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Variation of Ion Current Flowing into Double Probes with Coating of Organic Thin Film in rf Discharge Plasma

The current-voltage(Id–Vd) characteristics of double probes coated with an ethylene plasma polymerized(PPE) film were investigated in ethylene and nitrogen plasma produced by rf discharges. Since the probes were coated, the Id–Vd curve exhibited a hysteresis and the ion current was observed to decrease. On the basis of the shape of the hysteresis in the saturation region, we found a way to clarify whether the observed ion current was real or not. As a result, we could confirm that the coating of probes actually causes a decrease in the ion current ΣIp. Furthermore, a comparison between coated probes and a clean metal probe furnished with an external C–R parallel circuit has revealed that the decrease in ΣIp arises from the direct contact of plasma with the PPE film, indicating that the ion current from plasma into dielectrics is smaller than that into metal.