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Quartz enhanced photoacoustic leak sensor for mechatronic components

We report the first demonstration of a leak sensor based on a mid-IR quartz-enhanced photoacoustic (QEPAS) spectroscopic technique. A QEPAS sensor was integrated in a vacuum seal test station for mechatronic components. The laser source is a quantum cascade laser emitting at 10.56 μm, resonant with a strong absorption band of sulfur hexafluoride (SF6), which was selected as target gas for leak detection. The minimum detectable concentration of the QEPAS sensor is 6.9 ppb with an integration time of 1 s. This detection sensitivity allowed to measure SF6 leak flows as low as 3x10-5 standard cm3.