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Studies toward the optimization of ion polishing for multilayer x-ray mirrors

Multilayer mirrors of Co, Ni or Ru with spacer layer of C or B4C are fabricated by electron-beam deposition with ion polishing of all metal layers. Improved performance over previous work is obtained for the mirrors containing Co and Ru. Very smooth boundaries are obtained for Ni films, however, this smoothness is only obtained for coatings with a small number of layers.