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Preliminary characterization of the ion-sorption micropump

The microengineered miniature silicon-glass micropump has been shown for the first time ever. The device consists of lateral CNT-based cold cathode surrounded by an oval anode. Field-emitted electrons ionize residual gas particles, which are collected by a collecting electrode covered with active thin-film Ti getter co-operating with NEG getter (SAES, Italy). Preliminary results showed good pumping (~10-4 hPa), about two orders of magnitude better then NEG getter can achieve.