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Optical polarization characteristics and light extraction behavior of deep-ultraviolet LED flip-chip with full-spatial omnidirectional reflector system.

Optical polarization characteristics and light extraction behavior of deep-ultraviolet (DUV) light-emitting diode (LED) flip-chip with full-spatial omnidirectional reflector (FSODR) have been investigated. FSODR is fabricated to be simultaneously covered on the whole flip-chip, except the sapphire surface. It is found that the FSODR greatly enhance both transverse-electric (TE) and transverse-magnetic (TM) mode light extraction at every space angle, resulting in total enhancement of 73.1% and 79.8%, respectively. Moreover, the four individual ODR structures separated from FSODR, which are covered on the surface of n-AlGaN, the interface of p-GaN/p-AlGaN, the sidewall of mesa and the sidewall of n-AlGaN/AlN, respectively, show considerably different optical polarization characteristics and extraction behaviors between each other. The achievements of FSODR cannot be obtained by any separated ODR, and all of the individual ODRs can contribute to the FSODR. Especially, the synergy effect of TM extraction behavior obviously exists in FSODR. As a result, the light extraction efficiency (LEE) enhancement of FSODR is approximately 60% at a high current density of 140A/cm2. This study is significant for understanding and modulating the extraction behavior of polarized light to realize high efficiency AlGaN-based DUV LEDs.