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Advancement of Hard X-ray Nano-focusing Ellipsoidal Mirror at SPring-8

Ellipsoidal mirror optics can produce a smaller, two-dimensional focus with diffraction-limited properties than is possible when using mirror optics in Kirkpatrick–Baez (K–B) geometry [1]. This is because ellipsoidal focusing mirrors can be designed such that they have a larger numerical aperture in the sagittal focusing direction as compared to that in the meridional focusing direction. Although ellipsoidal focusing mirrors have this crucial advantage over K–B optics, K–B optics are widely utilized as micro-/nano-focusing devices [2–8] in synchrotron radiation facilities and X-ray free electron laser facilities [9, 10]. Figure 1 shows a schematic of focusing mirror optics; Figure 1(a) shows the ellipsoidal mirror and Figure 1(b) the K–B mirror arrangement. In K–B geometry, two mirrors with a one-dimensionally curved surface, such as an elliptical cylinder, are orthogonally arranged in tandem to reflect and focus light independently in a direction perpendicular to each other under grazing-incidence conditions. Ellipsoidal focusing mirrors, which can generate a two-dimensional focusing beam by a single reflection, have a highly sloped surface with a two-dimensional aspherical shape, when compared to elliptical-cylinder mirrors that are used for line-focusing in K–B geometry. In addition, surface shapes of nano-focusing mirrors must be fabricated with nanometer-level accuracy. Therefore, fabrication of ellipsoidal nano-focusing mirrors is extremely difficult. There are no reports on ellipsoidal nano-focusing mirrors in the hard X-ray region with superior performances to provide diffraction-limited beams.