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Novel micro-scanner for optical communications: architecture and performance

Two-dimensional (2D) scanners have a variety of applications in displays, barcode readers, optical data storage devices, and free-space optical interconnects. In this paper, we will describe the modeling and simulation of a novel MEMS-based cantilever micro-scanner design. The micro-scanner is actuated using electrostatic force. The cantilever beam connects to the top electrode. The bottom four electrodes on the substrate provide extra feedback for the control of the cantilever beam. Compared to our previous design, a pair of wings is added to further reduce the actuation voltage and improve the microscanner stability. The symmetric springs on the beam structure are adopted to further reduce the spring constant of the cantilever beam and make the beam more flexible. A thorough mechanical analysis (both static and dynamic) using finite element analysis has been completed to study key design parameters such as driving voltage and resonant frequencies. Prototype cantilever microscanners have been fabricated using the MUMPs process.