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Making the Stitching Process of Montaged SEM Images Automatic Using Fourier Transform Properties

Acquiring several images of parts of a sample at high magnification and assembling them into a single composite image is called montaging, which can be done either by moving the stage in an X-Y raster then capturing snapshots from an SEM or by using a unique tool like a Multi-SEM [4]. Usually, a degree of overlap is preserved between adjacent images, or tiles, which is used to align these images along vertical and horizontal seams, a process is known as stitching. The automatic creation of a large high-resolution montaged image is a research area involving computer vision and image processing. Achieving the stitched image is time-consuming and inefficient manually; there are some attempts at automating this process like the MIST image stitching This study attempts to address the image stitching problem for two cases in the montaging of semiconductor metallization layers for microelectronics applications.