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Design and analysis of a novel six-degrees-of-freedom precision positioning table

Abstract The purpose of this study is to design and analyse a novel six-degrees-of-freedom (DOF) precision positioning table, which is assembled by two different kinds of three-DOF precision positioning tables: a plane-type three-DOF (X, Y, θ z ) precision positioning table and a cylinder-type three-DOF (θ x , θ y , Z) one, and each table is driven by three piezoelectric actuators (PAs). In this paper, the Bouc—Wen model is employed to describe the hysteretic phenomenon of the PAs. The transfer matrices with cross-coupling terms between the output displacements and input voltages are derived from the dynamic equations in the steady-state conditions. In order to obtain the best transfer matrix, experimental measurements of the whole six-DOF table are compared with those from the two individual three-DOF precision positioning tables. Finally, the transfer matrices with better performance for the two three-DOF tables and the novel six-DOF table are obtained.