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Experiment of the MEMS Wind Sensor Based on Temperature-Balanced Mode

In this paper, the wind sensor operating on temperature-balanced mode is investigated. The temperature of four modules is kept as a constant higher than that in the center of the chip. Hence, the wind speed and direction can be characterized by the heating power of the modules. The wind sensor is fabricated on the ceramic substrate, and Ti/Pt is used as heating and sensing resistors. The experiment demonstrates that the power of four modules increases with the wind speed according the King’s law. The total power consumption is about 250 mW@20m/s and 320 mW@40m/s The calibrated results show that the speed varies from 0.2 m/s to 40 m/s with the error of 1 m/s and the direction spans from 0° to 360° with the error of 5°.