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Design and Control of a Spatial Micromanipulator Inspired by Deployable Structure

This article proposes the design, analysis, and experimental tests of a novel piezoelectrically actuated micromanipulator with spatial structure. Three-stage amplification is employed to amplify input displacement to obtain desired output displacement, and deployable mechanism is adopted to achieve compact structure. The spatial micromanipulator is designed with two fixed fingers and two detachable fingers, which can achieve multioperation modes. Theoretical analysis is utilized to evaluate the characteristics of the micromanipulator. Prototype of the micromanipulator is fabricated and experimental tests are carried out to investigate its performance. The results indicate the motion stroke is 125 μm with respect to 100 V voltage, the amplification ratio is 10.84, and the coupling rate is 4.32%. Close-loop test results show that the settling time is 23.5 ms with 2.8% overshoot, and the resolution can reach 0.1 μm. Finally, the developed micromanipulator is used to operate tiny objects with differentshapes.