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Cooling of Microspot by Microdroplets

In this work, we explored a novel technique using microdroplets to cool hot microspots in advanced microelectronic devices. A hot floating membrane 150 µm ×150 µm is used both as a hot microspot and a thermal microsensor in the experiment. Microdroplet of pure water is ejected from the inkjet head onto the hot microspot. The evaporation time of a microdroplet decreased with increasing microspot temperature, and the temperature decrease due to microdroplet cooling increased with increasing microspot temperature. The microspot temperature can be maintained constant without flooding with cooling liquid when microdroplets are ejected continuously at an optimal frequency.