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Method of analysis of the thin-film dielectric parameters

The methods of the resonant quasioptical interferometry based on the use of open resonators (OR) can be effectively used in the non-destructive testing of dielectric materials. The investigated object can be placed both inside the OR and outside it. The high measurement accuracy is necessary for testing the dielectric parameters of thin films. In this case it is advisable to place the object inside the resonator. In permittivity the present paper the mathematics of the resonator method of analysis and reconstruction of permittivity function of thin dielectric samples is considered. The results of the model experiments in the two-millimeter range of electromagnetic waves are presented.