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Advanced Technology Processes for Manufacturing of SnO2 and NiO-Based Gas Sensors and Their Properties

A novel wafer level and fully CMOS-compatible spray pyrolysis manufacturing process for SnO2-based gas sensors was developed. SnO2-sensor families making use of different additional nano materials like Au, Pt and Pd and combinations of them applied to the sensor surface were manufactured. The sensors were exposed to specific gases like CO, CO2 and volatile organic compounds (VOCs) for sensor array characterization according to an application for climate control in rooms as defined in the IOSENSE project. In addition, sputtered NiO sensors exhibited very good long time stability and they reached the best results at 200°C when the relative sensitivity was in the order of 104.