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Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope

A mode-matched single-crystal lithium niobate (SC-LN) disk gyroscope has been developed, for the first time, to realize a tactical grade MEMS gyroscope. SC-LN is suitable for piezoelectric transducers because of its high Q-factor and electromechanical coupling coefficient. However, its crystallographic anisotropy prevents from making disk-shaped mode-matched gyroscope. We discovered an optimum orientation to realize uniform in-plane elastic compliance. We designed sixteen-electrode for driving and detecting two modes for operation. Brittle SC-LN disk resonators were processed using a core drill machine. The as-fabricated disk showed 95 kHz wineglass modes with less than 200 Hz frequency split. The angular rate output was successfully obtained and we demonstrated the potential for realizing high performance SC-LN gyroscope.