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Electron Distribution Functions in a Sputtering Magnetron Discharge

The electron distribution function g(vz) in a cylindrically symmetric, planar, sputtering magnetron has been characterized using a one-sided, planar Langmuir probe. Measurements were made above the magnetic trap at six radial locations in the direction normal to the cathode. The distribution function is found to be non-Maxwellian, with a shape that depends sensitively on radial position. Near the symmetry axis, g(vz) is anisotropic and exhibits a strong electron drift from the cathode to the anode. Off axis, g(vz) is nearly symmetric and has two components: a dense, cold Maxwellian component, and a tenuous, energetic shell component.