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Evolution and removal of surface scratches on fused silica under magnetorheological finishing

Abstract. Magnetorheological finishing (MRF) is usually used to remove subsurface defects (SSD) of workpieces to improve the laser-induced damage threshold due to its low stress. Although MRF has been widely used to remove surface defects and SSD, the evolution and removal mechanism of surface scratches under MRF have not been fully elucidated. A systematic study is conducted on the scratch removal process and removal ability of MRF. First, an experimental study on the removal of scratches with different depths is carried out, and the effect of the scratch depth on the removal efficiency is analyzed. Second, when the scratches are removed, the processing is performed in two directions: parallel and perpendicular to the scratch. Thereby, the relationship between the scratch removal efficiency (SRE) and the processing direction is analyzed. Finally, based on the scratch removal process and mechanism, an innovative method for efficient scratch removal using a sacrificial layer is proposed. The effectiveness of this method is verified by experiments. This method can significantly improve the SRE of MRF.