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Study on Driving Technology of Piezoelectric Solid-State Micro Gyroscope

In order to compensate the noise brought by piezoelectric gyroscope or external environment and track the resonance frequency, Closed Loop Driving Circuit (CLDC) of piezoelectric solid-state micro gyroscope is proposted in the paper which will stabilize the driving voltage value and keep the resonance frequency tracked. CLDC mainly contains Phase Lock Loop (PLL) circuit, Automatic Gain Circuit (AGC). Experimental results show that the fluctuation of reference voltage is within ±7mv, while the fluctuation of reference voltage in Open Loop Driving Circuit (OLDC) without noise compensation is ±23mv. The frequency of CLDC drifts within 0.03 kHz with the resonance frequency of 357.9 kHz while the OLDC can’t track any drifting.