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Deflection angle tuning of electromagnetically driven MEMS with underdamping compensation

In this paper, a model-based compensation scheme of oscillation caused by underdamping characteristic of deflection mechanism in electromagnetically actuated micro-mirrors. In this scheme, an approximated resonant frequency compensator is introduced to the closed-loop control structure to compensate for the underdamping oscillation inherent in the deflection mechanism of micro-mirror. Then, a control scheme with robust design is implemented to handle the model residual and realize the accurate tracking of deflection angle. The experiments on an electromagnetically actuated micro-mirror are implemented for evaluation of the proposed strategy.