{'fraction_non_alphanumeric': 0.010033444816053512, 'fraction_numerical': 0.0, 'mean_word_length': 5.701492537313433, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Nonlinear System Identification of CZ Silicon Crystal Growth between Pulling Speed and Diameter

A nonlinear structure and parameter identification method is proposed to get the nonlinear dynamic model of Czochralski silicon crystal growth between pulling speed and diameter. The mean impact value(MIV) is used to select the historical speed and historical diameter input terms that significantly affect the crystal diameter. The nonlinear input combination terms are determined by the simultaneous estimation method. The model parameters are identified by the least square algorithm. The enhanced correlation-testing method is used to test the identified model. The simulation result shows that the proposed method can effectively solve the identification problem of nonlinear structure and parameter when the prior knowledge of relationship between pulling speed and crystal diameter is lacking.