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Reducing the Temperature Error of Thin-Film Structures of Micromechanical Elements in Mechatronic Pressure Sensors

Considered is the influence of the temperature factor on the accuracy of measuring pressure sensors with micro-sized layers formed on a metal membrane, which is an elastic element of said devices. As an example the designs of thin-film structures on single-membrane and double-membrane pressure sensors are considered. Five methods of reducing the influence of the temperature factor on the errors of micromechanical sensors are analyzed. The possibilities for the development of thin-film resistive pressure sensors for aircraft are considered.