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Preparation of (100)- and (111)-Textured Pb(Zr,Ti)O3 Piezoelectric Films and Direct Measurement of Their Piezoelectric Constants

A novel bending method is proposed to measure the piezoelectric constant e31 of piezoelectric thin films, in which strain and strain-induced charges are recorded simultaneously using a strain gauge and a charge integrator. Two kinds of lead zirconate titanate (PZT) films with (100) and (111) textures were prepared using the sol-gel process and their e31 was measured using the proposed technique. Reasonable e31 values of -6.0 and -6.9 C/m2 were obtained for the cross-plane-poled films with (100) and (111) textures respectively, whereas both as-deposited films exhibited the same low e31 of -0.2 C/m2.