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Development of Multiscale Simulation System for Nano-Processes

In contrast to microscale method (molecular dynamics) or macroscale method (FEM), multiscale modeling is a new, fast developing and challenging scientific field with contributions from many scientific disciplines in an effort to assure materials simulation across length/time scale. In this paper we propose MPM/MD handshaking method to establish multiscale modeling of thin film formation/nanocutting. First, the detailed handshaking method is presented for large scale simulation along with basic principles of the multiscale approach. Then, quantitative items: flatness, cutting force, adhesion between cluster and substrate, etc. are provided to avoid drawbacks of current qualitative manner. Finally, simulations are carried out to clarify the efficiency of system.