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High-precision angle sensor based on a Köster’s prism with absolute zero-point

In this publication, a novel approach will be presented to use a compact white-light interferometer based on a Köster’s prism for angle measurements. Experiments show that the resolution of this angle interferometer is in the range of a commercial digital autocollimator, with a focal length of f  =  300 mm, but with clearly reduced signal noise and without overshoot artifacts in the signal caused by digital filters. The angle detection of the reference mirror in the Köster’s interferometer is based on analysing the rotation angle of the fringe pattern, which is projected on a CMOS-matrix. The fringe pattern is generated by two displaced spherical wave fronts coming from one fiber-coupled white-light source and getting divided into a reference and a measurement beam by the Köster’s prism. The displacement correlates with the reference angle mirror in one linear direction and with the angle aberrations of the prism in the other orthogonal direction on the CMOS sensor. We will present the experimental and optical setup, the method and algorithms for the image-to-angle processing as well as the experimental results obtained in calibration and long-term measurements.