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Large silicon micromirror modeling and fabrication

Electrostatic micromirrors are yet a well-known topic in the world of MOEMS. But in some specific cases, the mirror dimensions should have to be extended in order to be able to switch beams of a larger diameter. In other words, the convergence in dimensions between electronic technologies and classical machining in the range of hundreds microns to millimetre was not yet explored. This is the context of our study, whose goal is to make digital switching devices with a size of some millimetres and a large, pre-fixed deflection angle of ten degrees.