{'fraction_non_alphanumeric': 0.031055900621118012, 'fraction_numerical': 0.009316770186335404, 'mean_word_length': 5.198717948717949, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Nanomechanical Structure with Integrated Carbon Nanotube

In this paper, we report on the fabrication method of a freestanding carbon nanotube (CNT) bridged between opposing silicon electrodes with a narrow gap (0.5–5 µm) that was fabricated by a silicon micromachining technique. After the metallization of nickel (Ni) or iron (Fe) as a catalyst for CNT growth, the CNT was grown between these electrodes with the application of a voltage of 30V during the growth by hot-filament chemical vapor deposition (HF-CVD) using acetylene diluted by hydrogen, as a source gas. The CNT was grown from the negative electrode to the other electrode. From the measurement of current–voltage (I–V) characteristics, the contact between the CNT and the silicon electrode shows ohmic behavior and the resistivity of the CNT was estimated to be approximately 4×10-5 Ω·cm. This nanofabrication technique will be applicable to the nanomechanical elements integrated an individual CNT.