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Pierce oscillator circuit topology for high motional resistance CMOS MEMS SAW resonator

This paper presents the design and simulation for a pierce oscillator using CMOS MEMS SAW resonator. The MEMS resonator utilizes surface acoustic waves to generate resonant frequencies of 600MHz and 900MHz. The MEMS resonator is fully compatible with CMOS technology, allowing the possibility of full integration with circuits. The pierce circuit topology was chosen as a sustaining circuit, connected to the resonator to form an oscillator. For simulation purposes, the CMOS MEMS SAW resonator was modeled using its RLC equivalent circuit. The oscillator produces transient oscillation of 300mV peak to peak voltage. The phase noise performance for 600MHz oscillator is -70dBc/Hz at 100 kHz and consume 1.17mW power. The 900MHz oscillator has achieved -63dBc/Hz phase noise at 100 kHz offset frequency and consume about 1.62mW power.