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Robust design of a tuning fork vibratory microgyroscope considering microfabrication errors

In order to reduce the influence of microfabrication errors on the design performance of a tuning fork vibratory micromachined gyroscope, and to enhance the performance robustness in the volume production environment, the limited key parameters with great influences on the fabricated performance stability are taken as the design variables at first, and then the constraint conditions of dimension, modal performance and mode-based microfabrication sensitivity are profoundly analyzed, the mathematical model of the robust optimization of micromachined gyroscope is correspondingly established. The dimensional structural parameters of the microgyroscope are finally optimized by the first-order perturbation technology and genetic algorithm without knowing detailed statistical information on the uncertainties of dimension/performance of micromachined gyroscope in advance.