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Electrostatic self-calibration of vibratory gyroscopes

This paper introduces a new approach to self-calibration of Coriolis-based vibratory gyroscopes that does not require the use of any additional moving parts or a calibration stage. Instead, the effect of the Coriolis force on the device is mimicked by the application of a rotating excitation to the device drive and sense modes. This calibration method is based on the theoretical analysis of an equivalent 2-DOF mass-spring model, which can be used to describe the behavior of a variety of MEMS gyroscopes. The method is validated both by the results of finite-element simulations and by experimental measurement.