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The Role of Secondary Electron Emission in the Charging of Thin-Film Phase Plates

In the past few years, physical phase plates (PP) have become a viable tool to enhance the contrast of weak-phase objects in transmission electron microscopy (TEM). Thin-film PPs, such as the Zernike and Hilbert PP, are based on the mean inner potential of microstructured thin films [1,2]. Typically, a thin amorphous carbon (aC)-film is applied, whose thickness is adjusted to induce a well-defined phase shift between unscattered and scattered electrons. However, the illumination with high-energy electrons initiates an irreversible degeneration of the aC-film, which causes electrostatic charging and affects the phase-shifting properties. Taking even advantage of charging, hole-free PPs were recently developed [3,4].