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Practical Exploration of Yield Prediction Model

In yield management research, there have been many achievements in the field of Yield Model which provides predictive function. However, the traditional yield model only considers the relationship between defect number and yield, and its accuracy is not very good. In recent years, some modified yield models have been published one after another, but they are too complex to be used easily. This paper systematically introduces how to extract Yr (defect yield) and Ys (systematic yield) based on the defect Poisson distribution model, and develops a practical method to describe yield prediction by using the relationship between Yr and D0, and gives the verification results in practical work.