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AFM Nanomanipulation with Tip Morphology Estimation and Positioning Compensation

During the AFM nanomanipulation, the uncertainty of AFM tip morphology and its location seriously affect the reliability of the nanomanipulation results. In response to this problem, we first estimate the tip morphology and reconstruct the scanned image. Based on this, the position and orientation of the interaction between AFM tip morphology and nanoparticle morphology are calculated. The simulation results show that the effect of the tip on the nanoparticle depends on the angle θ between the direction of the tip’s pushing direction and its actual force. The smaller the angle θ is, the more effective the distance is. Due to the uncertainty of the position of the tip, the minimum angle θ can’t be guaranteed, resulting in unstable results. Therefore, this study refers to the macro robot positioning strategy, using local scanning method to improve the positioning accuracy of the tip relative to the nanoparticles. According to the table of the tip pushing position and the deviation angle θ, the tip pushing position is compensated, which ensures that the deviation angle θ is minimum. Finally, the experimental results of constructing nanostructures verify the effectiveness of the proposed method. This is of great importance to the application of AFM nanomanipulation in Mems / Nems device assembly.