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LMM and LVV Auger Electrons Induced by Ar+ Ion Impact on a Si Surface

The Auger electrons induced by keV Ar+ -ion impact on a Si surface were studied. The spectral dependences on the Auger electron emission angle, the incident Ar+ ion energy and the oxygen partial pressure during ion bombardment were investigated in detail. As a result, the difference in the energy dependence between atomic-like peaks and a bulk-like peak was clarified. The chemical shift of the bulk-like peak was observed. A buried peak was revealed by diminishing the large background of the bulk-like peak.