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A test chip for ISFET/CMNOS technology development

A dedicated test chip has been designed and fabricated for assessing the compatibility of the ISFET (Ion Sensitive Field Effect Transistors) and CMNOS (Complementary Metal gate Nitride Oxide Semiconductor) technologies, in order to develop an ISFET/CMOS fabrication process. The test chip contains three sets of test structures dedicated respectively to the evaluation of the sensor performances in terms of electro-chemical characteristics, to the extraction of the CMNOS process/design (e.g. SPICE) parameters, and to the characterisation of basic analogue integrated circuit blocks for the on chip interface electronics. By using this technology single chemical sensors, arrays sensors and multi-sensors with on-chip signal conditioning for environmental and biomedical applications are currently under development in our laboratory.