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Contrast-to-gradient method for the evaluation of image resolution taking account of random noise in scanning electron microscopy.

We have taken random image noise into consideration in the contrast-to-gradient (CG) method for the evaluation of image resolution R in scanning electron microscopy (SEM). When looking at the local fine pattern in the SEM micrograph containing much random noise, viewers gradually expand the region of interest (ROI) to improve the signal-to-noise ratio (SNR) and to recognize the pattern. We employed this approach in the CG algorithm to evaluate potential resolution Rpot, which is defined as the minimal/most accurate CG resolution calculated in the ROI expanding process. The image noise or SNR also is evaluated by the parameter deltaR / R, where deltaR is a standard deviation of R. The Rpot values depending on SNR are useful for comparison among images containing different random noise.