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Improvement of pattern fidelity in triangle arrangement LCD's color filter by an optical proximity correction mask design method

For portable digital displays, the pattern of a color filter should resemble the design pattern as much as possible to avoid contrast loss within the liquid crystal display (LCD). The higher the quality requirement of a LCD, the smaller the difference between the design pattern and the actual pattern of a color filter, also known as ‘pattern fidelity’, should be. In this work, we use the histogram of the different segments between the designed pattern and the actual pattern to define the critical shape error (CSE) indices, CSEavg, CSE90 and CSE80, the area percentage indices of the ‘white zone’ (WZ Area%) and the ‘over zone’ (OZ Area%), and the maximum segment width of the ‘over zone’ (Max. CSE width). Through the evaluation of all indices of the optical proximity correction (OPC) patterns, we choose the optimal OPC pattern, the hexagonal OPC pattern circumscribing a circle of diameter 3 µm, and have a color filter with very good pattern fidelity.