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Tri-mode operation of highly doped silicon resonators for temperature compensated timing references

In this work, we propose a novel temperature compensation method that utilizes a tri-mode operation scheme to generate a temperature-stable frequency reference over a large temperature range. Three resonant modes are excited simultaneously on a highly doped silicon MEMS resonator, and the unique TCf characteristic of each mode is fitted to a parabolic curve. A linear combination of the three frequencies is shown to eliminate the temperature dependence up to second order and produce a temperature-insensitive frequency output. Preliminary results verify the concept and show a ±14ppm temperature dependence of the output frequency across the temperature range of −40∼80°C.