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Development of Anti-Static Acrylic Pressure Sensitive Adhesives Containing Reduced Graphene Oxide for Semiconductor Processing

Dicing tapes are commonly employed in semiconductor processing, and acrylic pressure-sensitive adhesive (PSA) tapes play an essential role. Since the semiconductor products are quite sensitive to electrostatic discharge (ESD) problems, high quality with anti-static properties are required for dicing tapes. The general dicing tapes can easily accumulate electrostatic charge at voltage up to 10kV or so. Such high electrostatic voltage may cause severe product defects due to ESD in the following semiconductor manufacturing processes. In this study, we developed a new acrylic based composite PSA by incorporating a modified reduced graphene oxide into the acrylic copolymer system via in situ polymerization strategy. The dicing tapes prepared by the composite PSA exhibited high performance of traditional non-UV tape and highly efficient anti-static properties with low surface resistivity.