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Effect of Magnetic Field on Permeability of Electroplated Permalloy for Microdevices

We have investigated the effect of a magnetic field on an electroplated Ni79Fe21 film. We have succeeded in the formation of a Ni79Fe21 (permalloy) film with high permeability by applying the magnetic field vertical to the electric field during the electroplating process. In a conventional NiFe electroplating process, annealing is required to obtain a stable Ni79Fe21 film after electroplating. This process without annealing is useful for fabricating Ni79Fe21 films for flexible devices and complementary metal oxide semiconductor (CMOS) integration.