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Multi-component force measurement in micromachining

Abstract An experimental setup for performing micro-scratching tasks and measuring the forces involved in the process is presented in this paper. The main component of the system is a multi-component force and torque sensor based on the principle of electromagnetic force compensation (EMFC). With this device it is possible to perform the micromachining process itself while simultaneously measuring the interaction forces between the tool tip and the test specimen. Experiments were performed with specimens of polished steel, silicon and glass. Planar micro-structures could be produced and tool point interaction forces in the order of some millinewtons were measured during the process.