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Report on in-situ antimony fluoride generation for ion implant processes

The in-situ formation of antimony fluorides in a continuous flow reactor was investigated. Molecular fluorine was delivered from a VAC™ cylinder into heated reactor packed with antimony metal. The post-reactor pressure was monitored and effluent species were measured using IR and mass spectroscopic techniques. Complete fluorine utilization was achieved when operating at temperatures greater than 160°C. The data suggests that the antimony and fluorine reaction formed antimony (III) fluoride or SbxFy clusters with boiling points greater 250°C. The report also includes recommendations for implementing this technology for ion implant applications.