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Classification of Inhomogeneities in Hydrogenated Amorphous Silicon

This paper presents studies of medium range order (MRO) of a-Si:H by small-angle X-ray scattering (SAXS) measurements. Device-quality a-Si:H films prepared by different preparation methods show differences in thermal evolution characteristics of hydrogen and scaling features in SAXS spectra. This suggests that a-Si:H can have several kinds of microstructures, and can therefore be classified by MRO.