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Efficient Sampling and Reconstruction Strategies for in-situ SEM/STEM

Images/spectral maps from scanning (transmission) electron microscopes (S(T)EMs) are now used routinely to quantify the morphology, structure, composition, chemistry, bonding, and optical/electronic properties of nanostructures, interfaces and defects in many materials systems. However, quantitative and reproducible observations for many materials of current technological importance are limited by electron beam damage destroying the sample before the highest resolution information is obtained. The effect of electron dose becomes even more important when we perform in-situ measurements, as the kinetic pathways that we are trying to observe can be completely changed by the beam. The aim for broadening quantitative S(T)EM applications to a wider range of samples and processes is therefore now to focus on the most efficient use of the dose that is supplied to the sample. In practice, this is achieved by minimizing the experimental dose, dose rate and dose overlap for any image, resulting in a controlled dose fractionation that maximizes the data content per unit dose, i.e. reducing the number