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Amplitude Amplified Dual-Mass Gyroscope: Design Architecture and Noise Mitigation Strategies

This paper presents our latest test results of an amplitude amplified dual-mass MEMS gyroscope. We discuss the effects of quadrature errors, parasitic capacitance, and frontend components on gyroscope's performance. Three mitigation strategies were utilized, including (1) precision electrostatic frequency tuning to reduce quadrature errors and to compensate for imperfections; (2) increased sensing capacitance to boost Signal-to-Noise Ratio (SNR); (3) a custom low-noise front-end electronics with balanced and differential pick-off channels to improve SNR and reduce noise. A performance of 0.09 deg/hr in-run bias stability and 0.0096 deg/rt-hr Angle Random Walk (ARW) were reported in the paper.