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Application Of Confocal Beam Scanning Microscopy To The Measurement Of Submicron Structures

Confocal laser microscopy extends the applicability of optical methods to sub-micron structure measurements. A beam scanning system developed by Heidelberg Instruments GmbH is presented. The contribution includes a detailed comparison between beam scanning and object scanning microscopes. A number of practical applications of the beam scanning system in the field of biology and integrated circuit metrology are presented.