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Study of energy balance in low-inductive capillary discharges in EUV sources

Results of a numerical research of energy input in a capillary discharge by Joule heating and magnetic piston working in the close electrode system are presented. In our calculations, RMHD code was used with taken in account of nonequilibrium gas ionization, own plasma radiation transport and the concrete pulse energy supply system on the base of long line. Calculations were carried out in reference both to the available full-scale model source of EUV radiation on neon-like ions of argon (λ= 46.9 nm) HM), and to a designed more high-power laser of recombination type on hydrogen-like ions of nitrogen with wavelength of transition of 13.4 nm. Different ways for rising in efficiency of an energy input into a discharge at collision pumping through excitation and recombination of ions are analyzed.