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Phase-locked laser diode interferometer: high-speed feedback control system.

We have previously proposed a phase-locked laser diode interferometer. In that previous interferometer, however, there was substantial room for improvement in the reduction of measurement time. This reduction is achieved by using a different process for generation of the feedback signal in which the output of a chargecoupled device image sensor is used effectively. We analyze the feedback control system of the interferometer as a discrete-time system and discuss the characteristics of the interferometer. It is shown that the measurement time is much shorter than that of the interferometer proposed previously.