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Silicon based integrated hollow waveguide for gas sensing applications

Gas sensors are crucial instruments for different industries and air quality monitoring. Micro-electro-mechanical system MEMS technology was proved as a solution for reducing the cost and size of spectrometers. Building gas cells with same technology enables the whole integration of the whole sensor. We present an HWG, as an example for integarted gas cell, which is fabricated on the silicon wafer using the MEMS technology. The HWG length is 2 cm long. The insertion loss of the HWG was measured. Carbon dioxide from exhaling and butane were measured using the HWG in conjunction with the MEMS based spectrometer. This proves the applicability of such HWG for portable gas sensors.