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MEMS accelerometers and their bio-applications

In recent years, MEMS accelerometers have found widespread use in health monitoring applications. In this paper, we demonstrate two designs for their use in Bio-MEMS applications. First, a high resolution 3-axis accelerometer based on [1] is presented for the monitoring of an infant's heart rate and ultimately for the detection of the Sudden Infant Death Syndrome, the leading cause of death among infants up to one year of age. In the second part of the paper, a low-g accelerometer has been designed and simulated for its use in a telemetric device similar to [2]. This accelerometer is used for sensing and monitoring micro-movements which are induced by an actuator for faster bone fracture healing. In this study we present our numerical results for the design of both accelerometers. COMSOL Multiphysics software is used to design and simulate the two accelerometers. The results show the potential use of these two devices.