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Performance analysis of electrochromic coloration efficiency by the oxygen deficiency in the sputtering a-WOx films

In this paper, we report on how electrochromic coloration is affected by oxygen deficient stoichiometries in amorphous tungsten oxide (a-WOx) films prepared by a dc reactive magnetron sputtering. The peak color efficient (CE) value of oxygen partial pressure at the optimum 6.5×10-3 Torr is improved about nine-fold larger than that of 2.0×10-3 Torr even in the nearly stoichiometric a-WOx films. We attributed that the optical absorption of a colored a-WOx film can be satisfactorily described by an intervalence charge-transfer transition (ICTT) mechanism between localized W5+ and W6+ states. Therefore, we have determined the most suitable condition (by increasing the partial oxygen pressure) to produce a-WOx films, thus offering a good electrochromic performance for opto-switching applications.