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Largest in the world bimorph deformable mirror for high-power laser beam correction

The deformable mirror with the size of 410x468 mm controlled by the bimorph piezoceramic plates and multilayer piezoceramic stacks was developed. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack-Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of 0.033 μm (RMS). The possibility of correction of the aberrations in high power lasers was numerically demonstrated.