{'fraction_non_alphanumeric': 0.021897810218978103, 'fraction_numerical': 0.0, 'mean_word_length': 5.458823529411765, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Experimental comparison of model-based and conventional pressure control for a plasma reactor

Pressure control in a plasma reactor system is used to experimentally compare nonlinear process-model-based-control, internal model control and conventional proportional-integral (PI) control. The experimental system consists of a single slice plasma etch reactor with an attached radio frequency generator and a vacuum pump. The RF discharge forms the plasma. The control system includes an one inch stepping motor powered butterfly type exhaust valve.