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Determination of the reference impedance of Line - Attenuator - Reflect for on-wafer vector network analyzer calibration

A determination of the reference impedance for the three standards line-attenuator-reflect (LAR) on-wafer vector network-analyzer (VNA) calibration is proposed. As a result, it is shown that the reference impedance to which the LAR calibration is referred cannot generally be determined. Based on this consideration, a modified LAR calibration allows a precise determination of the reference impedance so that the calibration accuracy is improved. Measurement results, compared to those obtained using the conventional multiline TRL calibration, show the efficiency of the proposed method up to 45 GHz.