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XPS inelastic background optimization: algorithm and results

The x‐ray photoelectron spectrum of a solid is a superposition of the peaks and the inelastic background. Using the background optimization technique it is possible to make a precise separation of them. The separated peaks and background have shown very physically consistent results in relation to the peak intensity, peak shape, loss function, etc. The most remarkable point of the present formalism is that very little sample‐specific knowledge is needed for the analysis. In this paper, details of the method and the results obtained both previously and recently on the metals Cu, Al and Ag will be reviewed. Copyright © 2003 John Wiley & Sons, Ltd.