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NANO TRAJECTORY CONTROL OF MULTILAYER LOW‐VOLTAGE PZT BENDER ACTUATOR SYSTEMS

In this paper, nano trajectory control of the multilayer low‐voltage PZT (lead zirconate titanate) bender actuator system (MLVPZTBAS) is developed. System analyses in of the hysteresis characteristic, frequency response and sinusoidal response, were conducted to evaluate the system features. Because not all of the states of the MLVPZTBAS are directly available, an observer is required to estimate the states. The proposed scheme contains feedback linearization with a sliding‐mode controller and a state observer to estimate the system states of the MLVPZTBAS. The sliding‐mode control possesses an equivalent control and a switching control. To track a trajectory dominant by a specific frequency, a reference model consisting of desired amplitude and phase features is established. The equivalent control using the signals from the observer and the reference model is designed so as to produce the desired control behavior. Due to the existence of modeling and estimation errors, the switching control is then employed to achieve robust performance. Experiments on the MLVPZTBAS were carried out to verify the usefulness of the proposed control.