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MEMS (micro-electro-mechanical systems) technology: an overview and SCL's role

Today's advanced IC fabrication techniques have let silicon micromachined into the tiniest electromechanical systems ever built. In just ten years, MEMS has blossomed into a vital industry with numerous practical applications. Semiconductor Complex Ltd., the nation's leading VLSI company has developed CMOS technologies which are in tune with the MEMS fabrication process.