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“MEMS de Piano”- an experimental course of design, fabrication, and testing of MEMS oscillator

Since 2005, an experimental course of design, fabrication, and testing of MEMS resonators is given to undergraduate and graduate students of the University of Tokyo. Through the experiences, an optimal-for-course resonator design (= the design with which all students have working device) was identified. Several “golden rules” were described for deeper students' understanding. Further extension of the course is presented in the paper: Integration with VLSI read-out circuit. A capacitance readout ASIC that can monolithically be integrated with MEMS resonator was fabricated with 0.6 μm CMOS technology on an SOI wafer and its functionality was verified.