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Temperature-dependent Characteristics of Carbon Nanofiber Arrays

In this work, we present temperature-dependent electrical characteristics of vertically aligned carbon nanofiber (CNF) arrays for on-chip interconnect applications. The study consists of two parts. First, the electron transport mechanisms in these structures are investigated using low-temperature (∼4K-300K) I-V measurements. The measured resistivity in CNF arrays are modeled based on known graphite a-axis (parallel to basal plane) and c-axis (perpendicular to basal plane) electron conduction mechanisms. The model is verified using high-resolution scanning transmission electron microscopy (STEM) of the CNF-metal interface. Second, electrical reliability measurements are performed at different temperatures to demonstrate the robust nature of CNFs for interconnect applications. Finally, some guidance is presented in catalyst material selection to yield lower resistance CNFs.