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Improved methods to rescue TEM lift out failure samples

In situ lift out is a mature and well established technique for TEM sample preparation [1]. There are occasions though, when lift out fails, and the TEM lamella falls into the TEM trench during sample preparation. In a previous study [2], the lamella can be rescued through a series of steps involving welding, tilting, cutting free and rewelding the lamella onto a grid or die. In this paper, we detail improved methods with reduced steps to rescue lamellas that have fallen into the trench at various tilt angles. The optimized steps have a shorter turnaround time and can be easily adopted by less experienced sample preparation analysts. This is important with the continual drive towards improved success rates and shorter cycle times in failure analysis work.