{'fraction_non_alphanumeric': 0.023809523809523808, 'fraction_numerical': 0.02976190476190476, 'mean_word_length': 4.804597701149425, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Single-crystal LaB6 tip as electron source for high-throughput electron beam lithography

Thermal field emission (TFE) characteristics of single-crystal LaB6 columnar tip were investigated. After adequate cleaning treatment, TFE was continuously stable at 1600 K and 1700 K in 10-8 Pa. Emission patterns indicated that TFE could be regarded as uniform if we took it into account that the size of the emission region practically used for the e-beam lithography was about 0.5 mm on the fluorescence screen.