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Fabrication and evaluation of a free molecule micro-resistojet with thick silicon dioxide insulation and suspension

A silicon free molecule micro-resistojet (FMMR) with a thermally insulating suspension frame composed of silicon dioxide has been designed, fabricated and tested. The concept was developed to increase the efficiency of FMMRs, especially in silicon-based integrated systems. Fabrication of the thick insulating frame was performed through oxidation of high-aspect ratio silicon trenches. The thermal properties of the 1 cm2 thruster were evaluated using an IR camera, and it was found that when the volume inside the frame is heated more than 200 °C using integrated nickel heaters, the temperature increase in the volume outside the frame is less than 50 °C. During operation in vacuum, the thrust range was calculated to be about 13–1070 µN and the maximum specific impulse 54 s. At maximum thrust, and a power consumption of 1.6 W, the total efficiency of the thruster was 17%. Designs of more efficient and versatile systems are discussed.