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Production and decay of chlorine ion excited species in an electron cyclotron resonance ion source plasma

The most important processes for the creation of chlorine ion excited states from the ground configurations of Cl10+ to Cl15+ ions in an electron cyclotron resonance ion source, leading to the emission of K x-ray lines, were studied. Theoretical values for inner-shell excitation and ionization cross-sections, including double KL and triple KLL ionization, transition probabilities and energies for the de-excitation processes, were calculated in the framework of the multi-configuration Dirac–Fock method. With reasonable assumptions about the electron energy distribution, a theoretical Kα x-ray spectrum was obtained, which was then compared with recent experimental data.