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Formation of Micro-bumps on the Surface of Densified Silica Glass by CO Laser Irradiation

Structural relaxation has been performed on the surface of high-pressure densified silica glass by the CO laser beam irradiation. Micro-bumps with Gaussian shape were formed on the glass surface after the laser irradiation. Micro-bumps were successfully arrayed at an interval of 25 µm. This demonstrates us a novel method to produce micro-lens array.