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Vibratory response of a precision double-multilayer-monochromator positioning system using a generic modeling program with experimental verification

A generic vibratory-response modeling program has been developed as a tool for designing high-precision optical positioning systems. The systems are modeled as rigid-body structures connected by linear nonrigid elements, such as complex actuators and bearings. The full dynamic properties of each nonrigid element are determined experimentally or theoretically, then integrated into the program as inertial and stiffness matrices. Thus, it is possible to have a suite of standardized structural elements for modeling many different positioning systems that use standardized components. This paper will present the application of this program to a double-multilayer-monochromator positioning system that utilizes standardized components. Calculated results are compared to experimental modal analysis results.