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Design study for a thick-film piezoelectric actuator in an LTCC structure

In this paper we present the results obtained in the early design phase of a ceramic micro-electro-mechanic system (CMEMS) with an integrated piezoelectric actuator providing a valve function for the regulation of pressure. Different constructions of thick-film piezoelectric displacement actuators integrated in a low-temperature co-fired ceramic (LTCC) substrate implemented using conventional thick-film technology were considered. The characteristics of the thick-film piezoelectric ceramics printed and fired on appropriate ceramic substrates are similar to those of bulk materials, only certain material parameters are degraded to some extent for thinner layers. The preliminary FE analyses revealed the influence of selected technology-dependent parameters, e.g., the thickness of the thick films and the degradation of the piezoelectric material properties, on the characteristics of the actuator.