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STRUCTURE AND FERROELECTRIC PROPERTIES OF PZT THIN FILM DEPOSITED ON LaNiO3 BOTTOM ELECTRODES

ABSTRACT In this paper, highly oriented conductive LaNiO3(LNO) thin films have been deposited on LaAlO3(LAO), SrTiO3(STO), MgO and Pt/Ti/SiO2/Si substrates by pulsed laser deposited(PLD). The AFM images and surface morphology of LNO electrode deposited on LAO, STO, SiO2/Si and MgO substrate have been measured. The particle size of the LNO on different substrates has been obtained. Pb(Zr0.52Ti0.48)O3(PZT) thin films were prepared by RF sputtering on LNO electrode deposited on different substrates. The structure and electrical properties of PZT ferroelectric films deposited on LNO electrode have been studied.