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Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers

We present a fully coupled multi-energy domain compact model of a MEMS microphone dedicated to the investigation of acoustic high-frequency effects affecting the device behavior. To this end, the components of the acoustic domain are described using physics-derived analytical expressions. Finite element simulations are employed to confirm the validity of the acoustic submodel. The differential equations governing the small-signal dynamics of the electrically actuated transducer are solved in the frequency domain with MATLAB. The full-system model is calibrated and validated with experimental data. Measurements and simulations show very good agreement, which highlights the reliability of the presented modeling approach.