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Valveless Micropumps with Dual Polyimide Diaphragms

Air-actuated valveless micropumps with dual polyimide (PI) diaphragms have been fabricated and characterized. A 5-μm-thick PI membrane was spin-coated on Si wafer, and released by Si ICP etching. The membrane was actuated by alternating air pressure of 10 kPa. The water flow-rate achieved 80 μl/min at the frequency of 1 Hz and 126 μl/min at 3Hz. Due to nice adhesion between Si and polyimide diaphragms, we could fabricate the double diaphragm micropumps with simplified fabrication processes.