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A Precision Ellipsometer without Employing a Compensator

Reflection of light at the surfaces of a λ/4 plate seriously affects the accuracy of ellipsometric measurements. The ellipsometer described here, which is to be used for the determination of the principal angle of incidence, φP, and the reflectivity ratio of the p- and s-components at this angle of incidence, φP, employs only one polarizer and no compensator, and is free from this nuisance. Its extinction sensitivity is roughly twice as large as that of a conventional ellipsometer. The requirements that have to be fulfilled in order that φP and ρP can be determined to ±3'' and ±10'' respectively are given in detail.