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Monitoring Nitride Layer Growth Using Magnetic Sensor

Abstract This paper presents a method of direct in-process control of the formation and growth of the nitride layer, based on changes in electromagnetic properties of the nitrided material brought about by diffusion and phase transformations. The main component of the measuring system is a magnetic sensor, placed inside the furnace retort. The changes in the voltage signal induced in the magnetic sensor during the process are unequivocally representative of the actual stage of formation and growth of the layer. The system described here is, on one hand, a convenient research tool for the analysis of nucleation and growth of the nitride layer, and on the other hand, it could be utilised in industry to test and select optimum nitriding atmospheres, composed of different combination of ammonia, dissociated ammonia, and nitrogen, which would ensure the best kinetics of the process for a given application.