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Measuring fluence distribution of excimer laser with YBCO film light thermodetector

The average fluence distribution of excimer laser is an important parameter in various applications of excimer laser. But it is more difficulty to measure the parameter due to UV wavelength of excimer laser, very short pulse width, energy undulation among various pulses and or so. Basing on the anisotropy Seeback tensor coefficients, a light-thermo radiation detector made from high Tc superconductor YBa2Cu3O7-(delta ) was fabricated. The novel advantages of this detector are that it functions at room temperature, with very low noise, very fast response and higher sensitivity within a very wide wavelength from ultraviolet to infrared. A measuring system of average fluence distribution of excimer laser is formed with the YBCO light-thermo-detector, a lock-in amplifier and a computer. The principle of the measurement system is analyzed, XeCl laser fluence distribution is measured.