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IMPLEMENTATION OF AN AUTOMATED INTERFACE FOR INTEGRATION OF TCAD WITH SEMICONDUCTOR FABRICATION

The structure and systematics of automated transfer of semiconductor fabrication process data into a Technology Computer-Aided Design (TCAD) framework are described in detail. The main stages of semiconductor fabrication from design to the final product are identified and outlined. Based on this system the TCAD framework is mirrored to reflect the functionality and behavior of the fabrication system as closely as possible. The structure of the necessary interfaces for this integration is described. The implementation of this system is explained and a couple of examples of the resulting framework are given. The resulting benefits from this approach are discussed.