{'fraction_non_alphanumeric': 0.032219570405727926, 'fraction_numerical': 0.003579952267303103, 'mean_word_length': 5.503875968992248, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Studies on key nano-fabrication processes for GaAs-based air-bridge-type two-dimensional photonic-crystal slab waveguides

We report successful studies on improved key nano-fabrication processes for AlGaAs-based air-bridge-type two-dimensional photonic-crystal (2DPC) slab waveguides. The first topic is proximity-effect correction in electron beam lithography for the definition of a uniform and precise periodic/non-periodic 2DPC waveguide pattern. The second topic is optimization of the selective wet-etching condition in an air-bridge fabrication process. The resultant nano-fabrication processes have been proved to be quite effective for the realization of 2DPC slab waveguides such as modified and topology-optimized bend waveguides having broad-band and high-transmittance spectra in excellent agreement with the calculated ones.