{'fraction_non_alphanumeric': 0.013136288998357963, 'fraction_numerical': 0.0016420361247947454, 'mean_word_length': 5.161616161616162, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
A film bulk acoustic resonator in liquid environments

A highly sensitive film bulk acoustic resonator (FBAR) mass sensor in liquid environments is described in this paper. A transmission line model is used to theoretically predict the dependence of the FBAR's resonant frequency on added mass. FBAR performance in a liquid environment is experimentally characterized for the first time and the effects of the liquid nature and conductivity on the FBAR series and parallel resonant frequencies are investigated. A TiO2-coated FBAR is developed for sensitive mass sensing of metal ions in a liquid environment.