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Secondary Charged Particle Emission from Proton Conductive Oxides by Ion Impact

Secondary charged particle emission (SCPE) from a proton conductive perovskite oxide, namely, SrCe0.95Yb0.05O3-δ(SCO) film on Si by ion impact has been measured using a charge collector method. When the ion projected range is much longer than the film thickness, SCPE yields are found to be nearly independent of the ion beam current (IB) for IB < a few nA, giving SCPE yields under charge-accumulation free condition, to contrast with the results for the thick polycrystalline SCO which shows a strong dependence of SCPE on the ion beam current. Several corrections are required to evaluate the secondary positive ion yields and a method is described.