{'fraction_non_alphanumeric': 0.030683403068340307, 'fraction_numerical': 0.009762900976290097, 'mean_word_length': 4.609375, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers

The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass.