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Investigations into Matrix-Addressable VCSEL Arrays 65 Investigations into Matrix-Addressable VCSEL Arrays

We report on fabrication and characterization of densely packed top-emitting 16× 16 elements wire-bonded matrix-addressable vertical-cavity surface-emitting laser (VCSEL) arrays, which may find future applications such as non-mechanical particle movement with optical multi-tweezers, confocal microscopy or free-space communications with beam steering capability. The factors that control packing density such as layer structure, mask design and VCSEL processing are investigated aiming to minimize the pitch between VCSELs in the array.