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Micromachined reference samples for particle counting

Three micromachined reference sample prototypes for particle counting have been fabricated by using dark ceramic spots in a transparent glass wafer to simulate particles on a surface. The direct write approach permits the spots to be positioned at random locations within an indicated area of the sample with sizes and numbers that are consistent with a distribution of particles. The goal of this work is to provide a path to creating a set of particle counting and sizing samples that can be used to establish the accuracy and precision of different measurements.