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Novel temperature sensor implemented on nanoporous Anodic Aluminum Oxide template

This study presents a novel temperature sensor consisting of the nano-textured Au-film on the nano-pores Anodic Aluminum Oxide (np-AAO) template. The np-AAO template enables the formation of nano-pores on the Au-film. The temperature change will lead to the variation of resistivity and nano-texture on metal film. Thus, the temperature sensor of negative TCR can be realized, and the sensitivity of temperature sensor can be improved. Measurement results show the TCR of Au-film (50nm) on np-AAO temperature sensor is 0.00218/°C (nonlinearity: 0.42% for heat-up, 3.72% for cool-down). As the Au-film increasing to 200nm and above, the temperature sensor on np-AAO has a TCR of −0.00598/ °C. Thus, the sensitivity of temperature sensor is improved.