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Optical Coherence Domain Mid-infrared Spectroscopy

The infrared spectroscopy is widely used as an analysis method of the chemical today. On the other hand, the technology that enables structural information acquisition in compound quality by OCT (Optical Coherence Tomography) develops, too. In this research, it aimed to develop measurement technique of non destructive and non contact of three dimension structure in a new technique for combining these. The measurement system was constructed by using low coherence light source and Michelson interferometer for the verification of principle, and in this thesis, it is a model sample in a known multilayer structure was used and examined. As a result, the possibility of obtaining the location information and element information on each level of model sample was able to be shown. It will aim at a three dimensional mapping in the future and it aims at doing qualitative and quantitative fault image measurement system achievement, and the application is developed