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Dependence of EUV emission on xenon flow rate from a z-pinch discharge plasma

This paper describes the dependence of EUV emission from a Z-pinch plasma discharge on gas flow rate. The Z-pinch plasma was driven by pulsed current with amplitude of 30 kA and pulse duration of 100 ns. Pinhole imaging, EUV spectrograph and in-band EUV energy monitor were used to characterize the EUV emission from the Z-pinch discharge plasma.