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New approach for 3D capacitance extractions for complex structures with conformal dielectrics

This paper describes a new approach for 3-D capacitance extraction using the boundary element method. The new formulation described in this paper improves condition number of the linear system to be solved and reduces the number of unknowns in the system. Implementation of the described method, in conjunction with an acceleration algorithm, will significantly reduce the computational time and memory required for the simulation of electrostatically actuated MEMS devices.