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Electrical characteristics of plasma sheaths in transformer-coupled toroidal discharges

The technology of transformer-coupled toroidal discharges has grown to become a key element of the semiconductor industry, especially in applications such as remote chamber cleaning and remote generation of reactive gases. We present a simple model that describes the temporal variation of voltage and current across the sheath and along the chamber in conductive and dielectric vessels. The good agreement observed between the model predictions and experimental data from argon discharges shows that the model succeeds in capturing the essential aspects of the interaction between the plasma and the walls. The model predicts that the potential difference between plasma and chamber wall changes linearly with the position along the toroid. As a result, during the peak of RF voltage the electron current from the plasma is concentrated on one side of the dielectric gap. On the other hand, the ion current to the wall is uniformly distributed along the chamber, but the ion energy is highest at the opposite side of the gap from where the electron current is concentrated.