{'fraction_non_alphanumeric': 0.05249343832020997, 'fraction_numerical': 0.03674540682414698, 'mean_word_length': 4.869230769230769, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
9.5 % Scandium Doped ALN PMUT Compatible with Pre-Processed CMOS Substrates

This paper presents an 80 µm squared piezoelectric micromachined ultrasonic transducer (PMUT) using 9.5 % scandium-doped aluminum nitride (AlScN). The improvement in the effective piezoelectric coefficient (e31,f) and consequently in the membrane displacement was demonstrating according with the FEM simulation. The proposed device has a high piezoelectric coefficient factor (kt2) in air, 2.76 %, and also in liquid environment, 1.12 %. The output pressure normalized at 1.5 mm in Fluorinert gives 12.57 kPa/V/mm2, ~ 9 times higher than 7x7 AlScN array (1.4 kPa/V/mm2). Pulse-echo experiment was validated with a single PMUT considering as reflected surface the air-liquid interface.