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Design and fabrication of optofluidic sensor with double-layered metal nano-grating

We propose and experimentally demonstrate an optofluidic refractive index sensor based on surface plasmon resonance with a figure of merit (FOM) reaching 20 in fluids at oblique incidence. The device consisting of a dielectric nano-grating sandwiched between double-layer gold stripes. A finite difference time domain (FDTD) method is employed to understand the optical properties and determine appropriate device parameters. The double-layered metal nano-grating (DLMNG) is fabricated by combining two beam interference lithography and electron beam evaporation deposition. A refractive index sensitivity of more than 560 nm/RIU is obtained using an optimized structure. The simple optical configuration of the DLMNG with high refractive index sensitivity make it possible for optofluidic sensors to be a promising candidate as a functional optical component in label-free biomedical sensing and integrated microfluidic chips.