{'fraction_non_alphanumeric': 0.01972872996300863, 'fraction_numerical': 0.013563501849568433, 'mean_word_length': 4.884057971014493, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
SiO2/SiN membranes as MEMS Pirani gauges for wide pressure measurement range

Thanks to an original surface microfabrication process, large membranes suspended 1 micron above a substrate have been elaborated. A membrane with a wide heat exchange area and such a small gap allows the gauge to be sensitive in the high vacuum regime, and ensures a broader pressure range of measurement. By optimizing the membrane and beam sizes, this paper shows that one can combine different membranes to design a packaged sensor with a wide sensitive pressure range (10-2 to 105 Pa) and a very low power consumption (maximum 115 microwatt in this paper). These results allow the design of a fully integrated sensor, based on a unique technology, that can be integrated for in-situ pressure measurements in vacuum applications.