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Electromechanical and optical properties of torsion-mirror actuators for optical switching applications

The electromechanical characteristics of a novel micro torsion-mirror actuator and the optical properties about the light scattering and reflection of its micro-mirror under the influence of mirror surface roughness are investigated experimentally and theoretically. The electrostatic yielding voltages for driving the metal-coated polysilicon or single crystal silicon micro-mirrors suspended by elastic torsion beams to tilt from 0o to 90o spontaneously are in the range of 270~290 V and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90o are found 55 V or so when the thickness of the torsion-beams is about 1 mm. The lifetime and the estimated shortest actuating time of the micro torsion-mirror actuators can reach 108 at least and less than 2 ms, respectively. The maximum value of the surface roughness of the micro-mirrors is 69.443 nm and the distribution of the surface roughness is smooth, which is acceptable for wavelength division multiplexing applications basically. In general, the novel torsion-mirror actuators can be applied as optical switches for optical networking.