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Synthesis of Zirconia and Hafnia Tubes by Atomic Layer Deposition (ALD) Template Method

Highly ordered zirconia and hafnia nanotubes are prepared by Atomic Layer Deposition (ALD) within the pores of an anodic alumina oxide (AAO) template. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) are used to characterize the morphology and elemental compositions of the different and EDS mapping of the entire sample cross-section. The diameters of the AAO channels are in the range of 200 nm and thickness of 60 μm. The length and diameter of the hafnia and zirconia nanotubes are dependent upon the pore diameter, the thickness of the applied AAO template and the ALD deposition time. The results indicate that the tubes are very uniformly assembled and parallel to each other in the pores of the AAO template.