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Polymeric multimode waveguide arrays for one- and two-dimensional optical interconnects

Polymeric optical multimode waveguide arrays with micromirrors have been fabricated for one- (1-D) and two-dimensional (-2D) optical interconnects between 1-D or 2-D arrayed VCSELs and detectors. Contact printing lithography was adopted for simple and low cost process using UV-curable epoxy based polymers. Micromirrors for 1-D optical interconnects were fabricated by dicing a waveguide array using a dicing saw with a 45° diamond blade and showed the excess loss of 1.1 dB. For 2-D interconnects, fabricated waveguides were diced of same size and stacked one by one with lateral positional errors less than ± 20 μm. Two kinds of mirrors were fabricated; single-reflection mirror and double-reflection mirror. Double reflected mirrors resulted in lower losses with 1.2 dB than single reflected mirrors with 2.1 dB. The average insertion losses of 16-channel arrayed waveguides with two single-reflection mirrors and with two double-reflection-mirrors were measured to be 6.1 dB and 4.4 dB for 6 cm long waveguides at a wavelength of 830 nm, respectively. The crosstalk between the waveguides was less than -25 dB. The characteristics of the waveguide arrays are good enough for applications to optical interconnects.