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INCREASING THE RANGE OF MEASUREMENTS OF PROFILE HEIGHT IN THE INTERFERENCE PROFILOMETER

Methods for increasing the measurement range of the height of surface profile by the interference profilometer are proposed. The methods are based on using of multiple light sources with different wavelengths. It was shown experimentally that the measurement range increased at least 5 times due to using of two wavelengths, and at least 7 times due to using three wavelengths, while maintaining the resolution of the measurements.