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CHARACTERIZATION OF A FULLY-INTEGRATED PERMANENT-MAGNET TURBINE GENERATOR

This paper presents the design, fabrication, and testing of a fully-integrated permanent-magnet turbine generator based on silicon MEMS fabrication technology. This is the first silicon turbine generator supported by gas thrust and journal bearings experimentally shown to generate milliwatt-level power. In this device, a free-standing, 12 mm diameter magnetic rotor is spun above microfabricated copper windings having connectors threaded through the device. To date, the generator has delivered 19 mW to matched resistive loads of 0.33  at a rotational speed of 40 krpm.