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Levitation Control of a Planar Magnetic Levitation Stage Based on Improved Auto-Disturbance Rejection Controller

In the present study, we proposed a magnetic levitation positioning stage for the high-precision positioning and scanning tasks in micro-electronics manufacturing and precision machining. This stage consists of a thrust system and a levitation system, the latter is a strong-coupling and nonlinear MIMO system related closely to both levitation height of each terminal magnetic bearing and instantaneous plane location of the movers and is focused on in our study. The dynamic model of this levitation system is so complicated that it is very difficult to obtain an ideal control accuracy and robustness by linear control theory, therefore, an improved auto-disturbance rejection controller was designed to realize decoupling and disturbance rejection and overcome the rough characteristics of traditional auto-disturbance rejection controller. The simulation and experiment showed that the performance of improved auto-disturbance rejection controller is superior to the traditional auto-disturbance rejection controller and with a better dynamic，static and robust performance.