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Measurement of Ion Temperature in Electron Cyclotron Resonance Plasma

Ion temperatures parallel and perpendicular to an applied magnetic field are measured in electron cyclotron resonance (ECR) plasmas under a divergent or a mirror magnetic field configuration using a directional analyzer. The temperatures obtained as a function of gas pressure are found to be low (0.2∼0.5 eV) and are compared with those measured by optical emission spectroscopy of Doppler profiles. The temperatures perpendicular to the magnetic field from the two different methods agree well for both magnetic configurations. The reliability of the measurement using the directional analyzer is discussed considering the ion motions in the sheath in front of the analyzer and in the magnetic field.