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Characteristics of Magnesium Oxide Deposited by Oxygen Neutral-Beam-Assisted Deposition in AC Plasma Display Panel

Magnesium oxide (MgO) plays an important role as a protective layer in AC plasma display panels (PDPs). We prepared MgO protective layers by oxygen neutral-beam-assisted-deposition (NBAD) and described the properties of the MgO thin film. The oxygen neutral beam energy is varied from 100 to 900 eV to assist MgO deposition. The preferred orientation and the (220) peak intensity varied depending on the neutral beam energy. The (111) peak appeared when the neutral beam energy was over 500 eV and its intensity also varied with neutral beam energy. The surface roughness and discharge characteristics of MgO also varied with neutral beam energy. It is considered that the NBAD method is appropriate for depositing MgO thin film as a protective layer in AC PDP.