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Three-Dimensional Profiling with the Sandia Nuclear Microprobe

A nuclear microprobe analysis system attached to Sandia's EN tandem Van de Graaff accelerator is described. A magnetic quadrupole doublet lens is used for the final focus and 2 ¿m beam diameters have been obtained. Several illustrative applications of the microprobe, including the first three-dimensional concentration profiles using Rutherford backscattering and elastic recoil detection ever measured, are given.