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Development of a shear‐force scanning near‐field cathodoluminescence microscope for characterization of nanostructures’ optical properties

An original scanning near‐field cathodoluminescence microscope for nanostructure characterization has been developed and successfully tested. By using a bimorph piezoelectric stack both as actuator and detector, the developed setup constitutes a real improvement compared to previously reported SEM‐based solutions. The technique combines a scanning probe and a scanning electron microscope in order to simultaneously offer near‐field cathodoluminescence and topographic images of the sample. Share‐force topography and cathodoluminescence measurements on GaN, SiC and ZnO nanostructures using the developed setup are presented showing a nanometric resolution in both topography and cathodoluminescence images with increased sensitivity compared to classical luminescence techniques.