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Peculiarities of x-ray scattering by thin-film roughness

The expression for X-ray scattering diagram by thin film roughness is obtained and analyzed in the perturbation theory approximation. Specific features of X-ray scattering are discussed which have no analogs in X- ray scattering from a single surface and are caused by the interference effects. These are: oscillations of X-ray scattering diagram, the lack of X-ray scattering from external film surface, and interference suppression (up to some orders) of X-ray scattering intensity.