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Dynamics of electrostatic inchworm motors for silicon microrobots

We present work on characterizing the speed of electrostatic actuators for applications in microelectromechanical systems (MEMS) based microrobotics. The actuators are based on electrostatic gap closers working in an inchworm motor configuration and fabricated in silicon. Measurements are taken using sidewall contacts on the gap stops of our devices. We have shown that our electrostatic gap closers can operate over a full cycle within 57μs, corresponding to an operational frequency of 17.5kHz. Using similar electrical sidewall contact measurements in the motors, we can measure the speed of the motor shuttles. By operating the gap closing actuators at 8kHz the inchworm motor shuttle can approach speeds over 30mm/s, over 6 times what has been previously reported using optical measurements.