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Micro-electro-mechanical systems-based micro-electromagnetic vibration energy harvester

We developed a simple and efficient micro-electromagnetic energy harvester based on micro-electro-mechanical systems technology. For processes of electromagnetic vibration energy harvesters in the presence of the magnet, the compatibility with the micro-electro-mechanical systems processing is not good. Therefore, we have adopted a method of micro-assembly production energy harvester. The energy harvester mainly consists of a resonator chip processed by micro-electro-mechanical systems and a winding coil. The total volume of the energy harvesters is 0.95 cm3. Test results show that the energy harvester generated a maximum load power of 116.64 µW across 400 Ω load at 291.4 Hz for an acceleration of 0.5g (g = 9.8 m/s2) after the optimization of the parameters.