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Hydrophone with hydrothermally deposited lead zirconate titanate poly-crystalline film on titanium film as acoustic receiving surface for estimation of high power acoustic field by HIFU

It is difficult to use conventional hydrophones for measurement of high power ultrasound with acoustic cavitation by high intensity focused ultrasound (HIFU), because a front electrode of a piezoelectric element in conventional type hydrophone was decorticated by acoustic cavitation and high sound pressure. We fabricated new toughness type hydrophones using titanium membrane acoustic receiving surface and hydrothermally synthesized lead zirconate titanate film for measurement of HIFU. We measured the acoustic field distribution (sound pressure distribution) by HIFU equipment (Frequency: 1.6 MHz). Acoustic power of HIFU is setting from 10 to 250 W. Our new type hydrophone by using for HIFU equipment could receive high intensity focused ultrasound without broken.