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A test structure for Young modulus extraction through capacitance-voltage measurements

We present a test structure for the on-line extraction of the Young's modulus of materials used for micro-electro-mechanical systems (MEMS) applications. This non-contact method is simple and non-destructive and allows for a fully electronic probing and readout. A single test structure is configured to respond to a change in voltage through a change in capacitance and the change in capacitance is then related to the Young's modulus and the device geometry. The device can also be used for simultaneous resonant frequency tests and measurement of pull-in voltage, thereby allowing for a multipoint orthogonal measurement. Experimental verification of the concept is presented in this paper. The test structure is fabricated in a silicon-on-insulator MEMS process allowing the extraction of the Young modulus of single-crystal silicon