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Integrated Parallel Flow Cytometry Device with Time Gated Spads

In this paper, we demonstrated parallelized detection of fluorescent microbeads flowing in multiple microfluidic channels coupled with an array of single photon avalanche diodes (SPADs). A complementary metal-oxide-semiconductor (CMOS)-integrated circuit (IC) containing an SPAD array was used for time-domain separation of fluorescence photons from excitation photons using fast gating and active quenching circuits to realize parallelized detection of fluorescence signals without complex microscopy and optical filters. The system can be used for the development of a parallelized flow cytometry system.