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Physical Structure of DC Diode Sputtered ZnO Films and its Influence on the Effective Electromechanical Coupling Factors

A number of ZnO polycrystalline films with various degrees of structural ordering of the crystallites were obtained by dc diode sputtering. A quantitative description was obtained by rocking curve studies and pole-figure analysis for the spatial distribution of c-axis orientations of the crystallites in the deposited films. The distribution was found to be expressed by a Gaussian distribution for most of the specimens. The physical structure of the films can be represented by a mean m (an inclination angle of mean c-axis orientation) and a standard deviation σ. Measurements of the effective electromechanical coupling factors kt (m=0°∼6°) and ks (m=7°∼12°) were made for the films of σ=2°∼8°. It was found that the coupling factors kt and ks were not affected remarkably by the standard deviation until σ=6°.