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Two-dimensional micromachined gyroscope

In this study a novel cross-shaped micro-gyroscope which detects two orthogonal component of the applied rate is developed. Four nickel cantilever-plates are arranged in a cross that sits above a glass substrate with four fixed electrodes. Upon applying rotations, there result varying amounts of Coriolis acceleration in the vibrating plates which can be detected by corresponding capacitance changes that depend on the separation between the cantilever and fixed electrode. From the results of testing, we obtain an angular rate detection sensitivity of approximately 0.1 mV/(rad/sec) and detect the two orthogonal components of the applied angular rate simultaneously.