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Design and analysis of FEM based MEMS accelerometer for detection of postural tremor in Thyrotoxicosis

This paper reports the design and simulation of FEM based MEMS piezoresistive accelerometer used in a strap-down inertial measurement unit (IMU) for detection of postural tremor in Thyrotoxicosis. A square proofmass with four flexures is used in this design. Eight piezoresistors are implanted for sensing the maximum stress and they are connected in the form of a wheatstone bridge with each arm containing two piezoresistors. This type of arrangement minimizes cross axis sensitivity and provides a sensitivity of 6.2mV/g; the dynamic range being (±)2g. MEMS structure has been designed and simulated using FEM based multiphysics software COMSOL 4.3 and the entire IMU unit consist of the accelerometer and associated signal conditioning unit.