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Enhancing the optical lever sensitivity of microcantilevers for dynamic atomic force microscopy via integrated low frequency paddles

A method is presented to enhance the optical lever sensitivity in dynamic atomic force microscopy (AFM) by nearly an order of magnitude over a wide frequency bandwidth. This is achieved by fabricating or releasing a paddle with a soft hinge close to the free end of the AFM microcantilever such that the paddle resonance frequency is well below the fundamental resonance frequency of the microcantilever. We show a significant increase in signal to noise ratio when cantilever motion is observed at the paddle for AFM systems that are not limited by thermal noise. Also, any effects due to the excitation of the second eigenmode were decoupled by locating the paddle at the node of the second eigenmode. We use these probes for higher harmonic imaging in amplitude modulated AFM (AM–AFM) on a standard polymer blend made of polystyrene and low density polyethylene. We demonstrate significantly improved contrast in higher harmonic images when observing cantilever motion at the paddle. Thus this microcantilever design can improve significantly conventional cantilever performance for dynamic AFM and is compatible with low-cost, high yield microfabrication processes.