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Optical monitoring of vitreous films: structure and composition

A method of structure analysis of vitreous films is proposed, which enables us to obtain the information on the kinds and concentrations of the main structural components of the material, and to create the statistical picture of the most probable arrangement of the atoms in film lattice. The method is based on the computer analysis of the shape of IR-absorption spectrum. The capabilities of the method are demonstrated on the example of structure analysis of amorphous silicon-oxygen phase.