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Simple and efficient technique for evaluating the optical losses from surface scattering and volume attenuation in a thin film.

We present a simple and efficient technique for evaluating the optical losses of a planar film by use of a quasi-waveguide configuration and a prism film coupler configuration. The technique can separate two contributions to optical loss: that from the surface scattering caused by the roughness of surface and that from volume losses including volume scattering and volume absorption.