{'fraction_non_alphanumeric': 0.03850156087408949, 'fraction_numerical': 0.018730489073881373, 'mean_word_length': 5.287581699346405, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
The Annealing Effect on Optical Properties of Silver Copper Alloy Films

In this paper, the dielectric functions of Ag-30.3at.%Cu alloy films upon the annealing effect were investigated by variable angle spectroscopy ellipsometry (VASE). The silver copper alloy films were deposited onto p-type silicon (100) substrate by direct current (DC) magnetron sputtering. With the increase of annealing temperature from 100 °C to 300 °C, the image part of the permittivity for Ag-30.3at.%Cu is significantly decreased in the wavelength below ~500 nm. The structure and surface topography of the alloy films were characterized using high resolution scanning electron microscopy (HR-SEM) and X-ray diffraction (XRD). The effective medium theory (EMA) has been utilized for the treating of surface roughness. The dielectric functions can be manipulated by changing the annealing temperature. Key words: Dielectric functions; silver copper alloy films; magnetron sputtering