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Performance of super-critical strained-Si directly on insulator (SC-SSOI) CMOS based on high-performance PD-SOI technology

This paper describes the performance of multiple-V/sub T/, Triple-gate oxide SC-SSOI CMOS realized with Freescale's high-performance silicon-on-insulator (HiPerMOS-SOI) and SOITEC's advanced wafer-bonding technology. The thermal stability of wafer-bonded strained substrate, the beneficial impact of biaxial strain on gate-leakage and SC-SSOI enhanced SRAM bitcell operation are demonstrated for the first time. In-addition, the important scaling issues due to parasitic resistance and channel strain engineering are identified.