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SOI Optical Switch Matrix Integrated with Spot Size converter (SSC) and Total Internal Reflection (TIR) Mirrors

SOI (Silicon on Insulator) based photonic devices has attracted more and more attention in the recent years. Integration of SOI optical switch matrix with isolating grooves, total internal reflection (TIR) mirrors and spot size converter (SSC) was studied. A folding re-arrangeable non-blocking 4times4 optical switch matrix and a blocking 16times16 matrix with TIR mirrors and SSC were fabricated on SOI wafer. The performances, including extinction ratio and the crosstalk, are better than before. The insertion loss and the polarization dependent loss (PDL) at 1.55mum increase slightly with longer device length, more bend and intersecting waveguides. The insertion losses decrease 2-3 dB when anti-reflection films are added in the ends of the devices. The rise and fall times of the devices are 2.1mus and 2.3mus, respectively