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Microstructure and nano-wear property of Si-doped diamond-like carbon films deposited by a hybrid sputtering system

Diamond like carbon (DLC) films have been extensively studied over the past decades due to their unique combination of properties. In particular, silicon-doped DLC (Si-DLC) films have attracted significant attention for their tribological applications. However, most of the efforts were focusing on friction and wear properties in conventional load range, while nano-scale tribological behavior remains being less investigated. In this study, Si-doped DLC films were deposited by a hybrid sputtering system combining high power impulse magnetron sputtering (HiPIMS) and radio frequency (RF) magnetron sputtering . The Si concentration in the films was controlled by altering the Si target power. The influence of the Si target power on the microstructure, mechanical and nano-wear properties of the Si-DLC films were investigated. The influence of the microstrure variation on mechanical and nano-wear property of the films were further studied. The results indicated that the hardness value was significantly influenced by the Raman I D /I G ratio and the I D /I G ratio also played an important role in the nano-wear behavior of the Si-DLC films.