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On-Chip Electrochemical Analysis System Using Nanoelectrodes and Bioelectronic CMOS Chip

An electrochemical microanalysis system for reversible redox species determination has been presented. This system consists of a nanoelectrochemical sensor and a complimentary metal-oxide-semiconductor (CMOS) chip for sensor signal interfacing and conditioning. The nanoelectrochemical sensor is an interdigitated array nanoelectrode fabricated using e-beam lithography and ultraviolet lithography. The CMOS chip is designed and fabricated to realize the electrochemical analysis method of sensing, which is a switch-based method. Using this switch-based method, the potential dynamics of the nanoelectrodes is recorded to evaluate the species concentration. Experimental results have shown that the detection limit of this microanalysis system on reversible redox species is in the range of 1-10 nM