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Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature Effect

A noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/ f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. A temperature dependent and an acceleration dependant of the noise are found in the accelerometers, in agreement and contract of the theories, respectively.