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Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas

An advanced robust probe called opto-curling probe (OCP) is presented, which enables the simultaneous monitoring of electron density and optical emission of reactive plasma. The electron density is obtained from the microwave resonance frequency of a small antenna set on the probe surface while the optical emission spectra are observed through an optical fiber tip located at the probe surface. The ratio of the measured optical emission intensity to the electron density readily provides the radical density without relying on actinometry. The usefulness of OCP was experimentally demonstrated in the oxygen plasma cleaning of a carbonized wall with endpoint detection.