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The Adhesion Properties of Parylene-C Thin Films

This work aims to enhance the adhesion of Parylene-C (poly-chloro-p-xylylene C) thin film on PMMA, Glass and Aluminum substrates by chemical vapor deposition, surface improvement and treatment of substrate as well as analysis of film on Glass, PMMA, Aluminum and its surface adhesion by dipping under A-174 silane solution and conducting on plasma treatment (18 W). The results show that: (1) After oxygen-plasma pretreatment, the surface roughness of the 200nm-thickness film on glass substrate specimens decreases from 18nm to 7nm. (2) After dipped in prescription solution pretreatment, the residual stress reduces from 107MPa to 64MPa on glass substrate specimens. (3) The critical load of 600nm-thickness film increases from 14.1 to 18.5mN, showing the substrate after dipped in prescription solution pretreatment can improve the adhesion of the Parylene-C thin film on flat glass substrate specimens.