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Design, Simulation and Fabrication of A Novel MEMS Based Pulsometer

A novel pulsometer was successfully developed using microelectromechanical systems (MEMS) based silicon-on-glass (SOG) technology for biomedical applications. The sensor was modelled and simulated in COMSOL Multiphysics® for pressures ranging from 0 to 40 mmHg. The capability of the fabricated pulsometer to detect movements in x and z-axis directions was investigated. The simulation results demonstrated displacement changes as high as of 98% and 36% in the x and z-axis directions, respectively for 40 mmHg, which correspond to typical radial blood pressure (rBP) on the wrist. In addition, an average capacitance change of 1 nF was experimentally obtained in the x-axis direction, from −5 V to 5 V. The response of the pulsometer is analyzed and presented in this paper.