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Parametric evaluation of shear sensitivity in piezoresistive interfacial force sensors

A three-axis load detector has been designed and manufactured utilizing four piezoresistive sensors on a flexible silicon membrane. The detector was prototyped using bulk microfabrication techniques on a single-crystal silicon wafer and was designed to detect normal and shear loadings applied to the membrane. Finite element analysis and experimental calibration methods have been used to determine the shear and normal sensitivity values. Device parameters were modified with emphasis on increasing the absolute shear to normal sensitivity ratio of the sensors without reducing their ultimate strength. It was determined that the shear to normal sensitivity ratio greater than 0.5 would allow detection of shear loads considering experimental error present. For devices with square membranes having 1000 µm edge lengths and 65 µm thicknesses, this amount of shear sensitivity was achievable using a mesa with a height of at least 150 µm.