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Homogeneous Al2O3 Multilayered Films Deposited on Poly(ethylene terephthalate) by Facing-Target Sputtering System for Thin-Film Passivation of Organic Light-Emitting Diodes

Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive processes using Al2O3 with the facing-target sputtering (FTS) system. The multilayered films showed 60% improved barrier performance and their fabrication was 30% faster than that of single Al2O3 layers of the same thickness. The water vapor transmission rate was increased up to the order of 10-4 g·m-2·d-1 from a three-pair system of reactive and nonreactive sputtered Al2O3 bilayers.