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Efficiency and stochastic error of Monte Carlo device simulations

Without proper analysis of the stochastic error it is not possible to assess the accuracy or efficiency of Monte Carlo device simulations and misleading results might be obtained. This is demonstrated for the so-called optimized terminal current estimator which turns out to be not more efficient than a standard estimator. Previously published results for the efficiency of nonself-consistent ("frozen field") device simulations are found to be questionable and relaxation of transients to be slower by orders of magnitude compared to the self-consistent case necessitating very long simulation times.