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Time dependence of the surface Fermi level of GaAs in atmosphere

This letter reports the time dependence of the surface Fermi level of GaAs grown by molecular‐beam epitaxy and then exposed to atmosphere. The sheet resistance of sample structures for field effect transistors alternately increased, decreased, increased, and decreased to become nearly constant after about 500 h. These changes correspond to the surface Fermi level varying between 0.3 and 0.7 eV and finally settling 0.7 eV above the valence band maximum. Comparison between annealed and unannealed samples with low‐temperature‐grown GaAs layers showed that the pinning of the surface Fermi level at 0.7 eV above the valence band maximum is caused by arsenic antisite defects. The result supports the advanced unified defect model.