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On-wafer calibration using space-conservative (SOLT) standards

In this paper the accuracy of on-wafer calibration using space-conservative (SOLT) standards is evaluated. The calibration approach relies on measurement-based standard definitions. Results are presented using CPW standards with 50 and 300 micron offsets, over the range from .045-65 GHz. In comparing to a multi-line TRL, the magnitude of the difference between the S-parameters is less than 0.05 up to 40 GHz, and below 0.1 up to 65 GHz.