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Fabrication of a Microbiochemical Reactor with Thick Thermal Isolation Layer and Integrated Pt Heater/Sensor in the Microwell

We have fabricated a microbiochemical reactor with integrated heater and sensor in the microwell, which is the unlike conventional micromachined biochemical reactors which have an integrated heater and sensor on the backside of the wafer. In order to pattern heater and sensor inside the well, a thick negative Su-8 photo- resist (PR) was used. As a desirable thermal isolation layer at the bottom of the well, we proposed a thick silicon dioxide layer using porous silicon. The temperature distribution in the well for various heater shapes and the effect of the thermal isolation layer was investigated by simulation. Because of the thick thermal isolation layer and Pt heater in the well, we can expect low power consumption and less heat dissipation to the silicon substrate, which is a good thermal conductor, and real-time sensing of reagent.