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RUBBER-COUPLED ACOUSTIC MICROSCOPY FOR INDUSTRIAL APPLICATIONS

This paper reports the rubber-coupled acoustic microscopy technique for cyclic inspection of industrial products in dry manner. Four kinds of rubber membranes are fabricated, and the ultrasonic transmission into the acrylic resin targets via the membrane/target interfaces, where the pressure of about 0.1 MPa is applied for improving the acoustic coupling at the contacting interfaces, is carried out. In practice, the cyclic acoustic imaging of electronic devices is demonstrated via the selected rubber membrane.