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Investigation of process sensitivity for electron-beam evaporation of beryllium

A statistical-design-of-experiments approach is here adopted to investigate the process sensitivity of an evaporative Be-coating technique as a function of its process parameters: deposition rate, substrate temperature, and run time. A total of 18 coating runs was used to produce Be coatings on Al, Si, fused silica, and Be substrates, and these were then characterized by SEM, IR spectrophotometry, stylus profilometry, and weight gain. On the basis of the results obtained, a functional relationship is developed between quality-related characteristics and evaporation-process parameters; the process sensitivity for each response is then ascertained by calculating the gradient of each such characteristic relative to all three process parameters.