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An improved version of the Cox and Strack technique for contact resistivity measurement

In Cox and Strack's technique for measuring contact resistivity rho c, a small front contact is made to a thick substrate with a back contact of large area. Contact resistivity is determined by subtracting the 'spreading resistance' of the small contact from the total resistance measured between the contacts. A modified version of the method is reported here in which rho c is determined by measuring the resistance between small, closely spaced contacts formed on a thick, uniformly doped substrate. Under these conditions, the contact contribution to the overall resistance should be enhanced, and thus the potential for greater accuracy exists. In this altered method, the resistance between the contacts is related to rho c, bulk resistivity, rho B, and metal sheet resistance using numerical methods which treat three-dimensional geometric effects without approximation. Finally, an experiment with aluminium contacts to p-type silicon which demonstrates feasibility is reported.