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Flexible micro thermoelectric generator

We demonstrate and discuss the performance of a flexible micro thermoelectric generator with Ni/Cu thermocouples in a SU-8 mold. The fabricated devices generate up to 20.68plusmn0.32 muWcm-2K-2 for the case of vanishing thermal interface resistance (K=0). The generator keeps functionality when bent to curvatures with radii down to 7.5 mm. This allows for enhanced thermal contact to non planar surfaces. A specific electrical contact resistance between thermoelectric material and interconnects of 2.11*10-11 Omega m2 have been achieved in average, which is crucial for low generator resistance and hence for improved performance. First model based design optimization predictions are experimentally verified.