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Analytical model establishment and attitude calculation of a parallel leaf-spring carrying mechanism

Abstract. In this paper, a novel parallel leaf-spring carrying mechanism (PLCM)
is investigated using a compliance-matrix-based approach.
For the analytical modeling and attitude calculation, the geometric errors of the
flexible arm, including the height and the top plane's direction, are considered, and the
displacement method is used to calculate the equilibrium attitude. The
influence of the equilibrium attitude at different heights and the initial tilts of the
top planes are analyzed separately. The validity and effectiveness of the
attitude calculation are illustrated by experimental verification. The laser
triangulation coordinate method is used for attitude measurement. The
deviations of the normal vector between the calculation results and measurement
results are smaller than 2×10-4, which is small enough to satisfy
practical requirements. This can be used to guarantee stable and accurate
wafer transfer in a lithography machine. Therefore, it can be concluded
that the methods employed for analytical model establishment and attitude
calculation can be used as a reference for the analysis and design of a
complex parallel compliant mechanism.
