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Core Level Photoelectron Spectroscopic Study on Oxidized Phosphorus-Doped (100) Diamond Surfaces after Vacuum Annealing

X-ray photoelectron spectroscopic (XPS) study was performed on wet-chemically oxidized phosphorus (P)-doped diamond (100) surfaces annealed systematically, under vacuum, at different temperature regimes. Methodical changes in the features of C 1s and O 1s spectra were observed after annealing. All these changes are attributed to the kinetics of the surface species. Similar to the (111) surface, the oxygen desorption also induces a C 1s binding energy (BE) shift in the (100) surface. A relationship between the surface oxygen content and the surface carbon structure is arrived. The energy loss spectra show that the graphitization takes place at temperatures above 900 °C.