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An imprinted polymer-based guided mode resonance grating sensor

In this paper, different guided mode resonance (GMR) grating sensors are studied with the focus on investigating the possibility of high-performance configurations with simplified and potentially low-cost fabrication methods. The gratings are fabricated in polymer using nano-imprint lithography (NIL). We have chosen Ormocer materials, as they allow fabrication at room temperature, are UV patternable and have good optical and dielectric properties. The GMR gratings have a pitch around 550 nm, which corresponds to a resonance response around 850 nm with a Q factor of 2200 in simulations. In experiment, gratings imprinted on glass and on foil are characterized, showing a successful imprinting process of both devices. The measured optical response of the GMR grating for a change of the refractive index unit (RIU) of the cover (Δλ=Δnc) is 100 nm/RIU. The measured temperature sensitivity is -0.07 nm/K.