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Mode Converters for Coupling to High Aspect Ratio Silicon-on-Insulator Channel Waveguides

The design, simulation, and experimental performance of mode converters for coupling from single-mode silicon-on-insulator ridge waveguides to high aspect ratio channel waveguides are described. The converters consist of a two-level adiabatic taper structure. The final channel waveguide is 1.5 mum high by 0.8 mum wide. Simulations predict that for total coupler lengths longer than 20 mum, the coupling loss from the fundamental ridge mode to the slit mode is better than -0.2 dB. The couplers and waveguides were fabricated using a two-step self-aligned process. The measured coupling loss for fabricated mode converters is -0.4 dB