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Theoretical and Experimental Research on Terahertz Metamaterial Sensor With Flexible Substrate

A terahertz metamaterial refractive index/thickness sensor with flexible substrate, exhibiting low-frequency Fano resonance and high-frequency electromagnetically induced transparent (EIT) resonance, is proposed. The physical formation mechanisms of Fano and EIT resonances are investigated by calculating the electromagnetic field. Simulated results demonstrate that the refractive index sensing sensitivity based these two resonances are up to 60 and 100 GHz/RIU, and the thickness sensing sensitivity are up to 1 and 1.7 GHz/μm, respectively. Furthermore, the proposed sensor was fabricated using femtosecond laser etching technology, and its sensing performance was verified by the experimental results that it can distinguish different liquids and detect the polyimide film with different thicknesses less than 180 μm. The remarkable performances make the proposed metamaterial sensor has feasible capability for biological and chemical sensing in terahertz range.