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Depth-segmented partial-wave microscopic spectroscopy for subsurface defects' micro-nano structure detection and characterization

Nondestructive surface inspection technology is getting mature, nevertheless, there is an urgent requirement for method capable of detection and characterization of the subsurface defects at micron to nanometer scales. In this paper, we propose a method for the detection and characterization of the subsurface defects based on the depth-segmented partial-wave microscopic spectroscopy. By combination of optical coherence tomography with partial-wave microscopic spectroscopy, depth-segmented partial-wave microscopic spectroscopy capable of micro-nano structure detection and characterization at specific depth range is put forward.