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Design and tolerance analysis of a 21 GHz CPW-fed, slot-coupled, microstrip antenna on etched silicon

The paper discusses the design and study of a rectangular patch antenna, constructed on high-resistivity silicon and slot-coupled to a coplanar waveguide (CPW) feed-line. Bulk fabrication and etching processes are used to construct the dual-layered structure. The frequency response and radiation performance of the antenna are estimated from FEM simulations and verified experimentally at 21 GHz. Antenna performance deviations due to fabrication tolerances are studied and data are obtained from the statistical analysis of a designed experiment.