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On measuring variability and its effect on sensitivity of coupled nano/micro resonators

We utilise an inverse eigenvalue analysis technique with perturbation analysis to characterise the sensing performance of two coupled MEMS resonators under manufacturing variability. The analysis derives the operating point, sensitivity, linearity, and mass resolution of the experimentally observed performance of an array of two resonators for both eigenfrequency and eigenvector sensing techniques. It is observed that eigenvector sensing is more prone to fabrication errors than eigenvalue and the sensitivity principally depends on the coupling string variability.