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High sensitivity contact probe based on optical path amplification

To meet the requirement of high precision measurement for high aspect ratio microstructures, a contact trigger probe based on optical lever is designed in this paper. An elastic mechanism, which is composed of a tungsten stylus, a cross shaped leaf springs, a floating plate and a mirror is used to transmitted displacement of the probe tip. An optical lever principle is used to amplify the angle offset to improve the sensitivity. The four quadrant detector is be adopted to detection light spot displacement, And the micro adjustment mechanism adjusts the position of the four quadrant sensor to make the measurement in the linear range. When the probe is triggered in different directions, the light spot will pass through multiple mirrors and produce double angle offset amplification, Through the plane mirror group, the light beam passes through the floating plate twice to realize the secondary amplification of the angle, it causes the light spot on the four quadrant detector to shift. The measurement accuracy is greatly improved. The experimental results show that the resolution of the probe in all directions is better than 1nm, and the maximum resolution in x-axis direction is 0.1nm.