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Gauge and differential pressure transducers with monolithic integrated silicon piezoresistive sensor-for an extensive temperature range

The basic structure, configuration and design of a gauge and differential pressure transducers with a monolithic integrated silicon piezoresistive sensor is proposed for an extensive temperature range from -60/spl deg/C to 125/spl deg/C. The microelectronic technology of a monolithic silicon sensor with the special compensation integrated network is described. The main metrological characteristics of pressure transducers are presented.