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The Raman microprobe: A quantitative analytical tool to characterize laser-processed semiconductors

The Raman microprobe technique can provide quantitative information on structure, composition, homogeneity, and stress, with 1-μm resolution. It is also a nondestructive technique that requires no special sample preparation and can be used in situ. After an introduction to Raman scattering and a description of the technique itself, the author reviews specific applications in the fields of laser recrystallization and laser damage of layered structures.