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Comparison of a hybrid model with experiments in atmospheric pressure helium and argon capacitive rf discharges

Atmospheric pressure radio-frequency (rf) micro-discharges have many applications in bio-medical and materials processing. We benchmark our current-driven two-temperature hybrid model that includes sheath and electron multiplication effects, by comparing the model results with previously found experimental results. We use more than one electron secondary emission coefficient in the comparisons, as that quantity is particularly important in determining the α–γ mode transition. For helium discharges we explore the effect of trace amounts of nitrogen, which can significantly modify the results and may be present in some experiments. For argon, we explore gas heating effects. For all experiments the main comparison is with the current and voltage values at the onset of the discharge and at the transition from the α to γ mode. Variation with frequency is also explored when a particular experiment allowed. These comparisons give mostly good agreement, indicating that our hybrid model can mediate between results from different experiments that seem in conflict due to varying conditions.