{'fraction_non_alphanumeric': 0.016908212560386472, 'fraction_numerical': 0.0024154589371980675, 'mean_word_length': 5.287878787878788, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
A single-chip CMOS resonant beam gas sensor

A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes beam resonance frequency. The limit of detection is 1 ppm for toluene.