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c-Axis Oriented Face-Centered-Tetragonal-FePt Nanoparticle Monolayer Formed on a Polycrystalline TiN Seed Layer

c-Axis oriented face-centered-tetragonal (fct)-FePt magnetic nanoparticles are a promising candidate for high density perpendicular magnetic recording media. In this study, TiN was investigated as a seed layer to achieve c-axis orientation of fct-FePt nanoparticles. First, a (200)-oriented, polycrystalline TiN layer with grain size around 10 nm was prepared by reactive sputter-deposition at 873 K on SiO2, and then FePt was sputter-deposited at 973 K on it. Both in-plane and out-of-plane X-ray diffraction revealed that FePt had fct structure with c-axis orientation. Plan-view field emission scanning electron microscopy showed that FePt formed well-isolated nanoparticles. The particle diameter increased with increasing nominal thickness of FePt, and it was similar to the size of the TiN grains when nominal thickness was 1.4 nm. Cross-sectional transmission electron microscope images indicated that single FePt nanoparticles grew on single TiN grains, namely, one nanoparticle per grain, with an epitaxial relationship. Superconducting quantum inference device measurement at 300 K revealed that the FePt nanoparticles had coercivity of 6.2 and 0.8 kOe for the out-of-plane and in-plane directions, respectively. The FePt nanoparticle monolayer sputter-deposited on polycrystalline TiN seed layer is a promising candidate for perpendicular magnetic recording media.