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A Bayesian approach to variable screening for modeling the IC fabrication process

We describe a technique for determining the set of input variables that are significant with respect to a set of fabrication process output variables. Our technique uses a Bayesian analysis approach to focus only on the "active" factors while ignoring those that are statistically insignificant. Macromodels are then built using those "active" factors. This approach results in reduced simulation models with high accuracy.