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Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering

We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600°C for 20min, and the peak wavelength was approximately 430nm. Tantalum oxide films that emit blue light may be useful materials for novel active optical devices utilizing Ta2O5/SiO2 multilayered photonic crystals.