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Fabrication of the solar-blind photodetector based on NixMg1−xO films by radio-frequency sputtering

Solar-blind photodetectors are fabricated with NixMg1-xO films that are formed on MgO single crystal substrate using a simple RF sputtering technique and a Ni-Mg composite target. The optical bandgap increases from 3.61 to 3.95eV as the Ni concentration decreases from 1 to 0.52. Photoconductors with interdigitated electrodes are fabricated using the sputtered NixMg1-xO films. The device based on Ni0.52Mg0.48O exhibits a peak response at a wavelength of 270nm with a cutoff wavelength of 295nm. The peak and the cutoff wavelengths of responsivity shift toward shorter wavelengths with decreasing Ni concentration.