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Development of wireless MEMS sensor for RFID tag and temperature/pressure monitoring

This paper presents an integrated multifunctional microsensor based on 440MHz surface acoustic wave (SAW) reflective delay line on 41° YX LiNbO3. A pressure sensor, a temperature sensor, and radio frequency identification (RFID) tag were integrated on two-bonded piezoelectric substrates. The pressure sensor was placed on the top plate, whereas the RFID tag and temperature sensor were located on the bottom substrate. Finite Element Methods (FEM) and Coupling of mode (COM) modeling were performed to extract the optimal design parameters before fabrication. The fabricated sensor was wirelessly characterized through the Network Analyzer. Sharp reflection peaks with high S/N ratio were observed. Obtained temperature and pressure sensitivity are ~10°/°C and ~2.9°/kPa, respectively.