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3D microscope using diffraction grating

An optical microscope has been adapted for 3-D inspection of small capillaries in thread spinnerets by placing a diffraction grating between the microscope objective and the specimen. We show how a grating was specified using a quantitative analysis of groove spacing and geometry. An illumination system was specified based on incident angle and light wavelength. Specimens are placed on a robotic stage for positioning, and repositioning affords multiple perspective views of the target depending upon the diffraction order visible to the objective.