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Over 100 million frames per second high speed global shutter CMOS image sensor

This paper presents advancement of ultra-high speed (UHS) global shutter CMOS image sensor technology exceeding 100M frames per second (fps). The development of key technologies toward the next generation UHS global shutter CMOS image sensor are overviewed, that includes high density analog memory integration, pixel-wise memory array architecture, and burst correlated double sampling (CDS) operation. By introducing the newly developed signal readout scheme with minimized pixel pulse transitions, a frame period of photo-electrons transit time is achieved. The fabricated chip prototyping a 3D stacked structure achieved 100Mfps with 80 record length and 125Mfps with 40 record length under room temperature without any cooling systems.