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Analysis of microelectromechanical systems (mems) by meshless local kriging (lokriging) method

Abstract A meshless Local Kriging (LoKriging) method is developed and used in this paper to analyze the behaviors of microelectromechanical system (MEMS) devices, which are simplified as thick beam systems subjected to dynamic non‐linear loading induced by applied voltages. In LoKriging, the Kriging interpolation technique is employed to obtain the shape function, which has a partition of unity and delta function properties. The local Petrov‐Galerkin weak form of the governing equations for MEMS devices is derived. The developed LoKriging method is used to analyze the behavior of microswitches and microtweezers, widely used for MEMS devices. Their static and dynamic characters are analyzed and compared with the results of experiments and other numerical methods. The computed results show that the present LoKriging method is easy to implement, efficient and accurate for the numerical simulation of MEMS devices. In addition, the method developed in this paper also has good potential for analysis of other complex MEMS devices.