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Novel thin film lift-off process for in situ TEM tensile characterization

Recent advances in MEMS based devices for in situ transmission electron microscopy (TEM) are opening exciting new directions in nanoscale research. The possibilities to combine various stimuli like biasing, heating, etc inside the TEM to study various applied materials e.g., solid state batteries, non-volatile memories, sensors, etc. are continuously increasing, but the challenges to prepare suitable specimens are increasing at the same time. The majority of samples used for in situ TEM experiments are prepared using Focused Ion Beam (FIB). Classic lamella preparation has been standardized and almost automated in previous years. However, unconventional methods are being developed to address the research challenges in sample preparation for in situ studies, e.g. to reduce dose and contamination. This study presents a method for successful FIB lift out from a heating membrane of commercially available MEMS based in situ heating chips onto the push-to-pull (PTP) device (Bruker) for in situ mechanical measurements, minimizing ion beam damage and contamination of the area of interest. Thin free-standing polymer films were deposited by spin-coating on a MEMS-based in situ heating device (Aduro from Protochips) and nanocrystalline graphene (ncg) was formed across the holes of the heating region as described elsewhere [1,2]. The area of interest for the lift-out is the