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Structure Optimization of Surface Acoustic Wave Based Particulate Matter 2.5 Monitor

This paper presents an optimal design on surface wave acoustic based particulate matter 2.5 monitor by improving the hot source structure in the monitor system. A kind of micro-heater was made on the quartz glass substrate based on MEMS technology, replacing the semiconductor chilling plate as the hot source of the PM 2.5 monitor, and providing the temperature gradient field required for the particulate matter deposition. The structure of the monitor is optimized by integrating the fabricated micro-heater and the micro-channel module. In addition, the commercial software COMSOL is used to simulate the temperature distribution of the designed micro-heater. Finally, the performance of the MEMS micro-heater fabricated was experimentally verified.