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Fatigueless Ferroelectric Capacitors with Ruthenium Bottom and Top Electrodes Formed by Metalorganic Chemical Vapor Deposition

Ferroelectric Ru/Bi4-xLaxTi3O12/Ru capacitors were fabricated by combining metalorganic chemical vapor deposition (MOCVD) of top and bottom Ru electrodes and spin-coating of the ferroelectric film. After optimization of the deposition conditions, good ferroelectric properties (2Pr=18 µC/cm2, Pr: remanent polarization) and low leakage current density (2×10-6 A/cm2) were achieved. No significant fatigue phenomenon (decrease of Pr) was observed even after 1010 switching cycles.