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Mechanical Characterization of Benzene cyclobutene (BCB) Used in Cu/polymer Hybrid Bonding

Three mechanical properties of Benzo cyclobutene (BCB) are characterized. The effective cure shrinkage is measured by an optical strain sensor called fiber Bragg grating (FBG) embedded in a cylindrically shaped specimen. Conventional DMA testing is conducted to determine the temperature-frequency dependent storage modulus. Young's moduli master curve is constructed by shifting the frequency dependent data and shift factors are obtained. Finally, hydrostatic testing is conducted to determine bulk modulus.