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High Accuracy Measurements Using a Scanning System with a Single Point Triangulation Sensor

Abstract: The capabilities of non-contact laser spot triangulation sensors for high accuracy measurements have slowly increased over the past decade, and now have usable resolution below 0.1 μm. The Dimensional Metrology Group at the National Institute of Standards and Technology (NIST) has developed a simple scanning system to work with these sensors, and presents the system details and data from a variety of geometries. The features measured include screw threads, fuel cell channels, and computer tomographic (CT) scanner phantoms.