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Miniaturized ISFET glucose sensor including a new structure actuation system

A new principle of an amperometric actuation technique was incorporated in the ISFET glucose sensor. The ISFET is fabricated by the CMOS process and the platinum working electrode is deposited by the lift-off process. A sensor with a specially designed ladder type working electrode exhibits improved operation in response time, response magnitude and detection range. An expectation concerning the reduction of sensor size is also discussed.