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Preparation and Ferroelectric Properties of Double-Scale PZT Composite Piezoelectric Thick Film

Dense and crack-free double-scale lead zirconate titanate (Pb(Zr0.52Ti0.48)O3, PZT) composite piezoelectric thick films have been successfully fabricated on Au/Cr/SiO2/Si substrates by a modified sol-gel method. The XRD analysis indicates that the thick film possesses a single-phase perovskite-type structure. The SEM micrograph shows that the surface is crack-free and the cross section is dense and clear. The thickness of the PZT thick film is about 4 μm. It also exhibits good ferroelectric properties, and has high direct current compression resistant properties. At the test frequency of 1kHz, the film has the coercive field of 50 kV/cm, the saturation polarization of 54 μC/cm2 and the remnant polarization of 30 μC/cm2.