{'fraction_non_alphanumeric': 0.015332197614991482, 'fraction_numerical': 0.0, 'mean_word_length': 5.533333333333333, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
A computationally efficient method for three-dimensional simulation of ion implantation

The high accuracy which is necessary for modern process simulation often requires the use of Monte-Carlo ion implantation simulation methods, with the disadvantage of very long simulation times especially for three-dimensional applications. In this work a new method for an accurate and CPU time efficient three-dimensional simulation of ion implantation is suggested. The approach is based on a combination of the algorithmic capabilities of fast analytical and the Monte-Carlo simulation methods.