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Fabrication of TiO2-based composite films by sequential ion implantation and subsequent annealing

A special method for fabricating a series of TiO2-based composite catalyst film is presented. There are two steps in this method. Firstly, two kinds of elements are sequentially implanted into the substrate. Then, the implanted samples are annealed in oxygen atmosphere. This method involves a solid phase growth process, which can be successfully used to prepare noble metal nanoparticles modified TiO2 film (Au NP-TiO2), metallic (Fe, V) and non-metallic (N) doped TiO2, and narrow-width band gap heterojunctions (Fe2O3-TiO2). These TiO2-based composite catalyst films show good crystallinity and stability, easy catalyst immobilization and recycling in photocatalytic experiments. In addition, the detailed growth processes and mechanisms of these TiO2-based composite films were systematically studied.