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A new method to prevent aluminum pad corrosion

The pad surface fluorine adsorption and the static charge will significantly cause the pad corrosion during the die saw process. In this paper, we will present a new method to prevent the pad corrosion during the die saw process by optimizing the pad fabrication process. During the PAD fabrication process, an extra gas treatment using N2/H2 base gas was added after PRS (Photo Resistor strip) process, which can reduce the static charge accumulation on the metal pad. Then, a new potential chemical, ST-44 (2-(2-Aminoethoxy) Ethanol, Butyrolactone and surfactant) was used to replace the conventional EKC chemical to clean fluorine on the pad surface. The previously mentioned N2/H2 treatment was repeated again after the wet cleaning by ST-44. The experiment results show that the pad corrosions can be solved during the die saw process. And the possible root causes and solutions have been discussed and illustrated.