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Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment

This paper verifies the performance of the active microvibration control system using the piezoelectric actuators with a table of length 3 m, width 1.8 m and weight 4,000 kg, which was applied to the large-scale semiconductor manufacturing equipment whose microlithographic accuracy was actually degraded due to the constant vibration. The mounted equipment was the integral-design semiconductor manufacturing equipment weighing 2,600 kg. The controller was designed by the method dependent on the coprime factor plant model in the preceding study for preventing the elastic vibration of the equipment and table from causing the spillover phenomena of the control system. For frequency forming algorithm, the model matching method and H(infinity ) method were employed. As a result of this system's application, the microlithographic accuracy of the manufacturing equipment could be recovered.