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Immobilization of Probe DNA on Ta2O5 Thin Film and Detection of Hybridized Helix DNA using IS-FET

We demonstrated developments of a non-labeling DNA (deoxyribonucleic acid) sensor by using a commercially available ion-sensitive field-effect transistor (IS-FET). A single strand DNA was immobilized on a Ta2O5 thin film on a gate electrode in the IS-FET, and the surface of the thin film was confirmed by XPS measurements. The results indicated that the DNA was immobilized on the Ta2O5 thin film. To detect the hybridization of DNA, we carried out measurements of Idrain-Vgs properties of IS-FETs immobilized by ss-DNA and ds-DNA hybridized by complemental target DNA. Then, the difference in threshold voltage was evaluated to be about 10 mV, and the amount of immobilized DNA as 6.3×107 [molecules/cm2]. Consequently, the non-labeling IS-FET DNA sensor is expected to be a novel measurement tool for diagnosing diseases.