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XAS characterization of growth parameter effects for pulsed laser deposited CoxTi1−xO2−δ films

Films of cobalt-doped titanium dioxide (CoxTi1−xO2−δ) can be stabilized in the thermodynamically unfavorable anatase phase if they are grown on appropriate substrates. We performed X-ray Absorption Spectroscopy (XAS) measurements at the oxygen, titanium, and cobalt edges of PLD grown samples. Our data shows the success of this substrate-induced stabilization of the anatase phase occurs only at elevated temperatures (∼ 700 °C or more) and elevated oxygen partial pressures (∼ 1 × 10−5 Torr or more). The effects of post annealing in vacuum are also considered.