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Surface Acoustic Wave Propagation Characteristics and Temperature Effects on Quartz under Periodic Aluminum Structure

In communication applications, surface acoustic wave (SAW) devices should have excellent temperature stability. For this purpose, a numerical procedure for analyzing the Rayleigh SAW propagation and temperature effect was established in this work. The theoretical method used here is the space harmonic method (SHM). The theoretical analysis showed a slightly enhanced reflectivity for the open grating and presented the centers of transduction and reflection as separate at a spatial distance of λ0/4. The computational frequency responses of a two-port resonator were similar to the experimental data. The temperature characteristics of quartz under aluminum grating were also studied in this work. The cut angle of the quartz with zero temperature coefficient of frequency (TCF) decreased with increasing aluminum grating thickness. The coupling-of-modes (COM) parameters of quartz with zero TCF were calculated.