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High-speed Three-dimensional Imaging at the Nanoscale via Fly-scan Ptycho-tomography

Ptychography has revolutionized coherent X-ray microscopy and became a mainstream technique for high-resolution imaging. Combined with conventional methods such as tomography and laminography, the technique has been successfully extended to 3D imaging, with state-of-the-art beamlines reaching below 20 nm spatial resolution [1,2], further providing new opportunities for characterizing materials such as integrated circuits (IC) and biological specimens. Moreover, the scanning sample scheme allows ptychography to be easily scaled to large objects at millimeter and even centimeter-scale.