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Fabry-Perot MEMS microspectrometers spanning the SWIR and MWIR

We have previously developed a SWIR microspectrometer based on monolithic integration of a parallel plate Micro- Electro-Mechanical Systems (MEMS) optical filter directly with a HgxCd1-xTe-based infrared detector. The primary technical challenge in achieving the integration of a MEMS Fabry-Perot filter with the HgxCd1-xTe detector is to keep the processing temperature less than 150°C, as the performance of HgxCd1-xTe based photoconductors degrade at higher process temperatures. In this work we present our results to extend the operation into the 3-5 μm (MWIR) wavelength range. For our preliminary results, the MWIR microspectrometer was based on a hybrid packaging approach, fabricating the MWIR filter separately from the HgxCd1-xTe detector; however the key process parameters relating to temperature control were maintained during fabrication of the MWIR filter, ensuring we can migrate this technology into an integrated solution. Linewidths of 210 nm, switching times of 20 μs and a tuning range of 900 nm have been achieved. The tuning speed is limited by squeezed film damping due to the physically narrow gap (&lgr;/2) between the Fabry-Perot mirrors.