{'fraction_non_alphanumeric': 0.016786570743405275, 'fraction_numerical': 0.017985611510791366, 'mean_word_length': 4.680272108843537, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications

We have developed a new hybrid AFM probe combining an SU-8 polymer body with a full tungsten cantilever having a nanometric tip. The fabrication is based on surface micromachining a silicon wafer, where tungsten is sputter deposited in oxidation sharpened moulds to yield sharp tips with radius below 20 nm. The material properties of tungsten were measured, yielding a hardness of 14 GPa, a specific resistivity of 14.8 µΩ cm and Young’s modulus of 380 GPa. Analyses of the probes show a mechanical quality factor of 90 in air, and a low contact resistance of 25 Ω on a gold sample is measured. AFM imaging is demonstrated. As a step in the development of a robust electrically conducting AFM probe, the results are very promising.