{'fraction_non_alphanumeric': 0.013636363636363636, 'fraction_numerical': 0.004545454545454545, 'mean_word_length': 4.954954954954955, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Design, Fabrication and Testing of Laterally Driven Electrostatic Motors Employing Walking Motion and Mechanical Leverage


 This paper describes the design, fabrication and testing of laterally driven linear electrostatic micromotors. The motors employ mechanical leverage with the aim to increase the force from the order of 1 μN up to the order of 0.1 mN, in combination with walking motion to increase the stroke to virtually unlimited. Three designs have been made and tested. Although walking motion has been shown to be feasible in MEMS technology, improvement of the clamping is needed to benefit from the use of levers to increase the generated force.