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STEM and Elemental Analysis by EDS and EELS for Two-dimensional Atomic Structure Containing Au and Cu

In high-technology engineering of semiconducting devices, Au is frequently used for fine wiring due to its high electrical conductivity and chemical inertness. As integration of circuits has become higher and size of electronic devices has become smaller according to Moore’s law, it is essentially important that nanometer-sized Au shows chemical and structural stability under normal operating temperatures and atmospheric conditions, to avoid potential degradation of device performance. In this study, we show that nanometer-sized Au is corroded in air in the presence of Cu at room temperature during ageing to form a compound of Au. The compound consists of a belt-like two-dimensional material, containing Au and Cu[1].