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THz structures fabricated in laser direct patterning

In this paper two different methods of the manufacture of metamaterial structures using a laser treatment were presented. One of them is related to direct metallization of the surface of aluminum nitride ceramics (AlN) by interaction of laser radiation. The second method involves a process of selective removal of the conductive layer (silver) in the laser ablation process. It has been proved that both proposed methods allow to produce a structure of SRR type showing its properties in THz range. Obtained results allow to implement these methods for the manufacture of more complex structures. An advantage of the process of laser radiation interaction on the surface of a material is the ability to produce any shape without having to adapt further process components.