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Simulating CMUT arrays using time domain FEA

Finite element method (FEM) has been extensively used for analyzing both static and dynamic behaviour of CMUTs. Typical parameters being evaluated include the pull-in voltage, pressure, sensitivity, bandwidth, and crosstalk. PZFlex is a commercial FEA software and has been optimized for the ultrasound industry and is commonly used to design piezo-electric ultrasound transducers. However, PZFlex is not commonly used within the CMUT research field. Nevertheless, it has an explicit modeling approach allowing large structures like CMUT arrays to be modeled and its transient analysis intrinsically supplies non-linear and broadband results from a single run. The objective is to present a multi-element CMUT array model with multiple cells per element and compare the output results to measurements of a fabricated CMUT array.