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Viability of Point Spread Function Deconvolution for SEM

An image is understood as the point spread function (PSF) of an imaging system convolved with the scene being imaged. An image can be restored to more accurately depict the scene by performing a deconvolution of the PSF and the image. In a scanning electron microscope (SEM), the PSF describes the shape of the electron beam. PSF deconvolution is a promising image restoration technique for SEM images [1] and is of special interest at low beam voltages (< 3kV), where resolution is hindered by multiple factors. This technique’s viability for SEM application is based on invariance of beam shape with respect to position and sample. Using Aura Workstation [2], we can determine the beam shape to test for invariance and perform restorations for image quality evaluation.