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Precise phase‐modulation generalized ellipsometry of anisotropic samples

A procedure for the measurement of the generalized ellipsometric angles using a phase‐modulation spectroscopic ellipsometer is described. Generalized phase‐modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PEM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth‐angle error and component imperfection. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)