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A NEMS vibration energy harvester using ordered piezoelectric Zinc Oxide nanowire arrays

A nanoelectromechanical (NEMS) piezoelectric energy harvester using crystalline ZnO nanowires is developed. The device converts ambient vibrations into usable electrical energy for low power sensor applications. This is accomplished by mechanical excitation of an ordered ZnO nanorod array using a suspended bulk micromachined proof mass. The device is capable of generating up to 14.2 mV single polarity voltage under an input vibration of amplitude 1 g (9.8 m/s2) at a frequency of 1.10 KHz. To realize this structure, highly ordered arrays of crystalline ZnO nanorods have been fabricated using an amorphous silicon template patterned by thermal nanoimprint lithography, in conjunction with a low temperature hydrothermal growth process.