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Development of a MEMS-rate sensor with PZT actuation and sensing

This paper relates to the development of a novel rate sensor for a wide range of potential applications in the automotive field, amongst others. The sensor is based on the dynamic behavior of an active, vibrating silicon structure that uses thin-film piezoelectric material for actuation and sensing functions, and can be manufactured using silicon micro-machining techniques. The use of piezo-electric material for drive and pickoff offers potentially significant advantages over electrostatic/capacitive means in terms of achievable actuation forces and simplicity of structural design. This paper gives an overview of the design and analysis of a prototype sensor. The design concept is described and a low-order mathematical model, incorporating the inertial behavior of the structure and the interaction between the silicon structure and the piezo-drives and pickoffs is presented. This model allows the basic sensitivity of the sensor to be quantified. The design of a prototype sensor is then described. Some preliminary test results are presented, illustrating the feasibility of the concept.