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Fundamental noise in MEMS force sensors

In recent years, MEMS devices have been developed for a wide variety of applications. Many of the signals that these sensors are intended to detect are expressed as forces that stress or deflect the micromechanical structure. As sensors are miniaturized, these forces naturally become smaller, and techniques for detection are required to improve. As the force sensing capabilities of MEMS devices have improved, it has become possible to apply these devices to interesting scientific experiments on biological systems.