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Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications

In this study, using two different types of linear internal type inductively coupled plasma sources with a serpentine-type antenna and a novel double-comb type antenna having the size of 1020×830 mm2, the characteristics of their plasmas were compared as the application to the flat panel display manufacturing. The use of the double-comb type antenna instead of the serpentine-type antenna showed two times higher plasma and radical densities, and more stable plasma when rf power higher than 2000 W was applied. By the application of 5000 W of rf power with 15 mTorr Ar, a high plasma density of 2.2×1011/cm3 with the plasma uniformity of 8% could be obtained for the double-comb type antenna. The increase of plasma density, radical density, and plasma stability for the double-comb type antenna compared to the serpentine-type antenna appears from the higher inductive coupling and less standing wave effect compared to the serpentine-type antenna.