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Characterization of FeN nanocrystals and nitrogen bubbles in ( Ga , Fe ) N thin films using electron microscopy

Nanometric bubbles filled with nitrogen, located adjacent to FenN (n = 3 or 4) nanocrystals with in (Ga,Fe)N layers, are identified and characterized using scanning transmission electron microscopy (STEM) and electron energy-loss spectroscopy (EELS). High-resolution STEM images reveal a truncation of the Fe-N nanocrystals at their boundaries with the nitrogen bubbles. A controlled electron beam hole drilling experiment is used to release nitrogen gas from a bubble in situ in the electron microscope. The density of nitrogen in an individual bubble is measured to be 1.4 ± 0.3 g/cm. These observations provide an explanation for the location of surplus nitrogen in the (Ga,Fe)N layers which is liberated by the nucleation of FenN (n> 1) nanocrystals during the growth.