{'fraction_non_alphanumeric': 0.028376844494892167, 'fraction_numerical': 0.01362088535754824, 'mean_word_length': 4.7272727272727275, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Conductivity and reproducibility of e-beam-induced deposited tungsten lines

The e-beam induced deposition process with the precusor gas W(CO)6 is investigated with the aim of improving the conductivity of the deposits. For this purpose, lines are deposited on KELVIN structures of gold on siliconoxide. A non-ohmic behavior is observed, if the connection of the deposits to the gold is incomplete. The reproducibility of the process mainly depends on the stability of the current density. Keeping the current density constant, the deviations of the conductivity are less than 20%. By increasing the dwell time and by lowering the beam energy and the beam step size (BSS), the specific resistance decreases down to 10-3 (Omega) cm. We conjecture that at a beam energy of 1 keV and a current density of 60-70 A/cm2 the conductivity and the reproducibility might further be improved.