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Surface roughness: A review of its measurement at micro-/nano-scale

Abstract The measurement of surface roughness at micro-/nano-scale is of great importance to metrological, manufacturing, engineering, and scientific applications given the critical roles of roughness in physical and chemical phenomena. The surface roughness of materials can significantly change the way of how they interact with light, phonons, molecules, and so forth, thus surface roughness ultimately determines the functionality and property of materials. In this short review, the techniques of measuring micro-/nano-scale surface roughness are discussed with special focus on the limitations and capabilities of each technique. In addition, the calculations of surface roughness and their theoretical background are discussed to offer readers a better understanding of the importance of post-measurement analysis. Recent progress on fractal analysis of surface roughness is discussed to shed light on the future efforts in surface roughness measurement.