{'fraction_non_alphanumeric': 0.022396416573348264, 'fraction_numerical': 0.0022396416573348264, 'mean_word_length': 6.209677419354839, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Surface-Micromachined Optical Interferometry System Utilizing Three-Dimensional Micromirrors and Microgratings

This paper presents a novel micro-optical interferometer incorporating three-dimensional micromirrors and microgratings. The interferometry system comprises a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated oscillating structure. The use of a curved polysilicon structure lowers the electrostatic operating voltage (4 V) of the oscillating structure substantially and permits high-speed movement (2 kHz) of the grating. The novel system presented in this study provides a wider modulation frequency, and hence a wider frequency response. Furthermore, the proposed micro-optical interferometer can be applied to a micro-optical bench to facilitate signal modulation and precision measurement applications.