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Mass Sensor Based on Thin Film Bulk Acoustic Resonator

A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor’ S11and Q factor are evaluated.