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A 47μW 204MHz AlN Contour-Mode MEMS based tunable oscillator in 65nm CMOS

A voltage controlled MEMS oscillator (VCMO) fabricated in 65nm CMOS process is proposed in this paper. The piezoelectric aluminum nitride (AlN) Contour-Mode MEMS resonator based oscillator can be operated under multiple frequencies from 204MHz, to 517MHz, to 850MHz. A maximum overall tuning range of 611ppm is achieved at a center frequency of 204MHz. The proposed oscillator operates in the sub-threshold region, resulting in a power consumption of 47μW measured under a 0.55V power supply, which is the lowest reported in literature for an application in the 200MHz range. The measured oscillator phase noise is -77dBc/Hz at 1kHz offset from the 204MHz carrier.