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Dynamic deformation measurement and analysis of active stressed lap using optical method

The active stressed lap is the heart of polishing process. A novel non-contact optical method of dynamic deformation measurement and analysis of an active stressed lap is put forward. This method, based on structured illumination, is able to record full-field information of the bending and rotating stressed lap dynamically and continuously, while its profile is changed under computer control, and restore the whole process of lap deformation varied with time at different position and rotating angle. It has been verified by experiments that this proposed method will be helpful to the opticians to ensure the stressed lap as expected.