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Two-dimensional modelling of CF4 rf plasmas: periodic steady state, transient response after step change of power source voltage, and comparison with one-dimensional modelling

CF4 radio frequency (rf) (13.56 MHz) capacitively coupled plasmas were simulated using a two-dimensional fluid model of cylindrical symmetry. We investigated their periodic steady state and transient behaviour after step changes of the amplitude of a power source voltage. The results were compared with those obtained by a one-dimensional model. The two-dimensional model showed that the plasmas in a harmonic steady state have asymmetric profiles due to generation of a dc self-bias through an asymmetric electrode system with grounded wall. The transient response of the plasmas in the two-dimensional model was qualitatively similar to those of the one-dimensional model except in the powered electrode edge region where the radial component of the electric field was significant.