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Micro-patterning of porous alumina layers with aligned nanopores

Arrays of nanoporous microfeatures of alumina are demonstrated via isotropic chemical etching of commercially available nanoporous alumina substrates. Etch rates are established for four morphologies of aligned nanopores having pore sizes in the range 20–220 nm and porosities from 30–60%. Parametrically varying etch conditions yields a process for creating microfeatures over large areas which is used to create a 384 porous tip array at a pitch of 70 µm with the 200 nm porosity.