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Evaluation of Single Phase Flow in Microchannels for High Heat Flux Chip Cooling—Thermohydraulic Performance Enhancement and Fabrication Technology

The increased circuit density on today's computer chips is reaching the heat dissipation limits for air-cooling technology. The direct liquid cooling of chips is being considered as a viable alternative. This paper reviews liquid cooling with internal flow channels in terms of technological options and challenges. The possibilities presented herein indicate a four- to ten-fold increase in heat flux over the air-cooled systems. The roadmap for single-phase cooling technology is presented to identify research opportunities in meeting the cooling demands of future IC chips. The use of three-dimensional microchannels that incorporate either microstructures in the channel or grooves in the channel surfaces may lead to significant enhancements in single-phase cooling. A simplified and well-established fabrication process is described to fabricate both classes of three-dimensional microchannels. Proof-of-concept microchannels are presented to demonstrate the efficacy of the fabrication process in fabricating complex microstructures within a microchannel.