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High-resolution quantitative phase microscopic imaging in deep UV with phase retrieval.

High-resolution three-dimensional (3D) microscopic imaging requires the use of short wavelengths. Quantitative 3D imaging techniques, such as digital holographic microscopy, require interference between the object beam and a known reference background for the extraction of phase information. At shorter wavelengths, due to short coherence lengths, it may be difficult to implement a two-beam off-axis setup. Thus, a single-beam technique, which provides complete phase information, may be better suited for short wavelengths. This Letter describes the development of a quantitative microscopy technique at 193 nm using multiple intensity samplings and phase retrieval.