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EELS Mapping with Random Scan

With modern TEM/ STEM system, elemental mapping is one of the most important components in microanalysis. The conventional mapping scheme is to raster the electron beam in a sequential fashion, from left to right and top to bottom [1]. To obtain elemental mapping, one or more detectors are used to collect signals (such as EDS and EELS) at each stopping point. The analytical signals synchronized with the electron beam position form the so called spectrum image. A typical EELS or EDS spectrum image is a 3-D numerical array with two spatial dimensions and one energy dimension.