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Combined EDX and Micro XRF Analysis on SEMs

Quantitative and qualitative micro X-ray fluorescence (XRF) analysis offers a wide range of applications. However, it is difficult to analyze light elements (Z<11) and elements having L or M lines in the low energy range (E<1keV) due to a small ionization cross section for excitation spectra of typical X-ray tubes. Additionally, significant absorption can occur if the measurements are not performed in a vacuum chamber. If an X-ray optics is used the transmission in the low energy range can also prevent an efficient excitation of low energy lines.