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Effect of fabrication errors on binary phase grating

Based on scale diffraction theory, binary phase gratings are designed and the effect of fabrication errors on the diffraction efficiency and uniformity is discussed. The theoretical and numerical analysis shows that (0, non-(pi) ) grating is more sensitive to phase delay error than (0, (pi) ) grating. Patterning error is very complex to analyze, but we can give a maximum intensity deviation to the grating.