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Hybrid method to calculate the spectral optical constants (n, k) of smooth and rough bulk samples

Spectra of the optical constants (n, k) of a substance are often obtained by comparing spectroscopic measurements of a bulk sample with a simulation model. The reflectance method requires a sample with a perfectly smooth surface to give unbiased values of n and k. The ellipsometric method generates n and k spectra which are accurate in general but which sometimes generate errors over limited spectral ranges when simulating polarized reflectance. We propose a new hybrid method to calculate reliable spectra of n and k. The proposed method uses both ellipsometric and s-polarized reflectance measurements and takes into account the potential roughness of the sample’s surface with the help of a specularity factor. The proposed method provides n and k that better simulate polarized reflectance measurements and applies to isotropic bulk samples with either smooth or rough flat surfaces. We provide demonstrations in the infrared spectral region with a smooth sample and a rough sample.