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Investigation of inhomogeneties and impurities in fluoride coatings for high-power excimer lasers

In the thickness range 50 nm - 500 nm at substrate temperatures of 300 K, 375 K, and 575 K the structure of physical-vapor-deposited magnesium, lanthanum, calcium, and lithium fluoride films were investigated using TEM microfractographical replication technique. Two growth groups, columnar and granular growth, were found and main structure building elements with their characteristic medium size have been determined. Using SIMS, SNMS, RBS, and partially spectroscopical and gravimetrical measurements, the O and C contamination of the films has been investigated. The quantitative results were related to the characteristic structure building elements.