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Construction of Larger Area Density-Uniform Plasma with Collisional Inductively Coupled Plasma Cells

The plasma density and electron temperature of a multi-source plasma system composed of several collisional inductively coupled plasma (ICP) cells were measured by a double-probe. The discharges of the ICP cells were shown to be independent of each other. Furthermore, the total plasma density at simultaneous multi-cell discharge was observed to be approximately equal to the summation of the plasma density when the cells discharge separately. Based on the linear summation phenomenon, it was shown that a larger area plasma with a uniform density and temperature profile could be constructed with multi-collisional ICP cells.