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An Ultrasonic Micro Knife Based on Triangular Silicon Horn Chip

This paper presents a silicon-based ultrasonic scalpel for minimally invasive surgery. Starting from the fundamental theory, the micro ultrasonic scalpel using triangular silicon horn chip is designed and fabricated in detail. It is found that the magnification of the composed horn keeps 5.8 when size changes. A micro scalpel has been fabricated by MEMS technology. The test results show that a good performance in vibration and fit for puncturing biological tissues at the micro/nanoscale are obtained in the micro ultrasonic scalpel.