{'fraction_non_alphanumeric': 0.017191977077363897, 'fraction_numerical': 0.0, 'mean_word_length': 5.99, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
An improved PSO algorithm and its application on model identification of coarse-stage in lithography machine

Lithography machine is a high-precision manufacturing equipment of electromechanical integration, involving precision machinery, precision control and measure, precision measurement and other subjects. PSO algorithm is easy to fall into local optimum, which has simple concepts and fast convergence. This paper proposes an improved PSO algorithm with adaptive parameters and boundary constraint, in ensuring accuracy of the algorithm optimization and fast convergence. Simulation results show that the methods have good applicability and stability for coarse-stage in lithpgraphy machine.