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Effects of Metal-Plasma Source Ion Implantation on Tribological Properties of a DLC Film

Abstract. Effects of ion implantation on tribological properties of a DLC film as a function of ion doses and implanted energies we investigated. Ti ions were implanted on the Si-wafer substrates followed by DLC coating using an ion beam deposition method. The roughness of DLC films on the ion implanted surface was measured by an Atomic Force Microscope (AFM). In order to study tribological properties of the DLC film, we used ball-on-disc type apparatus in the atmospheric environment. From results of wear test, friction coefficient was more stable below 0.1 as increasing ion implanted energies and ion doses.