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A Novel High-Speed Dimensional Inspection Method Using Bilateral Vibration Touch Probe

Abstract In this paper, a novel measurement method to obtain three-dimensional shapes is proposed based on use of a bilateral vibration touch probe that outputs feedback voltage in accordance with its position. Measurement with high precision and rapid speed is realized by the probe. The probe has high rigidity with a simple structure. It can therefore move with high acceleration. In addition, a dimensional inspection can be performed by measuring several characteristic points, and a measurement of the characteristic points is used to shorten the measurement time, where it is assumed that rough positions of the characteristic points are provided. A new method using the probe of dimensional inspection is proposed, and the effects are shown based on experimental results.