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Optical materials for use with excimer lasers

Synthetic UV-grade fused silica, crystalline fluorides, and dielectric coatings have been evaluated for transparency and durability at 193 nm. Most bulk materials eventually develop color centers, and fused silica also changes its density and index of refraction. However, the rate at which these changes occur and their magnitude vary strongly with material, grade, and other more subtle details. Careful selection and possibly pretesting are recommended, in order to ensure optimal matching between the intended application and the material properties.