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In-situ Correlative Analysis of electrical and magnetic properties of Ion-beam treated surfaces by combination of AFM and FIB

Combining different analytical methods into one instrument is of great importance for the simultaneous acquisition of complementary information. Especially highly localized probing of mechanical, electrical, magnetic, chemical and crystalllographic properties on the nanoscale represents a key success factor for gaining new insights into the micro and nano-world. Here, the in-situ combination of scanning electron or scanning ion microscopy (SEM/FIB) and atomic force microscopy (AFM) presents a unique possibilty to characterize ion-beam treated surfaces and extract novel information. In this work, we present an AFM system that can be seamlessly integrated into FIB or Helium micropscopy systems. Its open design and the use of self-sensing cantilevers with elctrical readout allow for simultaneous operation of FIB and AFM inside the vacuum chamber to perform in-situ correlative analysis of ion-beam treated surfaces.[1-3] We will present a variety of case studies to highlight the advantages of interactive correlative in-situ nanoscale characterization for different materials and nanostructures. We show results for in-situ electrical characterization by conductive AFM for 2D materials as well as electrostatic force microscopy (EFM) at grain boundaries of piezoceramic films. In a further step, we demonstrate how in-situ correlative analysis with the AFSEM in an SEM can be extended into the third dimension to measure nanomechanical properties of soft material.