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Fabrication of Periodic Microstructures on Nickel Template by Multi-Beam Laser Interference

Complex microstructures can be fabricated on nickel template directly by femtosecond laser. But the efficiency is low and much time is inevitable when large scale microstructures are fabricated. The multi-beam interference provides an effective method for fabrication of large scale microstructures. This paper mainly focuses on direct ablation of nickel template by four-beam interference and fabricating periodic microstructures by laser interference lithography. Experimental results show that submicron periodic stripes and column structures can be produced on the nickel template by laser interference, laying the foundation of making nickel molds for microfluidic chips.