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Theoretical Analysis and Experiment of A Novel Dep Chip With 3-D Silicon Electrodes

This paper presents a novel dielectrophoresis (DEP) device where the DEP electrodes define the channel walls. This is achieved by fabricating microfluidic channel walls from highly doped silicon so that they can also function as DEP electrodes. Compared with planar electrodes, this device increases the exhibited dielectrophoretic force on the particle, therefore decreases the applied potential and reduces the heating of the solution. A DEP device with triangle electrodes has been designed and fabricated. Compared with the other two configurations, semi-circular and square, triangle electrode presents an increased force, which can decrease the applied voltage and reduce the Joule effect. Yeast cells have been used to for testing the performance of the device.