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Modal characteristics of quartz tuning-fork angular rate microsensor by means of FEM

Quartz tuning-fork angular rate sensor (gyroscope) is a new kind of vibratory gyroscope which has a big market. The solid model of the quartz tuning fork is established and finite element method is used in studying its modal characteristics in this paper. The influence of the gyroscope structural dimension on the resonant frequency and structural modes is investigated, which offers reliable basis for the structure design of the micro gyroscope. Software Ansys5.6 is used in this work.