{'fraction_non_alphanumeric': 0.008350730688935281, 'fraction_numerical': 0.012526096033402923, 'mean_word_length': 4.853658536585366, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
A Method to Compensate Decay of Power in SR Lithography

A method to compensate the synchrotron radiation power decrease due to the stored current decay by increasing the stored electron energy is described. The absorbed power in a resist can be held constant by about a 10 percent increase of the electron energy, compensating the beam current decrease of 50 percent. The throughput decrease is 10 percent owing to power suppression in order to maintain constant absorbed power.