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Compositional modification of Pb-BASED ferroelectric thin films in chemical solution processing

Abstract Pb(Zr0.5Ti0.5)O30.5Pb(Zr0.5Ti0.5)O3-0.5Pb(Mg1/3Nb2/3/)O3 were prepared on the Pt-passivated substrates using a modified chemical solution. Modified methoxyethanol route including propyleneglycol and water based solvent and chelating agent was adopted to prepare a homogeneous multi-components solution precursor and stable solution for preparation of the thin films. Differential thermal analysis showed that the pyrolysis behavior of the films depended on the type of the chelating agent employed. The triethanolamine (TEA)-derived films were characterized at higher pyrolysis temperature than that of the acetylacetone (AcAc)-derived films. Several of these films with different compositions were studied to determine the effect of composition on crystallization, microstructure and dielectric properties.