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Resonant properties of piezoelectric cantilever transducers fabricated on the SiC membrane

We fabricated PZT thick film cantilever based on piezoelectric lead zirconate titanate (PZT) using SiC wafer. Electromechanical properties of PZT microcantilever such as nonlinear behavior under high voltage and behavior in liquid were investigated. The decrease in resonant frequency with an increase in electric field could be explained by the increase in elastic compliance of PZT thick film because of the elastic nonlinearity, and microcantilever dimension. Cantilever was tested in liquid using water-glycerol solutions of various proportion compositions. The viscosity and the density of liquids have characterized via oscillating-sphere model. The mass sensitivity through Au mass loading was discussed.