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Properties of PZT Nano-Powder Doped Silica Films Prepared by Sol-Gel Process

Silica films doped with amorphous PZT nanopowder were prepared by a modified TEOS sol-gel process. The films were annealed by conventional furnace or rapid thermal annealing methods at 700 ¯ respectively, and were examined by field emission scanning electron microscopy and spectro-ellipsometer. Most of the PZT particles were detached from the film after annealing. To avoid this phenomenon, a hydrothermal treatment process was utilized to crystalize the sol-gel derived amorphous PZT nanopowders before they were added into the silica solution. Silica films doped with the crystallized PZT powder were then annealed and revealed good embedded adhesion, typical perovskite phase, low extinction coefficient, and obvious refractive index change.