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Nanostructured multilayer contact system Ti/Mo/Ag for silicon solar cells

Multilayer contact systems Ti/Ag and Ti/Mo/Ag based on nanostructured Ag thin films were obtained by two different vacuum methods - electron-beam evaporation and RF magnetron sputtering. The influence of production techniques and annealing parameters on grain formation in silver thin films and interdiffusion process between metal contact layers was investigated by means of atomic force microscopy, X-Ray diffraction and mass spectrometry of secondary neutrals. The reduction of sheet resistance for obtained multilayer contacts and accordingly the increasing of short circuit current in silicon heterojunction solar cells were shown.