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Robustness analysis of an MIP for production areas with time constraints and tool interruptions in semiconductor manufacturing

This research is motivated by the need to verify and implement a schedule in a real production environment, especially in precarious production environments. This paper presents a mixed integer program (MIP) with time constraints and analysis risk parameters for tool interruptions. With the assistance of the survival analysis, a safety value will be computed and included in the MIP to downscale the available capacity. To verify the quality and robustness of the MIP, it is necessary to simulate tool interruptions and to change assumed release dates of production-bound jobs which have different stochastic distributions. To simulate these instabilities a hybrid model has been created which combines a discrete event simulation with a MIP solver. Finally, the results of the various simulations are compared.