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Enhanced Charge Collection by Single Ion Strike in AlGaN/GaN HEMTs

Transient currents in AlGaN/GaN High Electron Mobility Transistors (HEMTs) induced by focused ion beams are measured. Enhanced charge collection occurs in the on- and pinch-off states of AlGaN/GaN HEMTs. The first-order mechanism of enhancement is associated with bipolar and back-channel effects. In addition, we suggest that the temporal positive charge buildup contributes to the enhanced charge collection. The effect of displacement damage on the enhanced charge collection is also discussed.