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Measurement of optical near field of a nanoscale aperture

Nanoscale apertures, especially high transmission nanoantennas, have been shown to have great potential for nanolithography as well as near-field measurements. This paper describes a method for mapping the near-field distribution as a function of distance from the aperture surface. The measurements are performed using a home-built near-field optical microscopy (NSOM) with home-made aperture probes. The force distance curve is used to determine the tip-sample distance. The calibrated NSOM system is then used to correlate the collected near-field optical distribution data with the distance from the surface. The in-plane optical images are obtained at a constant height by turning off the vertical position feedback. The experiment results show that this is a potential method to obtain three dimensional optical measurements of nano structures.