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Error analysis of Gaussian spot width measured with CCD sensor

The system errors and random errors of a CCD sensor cause measurement errors of a laser spot width. Taking the Gaussian spot as example, the computer simulation method is used to analyze the influences of the measurement window size, the non-ideal integral sampling, the number of quantization lever and the read-out noise on the measurement precision of Gaussian spot width respectively, and the synthesized influences of these four kinds of error sources of the laboratory 8-bit CCD sensor on the measurement precision of Gaussian spot width. An optimal measurement window size is given. Simulation results are analyzed and discussed.