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Enhancements of BST Thin Film Varactors with SmScO3 Buffer Layer on Sapphire Substrate

This study analyzes the effects of adding a SmScO3 (SSO) buffer layer to the sapphire substrate for barium strontium titanate (BST) thin film varactors. The varactors are fabricated on SSO buffered sapphire substrates at two different electrode and BST thicknesses. The devices are tested from 0 to 40 GHz, applying a DC bias. capacitance vs voltage, and Q vs voltage were obtained from the swept frequency scattering parameters. The study also demonstrates an overall higher tuning ratio and competitive Q for the SSO buffered devices.