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Off-axis chromatic scanning confocal electron microscopy for inelastic imaging with atomic resolution

The development of electron-optical techniques for geometric and chromatic aberration correction have significantly improved the spatial resolution of transmission electron microscopy (TEM) and enhanced its capability for chemical mapping [1]. In the present work, we develop an off-axis confocal mode in a scanning transmission electron microscope (STEM) which uses the intrinsic chromatic aberration of the imaging lens system to enable fast imaging with inelastically scattered electrons without using a spectrometer [2]. Furthermore, the off-axis confocal configuration opens the possibility of obtaining depth-sensitive inelastic images for 3D imaging [3, 4].