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Trace water vapor determination in nitrogen and corrosive gases using infrared spectroscopy

The generation of particles in gas handling systems as a result of corrosion is a major concern in the microelectronics industry. The corrosion can be caused by the presence of trace quantities of water in corrosive gases such as HCl or HBr. FTIR spectroscopy has been shown to be a method that can be made compatible with corrosive gases and is capable of detecting low ppb levels of water vapor. In this report, the application of FTIR spectroscopy combined with classical least squares multivariate calibration to detect trace H{sub 2}O in N{sub 2}, HCl and HBr is discussed. Chapter 2 discusses the gas handling system and instrumentation required to handle corrosive gases. A method of generating a background spectrum useful to the measurements discussed in this report, as well as in other application areas such as gas phase environmental monitoring, is discussed in Chapter 3. Experimental results obtained with the first system are presented in Chapter 4. Those results made it possible to optimize the design options for the construction of a dedicate system for low ppb water vapor determination. These designs options are discussed in Chapter 5. An FTIR prototype accessory was built. In addition, a commercially available evacuable FTIR system was obtained for evaluation. Test results obtained with both systems are discussed in Chapter 6. Experiments dealing with the interaction between H{sub 2}O-HCl and potential improvements to the detection system are discussed in Chapter 7.