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Flow of nanosize cluster-containing plasma in a magnetron discharge.

A magnetron source of silver clusters captured by an argon flow with the quadrupole mass filter is used for the analysis of charged clusters after an orifice of the magnetron chamber, and the size distribution function follows from the analysis of clusters deposited on a silicon substrate by an atomic force microscope. Cluster charge near an orifice results from attachment of ions of a secondary plasma that is a tail of a magnetron plasma, and the cluster charge is mostly positive. The character of passage of a buffer gas flow with metal clusters through an orifice is studied both theoretically and experimentally. Assuming the cone shape of the drift chamber near the orifice, we analyze drift of charged clusters in a buffer gas flow towards the orifice if the electric field inside the drift chamber is created by charged rings on the cone surface. Under experimental conditions, when an equilibrium between the buffer gas flow and cluster flux is violated, a typical voltage of rings and parameters of corona discharge for cluster charging are estimated if the electric field does not allow for clusters to reach walls of the drift chamber. The number density of clusters near the orifice is estimated that increases both due to violation of an equilibrium for the cluster flux inside the buffer gas flow and owing to focusing of the cluster by the electric field that is created by electrodes located near walls and due to diffusion motion of clusters. Processes of cluster charging in the magnetron chamber are analyzed.