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Polarization properties of multilayers in the EUV and soft x ray

The calculated performance of multilayer interference structures used as reflection linear polarizers and transmission phase retarders as a function of photon energy range in the EUV/soft-x-ray is considered, as is the effect of certain imperfections on performance. These devices most effectively produce linear and circular polarization over at least the 50 to several hundred eV range. The degree of linear polarization produced with reflection polarizers is quite high and increases with energy, although throughput decreases with increasing energy. The amount of phase shift produced by transmission retarders is very sensitive to structural imperfections and decreases rapidly with increasing energy over this range.