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Simulation Study of Noise Influence in 3-Dimensional Reconstruction using High-Angle Hollow-Cone Dark-Field Transmission Electron Microscope Images

Three-dimensional reconstruction of crystal structures by filtered convolution back projection of high-angle hollow-cone dark-field transmission electron microscope images (HADF images) of a specimen is investigated. To determine the distribution of Cu particles in Si crystal from reconstructed images, the necessary conditions are estimated. Undistorted distribution of particles is obtained from a simulated reconstruction when the specimen is inclined between ±50°, the inclination axis direction error is ±2° and Poisson noise is 30 db. Under these conditions, the distribution of Cu particles in a Si crystal is experimentally reconstructed.