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Observation of Purifier Performance to Reduce Moisture in Hydrogen Chloride by Near Infrared Laser Absorption Spectrometry

The performance of a purifier in reducing moisture in hydrogen chloride (HCl) was evaluated using near-infrared laser absorption spectrometry. The moisture concentration in HCl passed through the purifier was lower than the detection limit (3σ) which was estimated to be 95 ppb. Despite the fact that the moisture concentration in the inlet stream increased from 1 ppm to 11 ppm, the moisture concentration in the outlet stream was maintained below the detection limit. Therefore, it is quite important to use the purifier in order to obtain dry HCl in a stable manner.