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High-Sensitivity Accelerometer Using Multilayer Piezoelectric Ceramics

A high sensitivity accelerometer using multilayer piezoelectric ceramics including internal electrodes has been developed. The sensitivity of this accelerometer is about 900 pC/G at the frequency range from 0.01 to 10 Hz. Because the circuit was structed to cancel pyroelectric voltages, the output voltage changes of this accelerometer were decreased to 1/10 compared with the case of a noncanceling circuit.