon sensors using various different technologies, with the sensors readout using the new ITkPix ASIC.