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Effect of substrate position on Structural, Morphological, and optical properties of reactively sputtered ZnO thin films

In this work, we have investigated the structural, morphological, and optical properties of ZnO thin films by placing the substrate at different locations of the substrate holder. ZnO thin films were grown on glass substrates by reactive radio frequency (RF) sputtering at 100W. Structural results obtained from XRD revealed that ZnO thin films were grown along (002) plane. Morphological studies showed that films were formed from nanograins of ZnO. Optical measurements in the UV-vis region presented an average transmittance >90%.